加熱器簡介與半導體上的應用 -...
TRANSCRIPT
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TSMC Fab14 (CVD)
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CVD CVD
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About Me About Me Educations
Current major jobs:Manage 87 tools, 31 staffs/
Experience : (11.5 years).Jun99, tsmc Fab-3 (8) E.E.Current, tsmc Fab-14 (12) EE section manager
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Q & A
Outlines Outlines 20102010--DecDec
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(Heat Conduction) (Heat Convection) (Thermal Radiation)
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((Heat Conduction)Heat Conduction)
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((Heat Convection)Heat Convection)
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((Thermal Radiation)Thermal Radiation)
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--
(Heat pump)
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(()) (Internal combustion Engine) (Steam Turbine) (Heater) (Refrigerator) (Boiler)
(()) (Motor) (Generator) (Transformer)
(()) (Evaporator) (Condenser)
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((I)I)(chamber)
(1000 C)
SiH4 Si + H2
(1150 C)
SiH2Cl2 Si + 2HCl
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((II)II)
(heating jacket)
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((II)II)
(heating jacket)
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((II)II)
PID
P ro p r ie t a ry& C o n f id e n t i a l
N o v . 2 0 0 6 P . 1 0
2 0 0 6 T S M C , L td
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Display
PLC
PID controller SSRFS
LED
T/C
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((Heater) Heater)
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Original position
Heater home sensor
Spacing
Shower head
Lift pin home sensor
Heater
Lift ring Lift ring flag
Heater flag
Original position
Heater home sensor
Spacing
Shower head
Lift pin home sensor
Heater
Lift ring Lift ring flag
Heater flag
Seal
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Ceramic (AlN) Heater
Metal Heater
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Heater Bottom
Heater Body Welding enhance
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Joint Rod (Nickel)
Heating element (Nickel Chromium)
Isolation Powder (Magnesium Oxide)
External Protection Tube
Heater Heater
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Problems of HeaterProblems of Heater
Particle/Life time issue
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Peeling/Bending
Problems of HeaterProblems of Heater
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Vacuum Leak
Problems of HeaterProblems of Heater
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Lift pins hole damaged
Problems of HeaterProblems of Heater
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Problems of HeaterProblems of HeaterArcing causing crack
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Problems of HeaterProblems of HeaterArcing causing leakage
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Problems of HeaterProblems of HeaterArcing causing heater terminal melt due to poor contact
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(32 lamps)
(12 lamps)
Top Pyrometer
(20 lamps)(12 lamps)
Upper Inner ZoneUpper Outer Zone
Lower Outer ZoneLower Inner Zone
Bottom Pyrometer
Edge pyrometer
Heating by LampHeating by Lamp
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Lamp Socket Lamp Ceramic Base
Upper Reflector Cover
Heating by LampHeating by Lamp
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Problem of LampProblem of LampLamp burn out
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Heating JacketHeating Jacket
(heating jacket)
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Heating JacketHeating Jacket
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Heating JacketHeating Jacket
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Heating JacketHeating Jacket
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Heating JacketHeating Jacket
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Heating JacketHeating Jacket
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Heating JacketHeating Jacket
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Heating JacketHeating Jacket
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Heating JacketHeating Jacket
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( ( Thermal Couple)Thermal Couple)
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() ,T1(,SEEBECK-EFFECT(T2)0(EMF)
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EMF
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-269+2800-
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E Type K TypeK Type
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((I)I)
()
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((II)II)
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(open-loop control system)
((I)I)
()(controller)
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() ,
(closed-loop control system)((II)II)
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PIDPID
PID60
PID(closed-loop control system)
PID ControllerPID Controller
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What Is PID What Is PID
P - proportional() I - integral ()D - derivative()
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PID PID
)(]1[
)(][)(
)()()()(0
sEsTsTK
sEsKs
KKsUL
dttdeKdeKteKtu
di
p
di
p
d
t
ip
++=
++=
++=
::
:
d
i
p
TT
Kwhere
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PIDPID-- ((proportional)proportional)
Steady-state error
)()(
)()(
sEKsUL
teKtu
p
p
=
=
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PIDPID-- ((integral)integral)
+(PI)
)(]1[
)(][)(
)()()(0
sEsTK
sEs
KKsUL
deKteKtu
ip
ip
t
ip
+=
+=
+=
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PID PID ((derivative)derivative)
+
+(PD)
)(]1[
)(][)(
)()()(
sEsTK
sEsKKsULdt
tdeKteKtu
dp
dp
dp
+=
+=
+=
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PIDPID
PID
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- PID
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PIDPID Chart Chart
P only PV SP (offset)I action
PI I actionI action
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PIDPID Chart Chart
PI I actionI action
PID D actionOPD action
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P Only
PIDPID Chart Chart
P I Control PID Control
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PID
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( Safety interlock)
(Normally open)
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Door interlock
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PID controller SSRFS
LED
T/C
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--
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-- Water FlowWater Flow
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-- Door InterlockDoor Interlock
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HomeworkHomework
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HomeworkHomework? ,
Safety interlock. ?
PID Control , I D ?
? Type ?
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Q & AQ & A