advantech u.s. oled evaporation problems and solutions · advantech 阿德文泰克 •founded in...

ADVANTECH US INC RIDC PARK WEST 160 INDUSTRY DRIVE PITTSBURGH PA 15275 USA www.advantechus.com

Advantech U.S.

OLED Evaporation Problems

and Solutions

ADVANTECH 阿德文泰克

• Founded in 2004 by Dr. Peter Brody & T.K. Pen – 有源平板显示发明人宝帝博士和冠捷科技潘仲光04年为OLED创办。

• Expert in Mask, Alignment, Mounting & Depositions – 荫罩制作、对准科技、张网技术、蒸镀工艺技术及蒸镀设备专家。

• 25 scientists, engineers, and technicians – 美国滨州匹兹堡市，25位科学家、工程师、技术人员组成的专业研发团队。

©2015 All Rights Reserved

Strategic Partnerships 战略合作伙伴


1. Shadow Mask 荫罩制作:

10µm Apertures Products 10 微米孔径产品

3. Precision Alignment 对准技术:

In vacuum Precise alignment < 1 µm mask to mask, or layer to layer.

真空环境，对准精度< 1 微米的层对层，荫罩对荫罩的对准技术

4. Deposition 蒸镀设备:

Next generation OLED evaporation source for better uniformity & utilization 新一代OLED蒸镀源设计，成膜更均匀，更有效的利用材料

36 WORLD PATENTS 36项世界专利

2. Mask Mounting 张网技术:

X,Y Multi-point Stretch 双向多点位拉伸张网


• Over Spray Shadows 沉积越界阴影效应

• Resolution < 600ppi 无法超越600ppi

• Aperture CD ± Errors 孔洞尺寸误差太大

• Total Pitch Variations 孔洞矩阵扭曲不齐

• > Mask = > Problems 荫罩越大问题越多

• Material Utilization 材料使用率太低


OLED Deposition Problems 蒸镀问题点

Over Spray Shadows 沉积越界造成阴影


1D vs 2D Stretch 1维与2维张网比较


• Mask Too Thick 荫罩太厚

• 1D Stretch Wrinkles 单方向张网起皱

• Taper makes it worse 斜角问题更大

• Thinner is Better 薄荫罩更靠谱

• 2D Stretch is Flat 二维张网保证平整


Overspray Shadows 沉积越界造成阴影

Resolution < 600ppi 无法超越600ppi

Aperture CD±Errors 孔洞尺寸误差大


10um Apertures = 1200ppi+

我们可以制作10微米孔洞！

10um Thick Fine Metal Masks

我们生产10微米厚的荫罩！

CD±1um 孔洞尺寸误差在1微米！


Our Electroforming Technology

Total Pitch Variations 孔洞矩阵扭曲不齐



2D Sectional Stretch & Mount 二维多位独立张网

XY Directions = Flatness

两个方向张网保证平整

Total Pitch Adjustment

多位张网调整扭曲问题

Laser Weld Mounting

激光焊接固定荫罩

>Mask = >Problems 荫罩越大问题越多


• Small Module Better Control

小区块荫罩模组确保每个区块完美规格

• No limit on how large the area you need

需要多大的蒸镀尺寸都不再是问题

• Each Module is 2D Mounted for flatness

每个区块都是二维张网确保紧贴基板

• Module Frames also a good rib support

模组框架同时也是支撑大型基板的肋骨


Modular Mask Frames 模块化蒸镀框架

Passive Active

Alignment Accuracy to 5 µm to 1 µm

Multiple layer registration

Good Superior

Shadow Mask on Frame

Optical Transmitters

Optical

Receivers

PPS

Alignment repeatability after

10 full mask alignment cycles

better than 1 micrometer

Shadow masks enable clear pattern deposition

Advantech Alignment Technology 阿德文泰克对准科技

非CCD系统，直接采集光谱。

3秒内快速完成对准（1

微米精度）。

重复10次对准，蒸镀动作后，成膜扩散范围仍然保持1微米内。


Products

Mobile HD

Mobile FHD

Mobile WQHD

Mobile UHD

Micro HD

Micro FHD

Micro WQHD

Our Future 我们的未来

Resolution

300ppi

400ppi

600ppi

800ppi

1000ppi

1300ppi

2000ppi

FMM

30um

20um

15um

10um

8um

7um

4um

CD±Error

42um±4um

31um±3um

22um±2um

15um±1.5um

12um±1.2um

10um±1um

6um±0.8um


Our Services 我们的服务

© 2015 All Rights Reserved

• Produce Fine Metal Masks: CD10um±1um

为您制作10微米孔洞±1微米误差的荫罩

• 2D Stretch and Mount: Total Pitch±3um

二维张网和焊接确保矩阵对齐到3微米

• Module Masks Carriers: G2.5, G4.5, G6+

模块化荫罩框架满足G2.5，G4.5，G6+生产需要

• Wash and Re-Use Services

为您清洗确保多次无忧使用

ADVANTECH US INC RIDC PARK WEST 160 INDUSTRY DRIVE PITTSBURGH PA 15275 USA www.advantechus.com

Thank You

advantech u.s. oled evaporation problems and solutions · advantech 阿德文泰克 •founded in...

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