Win Tech Technology corp.Win Tech Technology corp.6F6F--1 NO.27,Puding Rd.,1 NO.27,Puding Rd.,HsinchuHsinchu City,TaiwanCity,Taiwan 300, R.O.C 300, R.O.C TEL : (03) 666TEL : (03) 666--98729872 FAX : (03) 666FAX : (03) 666--97139713

WinTech Technology Corp.

Slit valve assembly & Gate valve overhaul process flow:

Slit valve assembly & Gate valve overhaul process flow:

:

Chamber

Slit Valve Bellow0040-20418

Air Cylinder3020-01052

Sensor

SMC CYLINDER

PM

PISTON

1) open 2) close

open

close

3 PSI ( 1 )

Bellow Bellow

Bellow

>0.3mm 2 0.15 mm Sin

bellow

()

Bellow2mm Bellow,

Before After

Bellow1mm

Problem Description:

Slit valve bellow assembly Q.C procedure

Background:Due to the bellow assembly is key parts for slit valve, the quality issue will cause the valve suffered P/D and vacuum issue.

Action:

Win-tt create the go-not go gauge to check the bellow assembly size. (done)

Bellow assembly Bellow

Go/ not Go gauge

Go/ not Go gauge

Bellow check

Spec. 15.87mm~15.89mm

Spec. 22.22mm~22.26mm

28KG,

Stainless 316()

AMAT

Win Tech Technology Corp.

VAT slit valve

1. 1. Product InformationProduct Information

2. 2. ((Parts Clean)Parts Clean)

3. 3. Function TestFunction Test

Contents

NVLS INOVA SNVLS INOVA Slit lit VValvealve AssyAssy OverhaulOverhaul

Product Information- -Assembly

General Flow Chart

1.

1.

2.

& 2.

&

5.

&

5.

&

4.

4.

6.

6.

7.

7.

8.

8.

3. &

3. &

Product Information-Assembly

VAT Slit Valve Bellows Assembly ( NVLS INOVA series) VAT P/N: 719-109820-00 Model NO:02112-BA24-APN1

NVLS INOVA SNVLS INOVA Slit lit VValvealve AssyAssy OverhaulOverhaul

Auto cycle 100 times Vacuum leakage check

Product Information-Assembly

VAT Slit Valve bellows Assembly

Whole Set Disassembly

Key-PartsWhole Set Assembly

Whole Set Disassembly

Warranty: 12 months, after installed assembly

Delivery: 2 Weeks

Ability: All Assembly

Kits Replacement (by condition or test result)- Welded Bellows

2ea - O-ring

9ea - Cylinder Refurbish- Cylinder shaft refurbish- Gear lubrication- Sensor / Counter rebuild,adjustment or replacement- Plate leveling adjustment and function test- Vacuum leakage check- Reliability mull cycle test > 500 Time

(To see more for detail in NVLS parts guide)

Product Information- -Assembly

1 2 3 4SMC CYLINDER 6 7 8 9 10 11VAT slit valve 13 14 15 16 17 18 19