Transcript
Page 2: Chemical analysis in the electron microscope

Contents (Note: Page numbers are as in the whole book so that the index remains valid)

Acronyms …………………………………………………….……………………… iii Preface ………………………………………………………………………………. iv

6 Chemical analysis in the electron microscope 6.1 The generation of X-rays within a specimen ……………... 170 6.2 Detection and counting of X-rays ………………………… 174 6.3 X-ray analysis of bulk specimens …………………………. 184 6.4 X-ray analysis of thin specimens in the TEM ……………... 193 6.5 Quantitative analysis in an electron microscope …………... 196 6.6 Electron energy loss spectroscopy (EELS) ………………... 205 6.7 A brief comparison of techniques …………………………. 212 6.8 Questions …………………………………………………... 213

Further reading ……………………………………………………………..…………... 236 Answers …………………………………………………………………………………... 238 Index …………………………………………………………………………..…………... 243

Page 3: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 4: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 5: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 6: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 7: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 8: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 9: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 10: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 11: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 12: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 13: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 14: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 15: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 16: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 17: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 18: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 19: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 20: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 21: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 22: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 23: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 24: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 25: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 26: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 27: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 28: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 29: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 30: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 31: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 32: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 33: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 34: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 35: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 36: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 37: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 38: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 39: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 40: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 41: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 42: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 43: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 44: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 45: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 46: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 47: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 48: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 49: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 50: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 51: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 52: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 53: Chemical analysis in the electron microscope
Page 54: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 55: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 56: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 57: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 58: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 59: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 60: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 61: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

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Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________


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