訊程實業股份有限公司 - isee.zju.edu.cn 2007... · 3 kimpsion...

1

Kimpsion

((ESD/Latch-Up)TLP (Transmission Line TLP (Transmission Line PulserPulser))

:: (([email protected]@Kimpsion.com))2005200520062006www.twww.t--esda.orgesda.org

http://www.t-esda.org/

2

Kimpsion

KIMPSION CORPORATION

ESD/LatchESD/Latch--UpUp

**((HBMHBM--Human Body ModelHuman Body Model))**((MMMM--Machine ModelMachine Model))**((CDMCDM-- Charged Device ModelCharged Device Model))CDMCDM(Non(Non--SocketedSocketed CDMCDM))CDM(SocketedCDM(Socketed CDM)CDM)

(ESD)(ESD)::

3

Kimpsion



**MILMIL--STDSTD--883F883F Method 3015.7 notice 8Method 3015.7 notice 8883883

*ESDA STM5.1*ESDA STM5.1--1998 1998 **JEDEC EIA/JESD22JEDEC EIA/JESD22--A114A114--DD ((March 2006March 2006))

*AEC*AEC--Q100Q100--002002--REVREV--C C

((HBMHBM--HumanHuman Body ModelBody Model))

4

Kimpsion



(HBM)Ip=0.66A/kV,

8kVmaxIp=0.66A/kV,

8kVmax

Tr=2~10nSTr=2~10nS

Td=130nS~170nSTd=130nS~170nS

100pF, 1500100pF, 1500

(A)

(B)

5

HBMHBM(0 ohm)(0 ohm)500 ohm500 ohm

Ir Peak IprRinging % of Ips

0.1 2.0 10 130 170 0.060- 0.073

6

JEDEC EIA/JESD22JEDEC EIA/JESD22--A114A114--DD

Trailing Pulse () , 0.13um

7

JEDEC EIA/JESD22JEDEC EIA/JESD22--A114A114--DD

Trailing Pulse ()

10K Ohm10V Zener

8

Kimpsion



**ESDA STM5.2ESDA STM5.2--1999 1999

**JEDEC EIA/JESD22JEDEC EIA/JESD22--A115A115

**AECAEC--Q100Q100--003003--REVREV--E E

((MMMM--Machine ModelMachine Model))

9

(MM)

Kimpsion

KIMPSION CORPORATIONESD/LatchESD/Latch--UpUp

Ip1=7A/400V

2kVmax

Ip1=7A/400V

2kVmax

66-90nS66-90nS

Ip2=67~90%Ip1Ip2=67~90%Ip1

200pF, 0200pF, 0

10

(MM)500ohm

+/- 400 Volts

Ipr I100 I200 as % of I100

ESDA 0.85 1.20 0.26 - 0.32 35 - 45 %AEC 0.85 1.20 0.26 - 0.32 -------

JEDEC I100 X 4.5 Max 0.232 - 0.348 -------

Kimpsion


11

HBM/MM HBM/MM --11()(x)()

()(y)()

I/O()I/O()

NC

mil-883

ESDA, JEDEC,AEC

Kimpsion



12

HBM/MM HBM/MM --22

,

Kimpsion



HBM MMMil-883 1, 3ESDA 0.3, 1 1, 3JEDEC 0.1, 1 0.5, 1AEC 0.5, 1 1, 1

13

((CDMCDM -- Charged Device Model)Charged Device Model)

1. 1. SCDM (SCDM (SocketedSocketed CDM)CDM)*ESDA SP5.3.2 (*ESDA SP5.3.2 () ) 2. 2. CDM (NonCDM (Non--SocketedSocketed CDM)CDM)*ESDA STM5.3.1*ESDA STM5.3.1**JEDEC EIA/JESD22JEDEC EIA/JESD22--C101C101--CC

**AECAEC--Q100Q100--011011--REVREV--AA

Kimpsion



14

Kimpsion



1.2.

1.

15

Kimpsion


CDMCDMESD/LatchESD/Latch--UpUp

CDMCDMCDM=Robotic CDMCDM=Robotic CDM

CDMThermoKeyTek RCDM3, Orion

CDMCDMThermoKeyTekThermoKeyTek RCDM3, OrionRCDM3, Orion

HV

HV

16

SCDMSCDM Kimpsion



+ + ++ + +

+

+ + + + + ++

+ + +

++ +

++

++

++

+++++

+

ZapmasterZapmaster SCDM SCDM

2.

2.

1.

1.

17

0.0 0.3 0.5 0.8 1.0 1.3 1.5 1.8 2.0-4.0

-2.0

0.0

2.0

4.0

6.0

8.0

TIME (NANOSECONDS)

Ip1

Ip2

Ip3

90% Ip1

t d

rt

10% Ip1

,

18

CDM -- JEDEC JESD22-C101-CESD/LatchESD/Latch--UpUp

Kimpsion


19

CDM -- ESD STM5.3.1

Voltage Ip1 (A) Rise Time Pulse width Undershoot Overshoot+/- 0.125 1.13 20% < 400ps < 600ps < 50% Ip1 < 25% Ip1

+/- 0.250 2.25 20% < 400ps < 600ps < 50% Ip1 < 25% Ip1

+/- 0.500 4.5 20% < 400ps < 600ps < 50% Ip1 < 25% Ip1+/- 1.000 9 20% < 400ps < 600ps < 50% Ip1 < 25% Ip1+/- 1.500 13.5 20% < 400ps < 600ps < 50% Ip1 < 25% Ip1

+/- 2.000 18 20% < 400ps < 600ps < 50% Ip1 < 25% Ip1

Voltage Ip1 (A) Rise Time Pulse width Undershoot Overshoot+/- 0.500 14 20% < 400ps < 1000ps < 50% Ip1 < 25% Ip1

ESDA 4pF Target, 1 GHz Metrology


ESDA 30pF Target, 1GHz Metrology

Kimpsion


20

1KV HBM/MM/CDMHBM/MM/CDM

-30

-20

-10

0

10

20

30

40

50

0 50 100 150 200

MM

HBM (0.66A Peak)

CDM (30pf Test Module)

A

ns

ESD/LatchESD/Latch--UpUpKimpsion


The CDM discharge is 100x faster than HBM or MM

The peak current can be 40x that of an HBM pulse

21

ESDKimpsion



*HBM:>=2kV (>2kV)*MM: >=200V*CDM: >=700V~1000V

22

(Latch(Latch--Up)Up)::

Kimpsion



**JEDEC EIA/JESD78A JEDEC EIA/JESD78A (February 2006)(February 2006)

*AEC*AEC--Q100Q100--004004--REVREV--CC

**MilMil--883F883F JESD78(A)JESD78(A) JESD78(A)JESD78(A)

23


output(floating)input()

A

--85+/-100mA

Kimpsion


Latch-Up-2

24

Latch-UpKimpsion



1. T22. T3~T4 (I/O)3. T54. T5T25. ,

25

Latch-Up-1 Kimpsion KIMPSION CORPORATION


*Trigger Current/Voltage(/)1.I/O: (): Inorm+100mA or 1.5xInorm: -100mA or 0.5xInorm JESD 78A: +100mA or -100mA2. Power Pin (): 1.5xVmax.JEDECAECI/O1.5xVmax

26

JESD78AAESD/LatchESD/Latch--UpUp

Kimpsion


27

Latch-Up Kimpsion KIMPSION CORPORATION


Inorm+10mA or 1.4xInorm

:Inorm25mA,1.4xInorm

28

/

,

,

/

Kimpsion

KIMPSION CORPORATIONESD/LatchESD/Latch--UpUp

29

Kimpsion


*T-2800()*-55 ~+200(-90+225)***

30

ESD SP5.5.1-2004(Standard Practice)Electrostatic Discharge Sensitivity Testing Transmission Line Pulse (TLP) Component Level*CS - Current Source*TDR -Time Domain Reflection*TDT - Time Domain Transmission*TDRT - Time Domain Reflection & Transmission

Kimpsion



31

Kimpsion



CT-1 V Probe

Simplified TLP block diagram

32

TLP vs HBM Waveform Kimpsion KIMPSION CORPORATION


TLP 100 nsecTr~10 ns

33

TLP-Sample DataKimpsion



It2

Leakage

34

TLP Sample ScreenKimpsion



35

Kimpsion

KIMPSION CORPORATIONESD/LatchESD/Latch--UpUp TLP Sample Screen

36

Kimpsion



Transmission Line Pulser ConfigurationsCurrent Source > 20 ns pulse width

Constant Impedance > 2 ns pulse width

CS TDR TDRT TDTUnbalanced 500 Ohm

Unbalanced 50 ohm

Balanced 100 ohm

Unbalanced 100 Ohm

Unbalanced 25 Ohm

Reflections: Minor

(Multiple) Reflections attenuator or diode required

TDR-S: VDUT(t), and optional IDUT(t), measured remotely

IDUT(t) & VDUT(t) measured close to DUT

TDR-O: incident and reflected pulses are overlayed, the incident pulse must be very flat

VDUT & IDUTMeasured remotely

VDUTVreferencePulse must be very repeatable

37

Kimpsion



Pulser

DUT

Incident

Reflected

Absorbed

Transmitted

General Pulse Definition

38

Kimpsion



Pulser

DUT

ScopeIncident

No Reflection

Absorbed

52.5

500

Termination

CS Advantages*Highest delivery impedance *There are no reflections back to the pulser to attenuate or clamp

Simplified Current Source

39

Kimpsion



Pulser

DUT

Scope

Incident

Reflected

Absorbed

Simplified TDR Time Domain Reflection

TDR-S Advantages*Simple connections provide good pulse fidelity*Highest pulse DUT current and power efficiency

40

Kimpsion



Pulser

DUT

ScopeIncident

Reflected

Absorbed

Transmitted

Scope

Simplified TDT Time Domain Transmission

TDT Advantages*High frequency direct DUT voltage measurement*High DUT current to voltage ratio

41

Kimpsion



Simplified TDRT Time Domain Reflection Transmission

Pulser DUTScopeIncident

ReflectedAbsorption

Transmitted

Scope

TDRT Advantages*High frequency direct DUT current measurement *High impedance means lower currents

42

!Kimpsion


(())

: (21)5882-1316: (21)5882-1312E-mail: [email protected]:


HBM(0 ohm)500 ohmJEDEC EIA/JESD22-A114-DJEDEC EIA/JESD22-A114-D(MM) (MM)500ohmHBM/MM -1HBM/MM -2 (CDM - Charged Device Model) SCDM CDM -- JEDEC JESD22-C101-CCDM -- ESD STM5.3.11KV HBM/MM/CDM (Latch-Up): ESD/Latch-Up JESD78AA ESD SP5.5.1-2004(Standard Practice)Electrostatic Discharge Sensitivity Testing Transmission Line Pulse (TLP) Component LevelTLP vs HBM WaveformTLP-Sample DataTLP Sample Screen!

訊程實業股份有限公司 - isee.zju.edu.cn 2007... · 3 kimpsion...

Documents