determination of the refrative index of y2o3 on glass and ......mm-16 se06 lcm determination of the...

MM-16

SE06LCM

Determination of the Refractive Index of Y2O3 on Glass andPre-evaporated Substrates by Spectroscopic Ellipsometry

Céline Eypert - Application Scientist - Thin Film Divisionlanthanide ions lanthanide ions lanthanide ions lanthanide ions lanthanide ions lanthanide ions lanthanide ions lanthanide ions lanthanide ions lanthanide ions lanthanide ions lanthanide ions chalcogen elements chalcogen elements chalcogen elements chalcogen elements chalcogen elements chalcogen elements Characterization of Chalcogenide Glasses Characterization of Chalcogenide Glasses Characterization of Chalcogenide Glasses Characterization of Chalcogenide Glasses Characterization of Chalcogenide Glasses MM-16 Spectroscopic Ellipsometer MM-16 Ellipsometer MM-16 Ellipsometer MM-16 Ellipsometer MM-16 Ellipsometer MM-16 Ellipsometer MM-16 Ellipsometer MM-16 Ellipsometer MM-16 Ellipsometer MM-16 AlGaN GaN MM-16 AlGaN GaN MM-16 AlGaN GaN MM-16 AlGaN GaN MM-16 AlGaN GaN MM-16 AlGaN GaN MM-16 AlGaN GaN MM-16 AlGaN GaN Ellipsometer Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spect roscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coa-tings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coa-tings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel multilayer coating multilayer coating multilayer coating multilayer coating mul-tilayer coating multilayer coating multilayer coating multilayer coating multilayer coating mul-tilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer phase modulated ellipsome-ter phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer pha-se modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase mo-dulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modu-lated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase mo-dulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modu-lated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase mo-dulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modu-lated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase mo-dulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modu-lated ellipsometer optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant op-tical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical cons-tant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant op-tical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical cons-tant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant op-tical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical cons-tant thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thic-kness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thic-kness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thic-kness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive in-dex refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refrac-tive index refractive index refractive index refractive index refractive index refractive index re-fractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive in-dex refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refrac-tive index refractive index refractive index refractive index refractive index refractive index re-fractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive in-dex refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refrac-tive index refractive index refractive index refractive index refractive index refractive index re-fractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive in-dex refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refrac-tive index refractive index refractive index refractive index refractive index refractive index re-fractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive in-dex Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsomet ry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coa-tings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coa-tings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel multilayer coating multilayer coating multilayer coating multilayer coating mul-tilayer coating multilayer coating multilayer coating multilayer coating multilayer coating mul-tilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer phase modulated ellipsome-ter phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer pha-se modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase mo-dulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modu-lated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase mo-dulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modu-lated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase mo-dulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modu-lated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase mo-dulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modu-lated ellipsometer optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant op-tical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical cons-tant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant op-tical constant optical constant optical constant optical constant optical constant optical constant optical c onstant optical constant optical constant optical constant optical constant optical cons-tant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant op-tical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical cons-tant thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thic-kness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thic-kness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thic-kness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thin film thin film thin film thin film thin film thin film 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thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive in-dex refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refrac-tive index refractive index refractive index refractive index refractive index refractive index re-fractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive in-dex refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refrac-tive index refractive index refractive index refractive index refractive index refractive index re-fractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive in-dex refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refrac-tive index refractive index refractive index refractive index refractive index refractive index re-fractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive in-dex refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive i ndex refrac-tive index refractive index refractive index refractive index refractive index refractive index re-fractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive in-dex sublimo application note application note application note application note application note application note application note application note application note application note application note application note application note application note application note application note application note application note application note application note application note application note application

Y2O3 films are good materials for use in many applications such as protection of aluminium andsilver mirror coatings, intermediate layers in wide band visible AR coatings and for XeCl laser AR anddielectric mirror designs.MM-16 Spectroscopic Ellipsometer MM-16 Spectroscopic Ellipsometer MM-16 Spectroscopic Ellipsometer MM-16 Spectroscopic Ellipsometer MM-16 Spectroscopic Ellipsometer MM-16 Spectroscopic Ellipsometer MM-16 Spectroscopic Ellipsometer MM-16 Spectroscopic Ellipsometer MM-16 Spectroscopic Ellipsometer Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coa-tings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coa-tings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel multilayer coating multilayer coating multilayer coating multilayer coating mul-tilayer coating multilayer coating multilayer coating multilayer coating multilayer coating mul-tilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer phase modulated ellipsome-ter phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer pha-se modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase mo-dulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modu-lated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase mo-dulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modu-lated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase mo-dulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modu-lated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase mo-dulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modu-lated ellipsometer optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant op-tical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical cons-tant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant op-tical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical cons-tant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant op-tical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical cons-tant thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thic-kness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thic-kness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thic-kness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive in-dex refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refrac-tive index refractive index refractive index refractive index refractive index refractive index re-fractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive in-dex refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refrac-tive index refractive index refractive index refractive index refractive index refractive index re-fractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive in-dex refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refrac-tive index refractive index refractive index refractive index refractive index refractive index re-fractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive in-dex refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refrac-tive index refractive index refractive index refractive index refractive index refractive index re-fractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive in-dex Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectros-copic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic El-lipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Spectroscopic Ellipsometry Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coa-tings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coa-tings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Optical Coatings Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel Uvisel multilayer coating multilayer coating multilayer coating multilayer coating mul-tilayer coating multilayer coating multilayer coating multilayer coating multilayer coating mul-tilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating multilayer coating Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 Y2O3 spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer spectroscopic ellipsometer phase modulated ellipsome-ter phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer pha-se modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase mo-dulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modu-lated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase mo-dulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modu-lated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase mo-dulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modu-lated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase mo-dulated ellipsometer phase modulated ellipsometer phase modulated ellipsometer phase modu-lated ellipsometer optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant op-tical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical cons-tant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant op-tical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical cons-tant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant op-tical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical constant optical cons-tant thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thic-kness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thic-kness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thic-kness thickness thickness thickness thickness thickness thickness thickness thickness thickness thickness thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film thin film refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive in-dex refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refrac-tive index refractive index refractive index refractive index refractive index refractive index re-fractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive in-dex refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refrac-tive index refractive index refractive index refractive index refractive index refractive index re-fractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive in-dex refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refrac-tive index refractive index refractive index refractive index refractive index refractive index re-fractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive in-dex refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refrac-tive index refractive index refractive index refractive index refractive index refractive index re-fractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive index refractive in-dex sublimo sublimo sublimo sublimo sublimo application note application note application note application note application note application note application note application note application note application note application note application note application note application note application note application note application note application note application note application note application note application note application note application note application note application note application note application note sublimo

The Y2O3 films are hard and usually amorphous with highadhesion to glass, germanium, silicon, zinc sulphide andzinc selenide as well as to metals such as aluminium andsilver. In some cases, a very thin layer of yttria can serve asan adherence promoter for multilayer coatings on non-ox-ide substrates. This material is of medium-index and verytransparent over the near-UV range (300 nm) to IR (11µm)region.Many methods have been used to produce yttria films suchas reactive thermal deposition, e-beam deposition, ion as-sisted deposition (IAD) and magnetron sputtering. As the re-fractive indices are dependent on the process it is importantto know with high accuracy the optical constants and thethicknesses of the films, especially when they are used ashigh refractive index materials and in combination withhigher index materials such as TiO2 and Ta2O5.This note describes how the HORIBA Jobin Yvon MM-16Spectroscopic Ellipsometer was used to characterize the in-fluence of substrate to growth of Y2O3, that is the differenceof optical properties of the Y2O3 film grown on amorphousglass substrate and the one grown on pre-evaporated lay-ers of ZrO2.

Sample Preparation

The films were prepared by electron beam evaporation in areactive oxygen atmosphere. The starting materials weregrains of Y2O3. The glass substrates were 5 mm thick andwere rotated during deposition to improve the uniformity ofthe films.In the first run two bare glass substrates were put into thechamber and a ZrO2 film deposited. For the second runone bare glass substrate and the sample from the first runwith pre-evaporated ZrO2 were placed into the chamberand a Y2O3 layer was deposited.Three samples were prepared and characterized as follows.Sample1:ZrO2 monolayer (See Application Note, Ref:LCM-SE05),Sample 2:Y2O3 monolayer,Sample 3:Y2O3 on ZrO2 pre-evaporated.

Results

The work was performed using the MM-16 Liquid CrystalModulation Ellipsometer. The Ellipsometric measurementswere made at an angle of incidence of 70° across the spec-tral range 430-830 nm. Both the refractive indexes andthicknesses were extracted from the SE data analysis. Theoptical constants were determined using the Lorentz Oscil-lator formula below:

Characterization of Y2O3 on glass

Y2O3 is a medium-index and low absorption material.Some amount of index inhomogeneity can appear with in-creasing layer thickness. The effect can be reduced by pro-viding sufficient oxygen backfill during evaporation. As with the ZrO2 sample (AN LCM-SE-05) a great improve-ment to the χ² value was found with a two layer model, withthe top layer being porous. Using the Effective Medium Ap-proximation (EMA) DeltaPsi2 (DP2) software can determinethe degree of porosity compared to the layer on the sub-strate, and in this case it was found to be 50%.

ωiΓωω)ωε(ε

εεn0

22t

2tS2

+−−

+== ∞∞

Fit results Y2O3 on glass

Wavelength (nm)800700600500

Is

0.200

0.180

0.160

0.140

0.120

0.100

0.080

0.060

0.040

Ic

0.700

0.650

0.600

0.550

0.500

0.450

SE06LCM

Characterization of Y2O3 on ZrO2

As a first step this sample was characterized using the opti-cal constants found from the previous results. Good valuesfor the films were obtained, but it was found that the resultscould be improved by the use of a slightly more complicat-ed structure.

Several approaches were followed (interface layer betweenthe two films,...), but the final model that significantly im-proved the fit, was the optimisation of the Y2O3 thickness-es, indices and porosity parameters. In the final results theY2O3 variation in refractive index between two samples wasabout 0.02.

ConclusionThe deposition conditions have generated inhomogeneousporous layers that have been observed by the MM-16 Liq-uid Crystal Modulation Ellipsometer. Moreover, the spec-troscopic measurements allow determination of the smalldiscrepancies between the optical constants of a Y2O3 filmgrown at bare substrate and the one grown on a ZrO2 film.

Optical constants of Y2O3

Wavelength (nm)850800750700650600550500450

n

1.715

1.710

1.705

1.700

1.695

1.690

1.685

1.680

k0.000

126Å

1451Å

overlayer

Y2O3

Glass substrate

Results with previous values fixed

Wavelength (nm)800750700650600550500450

Is

0.300

0.200

0.100

0.000

-0.100

-0.200

-0.300

Ic

0.9000.8500.8000.7500.7000.6500.6000.5500.5000.4500.4000.3500.3000.250

Fit results Y2O3 / ZrO2 / Glass

Wavelength (nm)800750700650600550500450

Is

0.300

0.150

0.000

-0.150

-0.300

Ic

1.000

0.800

0.600

0.400

overlayerY2O3

87% ZrO2 / 13% voidZrO2

Glass substrate

129Å1339Å131Å

1031Å

New Y2O3 optical constants

Wavelength (nm)850800750700650600550500450

n

1.720

1.710

1.700

1.690

1.680

1.670

1.660

k0.000

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- 04/

2005