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Page 1: luz.izt.uam.mxSecure Site luz.izt.uam.mx/mfg/arti/95-99/sobi12sio12-ap99.pdf · The experimental setup consists of a hioh-vacuum chamber where the target and substrate holder are
Page 2: luz.izt.uam.mxSecure Site luz.izt.uam.mx/mfg/arti/95-99/sobi12sio12-ap99.pdf · The experimental setup consists of a hioh-vacuum chamber where the target and substrate holder are
Page 3: luz.izt.uam.mxSecure Site luz.izt.uam.mx/mfg/arti/95-99/sobi12sio12-ap99.pdf · The experimental setup consists of a hioh-vacuum chamber where the target and substrate holder are
Page 4: luz.izt.uam.mxSecure Site luz.izt.uam.mx/mfg/arti/95-99/sobi12sio12-ap99.pdf · The experimental setup consists of a hioh-vacuum chamber where the target and substrate holder are