421436

Conveyor OHT

-- 450mm

E-mail: cn.wang@cc.kuas.edu.tw

300mm 450mm

7%~8%

30%~40%

- 450mm

1.

1.1

(Bench mark)

450mm (Moores Law)

450mm

( International Technology Roadmap for Semicon- ductors , ITRS)

450mm (Next

Generation Factory , NGF)

20%~50%(IntelSamsungTSMC) 450mm

2012 450mm [1]

1 300mm OHT (Inter-Bay)

2010 National Kaohsiung University of Applied Sciences, ISSN 1813-3851

422

(Intra-Bay)

AMHS

Inter-Bay

Stocker

Intra-Bay

OHT

Equipment

1 300mm OHT

1.2

1. 450mm (Conveyor-Curved)( 2)

(Conveyor-Turntable) 300mm (OHT)

Conveyor-Curved

2. Conveyor

3. Conveyor

Intra-Bay

Equipment

Lot

Curved

Inter-Bay

Conveyor

2 450mm Conveyor-Curved

Conveyor OHT -- 450mm 423

1.3

-Flexsim

Conveyor-Curved Conveyor-Turntable

Wang[2](Differentiated Preemptive Dispatching , DPD) OHT

OHT AMHS

2.

2.1 450mm

300mm 450mm

200mm 300mm

30% 450mm 300mm 2.25

450mm 300mm 2.25

450mm 300mm 450mm

Chien [3] 450mm (Porters Five Competitive

Forces) 450mm 300mm

[4] 200mm 300mm

450mm 300mm

2.2

300mm AMHS

Pierce and Stafford [5]( 34 )(

) 16%

3

424

()

3 AMHS -1

()

4 AMHS -2

2.3

450mm Conveyor

Conveyor Schmidt and Jackman [6] Conveyor

Conveyor

Conveyor

Nazzal and El-Nashar [7] Conveyor ( 5) Conveyor

Conveyor Nazzal and Johnson [8]

WIP Conveyor WIP Conveyor

Conveyor-Turntable WIP Conveyor

(Overhead Monorail Vehicles, OMV) 300mm (Inter-Bay)

Paprotny et al. [9](Continuous Flow Transporters ,CFT) OMV

OMV CFT OMV CFT 10

Conveyor OHT -- 450mm 425

5

3. Flexsim AMHS Conveyor

TurntableCurved OHT

3.1

Conveyor Curved (Conveyor-Curved)

Inter-Bay Intra-Bay Conveyor-Curved Conveyor-

Turntable Conveyor

Conveyor OHT 1

1 ConveyorOHT

OHT Conveyor

MCS MCS

426

3.2

Conveyor-CurvedConveyor-Turntable

Conveyor-Curved Conveyor-Curved ( 6)

1. (MCS) Inter-Bay Conveyor

Intra-Bay

2. MCS Intra-Bay Conveyor ( 3 1)

3. Intra-Bay Conveyor MCS Intra-Bay (

4 2 4)

4. (First-Come First-Server, FCFS)

Unloader Intra-Bay Conveyor Intra-Bay (Turnout-Sensor)

( 5 3)

5. MCS Inter-Bay Conveyor ( 6 Inter-Bay Conveyor

6)

6. Intra-Bay Conveyor Inter-Bay Conveyor MCS (

7 3)

7. Inter-Bay Intra-Bay Inter-Bay Conveyor

Stocker

Conveyor OHT -- 450mm 427

6 Conveyor-Curved

428

3.3

(Average Delivery Time)

WIP WIP

(Total Output) 3 3

(Cycle Time)

1. (Average Delivery Time)

( 1) Conveyor OHT

Average Delivery Time = Output Total

Time Cycle Total (1)

2. (Total Output)

Intra-Bay

( 2) 3

14

Total Output = ) (2) =i ( n

1=in,....,3,2,1=i )i(

4.

4.1 -Flexsim

Flexsim 450mm 3D

450mm 300mm

( 7 8)

1. 450mm257

24AMHS69

2. 145Inter-Bay5

Intra-BayIntra-Bay100

Conveyor OHT -- 450mm 429

3. Inter-BayIntra-BayConveyorConveyorOHT4.18

Conveyor5

4. Conveyor-TurntableConveyor-Curved

5. Conveyor-Turntable0.2

6. Conveyor-Curved Inter-Bay Intra-Bay Turnout Sensor

7. A-70%B-30%

7

8

4.2 -Flexsim

2 ( setup timeprocess timeload/unload time)

()

430

2

4.3 -Flexsim

OHTConveyor-Curved Conveyor- Turntable Inter-Bay

Intra-Bay 69 91011

9 300mm (OHT)

Conveyor OHT -- 450mm 431

10 450mm (Conveyor-Curved)

11 450mm (Conveyor-Turntable)

4.4

Conveyor-Curved (FCFS)

OHT (DPD)

OHT Conveyor International SEMATECH ISMI 450mm Guidelines(ISMI

2008) Inter-Bay Intra-Bay Intra-Bay

OHT

4.4.1

OHT 15 OHT

OHT 15

OHT 21 OHT 18 OHT

OHT

151821

432

4.4.2

90%95%

100%

4.4.3

15 OHT 3~5

1~20 14 Lot 1518

21 OHT Conveyor CurvedTurntable

14 10 90%95%100% 3

3*(3 OHT 2 )*10150

5. Conveyor-CurvedConveyor-Turntable OHT OHT 1518

21 10

5.1

12 Conveyor-CurvedConveyor-Turntable OHT

12 Conveyor-CurvedConveyor-Turntable OHT Conveyor-Curved

Conveyor-Curved Conveyor-Turntable

OHT

Conveyor-Curved OHT

Conveyor OHT -- 450mm 433

Simulation average results in different configurations

0

500

1000

1500

2000

2500

3000

3500

4000

4500

90 90 90 90 90 90 90 90 90 90 95 95 95 95 95 95 95 95 95 95 100

100

100

100

100

100

100

100

100

100

Bay loading (%)

deliv

ery tim

e (sec

onds

)

Cured Turntable 15 OHTs 18 OHTs 21 OHTs

13 Conveyor-CurvedConveyor-Turntable OHT

13 Conveyor-Curved Conveyor-Curved

Conveyor-Turntable OHT

OHT

OHT 15 OHT

18 18 21 21 OHT Conveyor-Curved

Conveyor-Curved

5.2

5.2.1

1. (3)

(1)

F=0.512P 0.477 > 0.05Conveyor-CurvedConveyor-Turntable

434

(2)

T=7.493

P0.00 < 0.055%

Conveyor-CurvedConveyor-Turntable

2. (4)

(1)

F=4.629P 0.036 < 0.05Conveyor-CurvedConveyor-Turntable

(2)

T=-55.9

P0.00

Conveyor OHT -- 450mm 435

(1)

F=57.77P 0.00 < 0.05Conveyor-CurvedOHT

(2)

T=-38.2

P0.00

436

3. Conveyor OHT

4. 450mm OHT

6.2

450mmOHT

1.

2. Conveyor-CurvedOHT

AMHS

3. Conveyor

Conveyor-TurntableConveyor-Curved

[1] -/ 2012 18 2008

http://www.eettaiwan.com/ART_8800520983_480202_NT_703acf67.HTM [2] Wang C.N., Preemptive Hot Lots Services and Modularized Simulation for Lot Delivery Time Estimation in Automatic

Material Handling Systems of 300mm Semiconductor Foundry, National Chiao Tung University Industrial Engineering and Management, 2006.

[3] Chien, C. F., Wang, J.K., Chang, T. C., Wu, W. C., Economic Analysis of 450mm Wafer Migration, IEEE Semiconductor Manufacturing, 2007. ISSM 2007. International Symposium on , 2007.

[4] 450mm 2007 [5] Pierce N. G. and Stafford R., Modeling and simulation of material handling for semiconductor wafer fabrication, in Proc.

Winter Simulation Conf., pp. 900906, 1994. [6] Schmidt, L.C., and Jackman J., Modeling recirculating conveyors with blocking, European Journal of Operational Research ,

pp.124:422-436, 2000. [7] Nazzal D., and El-Nashar A., Survey of research in modeling conveyor-based automated material handling systems in wafer

fabs, In Proceedings of the 2007 Winter Simulation Conference,2007. [8] Nazzal D., and Johnson, AN ANALYTICAL MODEL FOR CONVEYOR BASED AMHS IN SEMICONDUCTOR WAFER

FABS, Proceedings of the 2008 Winter Simulation Conference, 2008 . [9] Paprotny, I., Shiau J-Y., Huh Y., and Mackulak G., Simulation based comparison of semiconductor AMHS alternatives:

continuous flow vs. overhead monorail , In Proceedings of 2000 Winter Simulation Conference, 2000.