1. Agilent 7900 ICP-MS Agilent 1260 HPLC
Agilent ICP-MS
Agilent ICP-MS ICP-MS Agilent ICP-MS 2 ICP-MS
Consci AsH3 GC-ICP-QQQ
FDA HPLC ICP-MS
ICP-QQQ ppq 15 nm
1 Agilent ICP-MS
2-3 GC-ICP-QQQ III-V
4-5 FDA HPLC-ICP-MS
6 ICP-QQQ
7 ICP
8 ICP-MS/MS Spectroscopy Agilent ICP-MS
2
GC-ICP-QQQ III-V William M. Geiger1, Blake McElmurry1, Jesus Anguiano1, Mark Kelinske2. 1Consci, Ltd., Pasadena, Texas, USA, 2Agilent Technologies Inc.

Si Si 1 III V III-V III-V AlGa InIII NPAs SbV GaAs AlGaAsInGaAsN AsH3
III-V Si III-V HEMTFET
III-V 1 Si LED VCSEL III-V
LED * LED 3 4 III-V PV
*
1. LED

SiPSGe n III-V SiH4PH3H2S GeH4 SbH3H2SeSnH4
3
GeH4 1 ppb GC ICP-MS ppb GeH4


2 SiH4PH3H2S GeH4 24 ppb 1

GC-ICP-QQQ ppbv SiH4PH3H2S GeH4 GC 1 1
H2 O2 MS/MS 8900 ICP- QQQ 1 DL


16 17 19


18
1
1. GC-ICP-QQQ SiH4GeH4PH3 H2S


2020 8 FDA iAs1 iAs 100 µg/kgppb 2016 4 iAs cGMP

As 1As
As

As As As IIIAs V MMADMA As(III) FDA iAs As
As
FDA As As 100 ppb As iAs FDA EAM 4.112HPLC-ICP-MS iAs As(III) As(V)
As iAs iAs iAs 100 ppb 402 (a)(1) 1
Agilent HPLC-ICP-MS
Agilent ICP-MS ICP-QQQ Agilent HPLC ICP-MS MassHunter
Agilent HPLC-ICP-MS EAM 4.11 31 As(III) As(V) 4 As 34 HPLC 4 As ICP-MS 1
2020 10 - 82
5
1. Agilent HPLC-ICP-MS 5 As 4
2. HPLC-ICP-MS As(III) As(V)
HPLC-ICP-MS LOD LOQ %RSD
Agilent HPLC-ICP-MS iAs 56 As(III) H2O2 As(V) iAsAs(III) As(V) As(V) 2 EAM 4.11 10 HPLC-ICP-MS EAM 4.11 LOD LOQ 2 2 iAs FDA 100 ppb
ND =

1. US FDA, Guidance for Industry: Action Level for Inorganic Arsenic in Rice Cereals for Infants, accessed Sept. 2020
2. US FDA EAM 4.11 Arsenic Speciation in Rice and Rice Products Using HPLC-ICP-MS, accessed Sept. 2020
3. R. Juskelis, W. Li, J. Nelson, J. C. Cappozzo, J. Agric. Food Chem. 2013, 61, 45, 10670–10676
4. R. Juskelis, J. Cappozzo, J. Nelson, Agilent publication, 5991-2568EN
5. P. J. Gray, C. K. Tanabe, S. E. Ebeler, J. Nelson, J. Anal. At.Spectrom., 2017, 32, 1031-1034
6. C. K. Tanabe, S. E. Ebeler, J. Nelson, Agilent publication, 5991-9488EN
2020 10 - 82
1. 6 As HPLC-ICP-MS 2 μg/kgppb6

A_2 11.2 ND 62.3
B_2 14.9 ND 56.4
C_2 36.0 ND 113.5
D_2 15.1 ND 103.6
E_2 39.0 2.3 82.1
F_2 46.7 9.0 90.4
6

Agilent ICP-MS 78 1
2020 ICP-MS 9 10 2
ICP-QQQ
1
• Single Particle ICP-MS Fe
2
• ICP-QQQ
ICP-MS 1 ICP-MS ppq 15 nm Fe3O4 ICP-QQQ
ICP-MS ICP-QQQ Cl ICP-MS ICP-MS/MS
ICP-OES ICP-MS2Agilent GC/MS LC TOF
1. Agilent ICP-MS Journal issue 78, 2019, Agilent publication 5994-1490EN
2. Measuring Inorganic Impurities in Semiconductor Manufacturing, 5991-9495EN
ICP Ed McCurdy and Ross Ashdown, Agilent Technologies, Inc.
ICP Q&A Q&A

Spectroscopy
1. 1 ICP-OES ICP- MS
ICP-OES HCl Ag Hg ICP-MS 1
2. 2 ICP QC CRM
IntelliQuant Neb Alert ICP-MS
3. ICP IntelliQuant
ICP-MS As Se ICP-MS ICP-MS ICP-MS/MS

ICP-MS/MS Spectroscopy
Spectroscopy ICP-OES and ICP-MS Techniques for Today s Spectroscopists 2020 9 ICP-MS Ed McCurdyGlenn WoodsBastian Georg Accurate, Low-Level Sulfur Analysis by ICP-MS Using MS/MS with Oxygen Reaction Cell GasMS/ MS ICP-MS
ICP-MS ICP-MS ICP-MS/MS
MS/MS SO+ 31P 32S16O+
MS/MS 1 u 34S16O+ 32S18O+ MS/MS 34S 32S
https://www.spectroscopyonline.com/view/accurate-low- level-sulfur-analysis-by-icp-ms-using-ms-ms-with-oxygen-reaction-cell-gas
PDF https://cdn.sanity.io/files/0vv8moc6/spectroscopy/ceb db01a7c434e23e03df6b00fd1ce73e0db6ab6.pdf
Agilent ICP-MS
• Characterization of Rare Earth Elements used for Radiolabeling Applications by ICP-QQQ: Analysis of gadolinium (III) oxide and terbium using ICP-MS/MS with oxygen cell gas, 5994-2389EN • Determination of Trace Impurities in Electronic Grade Arsine by GC-ICP-QQQ: Sub-ppb detection limits for hydride gas contaminants using a single column, single injection volume, and multi-tune method, 5994-2213EN
www.agilent.com/chem/jp

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