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.
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-
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StandardPressureDrop
DustHoldingCapacity
OzoneGeneratio
n
ParticleSize
Efficiency
FiltrationPerformanceClassification
USAASHRAE 52.1-1992ASHRAE 52.2PAHAM AC-1-1988IES Rec. Prac.007MIL-STD-282ARI-850-84ARI-680EUROPEBritish Standard283144003928French StandardAFNOR NFX44-011AFNOR NFX44-013German StandardDIN 24184DIN 24185European StandardEUROVENT 4/5EUROVENT 4/9EUROVENT 4/10CEN EN 779JAPANJIS C 9615-1995JACA 10C-1979JEM 1467-1995OthersAustralian Standard 1132SAE Air CleanerElements1987Korean Standard KSC 9314-1994
x
xx
xx
xx
x
xxx
xx
xx
x
x
x
xxxxx
xxx
xx
xx
xxxx
xx
x
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xxx
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xx
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-
- 27 -
, JIS C 9615 JEM 1467, KS C 9314 (air cleaner)
" ,
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CO .
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10
.
2001 12 31 61.
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-
- 44 -
No
1 C/R 88.07~90.06
2Emitter Controller Real-Scale
89.07~91.02
3 C/R 88.07~91.11
4 Al Grating Access Panel
89.06~91.08
5 (Ultra) C/R 90.08~92.07
6 91.08~93.11
7 Air Filter 91.08~93.11
8 One-Touch 91.08~93.11
9 91.08~93.11
10 Complex Type Super FFU Ultra C/R 91.08~93.11
11 Chamber 92.09~94.12
12 Bowling Machine Pin-Setter93.12~94.11
13 93.08~95.12
14
93.09~96.08
15 94.08~96.10
16 94.11~97.03
17 95.12~97.02
18 95.12~96.08
19 96.10~97.09
20 97.07~98.06
21 Bio-Hazard 97.07~98.06
22 SMIF(Standard Mechanical InterfaceSystem)
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23 (IAQ) 97.12~02.11
-
- 45 -
, , ,
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.
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16 , 1972 10 17 6
2
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(ISO, International
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associated controlled environments"
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- 46 -
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paper (HEPA + ) ( ), (
+ )
.
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National, Teac, Sansui
, paper
,
.
-
- 55 -
() HEPA + ( )
Aiwa, National, Sanyo HEPA
99.999% .
, .
, 2
, , 99.97% .
,
99% .
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3
1.
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(1)
()
(DB) KISTI
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1) (BIST)
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(BIST) () .
-
- 61 -
(BIST)
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336
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-
- 63 -
(/) : BIST & DIGS
/
#1 ? or ?#2 (? or ?) and (? or ?)#3 ? or adj ?#4 ? or ? adj ?#5 ? or adj ? or adj (? OR ?)#6 ( OR ) ADJ ?#7 electrostatic adj (precipitator? or collector?)#8 (air or dust) adj filter#9 dust adj collect?#10 bag adj filter?#11 is>=1991
256()/336()
229
(2)
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COMPENDEX
Engineering Information Inc. The Engineering Index Monthly(Ei)
.
COMPENDEX 4,000
DB DB
, , , , DB
.
-
- 64 -
COMPENDEX
- - -
- - -
- - -
- - -
- - -
- - -
- - -
- - -
- - -
40 26 .COMPENDEX DB 70% , 50% .
- (Journal) : 53%- (Conference Proceeding or Article) : 35%- (Monograph Chapters, Book) : 6%- (Report) : 5%- : 1%
- 1970~- : 8,000 /- DB : Engineering Information Inc.
COMPENDEX () .
()
Engineering Information Inc. KISTI
COMPENDEX DB ,
1,838 , ( ) ,
1,047 .
-
- 65 -
.
() : COMP
/
#1 (air or dust) adj (filter?/kw or cleaner?/kw)#2 air adj purifi?/kw#3 cleanroom?/kw or clean adj room?/kw#4 dust adj (abatement/kw or collectror?/kw)#5 electrostatic adj (precipitator?/kw or separator?/kw)#6 is>=199101
1838
1047
.
(1)
()
( ) 229, 10
. 1990
17 24
. 2002
.
-
- 66 -
()
2
.
-
- 67 -
38%(88) ,
32%(73), 20%(45), 8%(18), 2%(5)
.
, ,
.
.
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.
59, 13, 11, 10,
9, 8 , 7
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-
- 68 -
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KY 12 , JH 10, MD 8, YJ 8, KH 7,
WS, CS, DJ, SH, WS 5 .
,
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-
- 69 -
/
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.
, 1992 1993
1997 1999
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- 70 -
//
1.4 , 1
1.4 , 1.7
, 1 1.7
.
()
()
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,
, 1992 1995 1
, 1998 2000 2
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-
- 71 -
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.
-
- 72 -
10 1,047 ,
1992 1993 ,
1996 1998
.
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.
(Journal Article) 76% 793, Conference
23%(239) Proceedings 1%(15) .
-
- 73 -
()
, 1047 .
45%(483)
, 1 22%(228) 2
. 14%(143), 11%(112)
(Dust Collector)
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2%(18)
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()
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, 13
.
-
- 74 -
(1047
) 44% 464 , 2
( 89) 5 .
, , , 7~9 13
.
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.
'Journal of Aerosol Science' 84, 50
'Filtration & Separation'. ,
6
.
-
- 75 -
()
9
.
-
- 76 -
5 , 3 1.
Anon 3 28 1
, 10 'Brown RC' 2, Cooper, Douglas W. 9
3, Pui, David Y.H. Liu, Benjamin Y.H. 8
4 . Inculet, Ion I. Sioutas, C. Devinny, Joseph
S. Wake, D. 6 9 .
()
10
.
1,047 624 ,
(1047) 44% 464 7 1~5
, , , 1 4 5
.
-
- 77 -
Univ of Minnesota 16 1, Univ of California Univ of
Chncinnati 10, Texwipe Co 9, Univ of Southern California 8
, Universitaet Karlsruhe 8 4,
Univ of Tennessee Research Triangle Inst, Health and Safety Lab,
Universite de Sherbrooke 7 5 .
() ///
(), , ,
.
///
-
- 78 -
() , 1991
1993 1996 1998
.
.
(/) 2.5,
(/) 3.1, (/)
1.3, (/) 1.5
. , 1 2.5,
3.1, 1.3 ,
1 1.5 .
-
- 79 -
()
()
.
, 1991 1993 1994 1995
, 1996 1998
.
.
(1)
(DB)
(www.kisti.re.kr)
(KUPA) (KPTN), (KUUM, KUMO),
(USPA), (EUPA) (JEPA) ,
DB
.
-
- 80 -
(2)
1991 1 2002 7 ,
, , ,
, ,
.
,
(, ,
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1 6 .
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4) ?,
, (IPC)
b01d(), f24f(), b60h-001?( , ), b60h-003?( ),
b03c-003?( ) h011-021?( ).
-
- 81 -
, ,
1) air adj (filter? or filtration?1 or purifi? or clean?)/ti.
2) dust adj2 (abatement?1 or collect? or filter? or filtration or separat?)/ti.
3) dust adj2 (abatement?1 or collect? or filter? or filtration or separat?)/ti.
4) cleanroom?/ti or (dean adj room?/ti)
, (IPC) b01d or b011 or b03c or b60h or f24f.
,
(vacuum adj cleaner?) .
.
-
- 82 -
.
(1)
6,823 ,
( ) .
58%(3,904) ,
( ) 23%(1,581) , 10%(707
) 9%(631) .
,
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3~4 2,500 ,
.
()
-
- 83 -
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.
, 11% ,
1% ,
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.
()
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, .
782 165 4
.
-
- 84 -
/ /
. 1996 1997
, 1997 , 1996
. 1996 ,
.
/
-
- 85 -
2001 2002 ,
1 6 ,
.
()
.
-
- 86 -
,
3 6
, 2000 2001
.
, 1990 60
77 .
()
, 1991 1998
93 1998 . 1999
2000 .
-
- 87 -
()
, 1990
356 423
.
(2)
6,823 , 7,204
, .
,
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-
- 88 -
()
(EC)
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45%(204) , 17%(77), 7%(32),
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, , ,
44, 38, 17 .
()
( )
, 1,780 ( 1,581)
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-
- 89 -
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9 .
() 147 1, () 130 2
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- 90 -
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.
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4 .
6 , 2 1
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GmbH 4 .
-
- 91 -
()
707
, 745 ( 707
).
60%(426) ,
16%(114), 7%(47), 4%(30),
3%(24), 3%(23), 3%(20) .
5
.
-
- 92 -
49 Donaldson Co Inc
, Dana Corp 14 1 Donaldson Co
1/4 , Carrier Corp 11 3, Air Kontrol Inc 6
4 .
Envirnonmental Elements Corp, Honeywell Inc, Minnesota Mining & Mfg. Co
Electric Power Research Institute Inc 5 5
.
3
, 7 .
-
- 93 -
() Filterwerk Mann & Hummel GmbH 13
1, ABB Flakt AB, Funai Electric Co Daikin
Industries Ltd 6 2, Firma Carl
Freudenberg Taisei Corp 5 3
.
()
(EPO) 631
, 726
.
31%(224) ,
19%(135), 18%(128), 7%(53),
3%(22, 20) .
5 .
-
- 94 -
(EC) ,
5 9 .
4 3
. Filterwerk Mann & Hummel GmbH 28
1, ABB FLAEKT AB 16 2, FLS
MILJO A/S Metallgesellschaft AG 7 3,
Loreth, Andrzej TL-Vent AB Meissner & Wurst GmbH & Co
6 4 .
5 . 7,
3, .
-
- 95 -
Donaldson Co Inc 38 Daikin Industries Ltd 24
1~2 ,
. Minesota Mining & Mfg. Co AIR-MAZE Corp
7 6 3~4 , Joannou, Constantions J.
ASANO, Jun NITTO DENKO Corp 5 5
.
()
,
4,415 ( 3,904).
99.2%(4,380) , 0.8%(35
) 14, 8, 7 .
-
- 96 -
10
, 1/3
.
Matsushita Electric Ind Co 287 1, DAIKIN IND
LTD 225, MATSUSHITA ELEC WORKS LTD 140, SANYO ELEC CO
126, MITSUBISHI HEAVY IND LTD 107, HITACHI PLANT ENG & CONSTR
CO 98, HITACHI LTD 80, MITSUBISHI ELEC CORP 79,
MATSUSHITA SEIKO CO 63, TOSHIBA CORP 61
.
-
- 97 -
,
() 10
1, CARL FREUDENBERG FA 2 2 .
Korea Institute of Energy Research LG Electron Inc 1
.
(3) (IPC)
(IPC)
.
6,823
, 7 (IPC) (8)
.
-
- 98 -
IPC ()
, B01D-046 2,470 ,
B03C-003 1,702, F24F-007 1,093, B01D-053 864, A61L-009 484
, B01D-039 472, B60H-003 396 .
B01D-046 '
' ,
(IPC) .
()
() IPC
7 , 4
3.
-
- 99 -
(IPC)
A61L- / / / , ,
9/00 ,
B01D-
29/00
35/00 : :
39/00
46/00
47/00 ,
50/00
53/00 : :
B03C- /
3/00 , ,
B60H- , ,
3/00
F02M-
35/00 ,
F24F- / / / (air current)
3/00 1 1 2 :
7/00
H01L- /
21/00
-
- 100 -
() IPC
2 ,
B01D-046 455 , B03C-003 345
.
.
B01D-046 '
' , B03C-003 '
' .
3
, F02M-035 105, H01L-021 67, B01D-047 59
.
.
-
- 101 -
()
IPC 7
, 4 3 .
,
B01D-046 B03C-003
B01D-053 B01D-039 , B01D-046 244
B03C-003 150 . 3
B01D (029, 035 & 050)
.
IPC
-
- 102 -
()
IPC 7
, 4 3 .
,
B01D-046 B03C-003 B01D-053 B01D-039
. B01D-046 221, B03C-003 194 ,
.
3 B01D-035 F02M-035 F24F-003
, F24F-003
7 .
IPC
-
- 103 -
()
IPC 7
, 57%
.
B01D-046 1,550
, F24F-007 1,040, B03C-003 1,013, B01D-053 660
, 4
.
IPC
-
- 104 -
3.
, ,
,
.
,
, ,
,
, .
(GR) ,
() .
,
1992 1995 1 1998
2000 2 .
, 1990 1.4,
() 1.5 , 1.7
.
38%, 32%, 70%
. () , "
" B01D-046 "
" B03C-003
(IPC) ,
. ,
.
-
- 105 -
,
. (NT), (ET),
(BT)
.
,
1996 1998
.
45% ,
22%, 14% .
1990
1.3 ,
B01D-046 B03C-003 56%
.
-
- 106 -
, ,
(GR) ()
.
, (NT), (ET), (BT)
.
-
- 107 -
4
,
. ,
.
1.
.
(Sick Building
Syndrome) , ,
.
. ,
. , , 4
. , ,
, .
-
- 108 -
,
.
, 1995 65.3%
, 43.8% ,
.
, , , ,
.
-
- 109 -
, , ,
,
, , ,
,
,
: 2000 , , 1996
.
, , , ,
, , .
,
. ,
, , ,
, , , , .
.
-
- 110 -
. ,
.
,
. ,
.
(1)
1970 ,
1990
, , , ,
.
,
. ,
,
.
, ,
,
.
-
- 111 -
(2)
VOCs(Volatile Organic Compounds), , ,
.
,
, . ,
1 GIGA DRAM
, , ,
(AMC: Atomic Molecular Contamination) GIGA
Ultra .
-
- 112 -
, LCD, , , ,
,
, , , .
2.
.
,
. , ,
.
200
. , 1930
,
.
.
,
.
-
- 113 -
, ,
.
,
. ,
,
.
, ,
, , , IAQ(Indoor Air
Quality) IAQ
. (EC) SCANVAC(, , ,
HVAC, , , )
,
.
.
-
- 114 -
, .
OSHA(Occupational Safety and Health Administration)
ACGIH(American Conference of Governmental industrial Hygienists)
, ASHRAE(American Society of Heating,
Refrigerating and Engineers, Inc.) ASHRAE Standard 55-1992
, Standard 62-1989
.
, WHO 1987
' (Air Quality Guidelines for Europe)'
, WHO
1997 . , (Health
Risk Assessment) ,
.
,
, , ,
.
-
- 115 -
OSHA (TWA:
Time Weighted Average Concentration), (STEL: Short Term
Exposure Limits), (PEL: Permissible Exposure Limits)
, ACGIH (TLV: Threshold Limit Value) ,
NIOSH(National Institute for Occupational Safety and Health)
(REL: Recommended Exposure Limits) .
(VOCs: Volatile Organic Compounds)
. FISIAQ(Finish Society of Indoor Air
Quality and Climate) 1995
0.2~0.6/ ,
20/ .
, , , , ( , , ,
) .
, .
"" ,
(), ""
.
, .
-
- 116 -
(IAQ)
(Indoor Air)
(Ambient Air)
(Workplace)
(CO)
10ppm(/)20ppm()8.6ppm(WHO Europe 8 )25ppm(WHO Europe 1 )51ppm(WHO Europe 30)86ppm(WHO Europe 15)
9ppm(EPA, 8 )35ppm(EPA, 1 )
5 0 p p m ( O S H A ,TWA)50ppm()10ppm(//
(HCHO)
0.1ppm(ASHRAE)0.081ppm(WHO Europe)0.1ppm(:)
1ppm(ACGIH, TLVTWA)2 p p m ( A C G I H ,STEL)2ppm( )
(NO2)
0.21ppm(WHO Europe 1 )0.075ppm(WHO Europe 24 )
0.055ppm(EPA, 1)
3ppm(ACGIH, TLVTWA)5 p p m ( A C G I H ,STEL)5ppm( )
(O3)
0.05ppm(ACGIH 8)0.03( 8)0.08ppm(WHO Europe 8 )0.1ppm(WHO Europe 1 )
0.12ppm(EPA, 1)0.06ppm( 1 )
0 .1ppm(ACG IH ,TLV TWA)0 . 3 p pm ( ACG I HSTEL)0.1Oppm( )
(Radon)
4pCi/ml(EPA/)2.7pCi/ml(WHO)2.9pCi/ml(, )
(SO2)
0.12ppm(WHO/STEL, 1)0.18ppm(WHO/STEL, 15)
0.03ppm(EPA, )0.14ppm(EPA, 24)0.5ppm(EPA, 3)0.04ppm( )
2ppm(ACGIH, TLVTWA)5 p p m ( A C G I H ,STEL)5ppm( )
(TSP)
0.15/(/)0.10.12/(WHO, 8)
0.075/(EPA, )0.26/ (EPA,24)
0.15/ ( )
-
- 117 -
(Indoor Air)
(Ambient Air)
(Workplace)
(CO2)
1,000ppm( )920ppm(WHO Europe)1,000ppm(ASHRAE)
1,000ppm()5,000ppm(OSHATWA)5,000ppm( )
(Asbestos)
0.01f/cc( )
0 . 1 f / c c ( O S H APEL)2f/cc( )
(VOCs)
0 . 2 ~ 0 . 6 / ( FISLAQ)
10ppm(OSHATWA)0ppm(NIOSHTWA)10ppm(ACGIHTLV)0.63(EPA)
200ppm(OSHATWA)100ppm(NIOSH TWA)100ppm(ACGIH TLV)21(EeropeamWHO)
100ppm(OSHATWA)100ppm(NIOSH TWA)100ppm(ACGIH TLV)
, ,
, .
, , (loading) ,
, , ,
.
SMIF(Standard Mechanical Interface) ,
(clean tube) (Mini-environment)
. (Bio-contamination Control)
.
-
- 118 -
.
(1)
, .
()
1986 5 ''
7 . 1992
''
5 , 1996 12 '
' , 7
. , ''
1999 2 '' .
.
.
,
.
.
-
- 119 -
2000( )
-
3000 2000 , ,2000 ()
-
- - -
()
- - -
-
: http://www.me.go.kr
()
'' , , ,
, , , ,
.
, ,
, ,
. ,
, . ,
.
-
- 120 -
2 GBC(Green Building Challenge), IEA(The
International Energy Agency) , ,
. , ,
,
,
. , 19 GBC(Green Build Challenge)
, IEA
.
- - ESSD -
- - -
- -
- ( , , )
-
- 121 -
1999 7 GBC .
, , , ,
, 1 40%
. , ,
. ''
' '
2001 12 ' ' , .
()
90%
.
/
-
- 122 -
22 54
(95.4%) (, 2001),
.
,
.
(2)
,
.
()
. KS C 9314 ""
,
. , JIS C 9615 "Air Cleaners"
.
. ,
,
.
-
- 123 -
()
23 , 10
. , '
' 60%
, 6%
. ,
1% .
66% , 27%
,
.
,
.
-
- 124 -
()
. ,
,
.
,
,
.
.
,
.
, 1980
. 1G DRAM, 300mm , 0.13
, GIGA
. GIGA
.
, ,
. ,
. ,
,
.
-
- 125 -
3.
,
.
.
( , ,
)
,
. ,
, , .
-
- 126 -
1995
, 1997
. , 1998
, 1999 . 2000
, 2001
.
2001
, .
, 5 , 4
. ,
.
()
-
- 127 -
,
.
,
. , 2001
.
,
.
, ,
.
(1)
1997 3
. , 2001 10% .
.
1994 4,880 , 1997 6,480
. ,
1998 2000 6,350 .
2001 ,
.
-
- 128 -
( )
90%
, 8~9%, .
2000 6.6% ,
2001 .
1996 2000
, .
,
.
-
- 129 -
()
, 2001
. ,
2000 2001 ,
2000 53.1% 2001 52.5% ,
2000 40.3% 2001 47.5% .
, . ,
.
-
- 130 -
-
- 131 -
.
, 2001
29.9% .
,
.
(2)
2001 () 13%,
10%, 9% , , , ,
. 6 50%
, 50% .
()
-
- 132 -
()
15%, 12%, 10%
, 9%, 7%, .
, , (:
)
.
(3)
10 100
, 50~60 , HEPA
10 . ,
,
.
-
- 133 -
, .
1) (: , )2) , 3) , 4)
(4)
.
. 2001
, .
.
-
- 134 -
(, )
, ,
. .
, , .
HEPA , 99.9% ULPA
.
ULPA
,
. HEPA
4 4 ( 13)
, 4
.
-
- 135 -
, . ,
,
.
.
,
,
.
, ,
.
, VOC, .
2001 8,
4 (, , , )
. 5
. , C0
.
-
- 136 -
.
1996 ' '
, . , 2000
,
. , 2002
3 , , , ,
.
,
.
(1)
()
2%
,
. ,
2 .
(2002 5 14) , 2000 1,700,
2001 1,250 , 2001 6% .
20% ,
10~15% .
50%
.
-
- 137 -
()
, 80 1M bite
DRAM ,
.
.
-
- 138 -
.
, 1992 200
, class 10
40% . ,
, 67%, 32%,
1% , , LCD, , ,
2/3 , ,
, 1/3 . ,
62%, 33%
, .
(2)
LG, , ,
, . 1 5
. LG 4~8 14 8, 8~12 28
. , 30~40 98, 40~60 1 35
. . 10
13 5, 10 40 5, 20
48 6. ,
.
. ,
.
-
- 139 -
(3)
IMF 1998 65 , 2002
90 . (), (), ,
, ()JM . , LG,
,
. ,
.
()
2002,
, 30~40% .
"" ,
. ,
, 7
. 2001
1 6 2002 2 .
-
- 140 -
()
10%~15% , 8~120
. , ,
.
, .
,
, VDT ,
,
.
()
, , ,
10%~20% .
. --
(HEPA)- 4 ,
3M 0.3 99.9% .
2001 120 2002 4
65 . 2
.
-
- 141 -
() ()
35~90 ,
. , , ,
(HEPA) ,
, .
() JM
JM 130 .
,
HEPA
. ,
1 8% .
0.3 99.97%
HEFA , ,
.
-
- 142 -
.
(1)
, 2001 , 2001~2005
20.6%(CAGR 4.79%), 2005~2010 26.3%(CAGR 4.78%) .
, 2005 806, 2010 1,018 .
(2)
2001 1,250 ,
2001 .
()
-
- 143 -
1)
5 20% .
5 2007 3,732 .
, 2000~2001 16.8% ,
, 2005 2,326, 2007 3,174
.
,
.
1) J, D, C
-
- 144 -
4.
2001 CO
.
.
,
. ,
,
.
,
,
.
,
.
-
- 145 -
, , ,
, . , CO
.
.
.
,
. , ,
,
.
,
.
,
.
,
6%~9% . ,
, ,
VP(Virtual Prototyping) ,
.
-
- 146 -
5.
,
. 1990 IMF
, 200
. ,
.
,
.
, ,
.
-
- 147 -
5
,
. ,
, ,
.
, ,
.
, ,
, VOCs
. , ,
.
, ,
,
,
.
-
- 148 -
, 1,000 20%
, 5 .
,
,
,
.
, ,
.
,
.
-
- 149 -
1. , ' ' ,
221 , 2002 4
2. , ' ', 2001
3. , '21 ', 2000
4. , '8
', 2002
5. , ' ', 2002
6. , ' ', 2002
7. , ' ', 1999
8. , ' ', 2001
9. , ' ', 2000
10. , ' ', 2002
11. , ' ', 1999
12. , ' ', 2002
13. , ' (//)', 2002
14. , ' ', 2001
15. , ' ', 2001
16. KEI, '' 3 1(7) 2001
17. , ' ', 1997
-
- 150 -
18. , ' ', 2002
19. , 2000, '21 ', ,
13, 1, pp.15~33
20. , 1999, 'GIGA Ultra ',
21. , , , , 1998, ' ',
, 11, 1, pp. 40~68
22. , 2000, ' , ',
, 13, 1, pp.34~64
23. , 1998, ' ', , 11, 2
, pp.59~70
24. , 1998, '', , 11, 1
, pp.21~26
25. , 1998, '', , 11, 1,
pp.27~35
26. 1997, ' ', 9 4
27. , 1997, ' ', /
28. , 1997, ' ()'
29. , 2002, ' ',
202-06-117
30. , 1998, ' ',
11 2, pp.40~49
31. , 1995, 'Air Cleaner', JIS C 9615
32. , 1994, '', KS C 9314
-
- 151 -
33. , 1995, ' ', JEM 1467
34. , 2002, ' ', 15 1, pp.19~28
35. , 2002, ' ', 15 1, pp.54~66
36. , 1990, ' (IAQ) Air Cleaning ',
19 6, pp.342~351
37. , 1995, 'IAQ ',
(12), pp.101~123
-
- 152 -
1 1. 2. 3.
2 1. 2. . .
3. . . . .
4. . . . .
3 1. . .
2. . .
3.
4 1. . .
2. . .
3. . . .
4. 5.
5