[ieee 2009 international conference on microelectronics - icm - marrakech, morocco...

4
$EVWUDFW² ,Q WKLV ZRUN ZH DQDO\]H WKH FKDUDFWHULVWLFV RI WKH PXOWLOD\HU $552: ZDYHJXLGHV 7KH PHWKRG XVHG LV WKH WUDQVIHU PDWUL[ PHWKRG 7KH GHSHQGHQFH RI WKH HIIHFWLYH LQGH[ DQG WKH DWWHQXDWLRQ RQ WKH ZDYHJXLGH SDUDPHWHUV VXFK DV QXPEHU RI FODGGLQJ FRQWUDVW RI FODGGLQJ LQGLFHV ZLGWK RI WKH FRUH DQG WKH ZDYHOHQJWK KDV EHHQ LQYHVWLJDWHG 7KH UHVXOWV RI RXU VLPXODWLRQ VKRZ WKDW WKH KLJKHU WKH FRQWUDVW RI FODGGLQJ LQGLFHV DQG WKH ORZHU LV WKH QXPEHU RI FODGGLQJ QHFHVVDU\ WR KDYH ORZ ORVV RSHUDWLRQ ,QGH[ 7HUPV²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β ± = λ π = N Q L DQG G L DUH WKH UHIUDFWLYH LQGH[ DQG WKLFNQHVV RI WKH LWK OD\HU UHVSHFWLYHO\ ȕ LV WKH FRPSOH[ SURSDJDWLRQ FRQVWDQW DQG Ȝ LV WKH ZDYHOHQJWK RI OLJKW 7KH WRWDO PXOWLOD\HU V\VWHP LV JLYHQ E\ WKH PDWUL[ SURGXFW RI WKH FKDUDFWHULVWLF PDWULFHV = = 1 L P P P P 0 0 $QDO\VLV RI PXOWLOD\HU $552: 6DLG 1DFHU DQG $EGHONDGHU $LVVDW 'HSDUWPHQW RI (OHFWURQLFV 8QLYHUVLW\ RI %OLGD %3 %OLGD $OJHULD HPDLO QDFHUBVD#\DKRRFRP $ 6XEVWUDWH Q V &RUH Q G $LU Q F &ODGGLQJ Q G &ODGGLQJ Q G Q 2009 International Conference on Microelectronics 978-1-4244-5816-5/09/$26.00 ©2009 IEEE 292

Upload: abdelkader

Post on 16-Mar-2017

215 views

Category:

Documents


0 download

TRANSCRIPT

Page 1: [IEEE 2009 International Conference on Microelectronics - ICM - Marrakech, Morocco (2009.12.19-2009.12.22)] 2009 International Conference on Microelectronics - ICM - Analysis of multi-layer

⎥⎥⎥

⎢⎢⎢

⎡−

=

β−±=λ

π=

∏ ⎥⎦

⎤⎢⎣

⎡==

2009 International Conference on Microelectronics

978-1-4244-5816-5/09/$26.00 ©2009 IEEE 292

Page 2: [IEEE 2009 International Conference on Microelectronics - ICM - Marrakech, Morocco (2009.12.19-2009.12.22)] 2009 International Conference on Microelectronics - ICM - Analysis of multi-layer

=γγ−−γ+γ=β

−β±=γ−β±=γ

π

=

⎥⎥⎥

⎢⎢⎢

⎡−

=

=−

+

=−

+

α+=β

α=α

π

=

293

Page 3: [IEEE 2009 International Conference on Microelectronics - ICM - Marrakech, Morocco (2009.12.19-2009.12.22)] 2009 International Conference on Microelectronics - ICM - Analysis of multi-layer

.

.

.

.

.

.

.

.

.

.

.

.

.

.

.

294

Page 4: [IEEE 2009 International Conference on Microelectronics - ICM - Marrakech, Morocco (2009.12.19-2009.12.22)] 2009 International Conference on Microelectronics - ICM - Analysis of multi-layer

295