PowerPoint TCOs
TCOs


Ga2O3 solution
In2O3 solution
TGA/DSC analysis
Heating at 100 °C for 24 hours in air in drying oven
Clear solution
MEA
Ga2O3 solution
In2O3 solution
Psot-heating at 400 °C for 1 hr in reduced atmosphere in tube furnace
Clear solution
MEA
In:Ga:Zn=X:Y:Z
IGZO precursor
ZnO solution
Spin coating at 2000 rpm for 10 sec then 3000 rpm for 20 sec
Pre-heating at 200 °C for 10 min in air in RTA
TF-XRD
FE-SEM
SE
UV-Vis-NIR

K.J. Chen, F.Y. Hung, S.J. Chang, Z.S. Hu, “Microstructures, optical and electrical properties of In-doped ZnO thin films prepared by sol–gel method,” Appl. Surf. Sci. 255 (2009) 6308 – 6312.
Seung-Yup Lee, Byung-Ok Park, “ Electrical and optical properties of In2O3–ZnO thin films prepared by sol–gel method”, Thin Solid Films 484 (2005) 184 – 187.
Chunfei Li, Yoshio Bando, Masaki Nakamura, Mitsuko Onoda, and Noboru Kimizuka, “Modulated Structures of Homologous Compounds InMO3(ZnO)m (M=In, Ga; m=Integer) Described by Four-Dimensional Superspace Group”, J. Solid State Chem. 139 (1998) 347 – 355.
Julia M. Phillips, R. J. Cava, G. A. Thomas, S. A. Carter, J. Kwo, T. Siegrist, J. J. Krajewski, J. H. Marshall, W. F. Peck, Jr., and D. H. Rapkine, “Zinc-indium-oxide: A high conductivity transparent conducting oxide”, Appl. Phys. Lett. 67 (1995) 2246.

Ethanol+ZnAcEthanol+Ga(NO
air in drying oven
MEA
reduced atmosphere in tube furnace
Clear solution
MEA
then 3000 rpm for 20 sec
Pre-heating at 200 °Cfor 10 min in
air in RTA