-

------------ ------Burestein-Moss (BM shift)------

=ne (n:, e: (1.6 10-19 coulomb), : ) Doping(): (ZnO:Al or ZnO:F, In2O3:Sn)

Nonstoichiometric ():

400 nm800 nm

In2O3SnO2ZnOSnAlSb

(high resolution scanning electron microscopy) (-step)

AZO

AZOAZOAl/Zn00.51.01.52.03.0 at.% 20 mL2. 2-methoxyethanol (11mL)1 0.75 M Zn2+3. monoethanolamine 0.5mL2 360C10 2AZO

AZO

AZO 1. 1 inch x 1 inch95 vol.% 2. 3000 rpm103. AZO100 L3000 rpm 30 4. 350C105. 23410550C26. 3 % H297 % Ar

(sol-gel method)

Hydrogen treatment ():(1) (2) (3)

(AZO ) (AZO )

1. ( multi-touch panel)IC 2. 3. 4. 5. ITO6. -7. 8. 2005138558639. 10. AZO (2005).