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4º CURSO DE TECNOLOGIA DO VÁCUO
PARA INDÚSTRIA E LABORATÓRIOS
20 - setembro - 2016
UNIVERSIDADE DE SÃO PAULO - INSTITUTO DE FÍSICA
BOMBAS DE VÁCUO - 2
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BOMBA TURBOMOLECULAR
![Page 11: BOMBAS DE VÁCUO 2 · 1. to-das as valvulas fechadas 2. cigar bomba mecÅnica 3. verificar pressÅo va bombear a bomba de difusÅo ssssssss 1. abrir valvula vp 2. prÉ-vÅcuo na bomba](https://reader033.vdocuments.pub/reader033/viewer/2022060516/60193c6aa6662a1aa3032a86/html5/thumbnails/11.jpg)
IFUSP - DFN
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BOMBA TURBOMOLECULAR (HORIZONTAL) - ROTOR
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BOMBA MOLECULAR
(HOLWECK) - MDP
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BOMBA MOLECULAR (MDP)
BOMBA TURBOMOLECULAR
+
MDP
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TURBO
+
MDP
(ROTOR)
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IFUSP - DFN
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BOMBA IÔNICA
ÓRBITRON
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IFUSP - DFN
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IFUSP - DFN
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IFUSP - DFN
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BOMBA DE
TITÂNIO
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BOMBA DE SUBLIMAÇÃO DE TITÂNIO
DURAÇÃO DOS FILAMENTOS DE TITÂNIO (SUBLIMÁVEIS):
10E03 Torr DIAS
10E06 Torr SEMANAS
10E07 Torr MESES
10E08 Torr ANOS
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BOMBA IÔNICA
MAGNÉTICA
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IFUSP - DFN
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BOMBA IÔNICA MAGNÉTICA
![Page 43: BOMBAS DE VÁCUO 2 · 1. to-das as valvulas fechadas 2. cigar bomba mecÅnica 3. verificar pressÅo va bombear a bomba de difusÅo ssssssss 1. abrir valvula vp 2. prÉ-vÅcuo na bomba](https://reader033.vdocuments.pub/reader033/viewer/2022060516/60193c6aa6662a1aa3032a86/html5/thumbnails/43.jpg)
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PRIMEIRA BOMBA IÔNICA VARIAN
![Page 46: BOMBAS DE VÁCUO 2 · 1. to-das as valvulas fechadas 2. cigar bomba mecÅnica 3. verificar pressÅo va bombear a bomba de difusÅo ssssssss 1. abrir valvula vp 2. prÉ-vÅcuo na bomba](https://reader033.vdocuments.pub/reader033/viewer/2022060516/60193c6aa6662a1aa3032a86/html5/thumbnails/46.jpg)
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BOMBA IÔNICA RIP (ROUND ION PUMP)
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BOMBA IÔNICA RIP - VISTA INFERIOR
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REVESTIMENTO NEG
1 µm
ímãs
cátodos
BOMBA IÔNICA RIP + NEG
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BOMBA IÔNICA RIP
+ NEG (Zr + V + Ti 1µm)
+ Paládio (150 nm)
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BOMBA
CRIOGÊNICA
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BOMBA CRIOGÊNICA
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