imaging in the euv region -...
TRANSCRIPT
Imaging in the EUV region
Eberhard Spiller
E. Spiller, June 11, 2008 2
•
Introduction to Imaging•
Applications–Astronomy–Microscopy–EUV Lithography–Direct Reconstruction
E. Spiller, June 11, 2008 3
Imaging with light
•
Waves move by λ
in 10-15
to 10-19
sec
•
Wave trains are 10-14
to 10-18
sec long
•
Each wavelet contains less than 1 photon•
Eye responds in about 0.1 sec
•
Everything is washed out !•
How can we see?
E. Spiller, June 11, 2008 4
Solutions
1) Use short observation time <10-15 sec need intensity, computer power, sample is destroyed
2) Generate standing waves that last need mirrors, lenses, coherence
3) Use simple objects (crystals): enhanced diffraction peaks low information content
simple reconstruction, resolve atoms
E. Spiller, June 11, 2008 5
object Optic
Moving Diffraction pattern
Fast detector → Computer → Image
Standing waves→ Image
E. Spiller, June 11, 2008 6
Material properties in the EUV
•
All materials absorb for λ<110 nm•
n = 1 -
δ, no lenses
•
No single surface mirrors, Rmax
< 1%
•
Multilayer designs that minimize absorption can enhance normal incidence reflectance to 70% in the 11 to 14 nm wavelength range
E. Spiller, June 11, 2008 7
History of X-Ray Optics bias: high resolution imagesRöntgen, 1895 Shadow graphs, No lenses or mirrorsLaue, 1912 X-ray-diffraction Bragg, 1914 Atomic resolution for crystalsEwald, 1916 Dynamical TheoryCompton, 1923 Grazing incidence mirror, capillaries (1931)Kiessig, 1931 Thin film interference with x-raysDuMond&Youtz, 1935 X-ray peaks from multilayers, diffusion const.Bormann, 1941 Standing wave in crystal reduces absorptionKirkpatrik-Baez, 1948 Imaging with 2 cylinder-mirrors, zone platesWolter, 1952 Imaging with 2 conic sections
E. Spiller, June 11, 2008 8
Recent HistoryMöllenstedt,1966 Zoneplates by electron-beamSchmahl, 1969 Zoneplates by holographySpiller, 1972 Multilayers for XUV near normal incidence
telescopes, microscopes, cameras, polarizersSpears, 1972 X-ray lithography (shadowgraphs)Walker, Golub, 1988 XUV telescopes for sun's corona SOHO, TRACEHawryluk, Kinoshita 1988 EUV projection lithographySnigirev 1996 Multi-lensesTinsley, 1998 Figure, finish of mirrors in 1 Å rangeEUVL LLC, 2001 EUVL cameras within diffraction limitFEL for x rays, 2009 Reconstruction in 3-D from diffraction patternsFuture Challenge: Phase contrast for medical x-rays
E. Spiller, June 11, 2008 9
Multilayer Mirror Design
1971:Absorber in Node does not absorb100% mirror is possible despite absorption
E. Spiller, June 11, 2008 10
O pti c
a b
c
d
f
e
dete
ctor
source
g
Euv/X-ray Imaging Systems
E. Spiller, June 11, 2008 11
Normal Incidence Telescopes
1980: Contact Harvard Observatory (L. Golub)
1981: Arcsec resolution with 3”
mirror at 67Å
1986: First launch of Sounding Rockets
1991: Launch of YOHKOH observatory
1995: Launch of SOHO observatory
1998: Launch of TRACE
E. Spiller, June 11, 2008 12
Multilayer telescope at IBM
E. Spiller, June 11, 2008 13
Properties of IBM system
•
E-beam evaporation low energy minimizes diffusion
•
Ion polishing after deposition smoothes boundaries
•
In situ x-ray reflectivity for immediate quality control
E. Spiller, June 11, 2008 14
White Sands Missile Range
E. Spiller, June 11, 2008 15
White Sands Recovery
E. Spiller, June 11, 2008 16
Trace, 10/10/98, λ=17.1nm
First good photo, 1989
Eclipse on July 11, 1991 gave estimate of scattering from multilayer mirror.
E. Spiller, June 11, 2008 17
TRACE, 10/10/98, λ=17.1nm
E. Spiller, June 11, 2008 18
Two mirror Schwarzschild for Microscopy and Lithography
E. Spiller, June 11, 2008 19
(R. Hudyma)
E. Spiller, June 11, 2008 20
Direct Reconstruction
Simple?
Needed:Coherent source (FEL)Many patterns for 3-DObject is destroyed at each exposureInject identical particles, different orientationComputer power and algorithms
E. Spiller, June 11, 2008 21
First ExperimentsGraded Multilayer separatesdirect and scattered beamLight from exploding specimen does not reflect.Diffraction patterns of explodingspecimen are obtained and simplespecimen are reconstructed
Diffraction Patterns of Nano Particles injected into the beamhave been recorded and reconstructed
E. Spiller, June 11, 2008 22
Challenge: Use phase contrast in medical x-rays
Promise: δ
is 104
times bigger than βEnhanced contrast, less radiation damage
Problem: Small deflection angle, except for very small featuresExperiments with synchrotron radiation and microscopic objects.Interferometry or large distance to detector
Multiple gratings suppress absorption contrast (Pfeiffer 2008)Probable path: Absorption contrast for large features, phase
contrast for small features?
E. Spiller, June 11, 2008 23
Figure 1. A portion of the solar corona seen in the Fe IX/X lines at λ=173Å on 7/29/98 from theTRACE spacecraft. Courtesy N AS A/TRACE.