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An Emerging Dimension of Internet-of-

Things System – Chemical MEMS SensorsChih-Ting Lin

Associate ProfessorDepartment of Electrical Engineering

National Taiwan University

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Outline

• Introduction

• Devices for Internet-of-Thing System

• CMOS Integrated Chemical Sensing System

– MEMS Chemical Sensors– CMOS-MEMS Biomolecular Sensors

• Conclusion

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Introduction

• 3S in 3C– Simple

– Secure

– Smart• IBM: smart planet

– Ability to harness data giving competitiveadvantages

• Intel: extended computing technology– Connect and enrich the lives on earth

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How to be Smart?

•

Learning from natures

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Proposed Systems

• Internet of Things (IoT)

• Machine-to-Machine(M2M)

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Outline

• Introduction

• Devices for Internet-of-Thing System

• CMOS Integrated Chemical Sensing System

– MEMS Chemical Sensors– CMOS-MEMS Biomolecular Sensors

• Conclusion

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Devices for Internet-of-Thing System

• Scalable– Orders of magnitude more (volume and variety)

• Sustainable– Orders of consumption less

• Smart

– Autonomous and self-regulated

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Technologies in IoT Devices

• Nature of de-centralization

• Trend of miniaturization

• Ubiquity of installation

8

Sensing

Communication

Computation     C    o    s     t     /    m    e    a

    s    u    r    e    m    e    n     t

P  er  f    o

r  m an c  e

9

90

250

MCU(MSP430)

RF (Zigbee)

Gas Sensor(Fiagro)

Unit: mW

9

90

2.5 MCU (MSP430)

RF (Zigbee)

Gas Sensor(inkjet printed)

Unit: mW

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MEMS Devices

• Boost the wave of smart technologies

– Acceleration, pressure, and gyros– Developed with over 20-year MEMS research

– Major at the physical quantity sensing

Freescale accelerometer  STMicro gyroscope MicroSesnorSystem

Pressure sensor 

9

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Something Missing…

• Another dimension of worlds: chemicalsensing– An emerging research field and market

– Sensitivity, selectivity, and reliability

• In networking system– Limited resources

– Local calibration

– Collaborative sensing

10

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Outline

• Introduction

• Devices for Internet-of-Thing System

• CMOS Integrated Chemical Sensing System

– MEMS Chemical Sensors– CMOS-MEMS Chemical Sensors

• Conclusion

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Why Chemical Sensing in MEMS?

• Harness the momentum of CMOS industries– MEMS

12

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MEMS Chemical Sensors

• Surface acoustic wave (SAW) sensors

– Based on piezoelectric resonators– Different recognition materials to promote

selectivity

Afzal, et al., Analytica Chimica Acta, 2013

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E-Nose Based on SAW Sensors

• Multiple sensing devices for different targets

Hao et al., Sensors Actuators B, 2010

Pietrantonio et al., Biosensors Bioelectronics, 2013

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MEMS Chemical Sensors

• Piezoresistive membrane with recognitionpolymers

Guo et al., Sensors Actuators B, 2011

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MEMS Chemical Sensors

• Capacitive micromachined ultrasonic

transducer (CMUT)

Park et al., Sensors Actuators B, 2011

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CMOS-MEMS Chemical Sensors

• CMOS-MEMS capacitive humidity sensors

Lazarus et al., J Microelectromechanical Systems, 2010

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CMOS-MEMS Biomolecular Sensors

• CMOS compatible biomolecular detectiontechnology– Microcantilever biosensors

Zheng, et al., Nature Biotechnology, 2005

Boisen and Thundat, Materials Today, 2009

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Fully Integrated MicrocantileverBiosensors

• CMOS Integrated Design– Piezoresistor can be used to monitor micro-

cantilever deflection

P-type (100) Silicon substrateField oxide 2900AWSix/Poly 1 2750A

Oxide 370AN+ Poly 2 (Resistance) 1800A

ILD-BPTEOS 4280A

M1 : TiN(ARC)/Al/TiN&Ti(glue layer) 6650A

Au/Ti 3000A+500A14430A

Etching

 position

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Fully Integrated MicrocantileverBiosensors

Huang et al., Sensors Actuators B, 2013

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Fully Integrated MicrocantileverBiosensors

Huang et al., Sensors Actuators B, 2013

•

Fully integrated with CMOScircuits– Analog interface circuit– Full functional micro-controller

(8051 core)– 433MHz OOK TX/RX– Micro-cantilever biosensing

capability

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Conclusion

• IoT systems offer a value-up momentum forMEMS technologies

• A paradigm shift for sensor designs is needed inIoT– Communication promotes collaborative sensing

• MEMS platform offers a vehicle for devices in IoTsystems– Low cost, low power, and high computational capability

• CMOS-MEMS chemical sensor is an emergingdirection to enrich IoT systems