2005muju workshop [email protected] fabrication and measurement of silicon strip device...

Fabrication and Measurement of Silicon Strip Device

ContentsDSSD (Double-side Silicon Strip Detector) FabricationCross-sectional viewProcessing squence in planar Technology IV & CV TEST Sensor characteristic curve Measurement methodRun history and Result view BEAM TEST Radiation Hardness SOURCE TEST S/N (1 slide)

1. DSSD Fabrication1. Cross-sectional View High Resistive n-type substrateN +P +P +Initial Oxide(~4,500) ILD LTO(:5500, :4000)Passivation PE-oxide(9,000) IMD PE-oxide(40,000)

NoProcess Desc.Process Flow & Cross sectionRemark.Start Material ; n-type, (100), 5K .cm. 380m, Front & Back PolishedCleaning ; STD1

Thermal Oxidation; 900C, H2/O2, 6500P+ Photo; Mask #F1, Positive PR, C-AlignerOxide RIE ; 5500

PR Strip

P+ Photo; Mask #B1, Positive PR, C-AlignerOxide RIE & Wet Etch; 5500 /1000+30%PR Strip

Cleaning ; STD1

Oxidation; 850C, H2/O2, 200

P+ implant; B11, 3E15, 40KeV < Front & Back >Oxide Wet Etch; 2000

1.

2. 3. 4. 5.

6.

7.

8.

9. 10. 11. 12.

13.

2. Process Sequence 1. DSSD Fabrication

NoProcess Desc.Process Flow & Cross sectionRemark.Cleaning ; STD1Anneal ; 900C, N2, 30min

Oxidation; 900C, H2/O2, 1000

N+ Photo; Mask #F2, Positive PR, C-AlignerOxide RIE & Wet Etch; 4000 / 1000+30%N+ implant ; P11, 3E15, 50KeV

PR Strip

Cleaning ; STD1

Oxidation & drive in; 900C, H2/O2, 500 / N2, 170minLTO Oxide Depo.; 6000Cleaning ; STD1LTO Annealing ; 900, 30min

Contact Photo; Mask #F3, Positive PR, C-AlignerOxide RIE & Wet Etch; 5500 / 1500+30%PR Strip14.15.

16. 17. 18. 19.

20.

21.

22.

23.

24.25.

26.

27.

28.

LTO Loading

* 23, 24 Step Skip

15. Oxidation 2. Process Sequence () 1. DSSD Fabrication

NoProcess Spec.Process Flow & Cross sectionRemark.Cleaning 50:1 BHF, 300sec

Metal1 Deposition; TiW/Al1%Si/TiW =1000/10000/750AMetal1 Photo; Mask #F4, Positive PR, C-AlignerMetal1 Etch;

PR Strip

PECVD Oxide Depo. ; 20,000 Contact Photo; Mask #B2, Positive PR, C-AlignerOxide RIE & Wet Etch; 3000 / 1000+30%PR StripCleaning 50:1 BHF, 300secMetal1 Deposition; TiW/Al1%Si/TiW =1000/10000/4000AMetal1 Photo; Mask #B3, Positive PR, C-AlignerMetal1 Etch;PR StripPECVD Oxide Depo. ; 40,000 29.

30.

31. 32. 33.

34.

35.

36.

37.38.39.

40.

41.42.43.

* * 2. Process Sequence () 1. DSSD Fabrication

NoProcess Spec.Process Flow & Cross sectionRemark.Via Photo; Mask #B4, Positive PR, C-AlignerOxide Wet Etch & RIE ; 7500 / 33,000+30%PR StripDI Rinse & NMD-3(Polymer ) DI Rinse & DehydrateMetal2 Deposition; TiW/Al1%Si/TiW =1000/10000/750AMetal2 Photo; Mask #B5, Metal2 EtchPR StripPE-Oxide Depo; , 8000A

PAD Photo; Mask #B6, PAD Oxide Etch; 8000A +30%PAD TiW Etch; 750A +30%PR Strip

PAD Photo; Mask #F5, PAD Oxide Etch ; 9000A +30%PAD TiW Etch; 750A+30%PR Strip

H2 Annealing; 420C, H2/N244.

45. 46.47.48.49.

50.51.52.53.

54.55.56.57.

58.59.60.61.

62.* 2. Process Sequence () 1. DSSD Fabrication

2. Sensor Characteristic Curve IV & CV TEST

2.1 Measurement method 2.2 Sensor Fabrication History and Result View

P-STOP_pad-HVN_side_pad+HVPIN- HV +2.1.1 Sensor Mesurement Method N side TEST (Surface Character)2. Sensor Characteristic Curve

2.1.2 Sensor Mesurement Method P side TEST (Bulk Character)2. Sensor Characteristic Curve+High voltageGND

1. 1 Run History (C-sensor) Initial Oxidation 6500A FPSD Dry Etch 5500A BPSD Dry Etch 5500A Wet Etch 1000A + 50% Buffer Oxidation 200A PSD Implant B11, 40K, 3E15 () Anneal, 900C, 30min Block Oxidation 1000A FNSD Dry + Wet Etch NSD Implant P31, 50K, 3E15 () Anneal, 900C, 100min LTO Dep. & Densification(900C, 30min) P-strip Fail : P-strip Leakage ~ 1nA/strip @100V P-guardring Current ~ 1mA @ 100VGuardring Current(a). P-strip(b). N-strip N-strip Leakage ~ 0.2nA/strip @30V N-guardring Current ~ 500nA @30V

Guardring CurrentN-strip Current (1st Sweep)N-strip Current (2nd Sweep)2.2 Sensor Fabrication History

2. 2 Run History (D-sensor) Initial Oxidation 6500A FPSD Dry Etch 5500A BPSD Dry Etch 5500A Wet Etch 1000A + 50% Buffer Oxidation 200A PSD Implant B11, 40K, 3E15 () Anneal, 900C, 30min Block Oxidation 1000A FNSD Dry + Wet Etch NSD Implant P31, 50K, 5E15 () Anneal, 1000C, 100min LTO Dep. & Densification(900C, 30min)(a). P-stripGuardring CurrentFail Strip(b). N-stripGuardring Current P-strip Fail : P-strip Leakage ~ 6nA/strip @100V P-guardring Current ~ 200uA @ 100V* Fail Strip Sample N-strip Leakage ~ 0.5nA/strip @30V N-guardring Current ~ 2uA @30V

2.2 Sensor Fabrication History

3. 3 Run History (E-sensor) Initial Oxidation 400A LPCVD Nitride 4000A FNSD Dry Etch Nitride 4000A NSD Implant P31, 50K, 5E15 () FPSD Dry Etch Nitride 4000A FPSD Implant B11, 40K, 3E15 () BPSD Dry Etch Nitride 4000A Wet Etch Oxide 400A Buffer Oxidation 200A BPSD Implant B11, 40K, 3E15 () Anneal, 900C, 120min LTO Dep. & Densification(900C, 30min) P-strip Fail : P-strip Leakage : 8 ~ 50nA/strip @100V P-guardring Current ~ 1uA @ 100V* 4(12 Chip ) 3(9 Chip) Fail Strip * Nitride TEOS Fail Strip N-strip Leakage : 2 ~ 20nA/strip @30V N-guardring Current ~ 1uA @ 30V(a). P-strip(b). N-strip2.2 Sensor Fabrication History

4. 4 Run History (G-sensor) Initial Oxidation 6500A LP-Nitride 1600A FPSD Dry Etch 1600A/5000 A BPSD Dry Etch 1600A/5000 A Wet Etch 1500A+50% Buffer Oxidation 400A PSD Implant B11, 40K, 3E15 () LP-Nitride 1000A FNSD Dry+Wet Etch 2600A/5000A/1500A Buffer Oxidation 300A FNSD Implant P31, 50K, 5E15 Nitride Strip Anneal, 900C, 140min LTO Dep. & Densification(900C, 30min) P-strip Fail : P-strip Leakage : 7 ~ 80nA/strip @100V P-guardring Current 0.5 ~ 1200 uA @ 100V* 6(18 Chip) 2(3 Chip) Fail Strip 2.2 Sensor Fabrication History

Sheet1

Strip CurrentGuardring Current

Target

5. TEST Run History Initial Oxidation 9000A (#01, #02) Initial Oxidation 9000A + LP-Nitride 4000A (#03~06) FNSD Dry Etch + Wet Etch Oxidation 300A FNSD Implant P31, 50K, 5E15 FPSD Dry Etch + Wet Etch FPSD Implant B11, 40K, 3E15 BPSD Dry Etch + Wet Etch Oxidation 300A BPSD Implant B11, 40K, 3E15 Anneal, 900C, 140min (#01~04) Anneal, 900C, 70min (#05~06) LTO Dep. & Densification(900C, 30min)Guardring CurrentFail Strip(a). #01, 02_Oxide Only( Chip)(b). #04~06 (Oxide +Nitride) Oxide Only - P-strip Fail : - P-strip Leakage : 3 ~ 10nA/strip @100V Oxide + Nitride - P-strip Leakage Variation - N-strip to P-stop Short2.2 Sensor Fabrication History

CV curve (Capacitor Voltage)

Chart3

0314.8306.9301.5294.4289.5321.1307.6310

4220.5174.1134.22128.33139.68118.73119.9136.19

8119.35129.43118.9120.36132.15112.49112.59129.07

12114.3125.2114.64115.8127.65109.92108.41125.25

16110.83122.22110.6112.66124.33107.87105.61122.36

20107.99120.07108.35110.49122.5106.56102.91119.72

24105.52118.38106.53108.51120.89105.23101.49117.2

28103.61116.69105.3106.76119.2103.9799.78114.98

32101.97115.39103.86105.34118.55103.0197.65113.43

36100.46113.78102.84104.16117.5102.2196.33112.12

4099.51113.08101.59102.85116.32101.695.07111.01

4498.24111.51100.81101.63115.4100.9194.02109.97

4897.38111.1299.79100.25114.59100.0893.26109.23

5296.48110.0499.299.8114.199.8492.63108.46

5695.76109.1598.499.25113.4799.0992108.05

6094.88108.6997.9698.69113.0498.4591.29107.21

6494.01107.9197.798.27112.5897.490.93106.67

6893.44107.2397.0597.75112.797.2990.51106.25

7292.97107.0696.8697.66112.0897.4790.19105.87

7692.48106.2296.4397.1511295.7989.84105.39

8092.06105.9496.3197.38111.6996.0389.55105.2

8491.6105.3295.997.02111.3495.3989.21104.86

8891.44105.1695.8396.85111.3294.8689.04104.67

9290.99104.7995.5396.58110.8594.688.93104.23

9690.93104.3895.4396.25110.5794.3688.71103.92

10090.57104.4595.496.07110.4694.4588.44103.87

10490.24103.8395.1995.99110.5593.6788.39103.3

10890.4103.7795.0895.83110.1293.988.41102.85

11289.8103.4394.7895.81110.0593.2988.25102.14

11689.57103.1894.6195.38109.6392.9887.9999.38

12089.65102.8794.4395.22109.892.8988.0194.83

C1T1_CV_G

C1T2_CV_G

C1T3_CV_G

C2T1_CV_G

C2T2_CV_G

C2T3_CV_G

C3T1_CV_G

C3T2_CV_G

C3T3_CV_G

Reverse Bias (V)

capacitance (pF)

LOT1_C_CV_Guard-ring

TABLE

2004-12-21 DSSD Guard-ring CurrentLeakage Current

3.BEAM TEST - Radiation Damage Test (35Mev) DSSD sensor 8, CREAM sensor 3 (Calibration test sensor 1)-11 1011 ,1012 ,1013 ,1014 ,1015 [/cm2 ]

Number of Proton[/cm2] = Target Proton X 80%3.1 BEAM TEST Log table and test Schematic1.Log table2.Test Schematic

TargetSensorAverage CurrentNumber of ProtonTime1012C3T32.78 nA, 63sec1.08X10122:45~2:461013G5T210.24 nA, 125sec8X10122:56~2:581014C3T256.83 nA, 250sec8.88X10133:19~3:231014E3T257.75 nA,250sec9.02X10133:32~3:361015E3T356.60 nA, 42min8.91X10143:45~4:27

3.2.Beam Test Result View - IV curve

Chart1

5.7326.261.73

94.525413.74188.28

402.21469.44740.73

721.932172.51127.69

1047.82717.61371.66

1434.083288.11772.68

1885.053866.62193.2

2362.34469.12636.8

2867.45049.13054.8

3438.45590.53472.9

4030.96123.43912.1

4675.96695.44352.6

5345.37281.64857.5

6074.47920.35420.1

6909.286105979.4

7850.39365.36585.9

8805.710208.37273.5

9905.30111146.17974.6

11159.2122008833

12376.213326.59789.1

1366114557.710836.2

14660.915894.911958.9

15920.21732113147.8

17872.818860.814426.8

19608.320494.215870.1

212762215717313.3

230192389918807.2

246542568420299.5

257122756122006

276502955123514

295043159125106

C3T3

1st_20050107

2nd_20050214

Rerverse Bias (V)

Leakage Current (nA)

BEAM TEST_C3T3_IV_Pside_10^12

P-side

P-side Test for Radiation Damage Test (nA,pF)

P-sideSource Test

IVC3T1_IV_Gsawed102nd_10C3T2_IV_Gsawed102nd_10C3T3_IV_G_10C3T31st_200501072nd_20050214E3T1_IV_GsawedE3T2_IV_Gsawed102nd_10E3T3_IV_Gsawed10^152nd_10^15G5T1_IV_GsawedmonitorG5T2_IV_Gsawed102nd_10G5T3_IV_Gsawed10

017.522.653.830.2030.150.833.8385.7326.261.7300.229.414211.2285.527.16110.0065.710.124625.112.058.6698.485.292.7410.328.950.06

4200.843296.3271.26357.94270.78156.145205.62527.77192.5294.525413.74188.2861.379204.45273.45340.45796.2747.1801338.591.3210.097194.4743392.72888.1144.161218.23730.73501.27211.99233.4766.52

8891.41533.91016.121629.07927.29622.511421.122776.6555.13402.21469.44740.73323.89310.74438.8543.853033.13096.8578.69324.7226302086.5109.7316805.16170.6202.63345.2229402093.8247.03863.34431.9

122172.83070.12572.53044.11698.351305.5738475391987.77721.932172.51127.69420.52389.74534.39672.015562.45653.1702.18412.7456344626.3127.176102429482269.79433.555398.14906.8292.2616961158.47

163703.14845.54124.346912628.82152.96695.38015.51382.891047.82717.61371.66492.9442.55611.32772.758079.77841.9814.08488.798369.8997475.4149.03613718.912736341.13542.447718.77545355.022515.31847.84

205493.36889.65928.96504.53723.23159.69839.10110567.21835.211434.083288.11772.68554.57497.83680.98885.9310732.110290.3944.75565.6311433.310511.7167.46717197.816030.3422.99665.26971411137.3414.793282.12524.6

247403.89025.1997996.18469.74936.54236.812384.8129082344.41885.053866.62193.2623.19608.4753.07953.1613054.212595.91007.08649.6914536.713502.4187.84720683.919101.5505.8794.4511428.514103.2473.5739662999.1

289407.511188.710014.110482.562895477.115355.715124.42904.32362.34469.12636.8696.74634.04812.761081.0515656.514820.71124.42717.5817508.116659.6206.162421622452599.78957.2813034.116974.8518.994645.83635.9

3211492.713500.512013.512560.87761.56858.618283.117270.13509.82867.45049.13054.8743.54678.96858.51060.5918097.717022.21228.852461.120035.119954.2225.322772526709695.841171.31451219933.2562.75396.24105.9

3613638.215861.714126.114703.49349.78328.60121201194094169.63438.45590.53472.9777.79711.67896.781092.1620115.119645.61299.772984.419901.122872240.083107929897822.241471.3215885.114485.8576.066309.44651.9

4015860.418390.616233.616927.411032.19928.524010215524887.14030.96123.43912.1813.63736.42930.721179.7822727220271256.33860.062341526559254.153456433450921.351844.0517199.210559.3613.477432.25230.4

4418135.12097018334.219180.812800.311605.926727237275637.54675.96695.44352.6844.48788.78960.23991224.425219243141232.54895.332753329975267.3238019349611078.592295.718500.111353.9637.968634.56066.9

4820438.22342720635.32137314653.413414.529443259076430.25345.37281.64857.5868.73829987.271225.5528320268681281.04919.172863432745279.641449389281206.22759.719444.312408.3729.498737078.6

522276325864229232366916582.415251.431919280897285.76074.47920.35420.1891.19786.911011.931230.429674297801312.99961.75993105635495290.844845433311371.293419.620658.613651.4801.1811152.88149.7

562513128489252082598318658.917082.234627303268202.3996909.286105979.4935.72920.711038.441255.1831946324961354.8989.593666338183302.4947946468881560.794026.42180914672.2869.9612417.29235.5

602755731379274772833220690.619069.337441325929201.97850.39365.36585.91204.281980.81147.711321.0234465352351424.271043.43976740947314.1651504501121763.994551.52304216649955.7913720.610300.3

64299923407329869307952283721220400953480810269.48805.710208.37273.51378.224348.41381.321548.1336473377401719.421303.014263743658337.454839542712041.295424.92433117467.71259.515029.212006.2

68324433667532288332202502523377429123706011430.69905.30111146.17974.63383.96565.61831.331879.3938888412362065.61559.914537346113456.0257999575842431.463752564419113.41922.616406.712941.7

72349293900934686356372736725571453713931712745.511159.21220088339012.59112.43054.73418.9412474427528606146.64821648890917.94613846098432367405.327007210173436.517708.514239

76374554151537160381332967127933481794147014168.312376.213326.59789.112261.111894.35246.45422.2440564487173988936.351505516431891.7364691646554446.98063.828511223775383.618942.815518.2

80400144422139591405273202330268507114377515663.41366114557.710836.215205.814825.47515.57657.746979479019408.810336.855036543233207.168018684445808.49521.929917228477604.420340.916758.5

84425424686741992431813437932793533874594917217.514660.915894.911958.918469.317875.910706.710978.8502015362412439.415661.557861577914828.871233717337447.99719.199313962420710011.82167818054.7

88451014962145220457433676634841561024829418919.415920.21732113147.8216652100313218.213915.6533185409114731.419112.260831598496637.374352755139421.511407.5327432630912527.32308319297.2

9247722522364780946578392323770058773507082064717872.818860.814426.824948241932220917074.75666857407212452252263899629128945.199762047879511224.512612.1346003541715002.42446520833.7

9650340549885032549199418224032161478531422238319608.320494.215870.12806127535254221988059858609312450625740670086592610651.1791418223813151.214088.93614531682175152584822186

100529995738952885518194438342923640575556024103212762215717313.33182030846287312370363290638102800828901700956889712818.6824788608315131.514293.1377403298520277.82728523747

104556706033655467544004695545582667465799825663230192389918807.23563134150256992595066565671963034032426731947177915004.3853148938417147.2134634037335503232512877125215

108583856268358428571264957248258693576050327299246542568420299.53844637494296172979169880704853491035972762257505317334910149273919120.515377.94189737785258603023326679

1126110165386609255983752193509587217963043287572571227561220064112840985327873269273263740313779038815793977810019665.492225950872140317119.74370939567281423275728223

116639316854963564623985496453717747596560430353276502955123514403724444636169361407678077438415424232282660812002214898249983022354220105.74583142479306843455529653

12066654712836642265347577145645577475682023192429504315912510641691478973974639455802368082145674463908560784283244769853710201625687224434792642664331913631131712

CVC3T1_CV_Gsawed2nd_10C3T2_CV_Gsawed102nd_10C3T3_CV_Gsawed102nd_10E3T1_CV_GsawedE3T2_CV_Gsawed102nd_10E3T3_CV_Gsawed10^152nd_10^15G5T1_CV_GsawedG5T2_CV_Gsawed102nd_10G5T3_CV_Gsawed

0321.1257.9237.2232.4307.6240.8222.4240.9310240.1149.9240.9229.4229.5205.8184.2199.5225.3192.4175.2184.9187.8273.6146.2157.94188.1143.59173.777.555.553180.2

4118.73110.16108.9102.02119.9108.8490.17107.53136.19120.4273.47117.31162.4160.6152.1142.7159.5174.4152.2150.5156.2192.4266.6144.9158.3162.6123.07153.991.44154.77155.4

8112.49105.55102.3796.46112.59102.7985.74104.03129.07114.6666.41111.87104.99103.2997.31134.35144.8115.72107.67148.39147.3187.9259.9144.1154.3102.37118.25148.389.56100.99102.13

12109.92103.8699.6694.07108.4199.6284.38102.31125.25111.2161.52108.5486.7488.982.61123.84137.1785.9480.01142.42146.277.68253.7142.977.1188.45111.75138.4959.8388.490.11

16107.87102.5897.8592.57105.6197.1583.24101.5122.36108.0172.94105.8477.5980.3174.81115.33128.0476.6671.76136.96140.378.34247.5141.277.5483.0591.68103.160.9984.4386.61

20106.56101.7596.491.09102.9195.3183.1100.44119.72105.0671.86103.3271.0274.4969.46106.8118.7670.7566.47132.71134.3777.69241.7142.576.4778.0868.36102.5869.48183.23

24105.23100.9295.1189.78101.4994.0289.0599.96117.2103.4768.57101.3366.8770.4566.0199.32110.766.9863.06128.05128.4377.15236.4143.175.6465.0560.689.1374.8877.9380.22

28103.97100.294.1789.3399.7892.788.6598.97114.98101.6768.1698.7563.867.7663.7192.32102.4164.160.84123.31121.4276.35231.814274.6360.967.9890.3574.0670.3171.9

32103.0199.7593.3488.0497.6591.2489.2898.28113.43100.2866.6397.3561.5565.8462.018997.0561.7858.64118.67115.6375.35228.4140.973.9257.5163.2484.7873.2359.1865.4

36102.2199.7692.5487.7296.3389.6789.4897.65112.1299.2153.4796.0459.764.4660.4786.3194.3160.0656.84112.69109.5674.82226.6148.8972.7355.1661.5182.1572.6361.5962.06

40101.69991.9286.6395.0788.5787.5296.6111.0198.1454.1194.8358.263.3359.4584.992.2458.5155.65107.63105.0573.71225.2148.3871.9853.4859.3180.1471.5658.8560.19

44100.9198.7691.2486.0794.0287.9387.3195.94109.9797.0663.5693.2756.9662.3858.3483.1189.4257.2954.45103.05100.1972.66224.1148.1370.9852.1159.0267.9271.1657.3858.77

48100.089890.4285.0393.2687.0687.1695.16109.2396.0562.8192.7855.9961.657.5181.8687.3856.2953.2998.8797.0571.67223.2148.4270.0651.1456.3463.1370.1556.2257.89

5299.8497.6789.8284.4792.6386.3187.0294.29108.4695.2361.792.3854.9860.8156.7280.7585.6655.353.596.5695.6570.59222.1148.6368.9350.453.5363.5969.0553.3757.13

5699.0997.6688.983.839285.6786.7593.53108.0594.8761.6991.453.9259.956.0879.4783.9954.5951.0392.9893.4469.41220.9148.2467.8649.8546.9361.6168.254.4956.47

6098.4597.5288.3783.4491.2985.3787.3592.94107.2194.2860.6590.8252.9759.3255.4877.2982.4953.852.8790.7992.1567.85220.1148.0566.0349.3340.962.3166.6153.1155.94

6497.497.6387.9183.1190.9384.987.0992.79106.6793.6461.8389.9552.4158.7355.1775.8480.9253.6854.5689.0290.1266.68219.3148.2464.2648.7938.8858.3264.9253.4455.49

6897.2997.4587.4482.5390.5184.2786.7791.68106.2593.1260.4289.7952.2858.3954.8874.1880.6253.554.8987.6288.2265.41218.6148.5462.8548.2837.8857.1163.4652.955.13

7297.47100.8487.2182.0790.1984.2887.290.62105.8792.559.2489.0752.2558.2554.9374.5479.1153.4457.3786.5286.6663.93217.5148.8261.7748.0136.2656.0561.7951.3454.73

7695.7993.0887.0382.589.8483.9486.389.6105.3992.158.6588.5352.3958.4755.3472.4478.8753.3958.4284.986.5161.97216.8148.1260.4347.636.1155.0660.1244.1754.41

8096.0393.2686.8382.0289.5583.5485.3189.31105.291.7959.3188.353.2558.7755.6271.9878.5753.4459.8684.5986.860.62216.1148.3659.0147.2834.1754.9159.151.1554.14

8495.3993.1886.4581.7889.2183.2885.4588.73104.8691.0759.1587.5953.4859.1455.870.9678.6553.2862.0583.2985.2758.96215.2148.3757.947.0434.1654.1357.6347.3553.8

8894.8691.7686.3581.989.0483.184.1188.87104.6790.5759.4487.0553.6659.335670.1478.3153.4363.6982.0884.6357.9214.2148.1456.746.7332.2654.0556.9550.4353.72

9294.691.9286.281.0888.9382.9883.6888.24104.2390.2160.1186.5953.8959.2256.3670.8378.7353.2865.4381.1484.7457.49213.4148.5455.9446.5133.7853.3656.2415.04753.56

9694.3691.4185.9881.4388.7182.7783.5687.64103.9289.6660.8686.5753.9959.3756.5770.3279.3553.3367.7781.8484.4356.72213.6148.1555.2446.3332.8553.7955.6415.31753.3

10094.4588.9885.948288.4482.7783.0887.13103.8788.1359.4884.0754.1859.4756.7969.6679.8754.2569.7581.4983.6256.49212.9148.0754.7846.2633.575354.9613.6953.19

10493.6788.2685.9980.888.3982.5982.1287.27103.385.6359.7681.1154.2959.5157.0770.6180.3154.5672.2381.3783.6755.97212.2148.3754.0846.1834.1153.2154.8915.9753.14

10893.988.1785.7780.6988.4182.5782.9886.75102.8582.9456.4977.2954.4359.5357.5470.8681.3254.6374.582.1683.2155.69211.5148.0253.7946.0233.6854.2854.818.6752.94

11293.2988.2585.7681.6688.2582.4980.8786.57102.1480.2352.973.8254.5559.6357.4470.1881.954.6676.858183.955.83211.1148.553.4946.0233.3654.554.2224.2852.95

11692.9887.9885.7580.9487.9982.481.7686.6799.3877.6951.6870.1654.6759.7156.5570.3883.0954.7879.4181.1183.9355.91210.2147.9553.0945.8133.8254.3354.522352.83

12092.8987.8885.8681.0488.0182.2881.4186.5794.8375.4748.3566.1854.8259.8357.0471.5784.1354.7482.0481.1884.2556.16209.9148.3552.9745.7334.8155.4454.3127.6452.77

P-side

C3T3

1st_20050107

2nd_20050214

Rerverse Bias (V)



N-side

N-side Test for Radiation Damage Test (nA,pF)

IV

C3T1_IV_G102nd_10C3T2_IV_G102nd_10C3T3_IV_G102nd_10E3T1_IV_GE3T2_IV_G102nd_10E3T3_IV_G10^152nd_10^15G5T1_IV_GG5T2_IV_G102nd_10G5T3_IV_G10

021.57119.40.3128.29121.73620.8720.05220.6314.4129.89528.00826.9726.59427.3929.3256.57526.77466.65638.96313.926332.615

175.524457.11217.92695.47699.82655.8780.076536.12418.53430.15935.31932.07324.28938.63936.1171.574735.85137.915720.3667.9143.6155.276

279.3671146.66679.471346.831530.841473.7584.4731193.48733.87516.41901.821896.64425.621909.51905.57179.8371547.61156.8241512.881441.89150.7173.755

383.2721591.62850.471962.312380.7231489.011648.39823.67569.892839.32829.2513.292850.62843.4186.8052355.5180.1242307.32215.1156.4189.286

489.6991770.49948.282590.43280.5320593.8521851.7906.9622.133807.13792.1609.673821.53812.6193.963201.1208.053140.43017.5161.983204.17

5102.061958.211041.323169.74162407798.3152014.34994.06690.9747424722.8726.484761.24739200.454026235.253951.43783.3167.812217.55

6114.482140.21142.793719.25080.84984.8103.0262202.51079.89860.995708.85685.4930.875732.75027207.524882.5257.654790.14547.1173.174232.85

7125.692347.61229.94217.25973.35865.7107.9692385.31152.781267.76641.26613.21332.146670.66151.3214.925711.3278.515601.25232.4179.851250.86

8139.3112538.21316.1647056901.16782113.142568.11222.71946.617607.47574.51981.627641.67413223.636571.9300.136436.45876.1186.028269.78

9154.5542705.41423.75149.27806.17673118.0782729.51299.262736.98545.8998504.52750.58585.58198.7232.687408.4322.097242.66462.3192.604287.74

10172.2382897.61499.435569.18738.3998590.2123.4322887.21401.953604.59509.194593609.59555.1018788.3243.258268.7345.338065.17034.8200.048305.68

11191.7553183.21666.525963.79671.29505.2129.1433073.51504.364504.510469.210409.94502.910520.310222.6254.259126.5369.098872.6017577.9206.98323.47

12212.443435.51888.75633410576.610393.2135.7243285.51599.755398.111401.911331.85393.311459.311430.5264.779959.4392.289641.28075.8213.99340.53

13235.993699.22002.956702.41151211306144.1283500.41694.786334.21236212276.76324.112426.812395.7275.5910817.7415.8410412.58545.3221.01357.69

14261.333868.22110.27053.312419.212189.4153.8163702.71783.437251.813292.613187.97237.913365.213329.5286.2411649.5438.8111138.68961.6228.02373.7

15290.2441402213.47408.113353.913096.4164.9873906.41872.38205.414247.914118.68187.614331.214295296.8312504.4463.4911866.79379.8234.88390

16321.854328.12309.57745.314262.313972.2176.3224097.71955.619137.10115177.115012.69115.715269.115230.5307.0113329.7486.6712557.79814.4241.48404.8

17359.844525.22404.58090.61520114871.2188.2634289.72038.1710106.116134.115922.310081.216238.316196.9316.8413907.3510.3113253.210294.3247.8420.02

18401.254666.72493.48425.116109.415732.9200.0644470.32116.211047.717057.716780.911018.417175.717130.2326.9214973536.3813907.510778.7254.36434.32

19450.684843.82583.28781.517043.216609.8212.454650.52191.712020.218005.817635.211985.718139.718090336.4315742.8557.8814564.711277.6260.56448.67

20508.645062.22671.69151.417978.317477.4225.284824.62264.312996.918955.618458.212957.419107.719048.6345.716413.4581.4615203.511767.9266.69462.78

21571.6652182759.29496.118883.218301.2237.324989.22331.613942.519869.319224.813898.720041.719985.2354.7617293.3605.0915799.112233.9272.26475.7

22647.785364.22850.59849.60119819.419135.4249.895150.12396.6149232081019991.714872.82100020948.7364.0818096.5625.8416389.912706278.14489

23732.755513.12942.410191.420721.819923.4261.845301.52456.615870.42170620713.215814.32193221869372.8219195.4650.1116943.113155283.76501.73

24834.345670.33042.610553.92164720721.3274.355451.52514.416851.2226362142916791.92289722832381.720035.1673.4417509.313622.9290.1514.3

25951.235822.13147.710899.72255321476286.9755912566.917804.8235342211617740.92383723766392.0220847690.6818072.614079.2295.95526.26

261091.235956.53262.611263.42348322251300.545729.52617.318786.1244472280218717.22480024726400.0221670715.3618668.814545.5300.84538.07

271250.556110.83386.511611.72438022993314.985856.12663.7197332532223447196612573225653408.4522469734.4719265.614988.2305.97549.37

281444.416229.13527.711969.12530623762331.795979.92707.320715.7262112410020639.52669626612416.2323290758.1919894.615440.7311.11560.78

291672.26418.23689.112336.12622924525351.546098.22751.7216882708924741216082765827570424.2924106781.8620530.615880.2316.23571.78

301930.856570.43867.312686.42712025260375.016204.62795.8226392792625349225542859028497431.9824891804.022114016302.6320.92582.77

CV

C3T1_CV_G102nd_10C3T2_CV_G102nd_10C3T3_CV_G102nd_10E3T1_CV_GE3T2_CV_G102nd_10E3T3_CV_G10^152nd_10^15G5T1_CV_GG5T2_CV_G102nd_10G5T3_CV_G

0323.6276.2216.2210.1244.1194.1137.3119.6140109.86.962.7296.8466.9566.574

1339.3294.5218.1210.2253.5196.8139.8119.3143.41121.96.8592.8536.9296.8856.605

2333.6306.6221212.6247.1196145.66116.7150.17106.396.9563.3786.8896.8576.681

3326313.4224.7210.4237.9202.3154.79116.2157.5105.686.9913.2796.8216.8636.531

4308.5322.8225.6212.8198.2204.3158.7115.3162.3105.66.9413.5056.8246.9066.552

5240.2318224.5212.9115.18199.5158.7114.7161.4104.916.983.4666.8436.8856.649

6115.78282.6224.5212.380.55197157.4113.9159.6103.787.0133.5116.8936.8096.628

783.5270.5226.4211.780.95190.4156.2111.5158102.646.9253.9446.8376.8026.69

884.38278.9230.4213.381.13175.3154.8110.44157.2101.696.9544.4346.9416.7816.634

984.33257.4234.9214.980.82146.21154.3110.53156.4102.026.9224.886.8036.546.378

1084.1197.1237.7214.380.4381.16153.7108.6155.9100.536.7114.9356.6466.4176.214

1183.95125.06237.8213.580.1449.01152.9108.43155.5114.66.4615.556.4656.4766.124

1283.3386.23236.9215.379.8545.97152.7106.88155.499.866.4075.9176.3616.3825.989

1383.0165.99234.5214.779.3445.89152.4105.6155115.26.3226.1576.4366.3366.061

1482.5856.97229.5217.179.0644.86152.1104.98154.598.316.4126.466.46.3436.142

1581.9456.8219.2215.678.6644.6152.2103.25154.4108.66.3617.036.3976.3946.166

1681.5566.04201215.578.1446.08151.7113.2154.5123.76.3077.646.5296.3836.035

1780.9562.51171.6215.677.8145.06151.6102.13154.595.986.378.066.4826.3636.1

1880.2143.8137.0921777.2444.95151.7110.6154.5122.16.2988.416.4476.4446.004

1979.1244.11108.12216.776.7745.09151112154.693.726.3349.126.5246.2686.161

2077.6755.0993.6214.475.944.57151.1111154.493.926.3998.7586.4966.4086.233

2176.9744.7491.12214.375.0543.99150.898.34153.91196.3989.976.456.2226.066

2276.2534.2390.95214.774.3743.45150.5135.3154.3118.36.4286.076.4836.3586.143

2375.7945.690.67214.173.8443.25150.7133.8154.3107.16.3055.016.4926.4156.21

2475.0931.8190.01214.573.344.26150.3132.6154.3131.46.43310.0946.4066.3836.178

2574.5933.8888.9421372.7945.37150.5132.1154.3132.56.3310.3976.4636.3026.147

2674.0849.8687.37212.872.2844.28150.3131.4154.5130.66.36310.4656.546.3676.091

2773.6624.2485.7321171.6942.38150.1131.3154.8129.16.32910.846.4146.3926.141

2873.0618.4283.9210.671.143.89150.2130.4154.2129.96.30811.56.5176.4416.139

2972.5617.7282.47209.870.742.1149.9130.8154.7129.56.32211.8826.5376.3716.149

3072.069.74481.15210.769.9742.09150.2129.8154.2128.36.31812.16.5026.476.065

Forward Bias

ForwardBias Test for Radiation Damage Test (nA,pF)

P-side Forward Bias

vC3T1_IV_GC3T2_IV_GC3T3_IV_GE3T1_IV_GE3T2_IV_GE3T3_IV_GG5T1_IV_GG5T2_IV_GG5T3_IV_GvG5T3_IV_G

07.187.727.676.830.26511.988.020.019.4218.0718.448.425.4110.24.2010.66

-1-794.98-810.92-596.93-646.02-62.76-567-739.64-638.79-260.72-765.9-597.11-569.87-836.49-736.25-830.27-794.720.1-51

-2-1717.74-1736.14-1414.1-1448.9-259.83-1579-1581.08-1395.28-948.07-1632.12-1243.4-1253.67-1788.18-1550.87-1762.08-1707.860.2-124.93

-3-2623.5-2646.7-2482.9-2269.7-1661.47-2595-2405.2-2138.7-1554.14-2487.7-1891.11-1932.91-2724.4-2316.3-2719.1-2612.30.3-203.63

-4-3565.4-3587.8-3382.1-3132.1-2313.8-3519-3269.9-2932.5-2446.9-3369.1-2543.2-2503.9-3690.4-3130.5-3673.9-3516.90.4-285.7

-5-4478.8-4507.5-4273.6-3969.8-3174.3-4496-4078.9-3721.6-3243-4228.9-3194.4-3189-4630.6-3939.8-4594.9-4424.70.5-369.59

-6-5417.2-5453.1-5181.5-4846.5-3911.2-5486-4944.9-4522.9-4227.5-5119.6-4022-3920.5-5594.9-4789.3-5533.2-5352.20.6-455.52

-7-6339.4-6372.4-6029.2-5707.9-4640.6-6380-5785.7-5307.6-4980.6-5997.2-4654.1-4509.4-6534.9-5629.6-6514.2-6273.20.7-570.27

-8-7292.8-7327.3-7013.4-6605.7-5956-7418-6628.4-6155.8-5643.2-6903.5-5229.5-5316.7-7510-6495.3-7468.2-7214.20.8-652.7

-9-8211.9-8263.6-7794.8-7474.8-6676.4-8307-7497.4-6979.3-6578.1-7782.1-6149.8-6406-8450.9-7341.6-8434.4-8130.10.9-743.9

-10-9151.2-9236.2-8885.4-8355.301-7541.4-9326-8358.4-7775.8-7395.4-8711-6714.1-7121.9-9421.5-8223.1-9401.2-9068.91-830.71

-11-10114.9-10193.5-9754-9247-8355.8-10288-9256.399-8527.7-8564.5-9616.301-7754.4-7858.7-10393.6-9092.101-10371.1-9990.51.1-919.48

-12-11044.3-11112.4-10738.2-10120.4-9513.1-11262-10140.3-9348.2-9595.1-10501-8328.699-8749.7-11335.3-9949.3-11308-10875.71.2-1004.73

-13-12003.4-12074.4-11664.4-11018.1-10276.4-12185-11015-10182.7-10499.4-11399.9-9095.3-9680.399-12309.1-10860.1-12275.8-11744.11.3-1078.4

-14-12932.4-12999.9-12524.8-11879.5-11358.9-13171-11914.8-11022.7-11307.2-12290.6-10023.9-10631.3-13249.4-11719-13200.5-12634.71.4-1190.52

-15-13888.2-13957.4-13420.2-12785.8-12568.2-14119-12715.7-11883.9-12994.2-13202.4-10643.6-11308.7-14219.8-12615.1-14164.5-13567.81.5-1286.62

-16-14812.4-14886.2-14306.4-13657.8-13431.1-15097-13529.7-12693.3-13989.3-14086-11549.4-12212.8-15162.5-13479.8-15117.8-14474.71.6-1380.49

-17-15763.6-15850.4-15142.8-14561.4-14580.2-16069-14480.4-13586.4-14723.4-15003.8-12256.2-13152.9-16139.6-14374.5-16043.7-15427.81.7-1468.67

-18-16692.2-16793.9-16065.9-15430.6-15490-16952-15291.1-14412.7-15626.4-15903.2-13080.4-14055.1-17084.9-15261.5-17010.8-16248.71.8-1561.24

-19-17645.4-17755.1-16997.7-16346.9-16424.9-17765-16134.9-15336-16648.4-16810.1-14015.7-14863.7-18055.7-16142.4-17993-17136.21.9-1651.11

-20-18605.3-18724.3-17288.9-17261.9-17329.9-18963-16867.3-16171.7-17546.1-17727.7-14887.3-15860.6-19031.8-17046.8-18941-17979.52-1772.79

-21-19523.9-19658.7-18899-18120-18252.2-19941-17691.8-17008.1-18436-18619.6-15642.8-16847.9-19973.1-17920-19880-18910.52.1-1848.53

-22-20477.4-20609.3-19863.4-19053.8-19167.8-20765-18385.6-18034.7-19376.1-19549.6-16435.5-17730.9-20949.1-18867.8-20845.8-19820.42.2-1951.56

-23-21398-21524-20533.4-19929.3-19940.6-21945-19420.3-19032.7-20315.1-20444.1-17171.1-18652.7-21882-19743.7-21774-20757.12.3-2039.54

-24-22367-22485-21719-20826.2-20863.2-22906-20417-19835.9-21299-21353-18015.4-19513.2-22855-20668.1-22732-216782.4-2109.54

-25-23292-23413-22553-21706-21807-23848-21309-20666-22174-22263-18840.4-20538.2-23798-21592-23684-225692.5-2169.54

-26-24253-24378-23475-22625-22677-24822-22065-21542-23101-23190-19654.4-21460-24782-22517-24648-235022.6-2239.54

-27-25182-25280-24363-24076-23726-25761-23123-22396-24078-24068-20552-22310-25719-23725-25588-244112.7-2430.5

-28-26121-26262-25295-25093-24671-26732-23973-23263-25063-24996-21375-23432-26692-24578-26528-252902.8-2512.6

-29-27061-27183-26284-26023-25373-27675-25189-24150-25868-25889-22267-24295-27638-25550-27450-262082.9-2578.8

-30-28008-28152-27176-26942-26412-28648-26089-25196-26837-26811-23101-25271-28599-26467-28410-271263-2701.4

N-side Forward Bias

vC3T1_IV_GC3T2_IV_GC3T3_IV_GE3T1_IV_GE3T2_IV_GE3T3_IV_GG5T1_IV_GG5T2_IV_GG5T3_IV_G

024.219.810.00422.06320.7919.5229.4338.0226.48528.66450.75927.869.86738.08961.716.18

-0.1-64.691-76.46-0.021-78.524-59.59-71.801-80.706-638.79-76.846-93.8691115.57-16.76.555-21.51

-0.2-142.431-155.72-0.052-158.017-133.716-148.792-165.202-1395.28-159.702-186.163-52.527-28.936-18.22-35.93-27.66-33.98

-0.3-222.9-236.46-0.082-239.89-212.54-229.14-251.27-2138.7-243.55-276.96-84.382-37.545-42.23-48.44-50.269-45.506

-0.4-305.59-319.65-0.102-323.88-294.36-311.14-338.27-2932.5-329.66-367.93-111.64-47.591-58.88-61.26-67.094-58.479

-0.5-390.32-404.06-0.102-409.18-377.82-395.24-425.45-3721.6-416.09-458.39-137.768-59.421-73.6-76.05-83.923-74.282

-0.6-475.99-489.47-0.103-494.78-463.21-480.88-514.05-4522.9-503.6-549.63-165.238-73.128-90.24-92.72-102.099-91.991

-0.7-591.86-605.16-0.234-609.47-578.33-596.06-631.61-5307.6-619.5-670.6-188.56-95.259-115.44-118.32-129.862-119.231

-0.8-677.92-692.14-0.582-696.3-664.88-683.7-719.6-6155.8-707.62-761.94-236.04-114.41-136.88-139.95-153.34-142.314

-0.9-765.64-780.4-0.626-785.04-753.2-770.91-808.92-6979.3-796.44-853.53-269.89-136.03-161.57-163.78-180.42-168.468

-1-853.77-867.95-876.86-872.74-841.43-858.42-898.01-7775.8-885.82-944.64-305.7-160.26-188.56-190.61-208.64-196.444

-1.1-943.08-956.68-965.41-961.04-929.32-947.68-987.92-8527.7-974.98-1036.43-343.79-187.291-217.6-219.93-239.79-227.37

-1.2-1030.9-1044.71-1053.98-1050.06-1018.32-1035.97-1077.7-9348.2-1063.55-1126.32-383.47-216.29-248.89-251.4-274.35-260.38

-1.3-1150.15-1162.87-1171.95-1168.14-1136.17-1153.86-1197.09-10182.7-1182.88-1248.5-438.39-258.96-294.76-296.67-323.04-307.73

-1.4-1238.47-1252.29-1261.09-1257.43-1226.31-1242.91-1288.42-11022.7-1272.74-1340.12-483.03-293.69-332.16-333.58-361.3-347.16

-1.5-1328.44-1341.11-1350.43-1345.43-1315.86-1331.63-1378-11883.9-1361.74-1430.72-527.68-330.97-370.73-371.51-402.2-386.77

-1.6-1417.94-1430.26-1440.05-1435.24-1404.82-1421.06-1468.49-12693.3-1451.89-1522.32-575.52-370.29-412.11-412.05-445.15-117.112

-1.7-1506.64-1519.21-1529.04-1525.11-1493.93-1510.32-1558.63-13586.4-1541.34-1612.92-624.48-411.58-454.13-454.28-490.41-321

-1.8-1596.07-1608.55-1618.58-1615.06-1584.2-1600.41-1648.9-14412.7-1631.94-1704.37-673.75-454.75-499.16-498.24-537.19-277.86

-1.9-950.34-1694.45-1705.95-1702.12-1671.45-1687.61-1735.64-15336-1718.98-1792.76-722.36-498.38-543.36-543.84-585.18-232.65

-2-1169.51-1814.34-1827.38-1820.97-1791.91-1807.28-1857.21-16171.7-1839.42-1914.78-793.6-561.61-607.94-607.6-652.54-278.37

-2.1-1879.39-1904.65-1916.77-1911.06-1882.63-1897.51-1948.52-17008.1-1930.04-2006.51-847.78-610.52-658.01-657.14-704.88-373.75

-2.2-787.7599-1995.31-2005.92-2000.37-1972.65-1987.5-2039.32-18034.7-2019.45-2098.2-903.04-661.53-710.06-710.11-758.54-333.27

-2.3-2073.9-2085.01-2097.15-2090.38-2063.35-2077.66-2132-19032.7-2111.5-2190.4-959.13-712.96-762.8-762.19-815.49-382.31

-2.4-2165.5-2177.4-2188.9-2182.4-2155.3-2169.6-2222-19835.9-2202.4-2281.7-1017.26-766.2-818.41-814.33-869.83-855.91

-2.5-2257.1-2267.9-2279-2273.4-2245.9-2260.5-2313.2-20666-2293.5-2373.6-1075.66-820.81-872.72-868.8-927.31-913.57

-2.6-2378.3-2388.2-2398.6-2392.6-2366.9-2380.5-2434-21542-2414.1-2495-1154.43-894.8701-948.77-943.53-1008.23-991.77

-2.7-2468.5-2479.3-2488.9-2483.1-2456.6-2470.3-2526-22396-2505-2586-1215.38-952.55-1008.02-1000.74-1067.43-1054.41

-2.8-2558.5-2568.2-2579.6-2574.3-2547.7-2561.3-2617.3-23263-2595.5-2676.9-1276.41-1010.82-1064.66-1058.89-1128.2-1114.52

-2.9-2649.5-2659.4-2670.8-2665.3-2638.4-2652.2-2707.7-24150-2686.1-2768.5-1338.76-1068.88-1125.36-1118.03-1190.96-1176.23

-3-2544-2749.1-2761.1-2756-2729.1-2742.5-2799.4-25196-2776.3-2860.3-1401.58-1128.65-1186.54-1178.92-1253.68-1238.41

Chart5

8.485.292.74

218.23730.73501.27

345.2229402093.8

433.555398.14906.8

542.447718.77545

665.26971411137.3

794.4511428.514103.2

957.2813034.116974.8

1171.31451219933.2

1471.3215885.114485.8

1844.0517199.210559.3

2295.718500.111353.9

2759.719444.312408.3

3419.620658.613651.4

4026.42180914672.2

4551.52304216649

5424.92433117467.7

63752564419113.4

7405.32700721017

8063.82851122377

9521.92991722847

9719.1993139624207

11407.53274326309

12612.13460035417

14088.93614531682

14293.13774032985

134634037335503

15377.94189737785

17119.74370939567

20105.74583142479

224434792642664

G5T2

1st_20050107

2nd_20050214

Rerverse Bias (V)


BEAM TEST_G5T2_IV_Pside_10^13

P-side


P-sideSource Test

IVC3T1_IV_Gsawed102nd_10C3T2_IV_GC3T21st_200501072nd_20050214C3T3_IV_G_10C3T31st_200501072nd_20050214E3T1_IV_GsawedE3T2_IV_GE3T21st_200501072nd_20050214E3T3_IV_GE3T31st_200501072nd_20050214G5T1_IV_GsawedmonitorG5T2_IV_GG5T21st_200501072nd_20050214G5T3_IV_Gsawed10

017.522.653.830.2030.150.833.8385.7326.261.7300.229.414211.2285.5217.1610.0065.710.124625.112.058.6698.485.292.7410.328.950.06

4200.843296.3271.26357.94270.78156.145205.62527.77192.5294.525413.74188.2861.379204.45273.45340.45796.2747.18011.321338.590.097794.4743392.72888.1144.161218.23730.73501.27211.99233.4766.52

8891.41533.91016.121629.07927.29622.511421.122776.6555.13402.21469.44740.73323.89310.74438.8543.853033.13096.8324.72578.6926302086.5109.7316805.16170.6202.63345.2229402093.8247.03863.34431.9

122172.83070.12572.53044.11698.351305.5738475391987.77721.932172.51127.69420.52389.74534.39672.015562.45653.1412.74702.1856344626.3127.176102429482269.79433.555398.14906.8292.2616961158.47

163703.14845.54124.346912628.82152.96695.38015.51382.891047.82717.61371.66492.9442.55611.32772.758079.77841.9488.79814.088369.8997475.4149.03613718.912736341.13542.447718.77545355.022515.31847.84

205493.36889.65928.96504.53723.23159.69839.10110567.21835.211434.083288.11772.68554.57497.83680.98885.9310732.110290.3565.63944.7511433.310511.7167.46717197.816030.3422.99665.26971411137.3414.793282.12524.6

247403.89025.1997996.18469.74936.54236.812384.8129082344.41885.053866.62193.2623.19608.4753.07953.1613054.212595.9649.691007.0814536.713502.4187.84720683.919101.5505.8794.4511428.514103.2473.5739662999.1

289407.511188.710014.110482.562895477.115355.715124.42904.32362.34469.12636.8696.74634.04812.761081.0515656.514820.7717.581124.4217508.116659.6206.162421622452599.78957.2813034.116974.8518.994645.83635.9

3211492.713500.512013.512560.87761.56858.618283.117270.13509.82867.45049.13054.8743.54678.96858.51060.5918097.717022.22461.11228.8520035.119954.2225.322772526709695.841171.31451219933.2562.75396.24105.9

3613638.215861.714126.114703.49349.78328.60121201194094169.63438.45590.53472.9777.79711.67896.781092.1620115.119645.62984.41299.7719901.122872240.083107929897822.241471.3215885.114485.8576.066309.44651.9

4015860.418390.616233.616927.411032.19928.524010215524887.14030.96123.43912.1813.63736.42930.721179.782272722027860.061256.332341526559254.153456433450921.351844.0517199.210559.3613.477432.25230.4

4418135.12097018334.219180.812800.311605.926727237275637.54675.96695.44352.6844.48788.78960.23991224.42521924314895.331232.542753329975267.3238019349611078.592295.718500.111353.9637.968634.56066.9

4820438.22342720635.32137314653.413414.529443259076430.25345.37281.64857.5868.73829987.271225.552832026868919.171281.042863432745279.641449389281206.22759.719444.312408.3729.498737078.6

522276325864229232366916582.415251.431919280897285.76074.47920.35420.1891.19786.911011.931230.42967429780961.75991312.993105635495290.844845433311371.293419.620658.613651.4801.1811152.88149.7

562513128489252082598318658.917082.234627303268202.3996909.286105979.4935.72920.711038.441255.183194632496989.591354.83666338183302.4947946468881560.794026.42180914672.2869.9612417.29235.5

602755731379274772833220690.619069.337441325929201.97850.39365.36585.91204.281980.81147.711321.0234465352351043.41424.273976740947314.1651504501121763.994551.52304216649955.7913720.610300.3

64299923407329869307952283721220400953480810269.48805.710208.37273.51378.224348.41381.321548.1336473377401303.011719.424263743658337.454839542712041.295424.92433117467.71259.515029.212006.2

68324433667532288332202502523377429123706011430.69905.30111146.17974.63383.96565.61831.331879.3938888412361559.912065.64537346113456.0257999575842431.463752564419113.41922.616406.712941.7

72349293900934686356372736725571453713931712745.511159.21220088339012.59112.43054.73418.941247442756146.628604821648890917.94613846098432367405.327007210173436.517708.514239

76374554151537160381332967127933481794147014168.312376.213326.59789.112261.111894.35246.45422.244056448718936.3739851505516431891.7364691646554446.98063.828511223775383.618942.815518.2

80400144422139591405273202330268507114377515663.41366114557.710836.215205.814825.47515.57657.7469794790110336.89408.855036543233207.168018684445808.49521.929917228477604.420340.916758.5

84425424686741992431813437932793533874594917217.514660.915894.911958.918469.317875.910706.710978.8502015362415661.512439.457861577914828.871233717337447.99719.199313962420710011.82167818054.7

88451014962145220457433676634841561024829418919.415920.21732113147.8216652100313218.213915.6533185409119112.214731.460831598496637.374352755139421.511407.5327432630912527.32308319297.2

9247722522364780946578392323770058773507082064717872.818860.814426.824948241932220917074.75666857407225222124563899629128945.199762047879511224.512612.1346003541715002.42446520833.7

9650340549885032549199418224032161478531422238319608.320494.215870.12806127535254221988059858609312574024506670086592610651.1791418223813151.214088.93614531682175152584822186

100529995738952885518194438342923640575556024103212762215717313.33182030846287312370363290638102890128008700956889712818.6824788608315131.514293.1377403298520277.82728523747

104556706033655467544004695545582667465799825663230192389918807.23563134150256992595066565671963242630340731947177915004.3853148938417147.2134634037335503232512877125215

108583856268358428571264957248258693576050327299246542568420299.53844637494296172979169880704853597234910762257505317334910149273919120.515377.94189737785258603023326679

1126110165386609255983752193509587217963043287572571227561220064112840985327873269273263740313881537790793977810019665.492225950872140317119.74370939567281423275728223

116639316854963564623985496453717747596560430353276502955123514403724444636169361407678077438423224154282660812002214898249983022354220105.74583142479306843455529653

12066654712836642265347577145645577475682023192429504315912510641691478973974639455802368082146390456748560784283244769853710201625687224434792642664331913631131712


0321.1257.9237.2232.4307.6240.8222.4240.9310240.1149.9240.9229.4229.5205.8184.2199.5225.3192.4175.2184.9187.8273.6146.2157.94188.1143.59173.777.555.553180.2

4118.73110.16108.9102.02119.9108.8490.17107.53136.19120.4273.47117.31162.4160.6152.1142.7159.5174.4152.2150.5156.2192.4266.6144.9158.3162.6123.07153.991.44154.77155.4

8112.49105.55102.3796.46112.59102.7985.74104.03129.07114.6666.41111.87104.99103.2997.31134.35144.8115.72107.67148.39147.3187.9259.9144.1154.3102.37118.25148.389.56100.99102.13

12109.92103.8699.6694.07108.4199.6284.38102.31125.25111.2161.52108.5486.7488.982.61123.84137.1785.9480.01142.42146.277.68253.7142.977.1188.45111.75138.4959.8388.490.11

16107.87102.5897.8592.57105.6197.1583.24101.5122.36108.0172.94105.8477.5980.3174.81115.33128.0476.6671.76136.96140.378.34247.5141.277.5483.0591.68103.160.9984.4386.61

20106.56101.7596.491.09102.9195.3183.1100.44119.72105.0671.86103.3271.0274.4969.46106.8118.7670.7566.47132.71134.3777.69241.7142.576.4778.0868.36102.5869.48183.23

24105.23100.9295.1189.78101.4994.0289.0599.96117.2103.4768.57101.3366.8770.4566.0199.32110.766.9863.06128.05128.4377.15236.4143.175.6465.0560.689.1374.8877.9380.22

28103.97100.294.1789.3399.7892.788.6598.97114.98101.6768.1698.7563.867.7663.7192.32102.4164.160.84123.31121.4276.35231.814274.6360.967.9890.3574.0670.3171.9

32103.0199.7593.3488.0497.6591.2489.2898.28113.43100.2866.6397.3561.5565.8462.018997.0561.7858.64118.67115.6375.35228.4140.973.9257.5163.2484.7873.2359.1865.4

36102.2199.7692.5487.7296.3389.6789.4897.65112.1299.2153.4796.0459.764.4660.4786.3194.3160.0656.84112.69109.5674.82226.6148.8972.7355.1661.5182.1572.6361.5962.06

40101.69991.9286.6395.0788.5787.5296.6111.0198.1454.1194.8358.263.3359.4584.992.2458.5155.65107.63105.0573.71225.2148.3871.9853.4859.3180.1471.5658.8560.19

44100.9198.7691.2486.0794.0287.9387.3195.94109.9797.0663.5693.2756.9662.3858.3483.1189.4257.2954.45103.05100.1972.66224.1148.1370.9852.1159.0267.9271.1657.3858.77

48100.089890.4285.0393.2687.0687.1695.16109.2396.0562.8192.7855.9961.657.5181.8687.3856.2953.2998.8797.0571.67223.2148.4270.0651.1456.3463.1370.1556.2257.89

5299.8497.6789.8284.4792.6386.3187.0294.29108.4695.2361.792.3854.9860.8156.7280.7585.6655.353.596.5695.6570.59222.1148.6368.9350.453.5363.5969.0553.3757.13

5699.0997.6688.983.839285.6786.7593.53108.0594.8761.6991.453.9259.956.0879.4783.9954.5951.0392.9893.4469.41220.9148.2467.8649.8546.9361.6168.254.4956.47

6098.4597.5288.3783.4491.2985.3787.3592.94107.2194.2860.6590.8252.9759.3255.4877.2982.4953.852.8790.7992.1567.85220.1148.0566.0349.3340.962.3166.6153.1155.94

6497.497.6387.9183.1190.9384.987.0992.79106.6793.6461.8389.9552.4158.7355.1775.8480.9253.6854.5689.0290.1266.68219.3148.2464.2648.7938.8858.3264.9253.4455.49

6897.2997.4587.4482.5390.5184.2786.7791.68106.2593.1260.4289.7952.2858.3954.8874.1880.6253.554.8987.6288.2265.41218.6148.5462.8548.2837.8857.1163.4652.955.13

7297.47100.8487.2182.0790.1984.2887.290.62105.8792.559.2489.0752.2558.2554.9374.5479.1153.4457.3786.5286.6663.93217.5148.8261.7748.0136.2656.0561.7951.3454.73

7695.7993.0887.0382.589.8483.9486.389.6105.3992.158.6588.5352.3958.4755.3472.4478.8753.3958.4284.986.5161.97216.8148.1260.4347.636.1155.0660.1244.1754.41

8096.0393.2686.8382.0289.5583.5485.3189.31105.291.7959.3188.353.2558.7755.6271.9878.5753.4459.8684.5986.860.62216.1148.3659.0147.2834.1754.9159.151.1554.14

8495.3993.1886.4581.7889.2183.2885.4588.73104.8691.0759.1587.5953.4859.1455.870.9678.6553.2862.0583.2985.2758.96215.2148.3757.947.0434.1654.1357.6347.3553.8

8894.8691.7686.3581.989.0483.184.1188.87104.6790.5759.4487.0553.6659.335670.1478.3153.4363.6982.0884.6357.9214.2148.1456.746.7332.2654.0556.9550.4353.72

9294.691.9286.281.0888.9382.9883.6888.24104.2390.2160.1186.5953.8959.2256.3670.8378.7353.2865.4381.1484.7457.49213.4148.5455.9446.5133.7853.3656.2415.04753.56

9694.3691.4185.9881.4388.7182.7783.5687.64103.9289.6660.8686.5753.9959.3756.5770.3279.3553.3367.7781.8484.4356.72213.6148.1555.2446.3332.8553.7955.6415.31753.3

10094.4588.9885.948288.4482.7783.0887.13103.8788.1359.4884.0754.1859.4756.7969.6679.8754.2569.7581.4983.6256.49212.9148.0754.7846.2633.575354.9613.6953.19

10493.6788.2685.9980.888.3982.5982.1287.27103.385.6359.7681.1154.2959.5157.0770.6180.3154.5672.2381.3783.6755.97212.2148.3754.0846.1834.1153.2154.8915.9753.14

10893.988.1785.7780.6988.4182.5782.9886.75102.8582.9456.4977.2954.4359.5357.5470.8681.3254.6374.582.1683.2155.69211.5148.0253.7946.0233.6854.2854.818.6752.94

11293.2988.2585.7681.6688.2582.4980.8786.57102.1480.2352.973.8254.5559.6357.4470.1881.954.6676.858183.955.83211.1148.553.4946.0233.3654.554.2224.2852.95

11692.9887.9885.7580.9487.9982.481.7686.6799.3877.6951.6870.1654.6759.7156.5570.3883.0954.7879.4181.1183.9355.91210.2147.9553.0945.8133.8254.3354.522352.83

12092.8987.8885.8681.0488.0182.2881.4186.5794.8375.4748.3566.1854.8259.8357.0471.5784.1354.7482.0481.1884.2556.16209.9148.3552.9745.7334.8155.4454.3127.6452.77

P-side

C3T3

1st_20050107

2nd_20050214

Rerverse Bias (V)



N-side

E3T2

1st_20050107

2nd_20050214

Rerverse Bias (V)


BEAM TEST_E3T2_IV_Pside_10^14

Forward Bias

C3T2

1st_20050107

2nd_20050214

Rerverse Bias (V)



G5T2

1st_20050107

2nd_20050214

Rerverse Bias (V)


BEAM TEST_G5T2_IV_Pside_10^13


IV


021.57119.40.3128.29121.73620.8720.05220.6314.4129.89528.00826.9726.59427.3929.3256.57526.77466.65638.96313.926332.615

175.524457.11217.92695.47699.82655.8780.076536.12418.53430.15935.31932.07324.28938.63936.1171.574735.85137.915720.3667.9143.6155.276

279.3671146.66679.471346.831530.841473.7584.4731193.48733.87516.41901.821896.64425.621909.51905.57179.8371547.61156.8241512.881441.89150.7173.755

383.2721591.62850.471962.312380.7231489.011648.39823.67569.892839.32829.2513.292850.62843.4186.8052355.5180.1242307.32215.1156.4189.286

489.6991770.49948.282590.43280.5320593.8521851.7906.9622.133807.13792.1609.673821.53812.6193.963201.1208.053140.43017.5161.983204.17

5102.061958.211041.323169.74162407798.3152014.34994.06690.9747424722.8726.484761.24739200.454026235.253951.43783.3167.812217.55

6114.482140.21142.793719.25080.84984.8103.0262202.51079.89860.995708.85685.4930.875732.75027207.524882.5257.654790.14547.1173.174232.85

7125.692347.61229.94217.25973.35865.7107.9692385.31152.781267.76641.26613.21332.146670.66151.3214.925711.3278.515601.25232.4179.851250.86

8139.3112538.21316.1647056901.16782113.142568.11222.71946.617607.47574.51981.627641.67413223.636571.9300.136436.45876.1186.028269.78

9154.5542705.41423.75149.27806.17673118.0782729.51299.262736.98545.8998504.52750.58585.58198.7232.687408.4322.097242.66462.3192.604287.74

10172.2382897.61499.435569.18738.3998590.2123.4322887.21401.953604.59509.194593609.59555.1018788.3243.258268.7345.338065.17034.8200.048305.68

11191.7553183.21666.525963.79671.29505.2129.1433073.51504.364504.510469.210409.94502.910520.310222.6254.259126.5369.098872.6017577.9206.98323.47

12212.443435.51888.75633410576.610393.2135.7243285.51599.755398.111401.911331.85393.311459.311430.5264.779959.4392.289641.28075.8213.99340.53

13235.993699.22002.956702.41151211306144.1283500.41694.786334.21236212276.76324.112426.812395.7275.5910817.7415.8410412.58545.3221.01357.69

14261.333868.22110.27053.312419.212189.4153.8163702.71783.437251.813292.613187.97237.913365.213329.5286.2411649.5438.8111138.68961.6228.02373.7

15290.2441402213.47408.113353.913096.4164.9873906.41872.38205.414247.914118.68187.614331.214295296.8312504.4463.4911866.79379.8234.88390

16321.854328.12309.57745.314262.313972.2176.3224097.71955.619137.10115177.115012.69115.715269.115230.5307.0113329.7486.6712557.79814.4241.48404.8

17359.844525.22404.58090.61520114871.2188.2634289.72038.1710106.116134.115922.310081.216238.316196.9316.8413907.3510.3113253.210294.3247.8420.02

18401.254666.72493.48425.116109.415732.9200.0644470.32116.211047.717057.716780.911018.417175.717130.2326.9214973536.3813907.510778.7254.36434.32

19450.684843.82583.28781.517043.216609.8212.454650.52191.712020.218005.817635.211985.718139.718090336.4315742.8557.8814564.711277.6260.56448.67

20508.645062.22671.69151.417978.317477.4225.284824.62264.312996.918955.618458.212957.419107.719048.6345.716413.4581.4615203.511767.9266.69462.78

21571.6652182759.29496.118883.218301.2237.324989.22331.613942.519869.319224.813898.720041.719985.2354.7617293.3605.0915799.112233.9272.26475.7

22647.785364.22850.59849.60119819.419135.4249.895150.12396.6149232081019991.714872.82100020948.7364.0818096.5625.8416389.912706278.14489

23732.755513.12942.410191.420721.819923.4261.845301.52456.615870.42170620713.215814.32193221869372.8219195.4650.1116943.113155283.76501.73

24834.345670.33042.610553.92164720721.3274.355451.52514.416851.2226362142916791.92289722832381.720035.1673.4417509.313622.9290.1514.3

25951.235822.13147.710899.72255321476286.9755912566.917804.8235342211617740.92383723766392.0220847690.6818072.614079.2295.95526.26

261091.235956.53262.611263.42348322251300.545729.52617.318786.1244472280218717.22480024726400.0221670715.3618668.814545.5300.84538.07

271250.556110.83386.511611.72438022993314.985856.12663.7197332532223447196612573225653408.4522469734.4719265.614988.2305.97549.37

281444.416229.13527.711969.12530623762331.795979.92707.320715.7262112410020639.52669626612416.2323290758.1919894.615440.7311.11560.78

291672.26418.23689.112336.12622924525351.546098.22751.7216882708924741216082765827570424.2924106781.8620530.615880.2316.23571.78

301930.856570.43867.312686.42712025260375.016204.62795.8226392792625349225542859028497431.9824891804.022114016302.6320.92582.77

CV


0323.6276.2216.2210.1244.1194.1137.3119.6140109.86.962.7296.8466.9566.574

1339.3294.5218.1210.2253.5196.8139.8119.3143.41121.96.8592.8536.9296.8856.605

2333.6306.6221212.6247.1196145.66116.7150.17106.396.9563.3786.8896.8576.681

3326313.4224.7210.4237.9202.3154.79116.2157.5105.686.9913.2796.8216.8636.531

4308.5322.8225.6212.8198.2204.3158.7115.3162.3105.66.9413.5056.8246.9066.552

5240.2318224.5212.9115.18199.5158.7114.7161.4104.916.983.4666.8436.8856.649

6115.78282.6224.5212.380.55197157.4113.9159.6103.787.0133.5116.8936.8096.628

783.5270.5226.4211.780.95190.4156.2111.5158102.646.9253.9446.8376.8026.69

884.38278.9230.4213.381.13175.3154.8110.44157.2101.696.9544.4346.9416.7816.634

984.33257.4234.9214.980.82146.21154.3110.53156.4102.026.9224.886.8036.546.378

1084.1197.1237.7214.380.4381.16153.7108.6155.9100.536.7114.9356.6466.4176.214

1183.95125.06237.8213.580.1449.01152.9108.43155.5114.66.4615.556.4656.4766.124

1283.3386.23236.9215.379.8545.97152.7106.88155.499.866.4075.9176.3616.3825.989

1383.0165.99234.5214.779.3445.89152.4105.6155115.26.3226.1576.4366.3366.061

1482.5856.97229.5217.179.0644.86152.1104.98154.598.316.4126.466.46.3436.142

1581.9456.8219.2215.678.6644.6152.2103.25154.4108.66.3617.036.3976.3946.166

1681.5566.04201215.578.1446.08151.7113.2154.5123.76.3077.646.5296.3836.035

1780.9562.51171.6215.677.8145.06151.6102.13154.595.986.378.066.4826.3636.1

1880.2143.8137.0921777.2444.95151.7110.6154.5122.16.2988.416.4476.4446.004

1979.1244.11108.12216.776.7745.09151112154.693.726.3349.126.5246.2686.161

2077.6755.0993.6214.475.944.57151.1111154.493.926.3998.7586.4966.4086.233

2176.9744.7491.12214.375.0543.99150.898.34153.91196.3989.976.456.2226.066

2276.2534.2390.95214.774.3743.45150.5135.3154.3118.36.4286.076.4836.3586.143

2375.7945.690.67214.173.8443.25150.7133.8154.3107.16.3055.016.4926.4156.21

2475.0931.8190.01214.573.344.26150.3132.6154.3131.46.43310.0946.4066.3836.178

2574.5933.8888.9421372.7945.37150.5132.1154.3132.56.3310.3976.4636.3026.147

2674.0849.8687.37212.872.2844.28150.3131.4154.5130.66.36310.4656.546.3676.091

2773.6624.2485.7321171.6942.38150.1131.3154.8129.16.32910.846.4146.3926.141

2873.0618.4283.9210.671.143.89150.2130.4154.2129.96.30811.56.5176.4416.139

2972.5617.7282.47209.870.742.1149.9130.8154.7129.56.32211.8826.5376.3716.149

3072.069.74481.15210.769.9742.09150.2129.8154.2128.36.31812.16.5026.476.065


P-side Forward Bias


07.187.727.676.830.26511.988.020.019.4218.0718.448.425.4110.24.2010.66

-1-794.98-810.92-596.93-646.02-62.76-567-739.64-638.79-260.72-765.9-597.11-569.87-836.49-736.25-830.27-794.720.1-51

-2-1717.74-1736.14-1414.1-1448.9-259.83-1579-1581.08-1395.28-948.07-1632.12-1243.4-1253.67-1788.18-1550.87-1762.08-1707.860.2-124.93

-3-2623.5-2646.7-2482.9-2269.7-1661.47-2595-2405.2-2138.7-1554.14-2487.7-1891.11-1932.91-2724.4-2316.3-2719.1-2612.30.3-203.63

-4-3565.4-3587.8-3382.1-3132.1-2313.8-3519-3269.9-2932.5-2446.9-3369.1-2543.2-2503.9-3690.4-3130.5-3673.9-3516.90.4-285.7

-5-4478.8-4507.5-4273.6-3969.8-3174.3-4496-4078.9-3721.6-3243-4228.9-3194.4-3189-4630.6-3939.8-4594.9-4424.70.5-369.59

-6-5417.2-5453.1-5181.5-4846.5-3911.2-5486-4944.9-4522.9-4227.5-5119.6-4022-3920.5-5594.9-4789.3-5533.2-5352.20.6-455.52

-7-6339.4-6372.4-6029.2-5707.9-4640.6-6380-5785.7-5307.6-4980.6-5997.2-4654.1-4509.4-6534.9-5629.6-6514.2-6273.20.7-570.27

-8-7292.8-7327.3-7013.4-6605.7-5956-7418-6628.4-6155.8-5643.2-6903.5-5229.5-5316.7-7510-6495.3-7468.2-7214.20.8-652.7

-9-8211.9-8263.6-7794.8-7474.8-6676.4-8307-7497.4-6979.3-6578.1-7782.1-6149.8-6406-8450.9-7341.6-8434.4-8130.10.9-743.9

-10-9151.2-9236.2-8885.4-8355.301-7541.4-9326-8358.4-7775.8-7395.4-8711-6714.1-7121.9-9421.5-8223.1-9401.2-9068.91-830.71

-11-10114.9-10193.5-9754-9247-8355.8-10288-9256.399-8527.7-8564.5-9616.301-7754.4-7858.7-10393.6-9092.101-10371.1-9990.51.1-919.48

-12-11044.3-11112.4-10738.2-10120.4-9513.1-11262-10140.3-9348.2-9595.1-10501-8328.699-8749.7-11335.3-9949.3-11308-10875.71.2-1004.73

-13-12003.4-12074.4-11664.4-11018.1-10276.4-12185-11015-10182.7-10499.4-11399.9-9095.3-9680.399-12309.1-10860.1-12275.8-11744.11.3-1078.4

-14-12932.4-12999.9-12524.8-11879.5-11358.9-13171-11914.8-11022.7-11307.2-12290.6-10023.9-10631.3-13249.4-11719-13200.5-12634.71.4-1190.52

-15-13888.2-13957.4-13420.2-12785.8-12568.2-14119-12715.7-11883.9-12994.2-13202.4-10643.6-11308.7-14219.8-12615.1-14164.5-13567.81.5-1286.62

-16-14812.4-14886.2-14306.4-13657.8-13431.1-15097-13529.7-12693.3-13989.3-14086-11549.4-12212.8-15162.5-13479.8-15117.8-14474.71.6-1380.49

-17-15763.6-15850.4-15142.8-14561.4-14580.2-16069-14480.4-13586.4-14723.4-15003.8-12256.2-13152.9-16139.6-14374.5-16043.7-15427.81.7-1468.67

-18-16692.2-16793.9-16065.9-15430.6-15490-16952-15291.1-14412.7-15626.4-15903.2-13080.4-14055.1-17084.9-15261.5-17010.8-16248.71.8-1561.24

-19-17645.4-17755.1-16997.7-16346.9-16424.9-17765-16134.9-15336-16648.4-16810.1-14015.7-14863.7-18055.7-16142.4-17993-17136.21.9-1651.11

-20-18605.3-18724.3-17288.9-17261.9-17329.9-18963-16867.3-16171.7-17546.1-17727.7-14887.3-15860.6-19031.8-17046.8-18941-17979.52-1772.79

-21-19523.9-19658.7-18899-18120-18252.2-19941-17691.8-17008.1-18436-18619.6-15642.8-16847.9-19973.1-17920-19880-18910.52.1-1848.53

-22-20477.4-20609.3-19863.4-19053.8-19167.8-20765-18385.6-18034.7-19376.1-19549.6-16435.5-17730.9-20949.1-18867.8-20845.8-19820.42.2-1951.56

-23-21398-21524-20533.4-19929.3-19940.6-21945-19420.3-19032.7-20315.1-20444.1-17171.1-18652.7-21882-19743.7-21774-20757.12.3-2039.54

-24-22367-22485-21719-20826.2-20863.2-22906-20417-19835.9-21299-21353-18015.4-19513.2-22855-20668.1-22732-216782.4-2109.54

-25-23292-23413-22553-21706-21807-23848-21309-20666-22174-22263-18840.4-20538.2-23798-21592-23684-225692.5-2169.54

-26-24253-24378-23475-22625-22677-24822-22065-21542-23101-23190-19654.4-21460-24782-22517-24648-235022.6-2239.54

-27-25182-25280-24363-24076-23726-25761-23123-22396-24078-24068-20552-22310-25719-23725-25588-244112.7-2430.5

-28-26121-26262-25295-25093-24671-26732-23973-23263-25063-24996-21375-23432-26692-24578-26528-252902.8-2512.6

-29-27061-27183-26284-26023-25373-27675-25189-24150-25868-25889-22267-24295-27638-25550-27450-262082.9-2578.8

-30-28008-28152-27176-26942-26412-28648-26089-25196-26837-26811-23101-25271-28599-26467-28410-271263-2701.4

N-side Forward Bias

vC3T1_IV_GC3T2_IV_GC3T3_IV_GE3T1_IV_GE3T2_IV_GE3T3_IV_GG5T1_IV_GG5T2_IV_GG5T3_IV_G

024.219.810.00422.06320.7919.5229.4338.0226.48528.66450.75927.869.86738.08961.716.18

-0.1-64.691-76.46-0.021-78.524-59.59-71.801-80.706-638.79-76.846-93.8691115.57-16.76.555-21.51

-0.2-142.431-155.72-0.052-158.017-133.716-148.792-165.202-1395.28-159.702-186.163-52.527-28.936-18.22-35.93-27.66-33.98

-0.3-222.9-236.46-0.082-239.89-212.54-229.14-251.27-2138.7-243.55-276.96-84.382-37.545-42.23-48.44-50.269-45.506

-0.4-305.59-319.65-0.102-323.88-294.36-311.14-338.27-2932.5-329.66-367.93-111.64-47.591-58.88-61.26-67.094-58.479

-0.5-390.32-404.06-0.102-409.18-377.82-395.24-425.45-3721.6-416.09-458.39-137.768-59.421-73.6-76.05-83.923-74.282

-0.6-475.99-489.47-0.103-494.78-463.21-480.88-514.05-4522.9-503.6-549.63-165.238-73.128-90.24-92.72-102.099-91.991

-0.7-591.86-605.16-0.234-609.47-578.33-596.06-631.61-5307.6-619.5-670.6-188.56-95.259-115.44-118.32-129.862-119.231

-0.8-677.92-692.14-0.582-696.3-664.88-683.7-719.6-6155.8-707.62-761.94-236.04-114.41-136.88-139.95-153.34-142.314

-0.9-765.64-780.4-0.626-785.04-753.2-770.91-808.92-6979.3-796.44-853.53-269.89-136.03-161.57-163.78-180.42-168.468

-1-853.77-867.95-876.86-872.74-841.43-858.42-898.01-7775.8-885.82-944.64-305.7-160.26-188.56-190.61-208.64-196.444

-1.1-943.08-956.68-965.41-961.04-929.32-947.68-987.92-8527.7-974.98-1036.43-343.79-187.291-217.6-219.93-239.79-227.37

-1.2-1030.9-1044.71-1053.98-1050.06-1018.32-1035.97-1077.7-9348.2-1063.55-1126.32-383.47-216.29-248.89-251.4-274.35-260.38

-1.3-1150.15-1162.87-1171.95-1168.14-1136.17-1153.86-1197.09-10182.7-1182.88-1248.5-438.39-258.96-294.76-296.67-323.04-307.73

-1.4-1238.47-1252.29-1261.09-1257.43-1226.31-1242.91-1288.42-11022.7-1272.74-1340.12-483.03-293.69-332.16-333.58-361.3-347.16

-1.5-1328.44-1341.11-1350.43-1345.43-1315.86-1331.63-1378-11883.9-1361.74-1430.72-527.68-330.97-370.73-371.51-402.2-386.77

-1.6-1417.94-1430.26-1440.05-1435.24-1404.82-1421.06-1468.49-12693.3-1451.89-1522.32-575.52-370.29-412.11-412.05-445.15-117.112

-1.7-1506.64-1519.21-1529.04-1525.11-1493.93-1510.32-1558.63-13586.4-1541.34-1612.92-624.48-411.58-454.13-454.28-490.41-321

-1.8-1596.07-1608.55-1618.58-1615.06-1584.2-1600.41-1648.9-14412.7-1631.94-1704.37-673.75-454.75-499.16-498.24-537.19-277.86

-1.9-950.34-1694.45-1705.95-1702.12-1671.45-1687.61-1735.64-15336-1718.98-1792.76-722.36-498.38-543.36-543.84-585.18-232.65

-2-1169.51-1814.34-1827.38-1820.97-1791.91-1807.28-1857.21-16171.7-1839.42-1914.78-793.6-561.61-607.94-607.6-652.54-278.37

-2.1-1879.39-1904.65-1916.77-1911.06-1882.63-1897.51-1948.52-17008.1-1930.04-2006.51-847.78-610.52-658.01-657.14-704.88-373.75

-2.2-787.7599-1995.31-2005.92-2000.37-1972.65-1987.5-2039.32-18034.7-2019.45-2098.2-903.04-661.53-710.06-710.11-758.54-333.27

-2.3-2073.9-2085.01-2097.15-2090.38-2063.35-2077.66-2132-19032.7-2111.5-2190.4-959.13-712.96-762.8-762.19-815.49-382.31

-2.4-2165.5-2177.4-2188.9-2182.4-2155.3-2169.6-2222-19835.9-2202.4-2281.7-1017.26-766.2-818.41-814.33-869.83-855.91

-2.5-2257.1-2267.9-2279-2273.4-2245.9-2260.5-2313.2-20666-2293.5-2373.6-1075.66-820.81-872.72-868.8-927.31-913.57

-2.6-2378.3-2388.2-2398.6-2392.6-2366.9-2380.5-2434-21542-2414.1-2495-1154.43-894.8701-948.77-943.53-1008.23-991.77

-2.7-2468.5-2479.3-2488.9-2483.1-2456.6-2470.3-2526-22396-2505-2586-1215.38-952.55-1008.02-1000.74-1067.43-1054.41

-2.8-2558.5-2568.2-2579.6-2574.3-2547.7-2561.3-2617.3-23263-2595.5-2676.9-1276.41-1010.82-1064.66-1058.89-1128.2-1114.52

-2.9-2649.5-2659.4-2670.8-2665.3-2638.4-2652.2-2707.7-24150-2686.1-2768.5-1338.76-1068.88-1125.36-1118.03-1190.96-1176.23

-3-2544-2749.1-2761.1-2756-2729.1-2742.5-2799.4-25196-2776.3-2860.3-1401.58-1128.65-1186.54-1178.92-1253.68-1238.41

Chart4

7.1610.0065.71

338.590.0977

578.6926302086.5

702.1856344626.3

814.088369.8997475.4

944.7511433.310511.7

1007.0814536.713502.4

1124.4217508.116659.6

1228.8520035.119954.2

1299.7719901.122872

1256.332341526559

1232.542753329975

1281.042863432745

1312.993105635495

1354.83666338183

1424.273976740947

1719.424263743658

2065.64537346113

28604821648890

73985150551643

9408.85503654323

12439.45786157791

14731.46083159849

212456389962912

245066700865926

280087009568897

303407319471779

349107622575053

377907939778100

415428266081200

456748560784283

E3T3

1st_20050107

2nd_20050214

Rerverse Bias (V)



P-side


P-sideSource Test

IVC3T1_IV_Gsawed102nd_10C3T2_IV_GC3T21st_200501072nd_20050214C3T3_IV_G_10C3T31st_200501072nd_20050214E3T1_IV_GsawedE3T2_IV_GE3T21st_200501072nd_20050214E3T3_IV_GE3T31st_200501072nd_20050214G5T1_IV_GsawedmonitorG5T2_IV_Gsawed102nd_10G5T3_IV_Gsawed10

017.522.653.830.2030.150.833.8385.7326.261.7300.229.414211.2285.5217.1610.0065.710.124625.112.058.6698.485.292.7410.328.950.06

4200.843296.3271.26357.94270.78156.145205.62527.77192.5294.525413.74188.2861.379204.45273.45340.45796.2747.18011.321338.590.097794.4743392.72888.1144.161218.23730.73501.27211.99233.4766.52

8891.41533.91016.121629.07927.29622.511421.122776.6555.13402.21469.44740.73323.89310.74438.8543.853033.13096.8324.72578.6926302086.5109.7316805.16170.6202.63345.2229402093.8247.03863.34431.9

122172.83070.12572.53044.11698.351305.5738475391987.77721.932172.51127.69420.52389.74534.39672.015562.45653.1412.74702.1856344626.3127.176102429482269.79433.555398.14906.8292.2616961158.47

163703.14845.54124.346912628.82152.96695.38015.51382.891047.82717.61371.66492.9442.55611.32772.758079.77841.9488.79814.088369.8997475.4149.03613718.912736341.13542.447718.77545355.022515.31847.84

205493.36889.65928.96504.53723.23159.69839.10110567.21835.211434.083288.11772.68554.57497.83680.98885.9310732.110290.3565.63944.7511433.310511.7167.46717197.816030.3422.99665.26971411137.3414.793282.12524.6

247403.89025.1997996.18469.74936.54236.812384.8129082344.41885.053866.62193.2623.19608.4753.07953.1613054.212595.9649.691007.0814536.713502.4187.84720683.919101.5505.8794.4511428.514103.2473.5739662999.1

289407.511188.710014.110482.562895477.115355.715124.42904.32362.34469.12636.8696.74634.04812.761081.0515656.514820.7717.581124.4217508.116659.6206.162421622452599.78957.2813034.116974.8518.994645.83635.9

3211492.713500.512013.512560.87761.56858.618283.117270.13509.82867.45049.13054.8743.54678.96858.51060.5918097.717022.22461.11228.8520035.119954.2225.322772526709695.841171.31451219933.2562.75396.24105.9

3613638.215861.714126.114703.49349.78328.60121201194094169.63438.45590.53472.9777.79711.67896.781092.1620115.119645.62984.41299.7719901.122872240.083107929897822.241471.3215885.114485.8576.066309.44651.9

4015860.418390.616233.616927.411032.19928.524010215524887.14030.96123.43912.1813.63736.42930.721179.782272722027860.061256.332341526559254.153456433450921.351844.0517199.210559.3613.477432.25230.4

4418135.12097018334.219180.812800.311605.926727237275637.54675.96695.44352.6844.48788.78960.23991224.42521924314895.331232.542753329975267.3238019349611078.592295.718500.111353.9637.968634.56066.9

4820438.22342720635.32137314653.413414.529443259076430.25345.37281.64857.5868.73829987.271225.552832026868919.171281.042863432745279.641449389281206.22759.719444.312408.3729.498737078.6

522276325864229232366916582.415251.431919280897285.76074.47920.35420.1891.19786.911011.931230.42967429780961.75991312.993105635495290.844845433311371.293419.620658.613651.4801.1811152.88149.7

562513128489252082598318658.917082.234627303268202.3996909.286105979.4935.72920.711038.441255.183194632496989.591354.83666338183302.4947946468881560.794026.42180914672.2869.9612417.29235.5

602755731379274772833220690.619069.337441325929201.97850.39365.36585.91204.281980.81147.711321.0234465352351043.41424.273976740947314.1651504501121763.994551.52304216649955.7913720.610300.3

64299923407329869307952283721220400953480810269.48805.710208.37273.51378.224348.41381.321548.1336473377401303.011719.424263743658337.454839542712041.295424.92433117467.71259.515029.212006.2

68324433667532288332202502523377429123706011430.69905.30111146.17974.63383.96565.61831.331879.3938888412361559.912065.64537346113456.0257999575842431.463752564419113.41922.616406.712941.7

72349293900934686356372736725571453713931712745.511159.21220088339012.59112.43054.73418.941247442756146.628604821648890917.94613846098432367405.327007210173436.517708.514239

76374554151537160381332967127933481794147014168.312376.213326.59789.112261.111894.35246.45422.244056448718936.3739851505516431891.7364691646554446.98063.828511223775383.618942.815518.2

80400144422139591405273202330268507114377515663.41366114557.710836.215205.814825.47515.57657.7469794790110336.89408.855036543233207.168018684445808.49521.929917228477604.420340.916758.5

84425424686741992431813437932793533874594917217.514660.915894.911958.918469.317875.910706.710978.8502015362415661.512439.457861577914828.871233717337447.99719.199313962420710011.82167818054.7

88451014962145220457433676634841561024829418919.415920.21732113147.8216652100313218.213915.6533185409119112.214731.460831598496637.374352755139421.511407.5327432630912527.32308319297.2

9247722522364780946578392323770058773507082064717872.818860.814426.824948241932220917074.75666857407225222124563899629128945.199762047879511224.512612.1346003541715002.42446520833.7

9650340549885032549199418224032161478531422238319608.320494.215870.12806127535254221988059858609312574024506670086592610651.1791418223813151.214088.93614531682175152584822186

100529995738952885518194438342923640575556024103212762215717313.33182030846287312370363290638102890128008700956889712818.6824788608315131.514293.1377403298520277.82728523747

104556706033655467544004695545582667465799825663230192389918807.23563134150256992595066565671963242630340731947177915004.3853148938417147.2134634037335503232512877125215

108583856268358428571264957248258693576050327299246542568420299.53844637494296172979169880704853597234910762257505317334910149273919120.515377.94189737785258603023326679

1126110165386609255983752193509587217963043287572571227561220064112840985327873269273263740313881537790793977810019665.492225950872140317119.74370939567281423275728223

116639316854963564623985496453717747596560430353276502955123514403724444636169361407678077438423224154282660812002214898249983022354220105.74583142479306843455529653

12066654712836642265347577145645577475682023192429504315912510641691478973974639455802368082146390456748560784283244769853710201625687224434792642664331913631131712


0321.1257.9237.2232.4307.6240.8222.4240.9310240.1149.9240.9229.4229.5205.8184.2199.5225.3192.4175.2184.9187.8273.6146.2157.94188.1143.59173.777.555.553180.2

4118.73110.16108.9102.02119.9108.8490.17107.53136.19120.4273.47117.31162.4160.6152.1142.7159.5174.4152.2150.5156.2192.4266.6144.9158.3162.6123.07153.991.44154.77155.4

8112.49105.55102.3796.46112.59102.7985.74104.03129.07114.6666.41111.87104.99103.2997.31134.35144.8115.72107.67148.39147.3187.9259.9144.1154.3102.37118.25148.389.56100.99102.13

12109.92103.8699.6694.07108.4199.6284.38102.31125.25111.2161.52108.5486.7488.982.61123.84137.1785.9480.01142.42146.277.68253.7142.977.1188.45111.75138.4959.8388.490.11

16107.87102.5897.8592.57105.6197.1583.24101.5122.36108.0172.94105.8477.5980.3174.81115.33128.0476.6671.76136.96140.378.34247.5141.277.5483.0591.68103.160.9984.4386.61

20106.56101.7596.491.09102.9195.3183.1100.44119.72105.0671.86103.3271.0274.4969.46106.8118.7670.7566.47132.71134.3777.69241.7142.576.4778.0868.36102.5869.48183.23

24105.23100.9295.1189.78101.4994.0289.0599.96117.2103.4768.57101.3366.8770.4566.0199.32110.766.9863.06128.05128.4377.15236.4143.175.6465.0560.689.1374.8877.9380.22

28103.97100.294.1789.3399.7892.788.6598.97114.98101.6768.1698.7563.867.7663.7192.32102.4164.160.84123.31121.4276.35231.814274.6360.967.9890.3574.0670.3171.9

32103.0199.7593.3488.0497.6591.2489.2898.28113.43100.2866.6397.3561.5565.8462.018997.0561.7858.64118.67115.6375.35228.4140.973.9257.5163.2484.7873.2359.1865.4

36102.2199.7692.5487.7296.3389.6789.4897.65112.1299.2153.4796.0459.764.4660.4786.3194.3160.0656.84112.69109.5674.82226.6148.8972.7355.1661.5182.1572.6361.5962.06

40101.69991.9286.6395.0788.5787.5296.6111.0198.1454.1194.8358.263.3359.4584.992.2458.5155.65107.63105.0573.71225.2148.3871.9853.4859.3180.1471.5658.8560.19

44100.9198.7691.2486.0794.0287.9387.3195.94109.9797.0663.5693.2756.9662.3858.3483.1189.4257.2954.45103.05100.1972.66224.1148.1370.9852.1159.0267.9271.1657.3858.77

48100.089890.4285.0393.2687.0687.1695.16109.2396.0562.8192.7855.9961.657.5181.8687.3856.2953.2998.8797.0571.67223.2148.4270.0651.1456.3463.1370.1556.2257.89

5299.8497.6789.8284.4792.6386.3187.0294.29108.4695.2361.792.3854.9860.8156.7280.7585.6655.353.596.5695.6570.59222.1148.6368.9350.453.5363.5969.0553.3757.13

5699.0997.6688.983.839285.6786.7593.53108.0594.8761.6991.453.9259.956.0879.4783.9954.5951.0392.9893.4469.41220.9148.2467.8649.8546.9361.6168.254.4956.47

6098.4597.5288.3783.4491.2985.3787.3592.94107.2194.2860.6590.8252.9759.3255.4877.2982.4953.852.8790.7992.1567.85220.1148.0566.0349.3340.962.3166.6153.1155.94

6497.497.6387.9183.1190.9384.987.0992.79106.6793.6461.8389.9552.4158.7355.1775.8480.9253.6854.5689.0290.1266.68219.3148.2464.2648.7938.8858.3264.9253.4455.49

6897.2997.4587.4482.5390.5184.2786.7791.68106.2593.1260.4289.7952.2858.3954.8874.1880.6253.554.8987.6288.2265.41218.6148.5462.8548.2837.8857.1163.4652.955.13

7297.47100.8487.2182.0790.1984.2887.290.62105.8792.559.2489.0752.2558.2554.9374.5479.1153.4457.3786.5286.6663.93217.5148.8261.7748.0136.2656.0561.7951.3454.73

7695.7993.0887.0382.589.8483.9486.389.6105.3992.158.6588.5352.3958.4755.3472.4478.8753.3958.4284.986.5161.97216.8148.1260.4347.636.1155.0660.1244.1754.41

8096.0393.2686.8382.0289.5583.5485.3189.31105.291.7959.3188.353.2558.7755.6271.9878.5753.4459.8684.5986.860.62216.1148.3659.0147.2834.1754.9159.151.1554.14

8495.3993.1886.4581.7889.2183.2885.4588.73104.8691.0759.1587.5953.4859.1455.870.9678.6553.2862.0583.2985.2758.96215.2148.3757.947.0434.1654.1357.6347.3553.8

8894.8691.7686.3581.989.0483.184.1188.87104.6790.5759.4487.0553.6659.335670.1478.3153.4363.6982.0884.6357.9214.2148.1456.746.7332.2654.0556.9550.4353.72

9294.691.9286.281.0888.9382.9883.6888.24104.2390.2160.1186.5953.8959.2256.3670.8378.7353.2865.4381.1484.7457.49213.4148.5455.9446.5133.7853.3656.2415.04753.56

9694.3691.4185.9881.4388.7182.7783.5687.64103.9289.6660.8686.5753.9959.3756.5770.3279.3553.3367.7781.8484.4356.72213.6148.1555.2446.3332.8553.7955.6415.31753.3

10094.4588.9885.948288.4482.7783.0887.13103.8788.1359.4884.0754.1859.4756.7969.6679.8754.2569.7581.4983.6256.49212.9148.0754.7846.2633.575354.9613.6953.19

10493.6788.2685.9980.888.3982.5982.1287.27103.385.6359.7681.1154.2959.5157.0770.6180.3154.5672.2381.3783.6755.97212.2148.3754.0846.1834.1153.2154.8915.9753.14

10893.988.1785.7780.6988.4182.5782.9886.75102.8582.9456.4977.2954.4359.5357.5470.8681.3254.6374.582.1683.2155.69211.5148.0253.7946.0233.6854.2854.818.6752.94

11293.2988.2585.7681.6688.2582.4980.8786.57102.1480.2352.973.8254.5559.6357.4470.1881.954.6676.858183.955.83211.1148.553.4946.0233.3654.554.2224.2852.95

11692.9887.9885.7580.9487.9982.481.7686.6799.3877.6951.6870.1654.6759.7156.5570.3883.0954.7879.4181.1183.9355.91210.2147.9553.0945.8133.8254.3354.522352.83

12092.8987.8885.8681.0488.0182.2881.4186.5794.8375.4748.3566.1854.8259.8357.0471.5784.1354.7482.0481.1884.2556.16209.9148.3552.9745.7334.8155.4454.3127.6452.77

P-side

5.7326.261.73

94.525413.74188.28

402.21469.44740.73

721.932172.51127.69

1047.82717.61371.66

1434.083288.11772.68

1885.053866.62193.2

2362.34469.12636.8

2867.45049.13054.8

3438.45590.53472.9

4030.96123.43912.1

4675.96695.44352.6

5345.37281.64857.5

6074.47920.35420.1

6909.286105979.4

7850.39365.36585.9

8805.710208.37273.5

9905.30111146.17974.6

11159.2122008833

12376.213326.59789.1

1366114557.710836.2

14660.915894.911958.9

15920.21732113147.8

17872.818860.814426.8

19608.320494.215870.1

212762215717313.3

230192389918807.2

246542568420299.5

257122756122006

276502955123514

295043159125106

C3T3

1st_20050107

2nd_20050214

Rerverse Bias (V)



N-side

11.2285.52

340.45796.2747.1801

543.853033.13096.8

672.015562.45653.1

772.758079.77841.9

885.9310732.110290.3

953.1613054.212595.9

1081.0515656.514820.7

1060.5918097.717022.2

1092.1620115.119645.6

1179.782272722027

1224.42521924314

1225.552832026868

1230.42967429780

1255.183194632496

1321.023446535235

1548.133647337740

1879.393888841236

3418.94124744275

5422.24405644871

7657.74697947901

10978.85020153624

13915.65331854091

17074.75666857407

198805985860931

237036329063810

259506656567196

297916988070485

326927326374031

361407678077438

394558023680821

E3T2

1st_20050107

2nd_20050214

Rerverse Bias (V)



Forward Bias

0.150.833.83

156.145205.62527.77

622.511421.122776.6

1305.5738475391

2152.96695.38015.5

3159.69839.10110567.2

4236.812384.812908

5477.115355.715124.4

6858.618283.117270.1

8328.6012120119409

9928.52401021552

11605.92672723727

13414.52944325907

15251.43191928089

17082.23462730326

19069.33744132592

212204009534808

233774291237060

255714537139317

279334817941470

302685071143775

327935338745949

348415610248294

377005877350708

403216147853142

429236405755560

455826674657998

482586935760503

509587217963043

537177475965604

564557747568202

C3T2

1st_20050107

2nd_20050214

Rerverse Bias (V)



E3T3

1st_20050107

2nd_20050214

Rerverse Bias (V)




IV


021.57119.40.3128.29121.73620.8720.05220.6314.4129.89528.00826.9726.59427.3929.3256.57526.77466.65638.96313.926332.615

175.524457.11217.92695.47699.82655.8780.076536.12418.53430.15935.31932.07324.28938.63936.1171.574735.85137.915720.3667.9143.6155.276

279.3671146.66679.471346.831530.841473.7584.4731193.48733.87516.41901.821896.64425.621909.51905.57179.8371547.61156.8241512.881441.89150.7173.755

383.2721591.62850.471962.312380.7231489.011648.39823.67569.892839.32829.2513.292850.62843.4186.8052355.5180.1242307.32215.1156.4189.286

489.6991770.49948.282590.43280.5320593.8521851.7906.9622.133807.13792.1609.673821.53812.6193.963201.1208.053140.43017.5161.983204.17

5102.061958.211041.323169.74162407798.3152014.34994.06690.9747424722.8726.484761.24739200.454026235.253951.43783.3167.812217.55

6114.482140.21142.793719.25080.84984.8103.0262202.51079.89860.995708.85685.4930.875732.75027207.524882.5257.654790.14547.1173.174232.85

7125.692347.61229.94217.25973.35865.7107.9692385.31152.781267.76641.26613.21332.146670.66151.3214.925711.3278.515601.25232.4179.851250.86

8139.3112538.21316.1647056901.16782113.142568.11222.71946.617607.47574.51981.627641.67413223.636571.9300.136436.45876.1186.028269.78

9154.5542705.41423.75149.27806.17673118.0782729.51299.262736.98545.8998504.52750.58585.58198.7232.687408.4322.097242.66462.3192.604287.74

10172.2382897.61499.435569.18738.3998590.2123.4322887.21401.953604.59509.194593609.59555.1018788.3243.258268.7345.338065.17034.8200.048305.68

11191.7553183.21666.525963.79671.29505.2129.1433073.51504.364504.510469.210409.94502.910520.310222.6254.259126.5369.098872.6017577.9206.98323.47

12212.443435.51888.75633410576.610393.2135.7243285.51599.755398.111401.911331.85393.311459.311430.5264.779959.4392.289641.28075.8213.99340.53

13235.993699.22002.956702.41151211306144.1283500.41694.786334.21236212276.76324.112426.812395.7275.5910817.7415.8410412.58545.3221.01357.69

14261.333868.22110.27053.312419.212189.4153.8163702.71783.437251.813292.613187.97237.913365.213329.5286.2411649.5438.8111138.68961.6228.02373.7

15290.2441402213.47408.113353.913096.4164.9873906.41872.38205.414247.914118.68187.614331.214295296.8312504.4463.4911866.79379.8234.88390

16321.854328.12309.57745.314262.313972.2176.3224097.71955.619137.10115177.115012.69115.715269.115230.5307.0113329.7486.6712557.79814.4241.48404.8

17359.844525.22404.58090.61520114871.2188.2634289.72038.1710106.116134.115922.310081.216238.316196.9316.8413907.3510.3113253.210294.3247.8420.02

18401.254666.72493.48425.116109.415732.9200.0644470.32116.211047.717057.716780.911018.417175.717130.2326.9214973536.3813907.510778.7254.36434.32

19450.684843.82583.28781.517043.216609.8212.454650.52191.712020.218005.817635.211985.718139.718090336.4315742.8557.8814564.711277.6260.56448.67

20508.645062.22671.69151.417978.317477.4225.284824.62264.312996.918955.618458.212957.419107.719048.6345.716413.4581.4615203.511767.9266.69462.78

21571.6652182759.29496.118883.218301.2237.324989.22331.613942.519869.319224.813898.720041.719985.2354.7617293.3605.0915799.112233.9272.26475.7

22647.785364.22850.59849.60119819.419135.4249.895150.12396.6149232081019991.714872.82100020948.7364.0818096.5625.8416389.912706278.14489

23732.755513.12942.410191.420721.819923.4261.845301.52456.615870.42170620713.215814.32193221869372.8219195.4650.1116943.113155283.76501.73

24834.345670.33042.610553.92164720721.3274.355451.52514.416851.2226362142916791.92289722832381.720035.1673.4417509.313622.9290.1514.3

25951.235822.13147.710899.72255321476286.9755912566.917804.8235342211617740.92383723766392.0220847690.6818072.614079.2295.95526.26

261091.235956.53262.611263.42348322251300.545729.52617.318786.1244472280218717.22480024726400.0221670715.3618668.814545.5300.84538.07

271250.556110.83386.511611.72438022993314.985856.12663.7197332532223447196612573225653408.4522469734.4719265.614988.2305.97549.37

281444.416229.13527.711969.12530623762331.795979.92707.320715.7262112410020639.52669626612416.2323290758.1919894.615440.7311.11560.78

291672.26418.23689.112336.12622924525351.546098.22751.7216882708924741216082765827570424.2924106781.8620530.615880.2316.23571.78

301930.856570.43867.312686.42712025260375.016204.62795.8226392792625349225542859028497431.9824891804.022114016302.6320.92582.77

CV


0323.6276.2216.2210.1244.1194.1137.3119.6140109.86.962.7296.8466.9566.574

1339.3294.5218.1210.2253.5196.8139.8119.3143.41121.96.8592.8536.9296.8856.605

2333.6306.6221212.6247.1196145.66116.7150.17106.396.9563.3786.8896.8576.681

3326313.4224.7210.4237.9202.3154.79116.2157.5105.686.9913.2796.8216.8636.531

4308.5322.8225.6212.8198.2204.3158.7115.3162.3105.66.9413.5056.8246.9066.552

5240.2318224.5212.9115.18199.5158.7114.7161.4104.916.983.4666.8436.8856.649

6115.78282.6224.5212.380.55197157.4113.9159.6103.787.0133.5116.8936.8096.628

783.5270.5226.4211.780.95190.4156.2111.5158102.646.9253.9446.8376.8026.69

884.38278.9230.4213.381.13175.3154.8110.44157.2101.696.9544.4346.9416.7816.634

984.33257.4234.9214.980.82146.21154.3110.53156.4102.026.9224.886.8036.546.378

1084.1197.1237.7214.380.4381.16153.7108.6155.9100.536.7114.9356.6466.4176.214

1183.95125.06237.8213.580.1449.01152.9108.43155.5114.66.4615.556.4656.4766.124

1283.3386.23236.9215.379.8545.97152.7106.88155.499.866.4075.9176.3616.3825.989

1383.0165.99234.5214.779.3445.89152.4105.6155115.26.3226.1576.4366.3366.061

1482.5856.97229.5217.179.0644.86152.1104.98154.598.316.4126.466.46.3436.142

1581.9456.8219.2215.678.6644.6152.2103.25154.4108.66.3617.036.3976.3946.166

1681.5566.04201215.578.1446.08151.7113.2154.5123.76.3077.646.5296.3836.035

1780.9562.51171.6215.677.8145.06151.6102.13154.595.986.378.066.4826.3636.1

1880.2143.8137.0921777.2444.95151.7110.6154.5122.16.2988.416.4476.4446.004

1979.1244.11108.12216.776.7745.09151112154.693.726.3349.126.5246.2686.161

2077.6755.0993.6214.475.944.57151.1111154.493.926.3998.7586.4966.4086.233

2176.9744.7491.12214.375.0543.99150.898.34153.91196.3989.976.456.2226.066

2276.2534.2390.95214.774.3743.45150.5135.3154.3118.36.4286.076.4836.3586.143

2375.7945.690.67214.173.8443.25150.7133.8154.3107.16.3055.016.4926.4156.21

2475.0931.8190.01214.573.344.26150.3132.6154.3131.46.43310.0946.4066.3836.178

2574.5933.8888.9421372.7945.37150.5132.1154.3132.56.3310.3976.4636.3026.147

2674.0849.8687.37212.872.2844.28150.3131.4154.5130.66.36310.4656.546.3676.091

2773.6624.2485.7321171.6942.38150.1131.3154.8129.16.32910.846.4146.3926.141

2873.0618.4283.9210.671.143.89150.2130.4154.2129.96.30811.56.5176.4416.139

2972.5617.7282.47209.870.742.1149.9130.8154.7129.56.32211.8826.5376.3716.149

3072.069.74481.15210.769.9742.09150.2129.8154.2128.36.31812.16.5026.476.065


P-side Forward Bias


07.187.727.676.830.26511.988.020.019.4218.0718.448.425.4110.24.2010.66

-1-794.98-810.92-596.93-646.02-62.76-567-739.64-638.79-260.72-765.9-597.11-569.87-836.49-736.25-830.27-794.720.1-51

-2-1717.74-1736.14-1414.1-1448.9-259.83-1579-1581.08-1395.28-948.07-1632.12-1243.4-1253.67-1788.18-1550.87-1762.08-1707.860.2-124.93

-3-2623.5-2646.7-2482.9-2269.7-1661.47-2595-2405.2-2138.7-1554.14-2487.7-1891.11-1932.91-2724.4-2316.3-2719.1-2612.30.3-203.63

-4-3565.4-3587.8-3382.1-3132.1-2313.8-3519-3269.9-2932.5-2446.9-3369.1-2543.2-2503.9-3690.4-3130.5-3673.9-3516.90.4-285.7

-5-4478.8-4507.5-4273.6-3969.8-3174.3-4496-4078.9-3721.6-3243-4228.9-3194.4-3189-4630.6-3939.8-4594.9-4424.70

2005muju workshop [email protected] fabrication and measurement of silicon strip device...

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