Bertrand ArdouinThomas ZimmerMichael Schröter
XMOD Technologies:Hicum toolkit & extraction services
HICUM Workshop, June 6 - 7, Dresden
XMOD: Presentation
How to choose a compact model ?
Measurement, Extraction,
Modelling Services and Consulting
Hicum “Aperitif toolkit” Simple approach
OUTLINE
HICUM Workshop, June 6 - 7, Dresden
Who ?
TEAM
Bertrand ARDOUIN, PhD, University Bordeaux Laboratoire de Microélectronique IXL
Thomas ZIMMER, Associate Professor, University Bordeaux, Laboratoire de Microélectronique IXL
Michael SCHRÖTER, Professor, T. University Dresden, chair for electron devices and integrated circuits
HICUM Workshop, June 6 - 7, Dresden
Where ?
XMOD is here
Laboratoire de Microélectronique IXL
HICUM Workshop, June 6 - 7, Dresden
not here
What ?
Co-operation and support from : � Technical University Dresden� University Bordeaux
A Start-up company in the Bipolar modelling domain :
� Offering parameter extraction software
� Provide extraction and modelling services
(parameter extraction, on wafer measurements, …)
� Hicum (SGP and VBIC models also supported)
� Single transistor and scaling approach
� Custom models for specific applications (HDL-A)
HICUM Workshop, June 6 - 7, Dresden
What ?
0
5
10
15
20
25
30
35
40
45
0.0001 0.001 0.01 0.1Ic (A)
f T (
GH
z)
meas
hicum
NWA HP 8510C (HF, CV)
HP 4155B (DC)
C-V meter HP 4284 (C-V)
T controler -60 °C up to 200 °C
0
0.001
0.002
0.003
0 1 2Vce (V)
Ic (
A)
measurehicum
Semi-automatic prober Karl Suss PA200
On wafer measurement capabilities
HICUM Workshop, June 6 - 7, Dresden
What ?
The “Hicum Aperitif Toolkit”Single transistor methodology
“In House” ICCAP tools for complete parameter extraction
HICUM Workshop, June 6 - 7, Dresden
Why ?
Efficiency: ability to model complex technologies
Simplicity:Time requirement= save money
VBIC
Gummel-PoonHicum
Advanced compact models
Mextram
HICUM Workshop, June 6 - 7, Dresden
Why ?
Efficiency: ability to model complex technologies
Simplicity:Time requirement= save money
VBIC
Gummel-PoonHicum
Advanced compact models
Mextram
HICUM Workshop, June 6 - 7, Dresden
Why ?
Efficiency: ability to model complex technologies
Simplicity:Time requirement= save money
VBIC
Gummel-PoonHicum
Advanced compact models
Mextram
HICUM Workshop, June 6 - 7, Dresden
Why ?
Efficiency: ability to model complex technologies
Simplicity:Time requirement= save money
VBIC
Gummel-PoonHicum
Mextram
HICUM Workshop, June 6 - 7, Dresden
Why ?
Efficiency: ability to model complex technologies
Simplicity:Time requirement= save money
VBIC
Gummel-PoonHicum
Mextram
Scalability and Physical meaning not taken into account
Single transistor strategy
HICUM Workshop, June 6 - 7, Dresden
Why ?
HICUM Workshop, June 6 - 7, Dresden
There’s a need for companies in this domain:
� Help to accelerate the FIRST use of Hicum and
help to establish a wide use
� Provide complete extraction services for
companies having no experience in the
bipolar domain (SiGe)
� Provide consulting for modelling very High
frequency devices, need of scaling, modelling
precision, statistics, temperature, ...
Centralise Bipolar experience
Goals of the “Hicum Aperitif Toolkit”
? HicumGummel-Poon
Switch
Learn a new model and new tools
Complex scaling approach
New test structures on the wafers
HICUM Workshop, June 6 - 7, Dresden
Goals of the “Hicum Aperitif Toolkit”
HicumGummel-Poon
Switch
“Hicum Aperitif Toolkit” allows to use the single transistor strategy (SGP like)
Decouple Scaling from parameter extraction
No specific test structures
Simplified approach
HICUM Workshop, June 6 - 7, Dresden
Goals of the “Hicum Aperitif Toolkit”
“Hicum Aperitif Toolkit” allows to:
A smooth transition from SGP to Hicum
Obtain efficient and physically meaningful parameter sets for Hicum(from direct extraction)
Evaluate Hicum without too much effort
HICUM Workshop, June 6 - 7, Dresden
Description of the toolkit
Probes
ICCAP measurements
toolkit
Instruments
Standard Bipolar
Measurement Database
Hicum “Aperitif” ToolkitICCAP
Gummel-Poon, VBIC,
MEXTRAMTRADICA and BIPAX
HICUM Workshop, June 6 - 7, Dresden
Description of the toolkit
ICCAP « Hicum aperitif Toolkit »New GUI interface
HICUM Workshop, June 6 - 7, Dresden
Description of the toolkit
Main window
Import data
Define
Select mdm file + view header
Simply select directory
Import
HICUM Workshop, June 6 - 7, Dresden
Description of the toolkit
Temperature
Comments on technology
Define things
Description of the toolkit
Extract
Extraction steps
Parameter group Edit parameters
Status
RunHICUM Workshop, June 6 - 7, Dresden
Description of the toolkit
Export Results
Export Directory
Utilities
Create HTML documentationHICUM Workshop, June 6 - 7, Dresden
Description of the toolkit
Optimize
Get from plots
Tune
HICUM Workshop, June 6 - 7, Dresden
Description of the toolkit
HICUM Workshop, June 6 - 7, Dresden
Description of the toolkit
HICUM Workshop, June 6 - 7, Dresden
Description of the toolkit
HICUM Workshop, June 6 - 7, Dresden
Description of the toolkit
HICUM Workshop, June 6 - 7, Dresden
Description of the toolkit
HICUM Workshop, June 6 - 7, Dresden
0
5
10
15
20
25
30
35
40
45
0.0001 0.001 0.01 0.1Ic (A)
f T (
GH
z)
mesures
hicum
BiCMOS SiGe 0.35 µm ST Microelectronics
fT = 45 GHz
0
10
20
30
40
50
60
70
80
90
100
110
120
1.E-08 1.E-06 1.E-04 1.E-02Ic (A)
Be
ta
meas
hicum
Parameter extraction: Results
fT (Ic) (Vce)
HICUM Workshop, June 6 - 7, Dresden
Parameter extraction: Results
Ic (Vce)Ic (Vbe), Ib (Vbe)
0
0.001
0.002
0.003
0 1 2Vce (V)
Ic (
A)
mesurehicum
1E-10
1E-09
1E-08
1E-07
1E-06
1E-05
0.0001
0.001
0.01
0.1
0.4 0.5 0.6 0.7 0.8 0.9 1Vbe (V)
Ic, I
b (A
)
Ic (mesure)
Ic (hicum)Ib (mesure)
Ib (hicum)
BiCMOS SiGe 0.35 µm ST Microelectronics
fT = 45 GHz
HICUM Workshop, June 6 - 7, Dresden
Parameter extraction: Results
BiCMOS SiGe 0.35 µm ST Microelectronics
fT = 45 GHz
HICUM Workshop, June 6 - 7, Dresden
1.E-07
1.E-06
1.E-05
1.E-04
1.E-03
1.E-02
1.E-01
1.E+00
0 0.5 1 1.5 2 2.5 3VCE (V)
g 0 (
S)
Mesures Hicum
g0 = d IC / dVce
Parameter extraction: Results
fT (Ic)
0
10
20
30
40
50
60
70
80
0.0001 0.001 0.01 0.1Ic (A)
f T (
GH
z)
mesure
hicum
BiCMOS SiGe 0.25 µm ST Microelectronics
fT = 75 GHz
HICUM Workshop, June 6 - 7, Dresden
Parameter extraction: Results
BiCMOS SiGe 0.25 µm ST Microelectronics
fT = 120 GHz
HICUM Workshop, June 6 - 7, Dresden
0
20
40
60
80
100
120
140
1.E-04 1.E-03 1.E-02 1.E-01IC (A)
f T (
GH
z)
Conclusion
XMOD provides Software, Consulting and
Services for Bipolar Modelling community
“Hicum Aperitif Toolkit” is ready for
evaluation
Simplified approach allows to familiarise
with the model and extend its interest
Scaling and statistics planed
HICUM Workshop, June 6 - 7, Dresden