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CENTER FOR MICROANALYSIS OF MATERIALS

LASER AND SPECTROSCOPY FACILITY

Gaertner ellipsometer model L116C

Operation instructions

MAKE SURE YOU SIGNED UP FOR TIME ON THE ON-LINE SCHEDULE FOR

THIS INSTRUMENT BEFORE USING IT.

LOG YOUR USAGE IN THE LOGBOOK.

1) Check the laser shutter to make sure its closed (Figure 3).2) Turn the key switch on the head of the ellipsometer (Figure 1).3) Make sure the mode switch is in the AS (auto-setting) position (Figure 2).4) Set the polarizer to 45 (Figure 3).5) If needed adjust the arms of the ellipsometer to the desired incidence angle

releasing the set screw (black) and pulling back the knob (silver) on the back of

each arm (Figure 4). Lock the arm back in position by tightening the set screw.

SUPPORT THE ARM WITH YOUR FREE HAND WHEN CHANGING

ANGLES. Make sure to enter the correct incidence angle on the measurementpanel form of the program, when taking data (Figure 9).

6) Place sample centered on the sample table (Figure 5).7) Looking in the microscope, align the centers of both cross hairs, using the tilt

adjustment knobs under the sample table (Figure 6). If only one cross hair isvisible, switch the knob on the side of the microscope (Figure 7). If it is still not

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visible, or if it is faint or blurred, adjust the height of the sample table turning theheight adjustment knob until the second cross hair becomes visible (Figure 6).

8) Open the laser shutter.9)

Maximize the intensity of laser beam on the detector using the height adjustmentknob (Figure 6). If the intensity is too low or too high to allow maximizing, turnthe analyzer (Figure 8) a few degrees to bring signal close to 60% and then

maximize it using the height adjustment knob.

10)Flip the mode switch (Figure 2) to A (auto measure).11)Start the program GEMP on the computer. If you have doubts on how to use the

program, its manual is next to the ellipsometer in a green binder (Figure 9). Ifyour doubt persists, contact a staff member for help. The following steps are

meant only to refresh your memory as to the most used features of the program,

for a more complete overview of its capabilities refer to the manual.

a. When the program starts, click the continue button on the next two screensit shows.

b. To make a measurement, click on the measurement and calculation button.Feed the known parameters and the first guesses on the measurement

panel form, and click the appropriate action button.

c. Remember to set the correct Angle of Incidence to match the ellipsometerarms position.

12)To measure the next sample, or a different spot of the same sample, close the lasershutter (Figure 3), change or adjust the sample, and proceed from 7) above.

13) After you finish using the instrument:a. Close the laser shutter.b. Toggle the mode switch to AS position (Figure 2).c. Save your data to the disk.d. Turn off the key switch on the side of the instrument.e. Close the GEMP program.f. Remove your samples and cover the instrument with the plastic cover.

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