MI;IC II;IC

LOi giOi thi~u.. TrangM6'ddu """""""""",""""""""""""""" ... """"""""" ..'.'.'.'.'.'.'.'.::"

PMn L GiOithi~uv~hoa hQCNano 1

, /

1.Gi6ithi?uvehOahQcnanD 1

2. C6ngngh?nin cO'bantronghOah9cnano 2" , ,

3. V(itli?ungu6nnanDniimgifirlhOah9CvavtjtlYchatran 64.Phdn10000ivtjtli?unano 8

,5. NhUngphuungphapnghiendrucdutrUevtjtli?unano l0

6. Ungc4mgcUav(itli?unano 13

7.Kilt 1u4n 18

PMn n. Cong ngh~bOahQcNano n~n 19

ChU'O11g1.Congngh~Nano Sol-Gel 19

1 PhuungphapSol-gel 1911. Hc;dSol 21

12. Gel """"""""""""""""""""""""""" 39

11Cdchc;ddonphdn tantrongdungdjch 44Ill. Diiu cM hc;dcdu 45

112.cdu trUecUahc;dcdu , 49

113.CO'cMphid triiln 51

III Cdcphuungphap kMc diiu cM hc;dnano 55Illi. Solkhi 55

Ill2. CdcphuungphapFhahO'i 56

Ill3. Cti 'phuungphcipdWlgdjchkMc 61

IV PhdntCulhc;dpyrogen 62

V Kiltlu4n , 66

ChuO'ng2. Congngh~h~t MiceliNano 671 M(5tsokhdini?mcO'ban 67

11 H?phOntanhqtMicell 67

12.TinhcMt cO'bancilah?phOntanh(llmicell 68

13. TinhcMt ai?ntk:h h?phOntanMzcell 69

11CMt ho(lla(5ngbi m(lt 70

Ill. CMt ho(lla(5nghi mijJionam 70

112.CMt hoqta(5ngbi m(ltionduvng " 71

113.CMt ho(lla(5ngbi m(lttrwlgtinhkh6ngion " 71

114.CMt hoqt a(5ngbi m(lt luffngc(1t: 71

115.CMt ho(lla(5ngbi 1l191CGophOn tir (polyme ai?n ly) 72

III Cong ngh? h(llmicell-lo phim WIgaiiu chi hqt nano 72

1111.Miceli thu4n 72111.2.Miceli aao 75

Ill3. Cacphim ~lnghqt micell nanDtrong vi nhfi turmg 76

1114.T6ng h9Phqt nanDtrong vi nhfi turmg 78IV. Mota tinh cMt cila cdu trUenanDtqi bi m(lt chung long/rim va tuvng lac

gi£i:acac hqt 79

IV.I. Tinh cMt cUacdu trUephOn tLrtren bi mijJ cac hqt nanD 79

IV.2. Turmglac cac bi m(ltrim trongpha long 80

V cdu trUc phOn tir bi m(lt d5' nanD va turmg lac bi m(lt cila hqt silic ddnxudtalkoxide 89

VI. D(lctinhphOntanvaMt 4fcilasilicddnxudtalkoxide. ; 89

V.2. Phep ao turmg lac bi m(lt va cdu trUephOn tLrcila cac hqt silic co

'aur'rngkinhkhi1cnhau 91

V 3. Anh huimg cila aur'rngkinh len cdu trUe bi m(lt va turmg lac hqt 93

VI.Turmglacbi mijJvaa(lctinhhuyinphilAlumina : 95

VII. Anh hzr61:gcila cdu trUep~ fir cUa lac nhOn phOn tan polymer lentuvng lacbem(ltvaa(lctinhhuyenphilaluminaa(lc. 95

VI 2. Anh huimg cila a(5pH ain d(ic tinh huyin phil co lac nhOn phOn tan

polymeranion. 100

VI 3. Anh huimg cila ham luvng lac nhOn phOn tan polymer len a(lc tinh

huyinphil aluminava tuvnglacbi m91. 102

VIA. Anh huimg cila m(tt a(5counter-ion ain a(ic tinh huyin phil alumina104

ChU'O1lg3. Congngh~ling dQngpha hOObOahqcNano 107

1 GiOithi?uvdllingaQngphahoihOah(JC 10711.MiJa6u 107

12.NhfmgnguyenryeaMnci«1CVD 110

12.1.NhfmgnguyenIf;ea ban 11012.2.CaeburYeaiduehinhtdea(J 112

12.3.CVDvaeaso vOiCVDpoiyme 112

13. CaephuvngpMpCVD 114

13.1 CVDnhi?t(IhermalCVD) 114

13.2. CVD plasma- -Plasma Assisted CVD (con auve biit lIin nhu: la

CVDnangplasmaho(tcPECVD) 114

14. Kiiu binhphirnzmgCVD 116

14.1.BinhphirnzIngthanhbinhnong 116

14.2.BinhphirnzIngthanhbinhk;mh 117

14.3.BinhphirnzInglien4tC 118

14.4.BinhphirnzmgCVDghepai?nplasma 119

15. Caeki€uphirnzmgvatidnehdtCVD 120. . . ,15.1.Caechatcog6c vaphOitirtieubieu 120

15.2.Caephirnzmgnhi?tphGn 122

15.3.CaephirnzIngoxyhOavathUyphGn 123

15.4.CaephirnzIngkhangtYI? 1~4

15.5.PhirnzmgafmgllingaQng 125

16. CaequatrinhxUIf ea banCVD 125

16.1.QuatrinhsirIf nwsstransport 125

16.2.QuatrinhphirnzInghOahQe 126

11LlingaQngphahoihoah(JCPolyme(CVP) 128Ill. GiOithi?u 128

111.1.Poly-p-xylylenes(parylenes) 130111.2.CaeM trimgh9]JvaSl,ftgothanhmitngmang 131111.3. Anh InrO1zgeila cae thOng s6 lling aQng ten Sl,fpMt tri€n ci«116p

mitng 132111.4.CaeehdtddnxudtthaytM eilaparylene-N 134111.5.Tinhehdt 135

112.CVPci«1polyimide 137

112.1.CaeMtrimgh9]Jvasl,ftgothanhmitngmang 138

112.1.Anh hur5ngcuacaethOngs6/ifngd9ng 139Il2.2. TinhcMtcitamimg-mangpolyimideVDP 140

Il3. Polynapthalene 143

1l3.1.Cachi tritngh()pvas¥t(lOthanhmimgmang 143Il 3.2.TinhcMt 144

Il4. Poly(p-phenylenevinylene) I44Il4.1 Cachi 145

Il 4.2.ThanhpMn cdut(lOvacdutrUe. 147Il 4.3.TinhcMt 147

Il5. Polyazomethine 149

Il5.1. T6ngh9]J 150Il 5.2. Tinhchdt 152

111.Caevtj!li?umOiUngc4mgCVP 152

111.1.CVPcitajluoropolyme 152

IIll.1 Monomejlo hOatritng h()pplasma (pPFM): S¥tgo thanh mimgmong 154

III 1.2.Anh hurYngcuacaethOngs6ltmg d9ng 155Ill1.3. TinhcMt 156

IV.chi t(lOcaecopolymemOibiingCVDnhiijt"""""""""""""""""""""'" ] 57

IV. 2. chi tgo silicon Dioxide-polyme nanocomposite bling CVD nhiijt ..158

IV. 2.1. Cach t6ng h()p mimg mong PPX-C/SiO2 nanocomposite 158IV.2.2. TinhcMt 159

V. Ung d1!J1gcitapolyme CVD 159

V.1. Ung d1!J1gvi diijntU: 160

+'.1.1. Cae ung d1!J1gdiijn moi tMp - k trong ULSI (Ultralarge &aleIntergrated) 160

v.1.2.CaeUngc4mgkit nang(encapsulation)vadonggoi 161

v.1.3.LOpcam quanlithographytrongvichi tgo 162v.2. Ungd1!J1gquangh()c 162

v.2.1.~iLcthi€tbiphatsang 162v.2.2. CiLc Ungd1!J1gquangh()c khongtuyin tinh (quangphi tuy€n)...I64

v.l. Ungd1!J1glOppM ngoai 166

V.3.1.Ungd1!J1gysinhh()c 166v.3.2.Ungd1!J1glOppM baovi} 166

VI.K€tlu(£n : 166

ChlfO'Dg 4. CODg Dgh~ t1}'Hip ghep philo ttf ...1691 MirtlJu 169

11 Mang mong tlem lOp theo Gong ngM tv lip ghip (Self-AssembledMonolayer - SAA1) : 171

111.Mang mang tv lApghip alkanethiols (SAM of alkanethiols) 172

Ill. I Qua trinh tgo SAM trong dWlg djch alkanethiol 173

111.2. CO' chi hinh thCmh mang SAM-alkanethiols va tinh 6n tljnh cUa no174

112.Mang tv lApghip SAM-alkylsiloxanes 175

112.1.Qua trinh hinh thCmhmang SAM-alkylsiloxanes ~ 175

113.Nhi1ngmangSAMkhac " 176

113.1Alkyl SAM 176

113.2.SAM- dihydroxyphenylethylamine (Dopamine) 177

113.3.Mang mong SAM alkanephosphoric axil (SAMAP) 178

114.DiJu chinh tinh cMt M m(tt theo GongngM SAM 179

114.1.fJiJuchinh nhOmchUr::niing 179

114.2. DiJu khiin hogt tinh bJ m(tt tI(jng d{ravao kha nang nhqy ciontliJu ki?n 179

III. Mang nhj phdn tic (self-assembled bilayers) va mang caDphdntic tl,f lAp ghep (self-assembled polymeric monolayers) nhiJ h6pph1,l v(it ly 182

1111.Mang nhjphdn tic(self-assembledbilayers) : 182

1112.Tl,flApghipcUacae hgthuyJnphitdimg mang tv lip ghip 185

1113.chi tgo cae hgt nanDdgng nhdn - vo (core-shell) dimg mang tv Jiipghip linnmOitrur3ng 187

III 4. chi tgo mang mong nano zeolit co tinh tljnh hurYng caD trong mOi

trur3ngmangcaDphdn tictv lip ghip 189

Ills. PatterningvicdutrUevCrimangtv lApghip 190IV.Kit lu(in 193

PhAn]II. V~tIi~uDaDOkim lo,pva v~t Ii~uIai 195

ChU'O'JIgt. V~tIi~uSol-Gel DaDO 1951 V(itli?ulaiMn tinhhi1uCO'-vocO'nano 195

11 Vtjtli?ulaiMn tinhsicd1}ng1l}'Clienkitvtjt ly 197

12 VtjtJi?ulaiMn tinhsicd1}ng1l}'Clienkit h6ahQc 199

11HgtNanomaDquan 200

Ill. Ht;dnano maoquan lagi ? 200

111.1.Djnh nghraht;dnano mao quint 200111.2.Zeolite ' 201

111.2. Hmh thanh cau tCJonanomao quan theo mo hinh hoa co ai€ukhidn 203

112.QuatrinhnghienCUllhCJtnanomaoquan 204

113.Plntongphilpt6nghr;;pckit nanomaoquan. 208

113.1.Sil'd1jJ1gcmit hot;da(Jnghi m{ition duvng lam khuon 211

113.2.Sil'd1jJ1gcmithot;dd(Jnghi m{itphi ion lam khuOn 215

11.4.Plntongphapphan tichcdu trUeciLawjtJi?unano maoquan 218

115. Ungc4mgva trih1vrngwjt li?unano mao quan 219

111.Zeolite nanotubelpolymerscomposites (znpc) " 221

mI. Zeolitenanotubelconductingpolymercomposites 221

111.1.1.Trimg hr;;ppyrrol 221

111.1.2.T6ng hr;;pzeolit nanotube - polyanilin composit 223

111.2.Zeolitenanotubepolymer-nanocomposit 225

111.3.Tridnvrng 226

W, V(itli?umimg m6ng diu trUenanoporous 226

W,l. V(itli?umimg mongai?n mot tkip 226

w'2. V(it li?u mimg mong cmit ai?n mot tkip co cdu tCJonanopor@us 229

W, 3. Plntong philp chi tCJoVljt Ji?u mimg mong ckit ai?n mot tkip co cdu

trUenanoporous 230

w,4. ,Lf tin~ va ai;ictinh ~i?n mot ciLav(it Ji?umimg mong ckit ai?n motthap co cau trUenano xop. " 233

IV. 5. Ung d1jJ1gva tridn vrng ciLa v(it li?u mimg m6ng ckit ai?n mOi tkip

cocdutrUenanoporous. 235

Chuong 2. Nanocomposittes gAmva kim lo~ khAi 237

1 Gi67thi?u 237

II Nanocomposite ceramic/kim loCJi 238

l'll~Nanocomposite chi tCJob&nghr;;pkim cO'hQc 241

112.Nanocomposite chi tCJofirt6ng hr;;psol-gel 243

113.Nanocomposite chi tCJob&ngt6ng hr;;pphun nhi?t 247

111.V(itli?ulai chUr:nang 251

mI. Nanocomposit n€n kim loCJilai cacbonnanotube , 251

Ill2. Nano composit chUr:niing kich tfntrYcnhO 254

Ill3. Nanocomposit kit bao 256

Ill4. Cac zmgch,mgcita sri nanocomposite 267

104. Ungch,mgcita hr;ttnanocomposite 269

ChU'O1lg3. Xuetac Nano 2711 Gi6'ithi?'uvexUctOenanD 271

11. Cac thanhpMnphan tirtqo nen hoqt tinhvcu16chQn l(JCxitc tac 274

12. Congng~ dibJcM xUclacnano 279

12.1.KjJthu(ztkhftcchUmdi?ntir : 27912.2.KjJthu(ztquangkhftc 28012.3.KjJthz!dt.theocongng~ Sol-Gel 281

11XitclacnanaTitaniumdioxide-no2 283

111.Gi6'ithi?'u.." 283112.Titaniumdioxide 284

113. TinhcMt cootitaniumdioxide 286

114.NguyenIf cO'bimcooxUclacquanghOadj tM 287

115.TiO2sird1Jl1glamchdtxUclacquang 289116.TinhU'anwc vasieuU'anuUc 293

116.1.G6ctiipxUc 293116.2.TinhU'anuUc 293

117.Ungd1Jl1gcitaxUclacnanDTiO2 297117.1.BJ m(i:tt7!sgch 298

117.2.TinhchdtcMngma 300

117.3.Hi?uzmgdi?tkhudn 302117.4.lion sgchkhOngkhivakhirmilL 302117.5.ChUr:niingt7!lamsgch 302117.6.TinhchdtsieuU'adimvaU'anwc 303

117.7.Ctius6 t7!sgch 303

117.8.XitclacquanghoaTiO2lamsgch m6itru&ng 303117.9.Xitclacquanghoano2 v6'ihi?uzmgquangdi?n 305

Phin IV. Polyme eiu true Nano va Nanpeoposit... ... ... ... ... 307. $.

ChU'O1lg1.Polymer can trUeNano 307

1 Mlrdlm 307

, ,

11. GiOithi?uve polymercau trUencmo 307

12. DiJu khidn cdu trUepolymer 309

II Trimg hqp living 309

111. CO'cM trimg hqp living 309

111.DiJu chinh hinh dqng cilapolymer 313

111.1.Tritnghr;rppolymer hinhsao (starpolymer) 313

111.2.Polymer hinh ban chiti (polymer brusher) 316

111.3.Polymer Dendrimer 320

111.4.DiJu chinh hinh dqngpolymer 323

IV. Hznh thiti h{Jccila copolymer khr5i"""""""""""""""""""""""""""""'" 325

V cdu trUencmod1!Gtrenchiatachpha kMi 327

VI.cdu trUencm6c4ratrencacpha dungmoich{Jn19C 331

VI.1.H?lienkit ngcmg18i 332

V12.H?lienkitngcmgv6 333

VI3.L6ngncmo 335

VII cdu trUencmotirmicellekhr5icacchdthoqtttinhM m(d 336

VIIITritng ngung phon tan co eMu khidn (Controlled DispersedCondensationPolymerization- CDCP). 339VIII1.CDCPtrongmoitrur'mgnuifc 340

VII12.CDCPtrongmoitrur'mgCO216ngtOiht;m 342

VIII3. Tritng ngung phon tan co aiJu khidn conductingpolymer cdu trUencmo """" , 344

IX. Kit lu(rnva tridnv9ng 345

Chmmg1.PolymeClay/Nanocomposit 349

1 NcmoclayhUuca 349

11. GiOithi?ukhoangsetBentonit- Clay 349

12. TinhcMt cUaClay 35212.1Kichthur'Jcht;tt 352

12.2. ThanhpMn hOah{JccUaBentonittinhcM 353

12.3.Xacainhdi?ntichMm(dvaa(Jtrurmgnil trongnuifc 35312.4.PhontichRonghen 35412.5.Phontichnhi?t 355

12.6.Dungluvngtraoadi ion 356

12.7.NghiencUuhinhthitih9Ccilabentonit 357

II. chi tqonanoclayhfium 358

11.1.Quatrinhbiin tinhhfiucO'hoakhoangset 358112.PhirnUngtrooa6i ..ion 358

II.3. chi tqov4tli?unanDclayhfiuCO' 361

113.1.Nguyenli?u 361

113.2.Anh huVngcUas6 nhOmthi trongmu6iamoniwn 366

113.3.NghiencUucdu trUenanoclay hfiumblingpM Mngngoqi... 367

Il3.4. Nghien cUuhinh thai h(JCcUananDclay hfiu CO' 368

113.5.Nghien cUutinh cMt uu dau cila nanDclay hfiu cO' 370

III. GiOithi?uvdPolyme clay/nanocomposit : 372

IV. Epoxy clay nanocomposit. 376

IV.1. chi tqo v4t li?u.chi tqo theo SO'ad Gongngh? hinh 2.21 376, ,

IV.2.NghiencUucautrUeva tinhchatcilav4tli?u 377

IV.2.1. Nghien cUu c6u trUe nanD cila epoxy clay nanocomposit bling

nhiiuxqRonghen 377

IV. 2.2. Nghien cUu tinh cMt nhi?t cila epoxy clay nanocomposit 378

IV.2.3. Nghien cUu hinh thai hQc v4t li?u epoxy/ clay nanocomposit. . 380

. V.chi tqo va nghien cUutinh cMt cilapolyamit/ clay nanocomposit 382v.1.M6'aau: 382

v.2. chi tqov4tli?u 383

V.3. TinhcMt cilapolyamit/clay nanocomposit 384

Phin V.CachoncAutrUeNanova s(}'iNano 389

ChU'O'Ilg1. Cachon cAutrUeNano """"""""""""""""""""""""""""""""""'" 389

1 T6ngquanvdcacboncdutrUeNano 389

11. Graphit 390

12. cdu trUecacbonnanDdqnghinhcau 391

13. Caebonx6p 39311Caebonnanotube ; 395

Ill. Caephuvngphdp t6nghopcaebonnanotub 396111.1.Nanotubeaa turmg 396111.2.Caechinncarbonnanotubethfmg 398111.3.Carbonnanotubeaon tuVngSWNTs 400

112.cdu trUeva tinhcMt 402

113.CO'chihinhthanh 408

114.Carbon nanotube bidn a6i bling h6a hQc 410

114.1.Pha tqp bling boron va nita 410

114.2.Nanotube m6; tube ai~na4Yva tube chlrcnang h6a 412

115.Cae thidt hi, tinhcMtvacdu trUeai?n Ur 413

115.1.Cdu trUeva tinh cMt ai?n tU: 413

115.2.Cae thidt hi ai?n Urvaai?n hO"a 414111.Nanotube va ca 427

1111.GiOithi?uchung 427

1112.Phuvngphap t6ng hr;pchung 431111.3.Cdu trUe " 433

m4. CaetinhcMt vaUngd1!l1gcilananotubevaca 437

Chtro'llg2. SQiNano 441

1 GiOithi?uchung 441

11Phuvngphap t6ng hr;p 442

11.1.Pha! tridns(linano blingpha khi 442

11.1.1.Phat tridnhai -16ng- ran 442

111.2.Phat tridnvOiSl!tr9'giitp cila oxide 44411.1.3.Phat tridnhoi - ran 445

11.1.4.Caephan Ungcarbon hOanhi?t 446

112.Cacphurmgphdp khclctrongpha khi 448

113.Phuvngphap dung djch cM tqo s(linano 450

113.1. CM tqo cdu trUc tinh tM dj huVng caD bling cae phuvng phap

khOngditngkhuon 450113.2.T6nghr;psird1!l1gkhuon 451113.3.Phuvngphapdungdjch-16ng-ran 456113.4.T6nghr;pnhi?t- dungmoi 458

Ill. fJi§uchinhquatrinhphattridn 458IV. TinhchirtcUas(linano 459

TiUIi~uthamkhao 461Tirkhoava tirvi~t ffit 463