lhc 加速器 atlas 実験用 sct シリコン飛跡検出器 に関する基礎研究
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DESCRIPTION
LHC 加速器 ATLAS 実験用 SCT シリコン飛跡検出器 に関する基礎研究. 筑波大 岡山大 A 京都教育大 B 高エ研 C 中村 雄一 中村浩二、宗像孝光、望月亜衣、内藤大輔 A ，原和彦、池上陽一 B ，氏家宣彦 C ， 海野義信 C ，高力孝 C ，近藤敬比古 C ，高嶋隆一 B ，田中礼三郎 A ，寺田進 C ，中野逸夫 A. LHC と ATLAS SCT 検出器 superLHC superLHC 用シリコン検出器の設計 N-on-P センサー レイアウト まとめと今後の課題. - PowerPoint PPT PresentationTRANSCRIPT
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LHCATLASSCT A B C
ABCCCC B ACA
LHCATLAS SCTsuperLHCsuperLHCN-on-P
-
LHCCERN 20077 TeV1034 /cm2s25nsecATLASHiggsATLAS
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ATLAS45 m22 m 70002T PIXEL (3 SCT:Semi Conductor Tracker(4Si microstrip8) TRT:Transition Radiation Tracker(36straw tubes 4mm)2.5m7mTRTSCTPixelLiq Ar
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SCT67686x6cm240mrad21129804CERNSCT
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B6
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Super LHClow ~700fb-120142016101035/cm2/ssuperLHC
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Super LHC TRT Si microstrip SCT12cm3cm31014 1015 /cm2 cm
SCTN-on-P SCTG4
-
-on-P P-NS/NP-NSCT500VN-on-PSDC10npP-on-NSCTP
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1.11014/cm2C)C-VP-on-N15%C-VBiasVoltage[V]P-on-NN-on-NN-on-PP-on-N1.11014/cm2
Graph2
00.1010230179
1.23434022261.1480818414
1.48791732911.7603580563
2.26963434022.2920716113
2.60015898252.7554987212
2.88346581883.1439897698
3.13179650243.36342711
3.38187599363.3841432225
3.47774244833.4025575448
3.4767885533
3.5691573927
3.5395866455
3.5009538951
3.5395866455
non-irrad
1.10E+14
Vbias (V)
Collected Charge (fC)
IV
05.60E-09
-10-1.79E-07
-20-2.10E-07
-30-2.31E-07
-40-2.44E-07
-50-2.55E-07
-60-2.64E-07
-70-2.72E-07
-80-2.80E-07
-90-2.86E-07
-100-2.92E-07
-110-2.99E-07
-120-3.05E-07
-130-3.09E-07
-140-3.13E-07
-150-3.17E-07
-160-3.20E-07
-170-3.23E-07
-180-3.24E-07
-190-3.28E-07
-200-3.28E-07
-210-3.34E-07
-220-3.39E-07
-230-3.39E-07
-240-3.41E-07
-250-3.46E-07
-260-3.48E-07
-270-3.53E-07
-280-3.59E-07
-290-3.63E-07
-300-3.69E-07
IV
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connected
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#chancodegainoffsetinnsecomment
0100051.136.1685unbonded1
512100052.831659unbonded
513100051.536.8673unbonded
514049.841.91318OK515
51510005612.3633unbonded
516051.963.51161OK517
517100053.447.6577unbonded
518800050.458.61077partbonded519
519100053.141.8614unbonded
520800053.413.11064partbonded521
52110005340.2652unbonded
52280005240.41092partbonded523
523100052.121.5608unbonded
524800051.448.51059partbonded525
525100052.146673unbonded
526800051.932.71016partbonded527
527100052.742.7625unbonded
528800052.263.21088partbonded529
529052.549.11147OK530
530051.743.61134OK531
531049.651.81254OK532
532100052.450.8593unbonded
533100050.935.8626unbonded
connected
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ch527
ch528
ch529
ch530
ch531
ch532
ch533
ch534
ch535
ch536
100V
timing
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ch526
ch527
ch528
ch529
ch530
ch531
ch532
ch533
ch534
ch535
ch536
HV
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ch532
timing (2)
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ch531
HV (2)
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ch530
HV (3)
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ch529
HV (4)
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ch528
HV (5)
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ch527
Istrip
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1-any
Istrip
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850
860
870
880
890
900
910
920
930
940
950
Vth (mV) w/ VtrimDC@240mV
Nev/500
EdgeON - 01X
cce
0000
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1-X1X
0-01X
1-01X
1-01X (laser off)
Vth (mV) w/ VtrimDC@240mV
Nev/500
Edge/compression modes
300V CC-X
ch1elaspTT1tempvt50errorsigmaerror102030405060708090100110120130140150160170180190200210220230240250260270280290300ch2vt50errorsigmaerror102030405060708090100110120130140150160170180190200210220230240250260270280290300
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300V CC-X
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0
20
40
60
80
100
120
140
160
180
200
Vth (mV)
Nev/500
Bias dependence (laser illuminated)
100V CC-X
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0
20
40
60
80
100
120
140
160
180
200
Vth (mV)
Nev/500
Bias dependence (neighbor to laser)
CC-X
102030405060708090100110120130140150160170180190200210220230240250260270280290300
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CC-X
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840
850
860
870
880
890
900
910
920
930
940
950
960
970
Vth (mV) w/ VtrimDC@240mV
Nev/500
EdgeON - any
cce-nonira
0000
0000
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1-01X (laser off)
1-01X
1-any
1-any (laser off)
Vth (mV) w/ VtrimDC@240mV
Nev/500
Edge/compression modes
cce comp
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cce comp
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000000000000
0
20
40
60
80
100
120
140
160
180
200
220
Vth (mV)
Nev/500
Bias dependence (laser illuminated)
cce2
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20
40
60
80
100
120
140
160
180
200
220
Vth (mV)
Nev/500
Bias dependence (neighbor to laser)
100VCCx
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2200.313877.360.3812.730.3600008441392904244814955005004995005005005004994844513561806213010005317000061.950000000000000000061183542726290000000
100VCCx
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000000000000
0
20
40
60
80
100
120
140
160
180
200
220
Vth (mV)
Nev/500
Bias dependence (laser illuminated)
00000000000
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20
40
60
80
100
120
140
160
180
200
220
Vth (mV)
Nev/500
Bias dependence (neighbor to laser)
ch1elaspTT1tempvt50errorsigmaerror102030405060708090100110120130140150160170180190200210220230240250260270280290300ch2vt50errorsigmaerror102030405060708090100110120130140150160170180190200210220230240250260270280290300
00.3638248.191.0628.70.73000000000000000002317631772812521325319120531308.173.5765.12.0100000000000000002742123247300189833092100
200.3738612.5228.03013.53000000000000000274120140840226492163000005317000059.06000000000000000000224177142183000000
400.3838463.564.6603.12000000000000001114531846149246338023379213000005317000092.650000000000000000000452165640000000
600.3838158.131.71.321.20000000000001710927846149749949346438624880161000005317000074.280000000000000000004912325732000000
800.393970050.9601.510000000000219024840147650050050049146436822989241000005317000080.6500000000000000000171102234751000000
1000.438118.650.3610.980.2800000000223103284420488498500500496479444363218103174000005317000076.83000000000000000000211982264241000000
1200.4139114.940.3812.490.30000000186717433243748850049949448444038225813751111000005317000085.43000000000000000000242061743851000000
1400.413892.660.3812.710.320000022185211337461495498500500500499498485458406288153355000005317000072.24000000000000000006883262213660000000
1600.423878.640.3712.460.300013451192864024764974994995005005005004984954674313441886071100053170096.61039.850000000000000000081213792454353100000
1800.433881.040.4313.460.290001234113246375451490499500499500500500496488466422322138465100005317000063.700000000000000000131263392524071000000
2000.433895.980.3913.740.33000001155618330742047249850050049849847145339831619486272000005317000046.71000000000000000003512651944074000000
2200.4438101.370.4113.330.300000022711223238144749049949749748447444038830316473270000005317000072.01000000000000000002562512114381000000
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000000000000
000000000000
000000000000
000000000000
000000000000
000000000000
0
20
40
60
80
100
120
140
160
180
200
220
Vth (mV)
Nev/500
Bias dependence (laser illuminated)
00000000000
00000000000
00000000000
00000000000
00000000000
00000000000
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00000000000
00000000000
00000000000
00000000000
00000000000
00000000000
20
40
60
80
100
120
140
160
180
200
220
Vth (mV)
Nev/500
Bias dependence (neighbor to laser)
ch1elaspTT1tempvt50errorsigmaerror102030405060708090100110120130140150160170180190200210220230240250260270280290300ch2vt50errorsigmaerror102030405060708090100110120130140150160170180190200210220230240250260270280290300
00.0138249.021.128.710.75000000000000000001315821672512251454915500531340.275.5177.683.1000000000000000001042127241297193811740000
200.0137595.9737.03016.62000000000000000011911929632917973314100005317000055.29000000000000000000120182159233010000
400.0238664.8629.22013.81000000000000003291403434383722379355262100005317000088.7900000000000000000013018486101000000
600.0338666.9522.94011.3200000000000017742534094654133472039845172000005317000092.40000000000000000004421907760000000
800.0438647.1216.3508.67000000000002181313144594764364083002068546192110005317000078.090000000000000000003811655661000000
1000.053812826.1700.8800000000112812727141748549749546744338928214344122000005317000064.51000000000000000000201691855782000000
1200.0638110.470.412.70.31000000062210823839546649549749949448147142134319488202000005317000080.11000000000000000003492511993640000000
1400.063885.110.3812.950.3600015116816532543848450050050050050050049046840331721092162100005317000044.43000000000000000002952991914775000000
1600.0738105.230.3913.840.360000002217017331442148849549649147645843733623714367153000005317000089.39000000000000000006452361784470000000
1800.0838108.030.412.390.25000000025313828941747549649348746943038232022810853203000005317000064.93000000000000000002482261714852000000
2000.0938107.660.3812.960.37000000064114628842347249348847946541938131020712644192000005317000077.88000000000000000001522371665581000000
2200.138107.250.413.020.33000000064615629342247649349448045242538430919110648211010005317000061.5000000000000000005472051764942000000
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000000000000
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000000000000
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000000000000
000000000000
000000000000
000000000000
000000000000
000000000000
0
20
40
60
80
100
120
140
160
180
200
220
Vth (mV)
Nev/500
Bias dependence (laser illuminated)
00000000000
00000000000
00000000000
00000000000
00000000000
00000000000
00000000000
00000000000
00000000000
00000000000
00000000000
00000000000
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00000000000
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00000000000
00000000000
00000000000
00000000000
00000000000
00000000000
00000000000
20
40
60
80
100
120
140
160
180
200
220
Vth (mV)
Nev/500
Bias dependence (neighbor to laser)
ch1elaspTT1tempvt50errorsigmaerror102030405060708090100110120130140150160170180190200210220230240250260270280290300ch2vt50errorsigmaerror102030405060708090100110120130140150160170180190200210220230240250260270280290300
-200
50.2638465.559.4505.05000000000000112922834214313502881779351356000005317000072.87000000000000000008511871585881000000
100.2738119.360.4314.170.42000000006381272883944584564313873402681831022436265000005317000066.5000000000000000001311601375882000000
150.283870030.39014.520000000000004461873614174023282181305847323000005317000057.020000000000000000228182197915590200000
200.2938482.9511.9406.1700000000000004301623544053552681647543316000005317000071.090000000000000001462247265127675170000000
50.338689.4331.82014.9100000000000002301883494083492711416357423000005317000063.86000000000000000118123232161725251000000
70.3138690.7629.55014.1000000000000110942814094003232451756658284000005317000057.23000000000000000000181151767952100000
90.323870025012.25000000000001121002324014403753192211405144284100005317000074.100000000000000000010981547380100000
110.3238114.50.4714.050.32000000021274216348430455444409373307246181843240262000005317000074.850000000000000000014101192895181000000
130.33397001.4101.410000000007391373094174474143793382581711054225262010005317000070.0500000000000000000081201538052000000
150.343870030.1014.490000000000035552023844343973202611336249363200005317000079.980000000000000000138182192924751010000
170.353870035.62017.370000000000002221403234103943312551356144371100005317000093.130000000000000001786245166814830000000
190.3638502.7113.3106.75000000000000112672664044103572511656458355000005317000070.95000000000000000230201289145765150100000
210.3638496.7913.5506.87000000000000008872564014052831837958295000005317000085.170000000000000055323232025598543211000000
230.3738482.1118.6708.910000000000000001108225034024012871445100005317000067.1200000000000013717238838730120176503940000000
250.3838637.6752.11022.13000000000000000004702513662271014011000053170080.39037.34000000000001694292456443407332262149732351000000
-160
50.4538241.410.7200.62000000000007401723364784984944924603882461022641000053170071.57031.35000000000000003642634434252911422981000000
70.4638605.9512.2906.770000000000022010527244147346343735028313781203000005317000081000000000000000001271922027451000000
90.4738650.9315.9808.56000000000003168626744046845239435625414650311100005317000067.72000000000000000000131351855852000000
110.483899.80.413.750.350000035381162583904674874824824434313953342381748145270001005317000071.2600000000000000000171092431115281000000
130.4838101.570.3812.090.33000000114942243904634894874814574334003422551858239143000005317000080.1300000000000000000211232491005160000000
150.4938578.158.3305.4400000000012321212934354874814294113222129557251000005317000065.7600000000000000001231922591154852000000
170.538649.4814.8508.07000000000005411683334704604544133222159541192100005317000066.25000000000000000011120287227904751000000
190.538606.5312.7306.97000000000000136523243648346442335222012856290100005317000073.89000000000000000441195361205854521000000
210.5138659.2919.82010.0800000000000052613934945545643235424611755221000005317000061.1400000000000000024151323342187712832000000
230.5238631.9922.91011.1600000000000000136160351452378279148622630000053170099.39042.6300000000000001371338439404300151573461000000
250.5338476.0118.0808.61000000000000000034617736634316571225000005317000052.5700000000001779268411459434382282117572610000000
00000000000
00000000000
00000000000
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00000000000
00000000000
00000000000
00000000000
00000000000
00000000000
5
7
9
11
13
15
17
19
21
23
25
Vth (mV)
Nev/500
Bias dependence (laser illuminated) -200
00000000000
00000000000
00000000000
00000000000
00000000000
00000000000
00000000000
00000000000
00000000000
00000000000
00000000000
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00000000000
00000000000
5
7
9
11
13
15
17
19
21
23
25
Vth (mV)
Nev/500
Bias dependence (neighbor to laser) -200
00000000000
00000000000
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00000000000
00000000000
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5
7
9
11
13
15
17
19
21
23
25
Vth (mV)
Nev/500
Bias dependence (laser illuminated) -160V
00000000000
00000000000
00000000000
00000000000
00000000000
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00000000000
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00000000000
00000000000
00000000000
00000000000
5
7
9
11
13
15
17
19
21
23
25
Vth (mV)
Nev/500
Bias dependence (neighbor to laser) -160
x=13umch1elaspTT1tempvt50errorsigmaerror5060708090100110120130140150160170180190200210220230240250260270280290300310320330340350ch2vt50errorsigmaerror5060708090100110120130140150160170180190200210220230240250260270280290300310320330340350
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300128.2126205112.660.4314.660.37003237104234354437473488491495496500496499499498496484450374264171903817101213263237.960.3610.230.3700000000000000003161043104294814533412161123619111016
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000000.0120.0620.2020.4760.7580.9340.9780.9820.9940.9980.99810.99610.9840.9440.8060.6340.3640.170.080.0280.030.0180.0180.02
00.002000.0120.0740.2240.4580.7660.9060.9720.9880.9880.9940.9940.99610.990.9980.990.9520.890.70.4240.2560.120.0540.0320.0240.030.02
0000.0080.030.160.3780.6220.8640.9560.9860.9820.9880.9920.9940.9960.9940.9980.9980.9880.9660.8720.6880.4260.230.10.0440.020.0220.0220.024
000.0060.0040.0740.2080.4680.7080.8740.9460.9760.9820.990.99210.9920.9980.9980.9960.9920.9680.90.7480.5280.3420.180.0760.0340.020.0240.026
000.0020.0060.0440.1820.4080.7240.8620.9420.9840.990.9940.9980.9940.9940.9980.9920.9960.9940.9740.910.7280.4880.3120.1240.0380.0320.0260.0220.022
000.0040.0040.060.1660.420.6440.850.9540.9660.9820.990.990.9960.9960.9960.9920.9880.9940.9680.8720.710.4860.280.1060.0380.0260.0140.0220.022
5.0788043478
6.9298387097
8.2026825633
8.3904828551
8.7388888889
8.7455661664
8.8430555556
8.4485294118
0
0
SPL6239-5
930(ns)
Vbias(V)ch1elaspTT1tempvt50errorsigmaerror5060708090100110120130140150160170180190200210220230240250260270280290300ch2vt50errorsigmaerror5060708090100110120130140150160170180190200210220230240250260270280290300
0026205239.650.3510.250.4000000000000000161591236432473442373226122263252.020.719.990.890000000000000000131248217407469444322208
1015.5426203224.110.3912.920.34000000000000011107221932344348745333122911048263247.61.410.261.410000000000000000111455261455475383248131
2037.626205202.050.4818.750.36000000000003116618727532436945749249046136724913058263246.140.389.320.4900000000000000001225116337470464369224115
3028.452620.025211.20.4618.30.360000000000003196618725828542147749045736522111261263248.170.387.80.3200000000000000000148229245745735019293
5065.0426201174.610.5725.40.440000000494195229259292344407453469488496495486439341189101263245.830.4410.850.5100000000000000001535147326453472377231116
S/N
101.2027863777
202.0053333333
301.5546448087
502.5606299213
0
0
0
0
0
0
0
0
0
VT50 (mV)
Vbias (V)
VT50 (mV) CCE
000000000
000000000
000000000
000000000
000000000
000000000
000000000
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000000000
000000000
000000000
000000000
000000000
000000000
000000000
000000000
000000000
000000000
000000000
0
50
100
150
200
250
300
350
400
Vthreshold (mV)
Nev
edge ON, XXX
00
00
00
00
00
0
0
0
0
14.5mV=0.29fC=1800e
910ns
930ns
Vbias (V)
sigma (mV)
0
0
0
0
0
0
0
0
0
Vbias (V)
S/N
00000
00000
00000
00000
00000
00000
00000
00000
00000
00000
00000
00000
00000
00000
00000
00000
00000
00000
00000
00000
00000
00000
00000
00000
00000
00000
000000000
000000000
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000000000
000000000
000000000
000000000
000000000
000000000
000000000
000000000
000000000
000000000
000000000
000000000
000000000
0
50
100
150
200
250
300
350
400
Vthreshold (mV)
Nev/500
edge ON, XXX
262262263263ch1elaspTT1tempvt50errorsigmaerror5060708090100110120130140150160170180190200210220230240250260270280290300ch2vt50errorsigmaerror5060708090100110120130140150160170180190200210220230240250260270280290300
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25.671.9621.19329898240.58208616780.611212814626.71262042160.413.340.4200000000000001124416535341346449446336526012758263227.840.3711.090.3500000000000001131912630743346648544133218980
83.642.9432.40620962341.89659863950.50961098422.2726204158.030.4315.580.4400000005125416229340244948248948549449449948945937228013272263232.280.412.980.390000000000000003198023336844547944534620490
107.153.9242.77501413992.42970521540.345308924515.0926203134.520.4415.540.39000014328221133142746148049349349749949649549648944938826213760263239.460.4111.790.4200000000000000004229428839347445635419692
94.044.952.66400525122.13242630390.531578947423.2326203147.630.4215.060.430000022155215130740845747548548849449549649548646337724913254263231.320.3911.250.36000000000000002097725839345048944933316778
76.665.8862.48363091991.73832199550.745308924532.5726203165.010.4113.660.4100000000212631933314424574774734874974984844554391796526263221.980.3911.20.3600000000000001167424339145248148647826310738
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Left
Right
Position (uM)
VT50 (mV)
000
000
000
000
000
000
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000
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Left
Right
L+R
Position (um)
CC (fC)
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260248.795290.151-51.3117.61.38301411470486491495499500500500500499500500500500500500500500498495481432338189484110530279.711.4668.560.9400000000000000000021150373483454282771100000
280241.795290.115121.3818.561.55289421462485492496498500498500500500500500500500500500500500499497478428334179558100530451.426.403.670000000000000000011112736648545527076410000
300248.795290.1151-50.57-14.180.59290403466485496497497500500500500500500500500500500500500500500497480444336195532000530302.931.6780.031.110000000000000000012112036348345326377800000
Si3N4
n+
p-stop
000
000
000
000
000
000
000
000
000
00
00
00
00
00
0
0
VT50 (mV)
Vbias (V)
VT50 (mV) CCE
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
Left
Right
L+R
Position (um)
Collected Charge (fC)
non-irrad sensor910ns nominal
gain200Vlaser offHV off930ns HvoffsigmaDsigma910ns HV=0
52952.53.231428571462.4712.99245235231.8512.580.68232.1211.660.65
530523.491538461546.6612.14235228227.5213.750.63228.2213.320.64
53150.63.532411067228.9412.51210206207.6913.230.62207.6813.730.63
53248.54.02144329937.1112.98236234232.0812.380.71232.1511.90.72
9:20
529average0
irrad sensor250Vlaser off
26343.72.9343249428125.6415.070.39253.879.370.4T=-1.3
43.73.0254004577121.6614.990.41253.87T=-1.7
43.73.1116704805116.9815.550.38252.96100.49
26454.33.118764302180.3717.620.43216.6611.560.41
26243.73.245080091596.8615.460.41238.6711.380.36
26144.13.1417dead
26051.33.456064073278.1315.190.4229.1610.860.4
259463.139588100791.2414.920.4228.4410.560.42
25844.83.171167048184.8215.830.39223.411.630.41
25743.63.073684210582.8920.40.46217.2115.60.46
average
non-irrad3.56920534980.13
irrad3.14174437070.14
irrad/non-irrad0.8802363728
HV39.1
00.10102301792590.069227.480.3711.530.370000000000000123311223124394624073051728731260230.940.3610.610.37000000000000002477125241146745738926615761
501.148081841425907186.540.3711.410.4200000000000828130346439456471483472410281149622718260229.560.318.810.3600000000000001129632594504834413291819035
1001.76035805632590.028162.60.3912.060.390000000001172220383453470473493494486462379264146682814260226.490.297.770.34000000000001022113883514774784203011727126
1502.29207161132590.039141.810.3712.20.3600000021580241364472473486493497498497483450372266138692915260222.420.339.770.390000000000000317491854134724663972861306820
2002.755498721225907123.690.412.460.3800104677207367442472481488494498496497497491481344325234874519260217.910.3510.510.33000000000000012171133104284904384333741436933
2503.14398976982590.028108.50.413.370.38010636144277410468487495493498497498499498498498479414344153954221260213.530.3711.50.39000000000000117591833864484814694182441667238
3003.363427112590799.920.413.340.32004321352464014614804814924934964994975004974994944794503072431245412260210.140.4112.380.410000000000001318912944054354844773922811639125
3503.38414322252590.02899.110.414.090.4009421242823854704804