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NUANCE Centerexploring the inner space
TEM Sample Preparation with FIB Ben Myers - 2009
TEM Sample Preparation with the FIB/SEM
Ben MyersNUANCE Center
Northwestern University
Evanston, IL
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NUANCE Centerexploring the inner space
TEM Sample Preparation with FIB Ben Myers - 2009
TEM Sample Prep with FIB
Pt Deposition
Bulk-Out
U-Cut
Lift Out
Mounting
Thinning
Cleaning Step-by-step instructions with recipe information and 3-D rendering of each process
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NUANCE Centerexploring the inner space
TEM Sample Preparation with FIB Ben Myers - 2009
TEM Sample Preparation
Sample
(100) Si
Goal
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NUANCE Centerexploring the inner space
TEM Sample Preparation with FIB Ben Myers - 2009
E-beam Pt
0
Tilt
Application: Pt e-Dep
Shape: Rectangle
15m (X) x 1.5m (Y) x 200nm (Z)
2-5kV, >1.4nA
E-beam dep
at 0
Tilt (SEM)E-beam dep
at 52
Tilt (SEM)
SEM
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NUANCE Centerexploring the inner space
TEM Sample Preparation with FIB Ben Myers - 2009
Pt Dep
(Ion Beam)
52
Tilt
Application: Pt Dep
Shape: Rectangle
15m (X) x 1.5m (Y) x 1.5m (Z)
30kV, 93pA-0.28nA
I-beam dep
at 52
Tilt (FIB)I-beam dep
at 52
Tilt (SEM)
FIB
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NUANCE Centerexploring the inner space
TEM Sample Preparation with FIB Ben Myers - 2009
Bulk-Out (1 of 2)
52
Tilt
Application: Si
Shape: Regular Cross Section
20m (X) x 12m (Y) x 6m* (Z)
30kV, 6.5-21nA
* Actual depth is material dependent
Bulk-Out (1/2) at 52
Tilt
SEM
FIB
FIB
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NUANCE Centerexploring the inner space
TEM Sample Preparation with FIB Ben Myers - 2009
Bulk-Out (2 of 2)
52
Tilt
Application: Si
Shape: Cleaning Cross Section
20m (X) x 1.5m (Y) x 6m* (Z)
30kV, 2.8-6.5nA
* Actual depth is material dependent
Bulk-Out (2/2) at 52
Tilt
SEM
FIB
FIB FIB
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NUANCE Centerexploring the inner space
TEM Sample Preparation with FIB Ben Myers - 2009
U-Cut
7
Tilt
Application: Si
Shape: Rectangles
1.5m wide, overlapping
30kV, 0.92-6.5nA
FIB
FIBSEM
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NUANCE Centerexploring the inner space
TEM Sample Preparation with FIB Ben Myers - 2009
Lift-Out (1 of 4)
0
Tilt
Insert Omniprobe
at Park
Drive to Eucentric
High
Lower to ~10m from sample
Insert Pt GIS needle
Position tip within ~200nm of sample
180
scan rotation is helpful
FIB FIB
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180
scan rotation
FIB
Z Position SEM
X/Y Position
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NUANCE Centerexploring the inner space
TEM Sample Preparation with FIB Ben Myers - 2009
Lift-Out (2 of 4)
0
Tilt
Application: Pt Dep
Shape: Rectangle
Size:
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NUANCE Centerexploring the inner space
TEM Sample Preparation with FIB Ben Myers - 2009
Lift-Out (3 of 4)
0
Tilt
Application: Si
Shape: Rectangle
Size: 1.5m (X) x 2-4m (Y) x ~2m (Z)
30kV, 2.8nA
FIB
FIB SEM
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NUANCE Centerexploring the inner space
TEM Sample Preparation with FIB Ben Myers - 2009
Lift-Out (4 of 4)
0
Tilt
Raise Omniprobe
~10m
Retract Pt GIS needle
Send Omniprobe
to Eucentric
High
Retract Omniprobe
FIB
FIB
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NUANCE Centerexploring the inner space
TEM Sample Preparation with FIB Ben Myers - 2009
Mounting (1 of 3)
0
Tilt
Reset eucentric
height on grid
Insert Omniprobe
at Eucentric
High
Lower to within ~10m of grid
Insert GIS
Position sample within ~200nm of grid
FIB
SEM SEM
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NUANCE Centerexploring the inner space
TEM Sample Preparation with FIB Ben Myers - 2009
Mounting (2 of 3)
0
Tilt
Application: Pt Dep
Shape: Rectangle
Size: ~1m (X) x 3-5m (Y) x 0.5m (Z)
30kV, 28-93pA
FIB
FIB
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NUANCE Centerexploring the inner space
TEM Sample Preparation with FIB Ben Myers - 2009
Mounting (3 of 3)
0
Tilt
Application: Si
Shape: Rectangle
Size: ~2m (X) x ~200nm (Y) x ~1m (Z)
30kV, 93pA-2.8nA
FIB
FIB
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NUANCE Centerexploring the inner space
TEM Sample Preparation with FIB Ben Myers - 2009
Thinning (1 of 3)
53-54
Tilt
Tilt into sample 1-2
Application: Si
Shape: Cleaning Cross Section
Size: ~10m (X) x ~500nm (Y) x ~3m (Z)
30kV, 0.46-2.8nA
+
FIB
FIBSEM
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NUANCE Centerexploring the inner space
TEM Sample Preparation with FIB Ben Myers - 2009
Thinning (2 of 3)
50-51
Tilt
Tilt into sample 1-2
Application: Si
Shape: Cleaning Cross Section
Size: ~10m (X) x ~500nm (Y) x ~3m (Z)
30kV, 0.46-2.8nA
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FIB
FIBSEM
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NUANCE Centerexploring the inner space
TEM Sample Preparation with FIB Ben Myers - 2009
Thinning (3 of 3)
Repeat thinning steps 1 and 2
Target final sample thickness +60nm
Application: Si
Shape: Cleaning Cross Section
Size: ~10m (X) x ~200nm (Y) x ~3m (Z)
30kV, 93pA-0.46nA
+/-
FIB
Step 1
FIB
Step 2FIB
thinned sample
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NUANCE Centerexploring the inner space
TEM Sample Preparation with FIB Ben Myers - 2009
Cleaning (1 of 2)
Tilt into sample +/-
3-5
Application: Si
Shape: Rectangle
Size: ~10m (X) x ~2m (Y)
5kV, ~46pA
~2-5min per side
+/-
FIB -
~52+5
tilt FIB -
~52-5
tilt
SEM
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NUANCE Centerexploring the inner space
TEM Sample Preparation with FIB Ben Myers - 2009
Cleaning (2 of 2)+/-
Repeat Step 1 with +/-
5-7
Application: Si
Shape: Rectangle
Size: ~10m (X) x ~3m (Y)
2kV, ~28pA
~1-3min per side
SEM
FIB -
~52+/-7
tilt
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NUANCE Centerexploring the inner space
TEM Sample Preparation with FIB Ben Myers - 2009
(S)TEM Results (HD2300)
Pt Dep
Pt e-Dep
Ga
damage
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NUANCE Centerexploring the inner space
TEM Sample Preparation with FIB Ben Myers - 2009
Bright Field STEM
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NUANCE Centerexploring the inner space
TEM Sample Preparation with FIB Ben Myers - 2009
Z-Contrast STEM
TEM Sample Preparation with the FIB/SEMTEM Sample Prep with FIB TEM Sample PreparationE-beam PtPt Dep (Ion Beam)Bulk-Out (1 of 2)Bulk-Out (2 of 2)U-CutLift-Out (1 of 4)Lift-Out (2 of 4)Lift-Out (3 of 4)Lift-Out (4 of 4)Mounting (1 of 3)Mounting (2 of 3)Mounting (3 of 3)Thinning (1 of 3)Thinning (2 of 3)Thinning (3 of 3)Cleaning (1 of 2)Cleaning (2 of 2)(S)TEM Results (HD2300)Bright Field STEMZ-Contrast STEM