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Microcontact Printing and its Applications using Self-Assembled Monolayers , Department of Chemistry , SungKyunKwan University
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Introduction INORGANIC MATERIALS LAB.Nano structure resolution and various precursors of Soft lithography What is SAMs( self assembled monolayers) ? Microcontact Printing and its Applications MOCVD CSD SOL-GEL Method Microfabrication
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method resolution microcontact printing (CP) 35nmreplica molding(REM) 30nmmitrotransfer molding(TM) 1 mmicromolding in capiliaries(MIMIC) 1 msolvent-assisted micromolding(SAMIM) 60nm
Soft Lithography INORGANIC MATERIALS LAB.
Sheet1
substrateprecursorbinding
AuRSH , ArSHRS-Au
AuRSSR'RS-Au
AuRSR'RS-Au
AuRSO2HRSO2-Au
AuR3PR3P-Au
AgRSH , ArSHRS-Ag
CuRSH , ArSHRS-Cu
PdRSH , ArSHRS-Pd
PtRNCRNC-Pt
GaAsRSHRS-GaAs
InPRSHRS-InP
SiO2 , glassRSiCl3 , Rsi(OR')3siloxane
Si/Si-H(RCOO)2R-Si
Si/Si-HRCH=CH2RCH2CH2Si
Si/Si-ClRLi , RMgXR-Si
metal oxideRCOOHRCOO-MOn
metal oxideRCONHOHRCONHOHMOn
ZrO2RPO3H2RPO2-3- Zr4+
InO3/SnO2(ITO)RPO3H2RPO2-3- Mn+
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SAMs form spontaneously by chemisorption and self-organization of functionalized, long-chain organic molecules onto the surfaces of appropriate substrates.2-3nmtiltedFunctional groupAlkyl chainReaction groupsubstrateSelf-Assembled Monolayers (SAMs) INORGANIC MATERIALS LAB.
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OTS : n-octadecyltrichlorosilane (CH3(CH2)17SiCl3)Tilted angle 8o - 10oHydrophobic functional groupsOxide layerCross linkingChemical bonding on the surfaceOTS monolayer INORGANIC MATERIALS LAB.
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Microcontact PrintingPeal off PDMS from MasterPDMS : poly(dimethylsiloxane) silicone elastomer PhotoresistPour PDMS against Master and CurePhotolithographyPDMSPDMSPDMSAu or other materialsInking of SAMsPreparation of PDMS stamp INORGANIC MATERIALS LAB.
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Fabrication of patterned OTS SAMsMicrocontact printingSpin casting of OTS solutionPDMSSiSiPDMSPDMSSiPDMSSi(hydrophilic area)(hydrophobic area) (25)PDMSSurface chemical ReactionInk (OTS solution)Silicone oxide layerMicrocontact Printing INORGANIC MATERIALS LAB.
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+ 2H2O- 2HCl- HCl- H2Ocondensation+ H2O+surfaceMechanism of surface reaction
surfaceunder air(spin casting)in hexanesurface INORGANIC MATERIALS LAB.
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Selectivity of OTS SAMs OTS SAMs Moisture Optical Microscope ImageSubstrate : Si(100) p-type waferSiO2 / SiMoisture OTS SAMs(hydrophobic area) INORGANIC MATERIALS LAB.
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Applications of patterned OTS SAMs(1)MOCVDOptical Microscope Image -Step ProfileTiO2OTS SAMs(Metal Organic Chemical Vapor Deposition) INORGANIC MATERIALS LAB.
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1100mOptical Microscope Image -Step ProfileCdSOTS SAMs(Chemical Solution Deposition)CSDApplications of patterned OTS SAMs(2) INORGANIC MATERIALS LAB.
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Applications of patterned OTS SAMs(3)SOL - GEL MethodOptical Microscope ImageSubstrate : Slide glassPrecursor : Tantalum(V) EthoxideDeposition Method : spin coatingBaking temperature : 450C Ta2O5 INORGANIC MATERIALS LAB.
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Microfabrication of double layered thin film
200mSlide glassITOTa2O5CdSOptical Microscope Image INORGANIC MATERIALS LAB.
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Conclusion & Future prospects Soft lithography tolerates a wide range of materials and surface chemistry. Patterned OTS-SAMs form very stable organic thin films. Optimize all about microcontact printing method. Application of microcontact printing and OTS SAMs on three dimensional nano fabrication. INORGANIC MATERIALS LAB.