Exploration and Evaluation ofUnderground Resources

National Institute of Advanced Industrial Science and Technology

Ceramics Research InstituteAdvanced Sintering Technology Group

Koji Watari

Role of Various Fields

Production of Ceramics

Industrial Application

Exploration and Evaluation ofUnderground Resources

GeologyMineralogy

CeramicsMaterial ScienceChemistryChemical Engineering

Design ElectronicsDevice

TargetHigh QualityLow cost

High performanceLow cost

High performanceLow costHigh reliability

Big Gap

Topics

• 1. Review of Ceramic Processing• 2. Direction of Ceramic Industries• 3. Today’s Ceramics• 4. Discussion

Investigative Tour of Underground Resources

Marble Factory

Kaolin Mining

NaSO4

Boron mine

Ceramic ProcessingRaw powder

Mixing

Shaping

Sintering

Grinding

Products

Good Example !

Can, Turkey, May 24, 2003

Cycle: 3 times in a day ( 1 cycle: 8hrs)Employee: 25 persons x 3 = 75 persons

Ceramic Processing-raw materials/mixing/shaping-

Dry mixing of three kind of raw powders

Mixture

Press

Mixing of powders

Press

Shaping of mixed powders

Powder flow

Die

Ceramic Processing-Printing-

Heater

Sample

Water Jet

Print roller

Sample

Ceramic Processing-Sintering-

Temperature:<1000cPeriod: 1day (?)

Use of co-generation systemfor ISO14000

Ceramic Processing-Final Evaluation-

Investigator

Sample direction

Final products

Export

Good one

Bad one

Packaging

How do company select ceramic for Industrial Application ?

1. Market2. Performance 3. Material cost4. Processing cost

Energy

Environmental Information Relation

Recycle

Direction of Ceramic Industries

Market Sample 1Requirement from Human and Times

Electronics:Mobile phoneLaptop computer

CD, MD

Smaller, High Speed Downsize of deviceHigh integration

High thermal conductivity substrate

Difficulty in heat escape from device

High Thermal ConductivityCeramics

Substrates for microelectronics and optical communication.

　　　　　　　(Maruwa HP )

Power Modulus substrate with Cu Circuit for very large currentSubstrate for IC package

CD player with AlN substrates for heat dissipation into laser-readingsystem

100

200

100

40

20

6

2

20

40

80100

24

68

10

0

SiC

Si3N4

Al2O3

AlN

( ～573K)(10-6 K-1)

(1 MHz)　

(kVcm-1)

(Wm-1℃- -1)

(x 10 MPa)

(MPa m0.5)

200

10

Thermal conductivity

Strength

Fracture toughness

Dielectric strength

Dielectric constant

Thermal expansionR.T.

Requirement (1)High corrosion resistance to CF4 gas.

　　　　　 (2)Suppression of electronic noise and electromagnetic waves.

　　　　 （3）Low thermal expansion to close that of Si.

　　　　　 （4）Suppression of vapor from ceramic in high temperature range.

　　　　　 （5）Very high heating rate and cooling rate of 400℃/sec in Max.

　　　　　 （6）Homogeneous temperature distribution.

　 (Thermal Conductivity =100～150Wm-1℃-1)

Requirement from Human and Times

Ceramic component and ceramic Heater for Semi-conductor Processing Equipment

Market Sample 2

Semi-conductor industry: Several billion US$

Corrosion to CF4+O2 Gas for Various Ceramics

0

20

40

60

80

100

120

AlN (A) AlN (B) Al2O3 SiC Si3N4

Etc

hing

rat

e nm

/min

Gas: CF4+30%O2

Pressure: 50mTorrOutput power: 1kWHolding time: 120min.

Flow rate: 50sccm

0

20

40

60

80

100

120

AlN (A) AlN (B) Al2O3 SiC Si3N4

Etc

hing

rat

e nm

/min

Gas: CF4+30%O2

Pressure: 50mTorrOutput power: 1kWHolding time: 120min.

Flow rate: 50sccm

(K.Watari et al. Japan-Korea Ceramics Seminar, 2001)

Components for semi-conductor processing equipment

(J.G.Goela et al. MRS Bull, 2001)

Market Sample 3

Increase of atmospheric pollution by automobile Removal of particles in

exhaust gas and its clean

Ceramic filter

Exhaust gas(HC, CO, NOx)

Inside: Catalyst

Material: 2MgO・2Al2O3 ・5SiO2　　　　　　　(Cordirite)　　 SiC

Requirement property1. High corrosion resistance2. High Thermal shock3. High strength

Honycome structure

Market Sample 4Requirement from Human and Times

Increase of life time in human(Aging society)

Lack of Exercise

Replacement of bone

Bio-Ceramics 1. Ca10(PO4)6(OH)2 (Hydroxy-Apatait)2. Ca3(PO4)2 (TCO)3. CaCO34. CaSO4 2H2O

Improvement of bone strength

Addition of CaCO3 to milk

Sag ol !