検査分析

Stepper, Track PM & Overhaul Report

2014-7-24

検査分析

■ Stepper PM 내용 - 일시 : 2014 년 7 월 21 일 10:30~20:30 - 업체 : 세미스트 - 장비명 : Nikon 社 NSR-1505 G6D - 작업목적 : 최상의 장비 상태 유지를 위한 예방정비 . - 작업내용 : Stepper PM & Lens Cleaning.

■ Stepper PM 완료 - Lens Cleaning 실시 . ( 제 1 Relay Lens 교환 필요 ) - Wafer Stage PM 완료 . - Wafer Loader PM 완료 . (Wafer loader 부 belt 교환 필요 ) - Wafer Flatness 조정 완료 .

※ 업체 Report

▣ Stepper PM 결과

Stepper PM Report

検査分析

■ Stepper PM 내용 - 일시 : 2014 년 7 월 21 일 10:30~20:30 - 업체 : MTR - 장비명 : TEL 社 MARK-8 - 작업목적 : 최상의 장비 상태 유지를 위한 예방정비 . - 작업내용 : Track PM. Main Arm, T&H Overhaul.

■ Track PM & Overhaul 완료 - Cassette Stage PM 완료 . - Coater Unit PM 완료 . (Hepa Filter 교환 ) - Develop Unit PM 완료 . - Track Hot Plate & Cool Plate & AD Unit PM 완료 . (AD Exhaust Line 교환 ) - Main Arm Overhaul 완료 . - T&H Overhaul 완료 .

※ 업체 Report

▣ Track PM & Overhaul 결과

Track PM & Overhaul Report

検査分析

■ 제 1 Relay Lens 의 안쪽 중심부 오염이 심하여 Lamp uniformity 에 대한 Cleaning 효과 없음 . - Cleaning 전 Data : Lamp uniformity 3.16% , Power : 332 ㎽ / ㎠ - Cleaning 후 Data : Lamp uniformity 3.1% , Power : 387 ㎽ / ㎠ - Relay Lens 교환 견적 요청 중 .

▣ Stepper Lens Cleaning

Relay Lens

Relay Lens

検査分析

■ Wafer Stage PM 완료 - Wafer Stage X,Y ball screw Cleaning 후 grease up. - Wafer Stage X,Y V-F Face Cleaning & & oilling. - Wafer Stage runing test & signal check. (speed & noise check)

▣ Stepper Wafer Stage PM

ball screw

V-F face

Wafer stage

検査分析

■ Wafer Loader PM 완료 - OF signal check & 전압 check. (no need adjust) - Arm 흡착부 cleaning . (fetch arm , side slider arm, OF Up/down arm, OF roller , Load/Unload arm) - Wafer Stage runing test & signal check. (speed & noise check)

■ Wafer loader 부 belt 상태 점검 . - 노후화가 심하여 교환 필요 .

▣ Stepper Wafer Loader PM

흡착부 clean-ing

belt

belt

検査分析

■ Wafer Flatness 조정 완료 - 조정 전 Data(Max-Min) : 8.4um , 조정 후 Data(Max-Min) : 3.7um - 추후 Prime grade Wafer 를 구매해서 Flatness Check 예정 .

▣ Stepper Wafer Flatness check

検査分析

■ Track Cassette Stage PM 완료 - Cassette Stage Cleaning. - Cassette Stage Teaching. - C/S 1-4 Y Axis Motor Vibration 으로 Belt Tension Adjust 실시 . - C/S 1-4 Cassette Position Adjust 실시 .

▣ Track Cassette Stage PM

Cassette Stage

検査分析

■ Track Coater Unit PM 완료 - Coater Cup & Chuck Cleaning. - Coater Resist Nozzle Tip Cleaning. - Coater Unit Teaching. - RPM Check. - Hepa Filter 오염으로 Change.

▣ Track Coater Unit PM

UnitPRM

500 1000 2000 3000 4000 5000

Coater(2-1) 500 1000 2000 3000 4000 5000

Hepa filter

Coater Unit

検査分析

■ Track Develop Unit PM 완료 - Develop Cup & Chuck Cleaning. - Rinse Nozzle Dispense Check. - Develop Unit Teaching. - RPM Check.

▣ Track Develop Unit PM

UnitPRM

500 1000 2000 3000 4000

Develop(2-2) 500 1000 2000 3000 4000

Develop(2-3) 500 1000 2000 3000 4000

Develop Unit

検査分析

■ Track Hot Plate & Cool Plate & AD Unit PM 완료 - Plate & Three Pin & Cover Cleaning. - AD Exhaust Line Change. - Plate Temp. Check.

▣ Track Hot Plate & Cool Plate & AD Unit PM

Unit측정 Point (℃)

1 2 3 4 5 AVG. STDEV. RSD%

AD(2-4) 90℃ 86.4 86.2 86.4 86.5 86.5 86.4 0.1 0.1

HP(2-5) 110℃ 107.8 107.7 107.1 107.1 107.3 107.4 0.3 0.3

HP(2-6) 110℃ 107.2 107.0 107.1 107.0 107.1 107.1 0.1 0.1

CP(2-7) 23℃ 23.0 23.0 23.1 23.0 23.0 23.0 0.0 0.2

HP(2-9) 110℃ 106.1 105.5 105.8 106.1 105.7 105.8 0.2 0.2

CP(2-10) 23℃ 23.4 23.3 23.4 23.4 23.4 23.4 0.0 0.2

CP(2-11) 23℃ 23.4 23.3 23.4 23.3 23.4 23.4 0.0 0.2

AD Exhaust Line

Hot Plate

Cool Plate

検査分析

■ Track Main Arm Overhaul 완료 - Ball Screw, Slide Bush , θ Axis Belt , Y Axis Belt, Z Axis Belt 교체 작업 실시 . - 上 Bearing, 下 Bearing 교체 작업 실시 . - Part's 교체 작업 실시 후 Main Arm Align Check. - Main Arm Setting 작업 실시 . ( Y, Z, θ Axis Home Sensor 간섭 유 . 무 Check. ) - Main Arm Pincette 1, 2, 3 Align 작업 실시 . - Main Arm X , Y, Z Axis Grease 작업 실시 .

▣ Track Main Arm Overhaul

Main Arm

検査分析

■ Track T&H Overhaul 완료 . - Water Regulating Valve, Float Switch, Water Solenoid V/V Change. - Clean Tube. (SUS 316L) - Tube Fittings.

▣ Track T&H Overhaul

T&H

Water Solenoid Valve

Float Switch