dc hollow discharge

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Plasma Enhanced materials processing and

rarefied GAS dynamics Unified Simulation tools

PEGASUS

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Simulation of

DC hollow cathode discharge

Module ： TTBEQ (for fluid model) PHM (hybrid model, fluid model)

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Computational model and conditions

H

W

D Unit ： mmGas : Ar

30, 10, 2 4.5,1.6,0.5

133 1) 1330

2) 6650

1) -230 -3002) -2800.05 0.04

Hybrid model

Cathode

Case-1 Case-2

・ H, D, W : ・ Pressure [Pa]・ Cathode voltage [V]・ γ+

・ PHM Fluid model

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Anode （ GND ）

5

32

2

Cathode-230 [V]-280 [V]γ+= 0.05

Ar : 133 [Pa]Anode （ GND ）

0.8

5

0.5

Cathode

-300 [V]γ+= 0.04

Ar : 1330 [Pa] 6650 [Pa]

Hybrid model Fluid model

Unit:[mm]

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Ar : 133 [Pa]Vc= - 230[V] Vc= - 280[V]

Electrondensity [/m3]

Electrondensity [/m3]

6Copyright 2002-2015 PEGASUS Software Inc., All rights reserved.

Ar : 133 [Pa]Vc= - 230[V] Vc= - 280[V]

Ar+

density [/m3]Ar+

density [/m3]

7Copyright 2002-2015 PEGASUS Software Inc., All rights reserved.

Ar : 133 [Pa]Vc= - 230[V] Vc= - 280[V]

Electric potential [V]

Electric potential [V]

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Ar : 133 [Pa]Vc= - 230[V] Vc= - 280[V]

Electron Temp. [eV]

Electron Temp. [eV]

9Copyright 2002-2015 PEGASUS Software Inc., All rights reserved.

Ar : 133 [Pa]Vc= - 230[V] Vc= - 280[V]

Ar+

source rate [/m3 /s]

Ar+

source rate [/m3 /s]

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Ar : 133 [Pa]Vc= - 230[V] Vc= - 280[V]

Reduced electric field

[Td] 　　　　　　

　　　　　換算電界 [Td]　　　　　　Reduced electric field

[Td] 　　　　　　

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Ar : 133 [Pa]Vc= - 230[V] Vc= - 280[V]

Ar+

Temp. [eV]

Ar+

Temp. [eV]

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Ar : 133 [Pa]

2.8 [mA]

9.5 [mA]

0

0.03

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Ar : 133 [Pa]

-230[V] Mid.-230[V] Bottom

-280[V] Bottom-280[V] Mid.

×

×

Mid.

Bottom

yield=0.406

yield=0.086

yield=0.011

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Ar : 1330 [Pa] Ar : 6650 [Pa]

Electrondensity [/m3]

Electrondensity [/m3]

15Copyright 2002-2015 PEGASUS Software Inc., All rights reserved.

Ar : 1330 [Pa] Ar : 6650 [Pa]

Ar+

density [/m3]Ar+

density [/m3]

16Copyright 2002-2015 PEGASUS Software Inc., All rights reserved.

Ar : 1330 [Pa] Ar : 6650 [Pa]

Electron Temp. [eV]

Electron Temp. [eV]

17Copyright 2002-2015 PEGASUS Software Inc., All rights reserved.

Ar : 1330 [Pa] Ar : 6650 [Pa]

Electric potential [V]

Electric potential [V]

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Ar : 1330 [Pa] Ar : 6650 [Pa]

Ar+

source rate [/m3 /s]

Ar+

source rate [/m3 /s]

19Copyright 2002-2015 PEGASUS Software Inc., All rights reserved.

Ar : 1330 [Pa] Ar : 6650 [Pa]

　　　　　換算電界 [Td] 　　　　　　　　　　　換算電界 [Td] 　　　　　　Reduced electric field

[Td] 　　　　　　

Reduced electric field

[Td] 　　　　　　

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Ar : 1330 [Pa] Ar : 6650 [Pa]

Ar+

Temp. [eV]

Ar+

Temp. [eV]