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Headquarter (Sales Division)5th Floor, Nihonbashi Plaza Building 2-3-4, Nihonbashi, Chuo-ku, Tokyo 103-0027, JapanTEL.81-3-3516-0800 FAX.81-3-3516-0801
Kansai Plant1, Higashimukojima, Nishino-cho, Amagasaki-City, Hyogo660-0856, JapanTEL.81-6-6411-7643 FAX.81-6-6411-7778
Ishikawa Plant1142, Urushijima-machi, Hakusan-City, Ishikawa924-0835, JapanTEL.81-76-274-9800 FAX.81-76-274-7790
Osaka Sales Office1, Higashimukojima, Nishino-cho, Amagasaki-City, Hyogo660-0856, JapanTEL.81-6-6411-1281 FAX.81-6-6411-7778
Ferrotec Ceramics Corporation
・Numerical values given in this catalog are for reference only and are not guaranteed as absolute.・Ferrotec Ceramics Corporation assumes no responsibility, directly or indirectly, for any damages and/or injuries caused by incorrect or improper use of the information contained in this catalog.・As a result of continuing improvements, products and/or specifications contained in this catalog may be changed or their manufacture discon-tinued without notice.
Important Information
URL http://www.ft-ceramics.co.jp
Fine Ceramics & Machinable CeramicsProducts Profile
Ferrotec Ceramics Corporation
1 2
No matter what the product is, quality is fundamentally based on the materials. Now, technological innovations and advancements take place in every field, The demand for higher-performance, easier-to-use, and cheaper products is increasing. Consequently, there are high expectations for wider applications of new ceramics material, as well as a devel-opment of products with a special and advanced properties of ceramics. Ferro-tec Ceramics is moving steadily forward to meet the continuously advancing needs of society. Customer satisfaction is our highest objective, operating under the motto “Manufacturing good products quickly and economically.” In the future, we will continuously improve our inde-pendent applied technologies and ultra-precision machining technologies, fully demonstrate the capabilities we possess, and further intensify our R&D to respond quickly to the wide-ranging needs of our customers.In the 21st century, the use of new ceramic materials with their superior characteristics, and in particular the use of the two key materials from our com-pany ‒ fine ceramics with a diverse range of advanced functions, and machinable ceramics that can be easily machined to precise and fine specifications ‒ will expand into all parts of our society and daily lives, including the rapidly advancing IT, electronics, medical devices, and auto-motive products. Working actively with these two ceramic material, Ferrotec Ce-ramics will utilize our original fine tech-nologies that combine advanced materi-als and production techniques with a state-of-the-art quality control in order to support the creation of a prosperous future society and the realization of dreams.
The creative power of ceramics : the future of precision products.
Headquarter
Ferrotec Ceramics Corporation
JQA-QM7716No.E028-ISO14001
QUALITY SYSTEM
ISO 9001 0000106Kansai Plant Ishikawa Plant
Fine technologies lead the way into the future.Ceramics perform a key material as ultra-pure, super wear-resistant, high-machinability, ultra-precise, and superior-characteristics to manufacture the most-advanced products.
Materials that bring us tomorrow’s products, today
“Photoveel”
“Photoveel L”
“Photoveel Ⅱ”
“Photoveel Ⅱ-S”
“Photoveel Ⅱ-S Black”
“Photoveel Ⅱ-k70”
“Photoveel α3.4”
Others
Machinable ceramicsFine ceramics
Corporate Profile
December 1, 1989
485.5 million yen
Shiro Tsuda, President andRepresentative Director
Ferrotec Corporation
Sumitomo Mitsui Banking CorporationThe Hokkoku Bank, Ltd.Mizuho Bank, Ltd.The Bank of Tokyo-Mitsubishi UFJ, Ltd.
Headquarter (Sales Division)5th Floor, Nihonbashi Plaza Building 2-3-4, Nihonbashi, Chuo-ku, Tokyo 103-0027, Japan
Kansai Plant1, Higashimukojima, Nishino-cho, Amagasaki-City, Hyogo 660-0856, Japan
Ishikawa Plant1142, Urushijima-machi, Hakusan-City, Ishikawa 924-0835, Japan
Osaka Sales Office1, Higashimukojima, Nishino-cho, Amagasaki-City, Hyogo 660-0856, Japan
Locations
Trade name
Date founded
Capital
Company representative
Shareholder
Main banks
Alumina Al2O3
Silicon nitride Si3N4
Aluminum nitride AlN
Silicon carbide SiC
Low thermal-expansion ceramics
Zirconia ZrO2
Others
Semiconductors /liquid crystaldisplays
Automotiveproducts
Energy Precisioninstruments
General industrialmachines
Advancedmedical devices
3 4
Utilizing advanced materials and production techniques, our fine ceramics materials are manufactured through integrated production based on quality control that achieves the highest industry standards. These materials offer advanced functions and superior char-acteristics that meet the absolute-highest customer requirements for product develop-ment and production across a variety of fields and applications. They are especially optimal for parts and components used in the manufacture of liquid crystals displays semiconductor manufacturing (wafer fabri-cation, processing, assembly, and inspec-tion), where high purity, high rigidity, and high precision are mandatory. In general industrial machineries, our materials provide superior resistance to wear, heat , and chemicals.
Fine Ceramics
Ferrotec Ceramics offers a wide range of materials for high strength, high purity, and other superior qualities to create commercially successful products in industries, from basic goods to advanced technology.
■For Manufacturing Semiconductor & Liquid Crystal Displays
■For General Industrial Machines
MATERIAL
1
Alumina, mainly comprised of aluminum oxide, has excellent insulation performance and wear-resistance, with competitive cost. Alumina is utilized for a range of purposes. Also, ultra-pure alumina, reaching a purity level of at least 99%, is particularly suited for use in plasma-resistant parts in semi-conductor manufacturing equipment.
Alumina ceramics, Al2O3
Chamber Parts
Vacuum Chucks
Low Dielectric Loss Alumina Chamber Parts
High-temperature Chamber Trays
Low Thermal Expansion Ceramics Parts
Transfer Parts
Plasmaresistance
Heatresistance
Wearresistance
Insulation
Highpurity
Highrigidity
Highprecision
Features
Main applications
Often used as a substitute material for alumina, silicon nitride has superior high-temperature strength and thermal shock resistance. It is widely used as a structural material that can withstand thermal loads.
Silicon nitride ceramics, Si3N4
Main applications
With regard to heat resistance, wear resistance, and corro-sion resistance, silicon carbide exhibits characteristics not found in other materials. Since it maintains strength even at high temperatures, it has particularly attracted attention as a high-temperature structural material.
Silicon carbide ceramics, SiC
Main applications
Zirconia ceramics, the main component is partially stabilized zirconium dioxide, is especially valued for outstanding mechanical strength and fracture toughness.
Zirconia ceramics, ZrO2
Main applications
Low thermal-expansion ceramics are materials that perform zero expansion at room temperature. They also have high strength and a high Young’s modulus.
Low thermal-expansion ceramics
Main applications
Parts for wafer transfer systems and chambers in semiconduc-tor manufacturing equipment, parts for liquid crystal display manufacturing equipment, vacuum equipment, and general industrial machinery
Semiconductor manufacturing equipment parts, burner nozzles, and welding jigs
Semiconductor manufacturing equipment parts and burner nozzles, Susceptor
Semiconductor transfer guides rails, bearing parts, and indus-trial cutters
Semiconductor manufacturing equipment parts and precision machine parts
5 6
Machinable ceramics provide easy machinability by conven-tional machining machine. Various precision machining are possible with synthetic diamond-based cutting tools and also with general carbide tools. Inspection jigs and parts for the manufacture of liquid crystals display and semiconductors required in a large-variety, and a small-quantity production. In the face of growing expectations for shorter lead time in all production processes, from design to trial production, the ma-chinable ceramics are widely used from their precision-machining and quick-delivery.
Superior machinability, quick delivery of high-precision, and high-quality products, provides customersan efficient production.
World’s strongest ceramic with variable thermal conductivityThis is a dense, high-grade compound mica-ceramic created through a fusion process that uses glass as a matrix and uniformly separates out mineralized fluorian phlogopite and zirconia microcrystals.
“Photoveel”
“Photoveel Ⅱ”, “Ⅱ-S”, “Ⅱ-k70”
Main applications
This mica-ceramic has fine-machining characteristic of “Photo-veel”, and adds low thermal expansion and high reflectivity.
“Photoveel L”
Main applications
The special characters of this ceramic material are its low thermal expansion and excellent mechanical strength. It is particularly suitable for small parts that require ultra-precision machining.
“Photoveel Ⅱ”
Main applications
The strongest point of this ceramic material is the thermal expansion similar to silicon. It is also suitable for parts that require ultra-precision machining like Photoveel Ⅱ.
“Photoveel Ⅱ-S”
Main applications
This material has all the characteristics of Photoveel II-S, in black color for use in optical components.
“Photoveel Ⅱ-S Black”
Main applicationsOptical components, medical camera components
This ceramic combines high thermal conductivity, high strength, and low thermal expansion. It is suitable for heat radiating parts and circuit boards. “Photoveel Ⅱ-k70” also has the highest bending strength in our machinable ceramic. It is widely used in structural parts that require high strength.
“Photoveel Ⅱ-k70”
Main applications
This ceramic is characterized by its thermal expansion coeffi-cient of 3.4. In the same way as Photoveel II and II-S, it is suit-able for parts that require ultra-precision machining.
“Photoveel α3.4”
Main applicationsJigs for package board inspection
Hole Diameter φ0.035mm
“Photoveel”
35μm
Optical and medical Parts (“Photoveel Ⅱ-S Black”)
Semiconductor Inspection for Parts (“Photoveel Ⅱ”, “Ⅱ-S”)
“Photoveel” microstructure
5μm
Precisionmachinability
Electricalinsulation
Heatinsulation
Heatresistance
Shortlead time
MATERIAL
2
Features
Inspection equipment parts and micromachine insulating parts
Inspection equipment parts and micromachine insulating parts
Heat sinks, insulating parts around heaters, welding nozzles, etc.
Parts for semiconductor manufacturing equipment, liquid crys-tal displays manufacturing equipment, heat-resistant and heat-insulating elements, vacuum equipment, electrical insula-tion, sensors, and medical devices
Analyzer insulating parts, circuit boards, positioning jigs, soldering jigs, and light-condensing parts
Machinable Ceramics“Photoveel”
Raw Material SinteringPressing Machining ofGreenbody
MachiningGrindingLapping
Ferrotec Ceramics implements vertically integrated production process, with a strict quality control, supported by advanced production techniques and the latest equipment.
7 8
Fine CeramicsManufacturing Process
CleaningShipping Inspection・Analysis
Spray Dryer 400t Press Air Furnace Atmosphere Furnace Atmosphere Furnace
Gate Type Surface Grinding Machine
Cleaning RoomCleaning in Clean Room Scanning Electron Microscope (SEM)
Ultrasonic Flaw Detector Coordinate Measuring Machine
Large Lapping Machine
9
■Technical guideA range of options are available to match the purpose of use. Contact us about complex shapes, high-precision machining, or any other special requirements you may have.
“Photoveel”Manufacturing Process
Blocks(Fusing Method)
Machining InspectionShipping
(Contact us about special cleaning and packing, or any other special requirements.)
Use Ra (average roughness at centerline) when designing ceramics.
Resin adhesion, glass adhesion
Metalization adhesion
Ceramics
Metal
JIS B 0405 (extracted)●Reference
JIS B 0601 (extracted)
Minimum φ35 μm (thickness 0.3mm), diameter and pitch tolerance ±5μm
Minimum M2, HELISERT minimum M2.5
(0.8s)
(6.3s)
(25s)
(100s)
0.2a
1.6a
6.3a
25a
Finish SymbolSurface Roughness Classification Value
Ra (Rmax)0.2
1.6
6.3
25
( )
( )
( )
( )
0.5 to 3
Over 3 and up to 6
Over 6 and up to 30
Over 30 and up to 120
Over 120 and up to 400
Over 400 and up to 1000
(μm)
±0.1
±0.1
±0.2
±0.3
±0.5
±0.8
±0.2
±0.3
±0.5
±0.8
±1.2
±2
Dimensional ClassificationTolerance(mm)
Medium Grade Coarse Grade
●Fine ceramics±1% (minimum: ±0.3 mm)
According to JIS B 0405 medium grade
Flatness 1-3 μm (concave/convex specification)
JIS B 0601 6.3a or equivalent
0.01a-0.2a or equivalent
As sintered
Grinding
Precision machining
General machining
Precision machining
Marking (characters, numbers, barcodes, etc.)
TiN, TiC, DLC, SiC, Al2O3, etc.
●“Photoveel”
Microscopichole drilling
Thread cutting
According to JIS B 0405 medium grade
5 μm or less (flatness, parallelism, etc.)
Generalmachining
Precisionmachining
Dimensionaltolerance
Dimensionaltolerance
Surfaceroughness
Laser machining
Adhesion
Surface coating
Hangzhou Dahe Thermo-Magnetics Co.,Ltd.China・Hangzhou
Ferrotec Taiwan Co.,Ltd.Taiwan・Hsinchu
Ferrotec Corporation Singapore Pte, Ltd.Singapore
Ferrotec Korea CorporationKorea・Seoul
Ferrotec Europe GmbHGermany・Frankfurt
Ferrotec (USA) CorporationUSA・Santa Clara, Bedford
◎Global Network
◎Domestic Locations
Kansai Plant・Osaka Sales Division
Ishikawa PlantTokyoHeadquarter・Sales Division
■Headquarter (Sales Division)5th Floor,Nihonbashi,Plaza Building 2-3-4,Nihonbashi,Chuo-ku,Tokyo 103-0027,JapanTEL 81-3-3516-0800 FAX 81-3-3516-0801
■Osaka Sales Office1,Higashimukojima,Nishino-cho,Amagasaki-City,Hyogo 660-0856,JapanTEL 81-6-6411-1281 FAX 81-6-6411-7778
■Ishikawa Plant1142,Urushijima-machi,Hakusan-City,Ishikawa924-0835,JapanTEL 81-76-274-9800 FAX 81-76-274-7790
※Numerical values for properties presented in this table are for reference only.
Material
Main Characteristics
Application
Material code
AluminaAl2O3
AS999
wt%
g/㎤
%
MPa
GPa
GPa
℃
1/℃(×10-6)
W/m・K
ΔT(℃)
Ω・cm
10-4
104
kV/mm
Main component purity
Color
Density
Water Absorption
Bending Strength
Young's Modulus
Vickers Hardness
Max.Operating Temperature
Coefficient of Thermal Conductivity
Thermal Shock Resistance
Dielectric Breakdown Voltage
General
Properties
Mechanical
Properties
Thermal
Properties
Electrical
Properties
AT999 AM997 AM997QII ACM995 ACM96 SN606 SC902E ALN99 ALN94 Z403 LE101
99.99
White
3.95
0
390
380
18
1600
7.0
7.7
33
200
1015
1012
109
107
9.9
0.5
2
18
99.9
Whitish yellow
3.92
0
400
385
16
1600
7.9
-
34
200
1015
1014
1011
106
9.8
4
0.25
17
99.7
Whitish yellow
3.93
0
390
375
18
1600
7.0
7.6
33
200
1016
1013
1010
109
9.7
1
1
18
99.7
Whitish yellow
3.93
0
390
385
17
1600
7.0
-
33
200
1015
1014
1012
105
9.7
0.15
6.7
18
99.5
Whitish yellow
3.93
0
370
370
16
1600
7.2
-
32
250
1014
1014
1010
106
9.9
10
0.1
15
96
White
3.74
0
350
320
14
-
7.2
-
24
200
1015
109
107
105
9.4
38
0.03
14
90
Gray
3.16
0
750
285
16
1200
2.7
4.2
23
700
1016
1013
1011
107
8
6.1
0.16
14
97
Black
3.15
0
490
400
22
1600
3.8
-
170
300
104
102
10
10
-
-
-
-
99
Light gray
3.24
0
295
320
11
1000
4.4
-
80
-
1014
108
107
105
8.5
30
0.03
-
94
Light gray
3.31
0
345
320
11
1000
4.4
-
150
400
1014
1010
107
105
8.5
30
0.03
15
94
Whitish yellow
5.98
0
880
245
16
-
8.9
10.4
3
280
1012
107
104
102
33
9
0.1
13
-
Gray
2.55
0
200
140
-
-
<0.5
2.0
-
-
1014
1012
1010
106
4.9
5
0.2
23
Microwaveinduction plates
Chamber Parts
Insulating parts
Chemical-resistant
Microwave-transmissive
Chamber Parts
Insulating parts
Heat-resistant
Chemical-resistant
Chamber Parts
Insulating parts
Machine parts
Microwaveinduction plates
Heat-resistant
Chemical-resistant
Microwave-transmissive
Microwaveand RF
SemiconductorEquipment
LowdielectricLoss
Insulating parts
Machine parts
-
Insulating parts
Machine parts
-
Machine parts
Sliding parts
Heat-resistantparts
Highstrength
Wear-resistant
Thermal-shock-resistant
High thermalconductivityparts
Heat resistantparts
Machine parts
High thermalconductivity
Heat resistant
High strength
Microwaveinduction plates
Insulating parts
High thermalconductivity
Microwave-transmissive
Machine parts
Sliding parts
High strength
High toughness
Wear-resistant
Machineparts
Low thermal expansion
Poreless
SiliconnitrideSi3N4
SiliconcarbideSiC
Aluminum nitrideAlN
ZirconiaZrO2
Low themal- expansionceramics
Coefficient ofThermal Expansion
RT~500℃
RT~800℃
25℃
300℃
500℃
800℃
10GHz
Volume Resistivity
Dielectric Constant
Dielectric Loss(tanδ)
Q Factor (1/tanδ)
Ferrotec Ceramics Corporation
Fine Ceramics
Machinable CeramicsMaterial
wt%
g/㎤
%
MPa
GPa
GPa
℃
1/℃(×10-6)
W/m・K
ΔT(℃)
Ω・cm
10-4
104
kV/mm
Main component purity
Color
Density
Water Absorption
Bending Strength
Young's Modulus
Vickers Hardness
Max.Operating Temperature
Coefficient of Thermal Conductivity
Thermal Shock Resistance
Dielectric Constant
Dielectric Loss(tanδ)
Q Factor (1/tanδ)
Dielectric Breakdown Voltage
-
White
2.59
0
150
66
2.2
1000
7.8
1.5
150
1015
1010
107
-
20
<1MHz>6.4
<1MHz>60
<1MHz>0.02
Insulating parts
Heat-insulatingparts
Prototype/emergency parts
Precisionmachinability
Electricalinsulation
Heat insulation
Quick delivery
Photoveel
-
White
3.06
0
89
-
1.2
600
6.1
1.8
200
1015
1012
107
104
18
<1MHz>5.9
<1MHz>78
<1MHz>0.01
Insulating parts
Positioning jigs
Light-condensingparts
Low thermalexpansion
High reflectance
Photoveel L
-
Gray
2.56
0
440
157
2.3
1.4
50
600
1015
1014
1011
107
35
1000(In nonoxidizing atmosphere)
<1GHz>5.5
<1GHz>10
<1GHz>0.10
1000(In nonoxidizing atmosphere)
<RT~150℃>4.7
<1GHz>9.0
<1GHz>25
<1GHz>0.04
1000(In nonoxidizing atmosphere)
<1GHz>9.0
<1GHz>25
<1GHz>0.04
1000(In nonoxidizing atmosphere)
<1GHz>8.5
<1GHz>20
<1GHz>0.05
1000(In nonoxidizing atmosphere)
<1GHz>6.0
<1GHz>10
<1GHz>0.10
1900(In nonoxidizing atmosphere)
<1MHz>6.8
<1MHz>97
<1MHz>0.01
<RT~500℃>4.8
<RT~800℃>5.0
2200(In nonoxidizing atmosphere)
<RT~150℃>4.7
<RT~150℃>3.4
<RT~1000℃>0.86
<1MHz>3.5
<1MHz>26
<1MHz>0.04
Inspection insulating parts
Micromachineparts
High strength
Low thermalexpansion
Precisionmachinability
Photoveel Ⅱ
-
Gray
3.50
0
320
130
2.3
23
400
1015
1011
107
104
30
Inspection insulating parts
Micromachineparts
High strength
Thermal expansionsimilar to silicon
Precisionmachinability
Photoveel Ⅱ-S
-
Black
3.50
0
320
130
2.3
23
400
1014
1011
107
104
30
Optical parts
Medical cameraparts
High strength
Thermal expansionsimilar to silicon
Precisionmachinability
Photoveel Ⅱ-SBlack
Gray
3.35
0
340
140
2.3
30
400
1015
1011
107
104
20
Packagesubstrate
inspection jigs
High strength
Thermal expansionsimilar to silicon
Precisionmachinability
Photoveel α3.4
-
Gray
2.72
0
520
200
4
1.8
70
600
1015
1013
1012
108
20
Heater peripheralinsulating parts
Welding nozzleparts
High strength
Low thermalexpansion
High thermalconductivity
Photoveel Ⅱ-k70
-
Light gray
2.90
0
300
180
3.8
92
400
1015
1010
108
105
65
Insulating parts
Heat sink
High strength
High thermalconductivity
Aluminum nitrideAlN-BN
99.5
White
1.92
-
35
39
-
75
1500
1014
1013
1012
109
40
Molten metalcorrosion resistance
material
Insulating parts
Precisionmachining jigs
Thermal stability
Corrosion resistance
Electrical insulation
Precisionmachinability
Boron nitridehBN
Coefficient ofThermal Expansion RT~400℃
25℃
300℃
500℃
800℃
Volume Resistivity
Main Characteristics
Application
■Headquarter (Sales Division)5th Floor,Nihonbashi,Plaza Building 2-3-4,Nihonbashi,Chuo-ku,Tokyo 103-0027,JapanTEL 81-3-3516-0800 FAX 81-3-3516-0801
■Ishikawa Plant1142,Urushijima-machi,Hakusan-City,Ishikawa924-0835,JapanTEL 81-76-274-9800 FAX 81-76-274-7790
※Numerical values for properties presented in this table are for reference only.
Ferrotec Ceramics Corporation
General
Properties
Mechanical
Properties
Thermal
Properties
Electrical
Properties
■Osaka Sales Office1,Higashimukojima,Nishino-cho,Amagasaki-City,Hyogo 660-0856,JapanTEL 81-6-6411-1281 FAX 81-6-6411-7778
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