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EE143 – Ali Javey
Section 8: Metallization
Jaeger Chapter 7
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EE143 – Ali Javey
Multilevel Metallization
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EE143 – Ali Javey
FOX
Si substrate
( InteMetal Oxide e.g. BPSG. Low-K dieletric)
(e.g. PECVD Si Nitride)
Multilevel Metallization Components
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EE143 – Ali Javey
Interconnect ResistanceRI =R/L = ρ
/ (WAl TAl )
Interconnect-Substrate CapacitanceCV ≡C/L = WAl εox / Tox
Interconnect-Interconnect CapacitanceCL ≡
C/L = TAl εox / SAl
* Values per unit length L
Interconnect RC Time Delay
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EE143 – Ali Javey
Interconnect Requirements• low ohmic resistance
– interconnects material has low resistivity
• low contact resistance to semiconductor device
• reliable long-term operation
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EE143 – Ali Javey
Resistivity of Metals
Commonly Used MetalsAluminumTitaniumTungstenCopper
Less Frequently UtilizedNickelPlatinumPaladium
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EE143 – Ali Javey
Ohmic Contact Formation
• Aluminum to p-type silicon forms an ohmic contact [Remember Al is p- type dopant]
• Aluminum to n-type silicon can form a rectifying contact (Schottky barrier diode)
• Aluminum to n+ silicon yields a tunneling contact
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EE143 – Ali Javey
For a uniform current density flowing across the contact areaRc = ρc / (contact area )
ρc of Metal-Si contacts ~ 1E-5 to 1E-7 Ω-cm2
ρc of Metal-Metal contacts < 1E-8 Ω-cm2
MetalContact Area
Heavily dopedSemiconductor surface
Contact Resistance Rc
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EE143 – Ali Javey
⎥⎥⎦
⎤
⎢⎢⎣
⎡
⎟⎟
⎠
⎞
⎜⎜
⎝
⎛= Bs
c Nh
m φερ
*2exp
Approaches to lowering of contact resistance:1) Use highly doped Si as contact semicodnuctor2) Choose metal with lower Schottky barrier height
φB is the Schottky barrier heightN = surface doping concentrationρc = specfic contact resistivity in ohm-cm2
⎟⎠
⎞⎜⎝
⎛
∂
∂≡
−
c V
Jρ
1
at V~0
m = electron massh =Planck’s constantε= Si dielectric constant
Specific contact resistivity
Contact Resistivity
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EE143 – Ali Javey
Aluminum Spiking and Junction Penetration
• Silicon absorption into the aluminum results in aluminum spikes
• Spikes can short junctions or cause excess leakage• Barrier metal deposited prior to metallization• Sputter deposition of Al - 1% Si
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EE143 – Ali Javey
Alloying of Contacts
areacontact =A
ResistanceContact 102.1
y ResistivitContact SpecificyResistivitContact LowVery Obtain Alloy to
26
AR
Rcmx
cC
C
c
ρ
ρ
=
−Ω= −
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EE143 – Ali Javey
Electromigration
High current density causes voids to form in interconnections
“Electron wind” causes movement of metal atoms
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EE143 – Ali Javey
Electromigration
• Copper added to aluminum to improve lifetime (Al, 4% Cu, 1% Si)
• Heavier metals (e. g. Cu) have lower activation energy
MTF ∝1J 2 exp EA
kT⎛ ⎝ ⎜
⎞ ⎠ ⎟
J = current densityEA = activation energyMTF = mean time to failure
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EE143 – Ali Javey
Metal Deposition Techniques• Sputtering has been the technique of choice
– high deposition rate– capability to deposit complex alloy compositions– capability to deposit refractory metals– uniform deposition on large wafers– capability to clean contact before depositing metal
• CVD processes have recently been developed(e.g. for W, TiN, Cu)– better step coverage– selective deposition is possible– plasma enhanced deposition is possible for lower deposition
temperature
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EE143 – Ali Javey
TiN– used as barrier-metal layer
– deposition processes:
HClTiNHNHTiCl 8222 234 +→++
234 NHCl24TiN6NH8TiCl6 ++→+
HClTiNHNTiCl 8242 224 +→++
Metal CVD Processes
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EE143 – Ali Javey
Electroplating
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EE143 – Ali Javey
Dual Damascene Process
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EE143 – Ali Javey
Salicides
• Self-Aligned Silicide on silicon and polysilicon
• Often termed “Salicide”
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EE143 – Ali Javey
Low-K Dielectrics
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EE143 – Ali Javey
Porous low-k dielectric examples