igc ™ ii

© 2004 Swagelok Company

igcigc™ ™ IIIIigcigc™ ™ IIIIModular Surface-mountModular Surface-mount

DesignDesignModular Surface-mountModular Surface-mount

DesignDesign


Features of Modular Gas Systems Features of Modular Gas Systems Features of Modular Gas Systems Features of Modular Gas Systems • Reduces Space Requirements • Facilitates Easy Assembly and Maintenance• Reduces Inventory


igcigc™™ IIIIigcigc™™ IIII• Simplifies Design and Assembly• Reduces Potential Leak Points• Reduces Panel Weight• Complies with SEMI-PR3.1• Supported by Local Swagelok Distributors• Competitive Cost of Ownership


Modular Modular TechnologyTechnology

Modular Modular TechnologyTechnology

(38.9 mm)(38.9 mm)1.53 1.53 in.in.

1.23 1.23 in.in.(31.2 mm)(31.2 mm)


Open ArchitectureOpen ArchitectureSurface-mount C-ring GasketsSurface-mount C-ring Gaskets

Open ArchitectureOpen ArchitectureSurface-mount C-ring GasketsSurface-mount C-ring Gaskets

3 port3 port 2 port2 port 1 port1 port

Surface-mount SealsSurface-mount Seals

C-ring Gasket AssemblyC-ring Gasket Assembly

For Drop-down componentsFor Drop-down components


igcigc™™ II ConstructionII Constructionigcigc™™ II ConstructionII Construction

Igc PanelIgc Panel



Substrate AssembliesSubstrate Assemblies



Surface-mount Surface-mount ComponentsComponents


Substrate Flow ComponentsSubstrate Flow Components

Substrate Substrate ChannelChannel




Substrate AssembliesSubstrate Assemblies



Igc PanelIgc Panel



Manifold Flow ComponentsManifold Flow Components



Mounting ComponentsMounting Components

Base PlateBase Plate


Substrate LayerSubstrate LayerSubstrate LayerSubstrate Layer

Substrate AssemblySubstrate Assembly



Surface-mount Surface-mount

ComponentsComponents


Substrate Flow ComponentsSubstrate Flow ComponentsSubstrate Flow ComponentsSubstrate Flow Components

Drop-downDrop-down

Surface-mountSurface-mount

ConnectorConnector

MFC MFC ConnectorsConnectors

Substrate Substrate

End ConnectorEnd Connector


Substrate ComponentSubstrate Component

Substrate ClipSubstrate ClipSubstrate ChannelSubstrate Channel




Lock-down plateLock-down plate

Substrate ChannelSubstrate Channel



C-ring GasketC-ring Gasket




Surface-mount ComponentSurface-mount Component




Load Bearing InsertLoad Bearing Insert


Manifold ChannelManifold Channel

Manifold ComponentManifold Component

Manifold ClipManifold Clip

Manifold LayerManifold LayerManifold LayerManifold Layer


Manifold AssemblyManifold Assembly



Manifold LayerManifold LayerManifold LayerManifold LayerButt Weld End Butt Weld End

ConnectionConnection

Butt Weld End Butt Weld End

ConnectionConnection



Manifold PortsManifold Ports



Manifold PlugManifold Plug



CapCap


Manifold ClipManifold Clip

Manifold ComponentManifold Component

Cap ScrewsCap Screws

Manifold ChannelManifold Channel




Locating RibLocating Rib




Parallel ManifoldParallel Manifold



Parallel ManifoldParallel Manifold

Jumper ComponentJumper Component


Support LayerSupport LayerSupport LayerSupport Layer

Mid-line Support Mid-line Support

BlockBlock

Foot BlockFoot Block

Foot BlockFoot Block


AccessoriesAccessoriesAccessoriesAccessories

Cartridge Style Heater ClipCartridge Style Heater Clip


AccessoriesAccessoriesAccessoriesAccessories

Mass Flow ControllerMass Flow Controller

Conversion PlatesConversion Plates

CapCap

Vertical PortVertical Port


igcigc™™ IIIIigcigc™™ IIII

igc ™ ii

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