cabtures - nano-tera 2013
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EnablingAutonomousSensorNodes:
TunableCarbon
Nanotube
Electro
MechanicalResonators(CabTuRes)
C.Hierold/C.Roman
W.Andreoni,A.Magrez/L.Forr,O.Grning,A.Ionescu,
M.Kayal,
B.
Nelson,
D.
Poulikakos,
D.
Briand
/N.
de
Rooij
30.05.2013
NanoTera.ch AnnualPlenaryMeeting,Bern,May30,2013
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Overview
CabTuRes proposesaSiP solutiontointegrateCNTresonators(NEMS)withreadout
electronics(CMOSIC)withinapackageadaptedtoapplication(capwafer)
CabTuRes isaninterdisciplinaryengineeringresearchprojectatthecrossroadsbetween
basicscienceandengineeringwithgreatinnovationpotential.
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5mm
2
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Rationale:massbalance
Yes,itisminiatureanditrequiresultralowpower toexcite/readoutananoresonator
UnprecedentedmassresolutionincomparisontonanowiresandQCMs(~1cm
size)inUHVandlowtemperaturedemonstratedinliterature
SNRandQforSWNTresonatorsatambientconditionsmustbeinvestigated
UnprecedentedmechanicaltuningrangeofSWNTs(yieldstrainupto
510%)allowsforaverylargemeasurementrangeinclosedloopoperation.
Highsensitivityformass
balance
because
of
low
m andhigh
0
Goal:ultralowpowerandsmallsize&weightisconditionalforautonomous
sensorsystems
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Miniaturizationperseisnotthe
motivationbutallthebenefitscoming
withminiaturization.
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Potentialapplications
thefirstdemonstrationofmassspectrometrybasedonsingle
biologicalmoleculedetectionwitha[NEMS][Naik etal,Nature
Nano4,445(2009)]
achemical
sensor
technology
based
on
resonant
NEMSmassdetectors that[performed]
chromatographicanalysis of13chemicals
withina5stimewindow.[Lietal,NanoLett.10,3899
(2010)]
Portablemicroanalytical systems Singlemoleculemassspectrometry
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TheCabTuResTeam
T5:CMOSIC
&sys.model
T3:MEMS
withCNTs
T4:CNTmech.
interfaces
T1:CNTgrowth
&integration
T2:SWNTfund.
propertiesT6:System
inPackage
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HighlightsofResearchAchievements
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CNTNEMSresonators
12
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NottheworstCNTresonatortechnology
13
Competition:ebeam litho,
DCgatestraining
[Lassagne08]
[Sazonova04]
[Witkamp06]
[Peng06]
CabTuRes:photolitho,
MEMSactuatorstraining
[ShihWeiLee]
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FeaturesofCNTNEMStechnology
14
ShihWeiLeeShihWeiLeeShihWeiLee MatthiasMuothMatthiasMuothMatthiasMuoth
Lowvoltage,largestroke
(0.5m/V)thermalactuators
SilicononInsulator
decoupledactuationRFsignalpaths
Leeet
al,
to be submitted
to Sens and Actuators A
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SOIprocessflow
Si SiO2 Catalyst Al2O3 Cr/Au
(a)
(b)
(c)
(d)
(f)
(e)
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Leeetal,IEEE NEMS2011,p.37
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FeaturesofCNTNEMStechnology
16
ShihWeiLeeShihWeiLeeShihWeiLee MatthiasMuothMatthiasMuothMatthiasMuoth
*measurementsdonotnecessarilycorrespondtothedisplayedCNFETSEM
stableelectricalcontacts
smallgatehysteresis
Leeetal,to be submitted to
Nanotechnology
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Resonatorresults
17
ShihWeiLeeShihWeiLeeShihWeiLee
*measurementsdonotnecessarilycorrespondtothedisplayedCNFETSEM
StuartTruaxStuartTruaxStuartTruax
DCtunable,
CNTresonators
Leeetal,submitted to APL
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AnotherpromisingCNTNEMSprocess
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piezoresistive,ultraclean,
suspendedCNFETs
MatthiasMuothMatthiasMuothMatthiasMuoth
Muothet
al,
MEMS
2013,
p.
496
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SecondCNTNEMSprocess
31
JiCaoJiCaoJiCao highresonator
density(106/cm2)
preciseCNT
alignment
hysteresis
freeCNFETs
Wladek GrabinskiWladek GrabinskiWladek Grabinski SebastianBartschSebastianBartschSebastianBartsch
Caoetal,IEDM2012
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[Cao12]
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SecondCNTNEMSprocess
32
L=750 nm CNTresonators
@RT
DCtunable
resonance
L=1 m
higherQ
@77K
JiCaoJiCaoJiCao Wladek GrabinskiWladek GrabinskiWladek Grabinski SebastianBartschSebastianBartschSebastianBartsch
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CNTsynthesis,integrationandproperties
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Growingcarbonnanotubes
38
preciselylocatedCo
catalystnanoparticles
ArnaudMagrezArnaudMagrezArnaudMagrezMassimoSpinaMassimoSpinaMassimoSpina
narrowdiameter
distribution
highyield
CNTgrowth
narrowdiameterdistribution
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Growingcarbonnanotubes
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localizedCNTgrowth
nanoparticledepositiononMEMS
flowalignedCNTgrowth
T:1000C,Ethanol,
laminarflowofAr (10ln/h)+H2 (20ln/h),10min
ArnaudMagrezArnaudMagrezArnaudMagrezMassimoSpinaMassimoSpinaMassimoSpina
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processformech.clampingstudies
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Clampingandtribologyatcontacts
48
inSEM
manipulation
inTEM
manipulation
LateralForce
Microscopy
ManishK.TiwariManishK.TiwariManishK.TiwariSimoneSchrleSimoneSchrleSimoneSchrle
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Clampingandtribologyatcontacts
49
unclampedCNTs
CNTsclampedwEBIDPt
~150nmdefl.
~4.4%strain
~85nmdefl.
~1.4%strain
(L ~1m)
ManishK.TiwariManishK.TiwariManishK.TiwariSimoneSchrleSimoneSchrleSimoneSchrle
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STM/STSofOonCNT
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ChemisorptiononCNTs
60
FabioPietrucciFabioPietrucciFabioPietrucciJaap KroesJaap KroesJaap Kroes
O.GrningO.GrningO.GrningW.AndreoniW.AndreoniW.Andreoni
ab initioDFT
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Interfaceelectroniccircuits
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SystemTopology&Implementation
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ChristianKauthChristianKauthChristianKauth MarcPastreMarcPastreMarcPastre interface
circuit
topology
frontend
electronics
gain noise
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SystemTopology&Implementation
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ChristianKauthChristianKauthChristianKauth MarcPastreMarcPastreMarcPastre interface
circuit
topology
feedbackIC
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SystemTopology&Implementation
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ChristianKauthChristianKauthChristianKauth MarcPastreMarcPastreMarcPastre interface
circuit
topology
actuator
drive
09.04.2013
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Systemassembly
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systemintegration concept
ThroughSiliconVias
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DanickBriandDanickBriandDanickBriand RokhayaGueyeRokhayaGueyeRokhayaGueyeTeru AkiyamaTeru AkiyamaTeru Akiyama
highTresistant
Ta/Pt TSVs
ohmiccontacts RFTSVs
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systemintegration concept
Capwaferandstudconnections
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DanickBriandDanickBriandDanickBriand RokhayaGueyeRokhayaGueyeRokhayaGueyeTeru AkiyamaTeru AkiyamaTeru Akiyama
encapsulation
process
Eutecticbonding,
T=415C,P=1100mbar,
t=30min
CMOS NEMS
assembly
StudbumpstechnologybyHybridS.A
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Additionalinformationandtechnicaldetails
For
more
information
please
consult
any
of
the
7
CabTuRes
posters
30.05.201310
9
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TheCabTuResteamthanksyou!
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Grouppictureon14.10.2009atETHZurich
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