mfc: theory and applications -...
TRANSCRIPT
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MFC: Theory and
Applications
TSMC Fab14 Etch 范揚楷
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Outlines 2011- 3/14
TSMC Fab14 Briefing
Semiconductor industry & Equipment
MFC Theory
MFC performance indices
MFC Applications in Semi. Industry
Q&A
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-(6,000 people)
F14F6
范揚楷 : EE Mgr
-13 years @ EE
電機系:
劉育志副理電機系:
吳育毅經理機械所毛穎恆
電子所李碩勛
機械所林明宏
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Fab
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We Enjoy it
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Why
Semiconductor ?
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Growing Demands
- 個人消費持續增加
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Growing Demands
- 20 IC’s per iPad
2011 4千8百萬 台*20 = 9億6千萬顆
~ Fab 一年的產能
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MFC (Mass Flow Controller)
Industrial Application
Definitions
Thermal MFC technology
Material considerations
Unit of measure
Performance Indices
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Industrial
Applications
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Typical Process Flow循環不止, 生生不息
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Dry Etchers Precise control to RF/Gas/Pressure
Run at high vacuum ( 10-4 atm)
Chambers
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Chamber Basic
RF
Plasma
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Basic Layout
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Industrial Applications
Gas Box
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Industrial Applications
Gas Box
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World Market of MFC US$ 7 (NT$210 ) in 2010 by 5.3%
annual growth
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MFC Business
in Taiwan (estimate)
MFC’s 4,000
* 8” 270
MFC 108
0.1 %
108 *0.1%*10 ~
* IC insight 2010-11
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Definitions
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Definitions of MFC
MFC (Mass Flow Controller)
–
–
VAQQ vm
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Turbulent
Re >3,000
Laminar
Re < 2,100
General Flow Terminology Reynolds Number (RE)
– A single dimensionless parameter formed as the ratio of
inertial to viscous forces .
ViscosityFluid
)(cDimen.Chartersti DV
ForceViscous
ForceInertia
E
fR
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Volume Flow MetersORIFICE PLATE
(or FLOW TUBE) VENA
CONTRACTA
MANOMETER
(or DP
TRANSMITTER)
h
Direction of Flow
1 1 2 2v A v A
2 2
1 1 2 2
1 1
2 2p v p v
Bernoulli’s eq.
Continuity eq.
2
211 2 1
2
11
2
Av p p p
A
1 2
1
2
2
1
pv
A
A
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Thermal MFC
Technology
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Principle of Thermal Mass
Flow Meter
)( udppheat
TTmCTCmQ
Tu Td
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Principle of Thermal Mass
Flow Meter Keep Laminar Flow
Add 2 coils (resistance)
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Principle of Thermal Mass
Flow Meter
T1 T2
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Principle of Thermal Mass
Flow Meter
T1 T2
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Principle of Thermal Mass
Flow Meter
Linear if bypass is small
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Mass Flow Control
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Control Valve Quick response and precise
Piezo-eletric ~msec Solenoid ~ 1sec
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Industrial MFC’s
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Material
Considerations
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Material Considerations
High resistance to Toxic and Corrosive Gas
No particle generations or reaction to gases
SUS316 for MFC block and piping
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Units of Measure
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Gas Correction Factor
GCFC
C
Q
Q
Q
Q
m
m
C
C
TkCmTkCm
kTkCm
pasa
prsr
sr
sa
srsr
sasa
r
a
pa
pr
paaprr
p
Then
;
gas and Actual (N2) gas For ref.
constant :
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Gas Correction Factors
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Gas Correction Factor
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GCF – Actual vs. Indicated
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GCF - Example
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GCF - Example
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Performance
Indices
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Define Application Spec.
Flowing Media (Steam, Water, Air, Gas etc…)
Density - pressure and temperature
Flow Range, minimum to maximum
(turndown needed)
Accuracy – how stated? % of range or span
Repeatability
Economic Considerations – Initial cost,
maintenance cost & operating costs
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Flow Control Performance
Accuracy
Repeatability
Linearity
Rangeability
Poor Repeatability Means
Poor Accuracy
Good Accuracy Means Good Repeatability
Good Repeatability Does Not Necessarily Mean Good Accuracy
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Performance Indices
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Factors – Mechanical
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Factors - Temperature
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Factors – Upstream Pressure
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Examples
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MFC Verification
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Reference
MFC ,New Jein Corp., 2009
Mass flow controller introductions, MKS, 2010
MFC introductions, tsmc / ,2006
A Tale of Two Thermals: Capillary & Immersible,
Mark McMahon, Sierra Instruments, 2008
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Homework
MFC
MFC
Thermal MFC
MFC
MFC