seminar kth
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POLYGENERATION OF ELECTRICITY, HEATand ULTRA PURE WATER forSEMICONDUCTOR INDUSTRY
Chuanfeng Liu
Supervisors: Andrew Martin EGI KTH
Aapo Ssk Xzero ABHenrik Dolfe Xzero AB
Heat and Power Technology, Stockholm, Sweden
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Content
Heat and Power Technology, Stockholm, Sweden
1. Objectives of thesis
2. Current UPW system in semiconductor industry
3. Principle of air gap membrane distillation
4. Xzero test facility of Air Gap Membrane Distillation
5. Integrated MD in cogeneration cycle
6. Conclusion
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Objectives
Integrate MD technology into traditional heat and power
cogeneration cycle to produce UPW for semiconductor industry
Theoretical study of membrane distillation
Experimental study of air gap membrane distillation
Economic analysis
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UPW Consumption in Semiconductor
Industry
Heat and Power Technology, Stockholm, Sweden
50% of total UPW market worldwide.
More than 6000 liters UPW for one eight-inch wafer
1.4-4.8 million liters UPW per dayThe cost of a UPW system in a fab is more than $10
million.
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Present UPW Production System
Heat and Power Technology, Stockholm, Sweden
Reverse osmosis (RO) and Electro-deionization (EDI)
10-20 KWH per cubic meter UPW
2-3MW-- 6% of total fab energy consumption
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Make-up Section
Raw
Water
Tank
Multi
Media
Filter
Carbon
FilterHeat
ExchangerCartridge
Filter
Reverse
Osmosis
and EDI
Break
Tank with
Nitrogen
Blanket
Degas
Primary
Mixed
Bed
Exchange
UV
System
Cartridge
Filter
RejectTo Polishing Loop Section
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Principle of Membrane Distillation
Membrane
Hot
S
ide
Coldside
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Advantages of MD
Heat and Power Technology, Stockholm, Sweden
100% (theoretical) rejection of non-volatile matters
lower operating temperatures
lower operating pressure
reduced chemical interaction
reduced vapor spaces compared distillation processes
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Flow Diagram Of Xzero TestFacility
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Computer Simulation of MembraneDistillation
Hot side
Membrane
Cold Side
Ultra Pure Water
Feed wat er in
Feed water out
Cold water in
Coldwater out
Heat exchanger
Heat E xchanger
Expansion tank
Water_tank
H e a ti n
H e
o u
Module emplyed in
Aspen Utilites
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Integrated Cogeneration of MD in the
Semiconductor Industry
The power requirement of one typical semiconductor
fabrication plant is equal to what 7500 single-family
homes consume.
The average power consumption for the fab is 2.18
KW/m2, and the average cooling load is 1.53 KW/m2.
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Combined Heat Recovery Chiller
With MD Units
P
Compressor
Expansion Valve
CondenserEvaperator
Air conditioner systemMD Water P urification
H e a t r e c o v e r y c h i l l e r
Waste Heat
From Fab
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Combined MD With Waste Heat
From Fab
Total 35-40 MW
Air conditioner system 4-5MW
Condenser side 12 MW 20,000 l/hour possible with readily available waste heat
sources
About 1/3 of fab UPW requirement
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Integrated MD With PowerProduction
HTCA
JW
LO
LTCA
Membrane Module:
Gas Engine
heat recorvery
JWheat exchanger
LOheat exchanger
MDunit: AGMD,XzeroLayout NO.1 with flue gas heat recovery
S
T
A
GE
1
S
T
A
GE
2
S
T
A
G
E
3S
T
A
G
E
4S
TAG
E
5
S
T
A
G
E
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Pure Water
Cooling water in
Coolin water out
H e a t R e c o v e r y
C o o l i n g
W a t e r O u
36 Mwei (fab electricity demand
covered )
48,000 L/hr (2/3 UPW demand)
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Conclusion
Polygeneration is promising in semiconductor
industry.
With CHP and waste heat utilization , up to 65 m3/hr
UPW possible for a fab with 5000 wafers production
per week.
Capital cost is around $3 per cubic meter UPW.
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