新綠色思維– 綠色晶圓廠策略與實務 · pdf filetsmc property 1...

TSMC Property
1
Apr. 13th, 2012
http://www.nordridesign.com/

2010 TSMC, Ltd.
2

TSMC Property
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2010 TSMC, Ltd.
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26

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LEED Leadership in Energy and Environmental Design
LEED
(The U.S. Green
Building Council, USGBC)
LEED
//
1998

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LEED
1. Sustainable Sites 26 (24%)
2. Water Efficiency 10 ( 9%)
3. Energy and Atmosphere 35 ( 32%)
4. Materials and Resources 14 (13%)
5. Indoor Environmental Quality 15 (13%)
6. Innovation and Design Process 6 ( 5%)
7. Regional Priority Credits 4 ( 4%)
110 (100%)
40~49
50~59
60~79
80

TSMC Property
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EEWH Ecology, Energy Saving, Waste Reduction and Health
EEWH
12-25
26-33
34-41
42-52
52
- EEWH (Ecology)
(9%)
(9%)
(9%)
(Energy Saving) (28%)
(Waste Reduction)
CO2(9%)
(9%)
(Health)
(12%)
(9%)
(6%) EEWH - - - - -

TSMC Property
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:

TSMC Property
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:

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LEEDEEWH

TSMC Property
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TI Rfab
ISMI
2011
/
LEED13,900
EEWH
/LEED6,100
LEED
/EEWH
EEWH
LEED
/
/LEED
LEED

2010 TSMC, Ltd.
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LEED-NC
LEED-EB O&M

TSMC Property
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2008101620
2007
129
353 737 900 1044 885
482
1219
2119
3163
4048
0
1000
2000
3000
4000
5000
2007 2008 2009 2010 2011 2012

TSMC Property
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F12P4 (2012/9)
:
+
(60-69)
:
+
(70-79)
:
+
(70-79)
:
+
(80-100)
:
+
(80-100)

2010 TSMC, Ltd.
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MVPN(Mobile Virtual Private Network)
(7xx-xxxx)
MVPN

2010 TSMC, Ltd.
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2010 TSMC, Ltd.
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2010 TSMC, Ltd.
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LEED-NC
()
()
50%
*1.25
EEWH

TSMC Property
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:
:
:

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CO29,570
CO210

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RFID eTag
422(CO2) 36,310

2010 TSMC, Ltd.
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LEED-NC
50%
100%
50%
20%
30%
EEWH
()
()

TSMC Property
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F12P4
37,200M2750M3
F14P3
16,0003,200CO2
185,250M2, 3.4
MAU
* MAU:

2010 TSMC, Ltd.
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100%(Recycled Polypropylene)
40%
F12P46,0001,200CO2

TSMC Property
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25
85%55%
Processed Water Classify Table
Waste Water Reclamation Waste Chemical Reclamation
1 DIR DI Reclaim 1 IPA
2 AWD Acid Wastewater Drain 2 H3PO4
3 AWD(TMAH) AWD with TMAH contained 3 M1
4 Caustic AWD with NH4OH contained 4 M2
5 AWD O3 AWD with Ozone contained 5 Thinner
6 HFD Diluted HF Drain 6 ACT/ST250
7 HFC - Concentrated HF Drain 7 NMP
8 AOR Advanced Organic Reclaim Drain 8 H2SO4
9 AORI AOR with IPA 9 CuSO4
10 CMP CMP Drain
11 CuCMP CuCMP Drain
12 ECP ECP Drain
13 H2O2 DI + H2O2 Drain
14 HF + O3
15 Caustic + O3
16 LSD Local Scrubber Drain

2010 TSMC, Ltd.
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LEED-NC
()
ASHRAE 90.1
()
CFC ()
(19 Points)
(3 Points)
,
EEWH
20%

TSMC Property
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DOE2/ eQUEST
6.1%
()4%
13.4%
1.9%
1.2%
0.8%
27.4%

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300960
5 12
: 2,000
5 12

TSMC Property
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: 5,600 3,210
1235
35
VFD
VFD 70C HWR
90C HWS
HTX
VFD
VFD
VFD
29C WWR
35C WWS

TSMC Property
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(mini-environment)Class 175%FFU)
2 F
Class:1 (Mini-
environment)
Class:100
(Cleanroom environment)
3F
FFU

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(30%)
3
10~35oC/60~90%
25oC/50%

TSMC Property
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2010 TSMC, Ltd.
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LEED-NC
()
75%
95%
50%
50%
75%
5%
10%
10%
20%
10%
20%
2.5%
FSC 50%
EEWH
CO2
CO2
CO2

TSMC Property
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91%
65%86%91.85%

2010 TSMC, Ltd.
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EEWH
/
LEED-NC
ASHRAE 62.1 ()
()
CO2
ASHRAE 62.130%
CRI
90%
50%
ASHRAE 55
75% 2%
90%
(30%45%)
10%

TSMC Property
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CO2/CO2 900 ppm
VFD
MAU
CO2
PLC
CO2
VFD Output
%
CO2
: 900PPM

2010 TSMC, Ltd.
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(CO2 Sensor)
(Occupancy Sensor)
CO2

TSMC Property
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24KWp
242KWp(10)
609KWp
1,155,777kWh

TSMC Property
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: :

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TSMC Property
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ASHRAE 90.1-200720~27%
91~92%
85%55%
2%
5/12 5 /9
1% (LEED Certified, 26~32)

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LEED
LEED
2013
MIT

TSMC Property
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EEWH

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EEWH
(25%)
COP
,
3, , /
EEWH(, )

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EEWH-BC

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!

2010 TSMC, Ltd.
49 300-07, 25
: [email protected]

新綠色思維– 綠色晶圓廠策略與實務 · pdf filetsmc property 1...

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