自動化設備安全 設計要求 - semi.org‡ª動化設備... · nfpa 12 nfpa 13 nfpa 72 nfpa...
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2012 PMC ()
(04)23599009 515 [email protected]
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2012 PMC ()
PMC*8261
*270*
42
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2012 PMC
Machinery Safety DepartmentElectromagnetic Compatibility Department
S E M I Semiconductor Process Equipment Manufacturing System Consulting and Examination
CE Marking Consulting and Examination
Precision Machinery R&D Center
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2012 PMC ()
/(CEGB)
IC(SEMI S2)
(ECO)
(FPD LED)
PMC
(94~)()()(LED) 8.5GAMOLED(99~)
tsmcSEMI S2SEMI S2
400
(LED)
RobotAMHS
PMC
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2012 PMC ()
(tsmc) SEMI S2
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2012 PMC ()
StripperSEMI S2
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2012 PMC ()
6
SEMI E6SEMI F5SEMI F14SEMI F15SEMI S1SEMI S3SEMI S6SEMI S7SEMI S8SEMI S10SEMI S12SEMI S13SEMI S14SEMI S22SEMI F47 ANSI/IEEE C95.1
ANSI/RIA R15.06ANSI/ISA S84.01
EN 775EN1050EN1127 IEC 60825-1
IEC 61010-1IEC 61508
DIN V VDE 0801
ISO 10218ISO 13849-1
NFPA 12NFPA 13NFPA 72NFPA 79NFPA 497NFPA 704NFPA 2001
UL 508A
SEMI S2SEMIEN
ANSI
DINUL
ISO
NFPA
IEC
SEMI S2
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2012 PMC ()
SEMI S2
Electrical
Safety Circuits
Structural/seismic
Mechanical movement
Robotics and material handlers
Ergonomics
Fire risk and protection
Liquid chemical heating Chemical containment and exposure controlVentilation
Ionizing RadiationNon-ionizing radiationOptical and laser radiation
SEMI S2
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2012 PMC ()
SEMI
1. POWER HITESTER
SEMI S2
SEMI S22
ECO
SEMI F47
Tracer gas
LVD
1.2.3.()4.5.
1.
1.2.
1. Sampler and Doser2. Field Gas-Monitor
1.2. RF3.45.6.7.8.
1. 2.
1.2.3.
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2012 PMC ()
TAF
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2012 PMC
AMHS (Automated Material Handling System)
(Substrate Handlers)
(Cassette Handlers)
() (Industrial Robots (Systems))
(UTV)
AMHS
UTV (Unmanned Transport Vehicle)
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2012 PMC
UTV
UTV
Automated Guided Vehicle System (AGV)
Rail Guided Vehicle System (RGV)
Interbay Overhead Transport Vehicle System
Intrabay Overhead Hoist Transport Vehicle(OHT)
1 3
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2012 PMC
a)
b)
c)
d)
e)
f)
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2012 PMC
:
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2012 PMC 14
:()
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2012 PMC
()
A 1
B 0.21
C 0.040.2
D 0.020.04
E 0.0020.02
F 0.002
(SEMI S10)1
A1-2
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2012 PMC
1.
2.
3.
4.
(SEMI S10)2
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2012 PMC
(SEMI S10)3 A1-1
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2012 PMC
1
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2012 PMC
ISO 13857()
()
a
b
c
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2012 PMC
(a)
(b)
1000 1200 1400 1600 1800 2000 2200 2400 2500 2700(c)
2700 - - - - - - - - - -2600 900 800 700 600 600 500 400 300 100 -2400 1100 1000 900 800 700 600 400 300 100 -2200 1300 1200 1000 900 800 600 400 300 - -2000 1400 1300 1100 900 800 600 400 - - -1800 1500 1400 1100 900 800 600 - - - -1600 1500 1400 1100 900 800 500 - - - -1400 1500 1400 1100 900 800 - - - - -1200 1500 1400 1100 900 700 - - - - -1000 1500 1400 1000 800 - - - - - -800 1500 1300 900 600 - - - - - -600 1400 1300 800 - - - - - - -400 1400 1200 400 - - - - - - -200 1200 900 - - - - - - - -0 1100 500 -
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2012 PMC
2
Interlock
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2012 PMC
panel
3
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2012 PMC 2013/5/21 23
Safety Mat
Safety Laser Scanner
Safety Light Curtain()
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2012 PMC
Safety Mat
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2012 PMC
InterlockGuard Locking Safety-door switch
LockoutTag out
Lockout /Tagout
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2012 PMC
EQ
EMS
EMOEMS EMOEMS
EMOEMS EMOEMS
EMO
EMS
STK / Cassette stage
Door2 Door1
Door switch
Door switch
Key SW
HMI
Key SW
EMO
EMS
HMI
Key SW
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2012 PMC
AutoTeach
/_
1. message,2. .
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2012 PMC
/_
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2012 PMC 29
(250 mm/ sec)
AutoTeach
,
BY-PASS
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2012 PMC
Teching box
30
12332
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2012 PMC
Teching box
2013/5/21 31
1.
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2012 PMC
Teching box
a) ; b) ; c); d); e)0 1
;
2013/5/21 32
2.
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2012 PMC 33
Robot,
Z
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2012 PMC
1.
2. (1)
(2)
3.
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2012 PMC
4. (1)()(2) (3) ()
5.
6. (1)
(2)
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2012 PMC 2013/5/21 36
a
a
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2012 PMC
2013/5/21 37
37
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2012 PMC
(04)23599009 515 [email protected]