6061

: : : MA110222 :

6061

1

26061 31930(Mr. Salomon)

4

5.

6.(Micromanufacturing)(LIGA)(Focused Ion Beam)(Excimer Laser) (Femto-second Laser)(Micro-EDM)(Micro machining)

7.

Ra: Rmax :Rz:

8.

9.

10S/N .SignalNoiseS/N ()

yi :n:S:dB:()MSD:(Mean square departure)11.S/N

12.-

13.-:R200m:30

SJ4010.000125 m

14.-

15.-

16.-S/N

S/N

17.-A:B:C:

A5B4C1

18.-55,000 rpm (A5)2.777 m (B4)0.005 mm (C1)

Ra=0.035 m19.Ra=0.035m CNS (Ra 0.01~0.1m) 0.01 m < 0.035 m< 0.1 m2.777 m/tooth

20.-6061 2010

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