Nano Tech Co., Ltd.

Nano Tech Co., Ltd.

Nano Tech Co., Ltd.

3 , Tantalum(:Ta) .

(ingot) . 'Crystal Pulling' .

Nano Tech Co., Ltd.

(CZ) Crystal Pulling .

'Seed()' 'Seed' 'Seed' 'Seed' '(ingot)' .

Nano Tech Co., Ltd.

'(ingot)' . (Flat) .

Nano Tech Co., Ltd.

Nano Tech Co., Ltd.

.

. p-type n-type .

Nano Tech Co., Ltd.

Si + O2 SiO2Si + 2H2O SiO2 +2H2

SiO2

Si-SiO2

MOSFET

.

Nano Tech Co., Ltd.

PR(Photoresist) . Spinner PR 2~200 3000rpm . Positive() Negative() Negatice Resist PR 2.0 . Positive Resist Negative . 1.0~0.152.0 .

Nano Tech Co., Ltd.

Nano Tech Co., Ltd.

Nano Tech Co., Ltd.

.

(80~100) . (800~1200) . .

Nano Tech Co., Ltd.

Nano Tech Co., Ltd.

Spin Rinse Dry .. .. ..

. ? .. Clean room , '(bunny)' .

Nano Tech Co., Ltd.

p-type B, Ga, In

n-type

Sb, As, P, Bi

ION IMPLANTER

Nano Tech Co., Ltd.

(CVD) . CVD , NH3 SiCl2 Si3N4 Si SiO2 . (silicide) WF6 WSi . RECVD CVD . CVD NF3 CVD 'Cluster Tool' CVD. (in-situ) . APCVD, LPCVD PECVD CVD IC .

Nano Tech Co., Ltd.

Nano Tech Co., Ltd.

.

(Evaporation:)

(Sputtering)

,

.

Evaporation :

.

Nano Tech Co., Ltd.

(Ar)

.

,

.

(Ar+)

.

.

Nano Tech Co., Ltd.

. . .(selectivity)

Nano Tech Co., Ltd.

SiCl, 'ashing' .

Nano Tech Co., Ltd.

(backside preparation)

.

(die) .

(chip)

tester

( )

.

.

Nano Tech Co., Ltd.

Nano Tech Co., Ltd.

Wire bonding .