Micro Heater with PT-CR thin film Thermo-Couple for high speed

Biological Measurements

Fujita Laboratory, IIS, cIRMM, the University of

Tokyo ,JAPAN F. Gillot, H. F. Araa, F. O. Morin, D. Collard

and H. Fujita

Tranducer 2007

報告人： 蘇聖欽

Outline

• Introduction

• Manufacturing Process

• Biological Application

• Conclusion

• References

Outline

• Introduction

• Manufacturing Process

• Biological Application

• Conclusion

• References

Thermo-Couple

• Thermoelectric voltage :

TmVAB

m : number of couples legs

ΔT : temperature between hot and cold junctions

αAB : seebeck coefficient

Outline

• Introduction

• Manufacturing Process

• Biological Application

• Conclusion

• References

Fabrication of PT-CR

Hot junction has 2.5-um * 2.5-um area

PT-CR couple offers a high Seebeck coefficient(17.4uV/K)

Device Calibration

Thermal device behavior using finite element analysis (FemLab 3.1)

Micro TFTC coupled with a 471Ω CMS resistor ramping the voltage by steps of 0.1V (waiting time of at least 30s)

Output voltage of Thermocouple

4-noctyl-4-cyanobiphenyl(8CB)

Separation line between the nematic and the smectic phase on 1.2V applied

(a)-(c) pictures taken by a BX 51 Olympus(20x)

Outline

• Introduction

• Manufacturing Process

• Biological Application

• Conclusion

• References

Unzipping dsDNA into ssDNA

Syber green binds to dsDNA but not to ssDNA

The final quick decrease corresponded to unzipping of a DNA that completed within 52 ms(stage 3)

16um long λDNA together with fluorecent on the thermodevice

Outline

• Introduction

• Manufacturing Process

• Biological Application

• Conclusion

• References

Conclusion

• Showing fast thermal shifting as well as thermal sensing in the ms range.

• Thermocouple can use for other application (actuator).

References

[1] F. Gillot, H. F. Araa, F. O. Morin, D. Collard and H. Fujita, “Micro Heater with PT-CR thin film Thermo-Couple for high speed Biological Measurements”, Transducer, pp. 21-23, 2007.

[2] F Gillot, FO Morin, HF Arata, R Guégan, H Tanaka, “On-chip thermal calibration with 8 CB liquid crystal of micro-thermal”, Lab on a Chip, pp. 1600 – 1602, 2007.