V:::14/04/10

(WEDG)(Micro-EDM)V-cut

1

V

V-cut

VV-cut

2

6

CNC(MIRDC)(ARISTECH)MD-22SKD1135m

7

9

V(V)90V90V90V(I)0.3A0.3A0.3A(on)0.5s0.5s2s4s6s0.5s(off)4s4s15s30s45s15s1~3m85nm50nm35nm50nm50nm(g/l)0.3g/l0.7g/l1g/l3g/l7g/l0.7g/l0.7g/l

103.1

0.1A0.3A0.5A

1A2A

11

7g/l3g/l1g/l0.7g/l0.3g/l35nm50nm85nm1~3m

(:90V/on:0.5s/off:4s)12(:90V/0.3A/on:0.5s/off:4s)

13

7g/l3g/l1g/l0.7g/l0.3g/l35nm50nm85nm1~3m

(:90V/0.1A/on:0.5s/off:4s/)141/2

(:90V/on:0.5s/off:4s)152/2 (:90V/0.3A/on:0.5s/off:4s)

85nm0.3g/l 35nm0.3g/l (:90V/0.3A/on:0.5s/off:4s)161/2

(:90V/0.3A/on:0.5s/off:4s) 172/2

(:90V/on:0.5s/off:4s) 181/2 (:90V/0.3A/on:0.5s/off:4s)

(90V0.3A on0.5s off4s)19

(85nm/3g/l/90V/0.3A/on:0.5s/off:4s)20(EDS)

3.2 21(:90V/0.3A/50nm/0.7g/l)

23(:90V/0.3A/50nm/0.7g/l)

24Ra(:90V/0.3A/50nm/0.7g/l)

25(:90V/0.3A/50nm/0.7g/l)

26(90V0.3A80nm0.7g/l)

on=0.5son=2son=4son=6soff =4soff =15soff =30soff =45s

50nm0.7g/l

0.5s15s

EDS27

**