mos-ak_jms by rohit anand

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    MIXDES 02

    Principles of the 1-T DRAMConcept on SOI

    Jean-Michel Sallese, Serguei Okhonin, Pierre FazanMikhail Nagoga

    LEG Laboratory, Swiss Federal Institute of Technology, EPFL,1015 Lausanne, Switzerland

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    MIXDES 02

    1T/1C DRAM cell area : 8F 2 (F: min. feat. size)

    Capacitor does not scale below 100 nm (30 fF) Alternate Memory Solutions : exotic materials, large cells and complex:

    FERAM : 1T / 1 FeCap - MRAM : 1T / 1 MTJ - OUM : 1T / 1 R

    Capacitor-less DRAM Cells : some attempts, still complex: 2T cell on bulk Si or SOI, Tunnel diode .

    Objective of this work: a 1T cell Use SOI MOSFETs Scales with CMOS < 100 nm

    Introduction

    CBL

    WL

    T

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    MIXDES 02

    PD SOI-Mosfet Floating Body Effects:Floating Body Device operation instabilities:

    Kink effect Self heating Transient effects:

    Current overshooting Current undershooting

    1T DRAM : exploits such effects: Use SOI body charging to store information.

    Use SOI transistor to read stored information.

    Introduction

    Gate

    Si

    Buried OxideS DSiO 2 + + +

    PD-SOI Nmosfet

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    MIXDES 02

    1T-DRAM Concept Store excess of + or - charges in the Body of PD

    SOI-MOSFETs Use the transistor amplifying mode: 1T Gain Cell

    VG > V ON

    VDD VDD

    VDD /2

    Vcc/2

    00

    VG > V ON

    1T/1C-DRAM True 1T-DRAM

    BL1

    C BLC Cell

    BL1

    +/ V

    + + +

    - - -

    Read bycurrentsensing

    I1, I 0

    Store 1

    Store 0

    Read bychargesharing

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    MIXDES 02

    Samples :0.25 m PD-SOI N&P MOSFETs from LETI 0.13 m PD-SOI N&P MOSFETs from IMEC

    Data Writing (PD N-mosfet):Write a 1 :

    Channel impact ionization : excess of holes

    Write a 0 : Forward biasing body junction: default of holes

    Data Reading:Read the information stored by current sensingNon destructive read

    Data Refreshing:DRAM= data loss with timeRefresh operations needed

    1T-DRAM Operation Modes

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    MIXDES 02

    Writing 1 Use impact ionization mechanism:

    Example of voltage for 0.25 m NMOS devicesfor writing 1 in 3 ns

    1T-DRAM Operation Modes

    Gate

    SiBuried Oxide

    S D+ + +SiO 2

    0.6V

    0V 2V

    PD-SOI NMOS

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    MIXDES 02

    Writing 0 Use hole removal mechanism:

    Example of voltage for 0.25 m NMOS devicesfor writing 0 in 3 ns

    1T-DRAM Operation Modes

    PD-SOI NMOS

    Gate

    Si

    Buried Oxide

    S D+ + +- - -0V -2.3V

    0.6V

    SiO 2

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    MIXDES 02

    Writing 1 & Writing 0( 0.25 m PD N-mosfet, W/L = 25/0.5 m )

    1T-DRAM Operation Modes

    0

    1 10 -5

    2 10 -5

    3 10 -5

    4 10 -5

    5 10 -5

    0 5 10 15 20

    R e a

    d C u r r e n

    t [ A

    ]

    Time [s]

    "1"

    "0"

    W/L=25/0.5 m

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    MIXDES 02

    Data reading: current sensing

    Key difference vs 1T/1C-DRAM: Non destructive read

    But refresh needed: charge loss due to generations & recombinations

    1T-DRAM Operation Modes

    0.6V

    0.3V

    - +

    I read

    -10

    0

    10

    20

    30

    40

    50

    0 0.5 1 1.5

    R e a

    d C u r r e n

    t [ u A ]

    Gate Voltage [V]

    180 mV

    "1"

    "0"

    VD = 0.2 V1 & 0 meas. 1 ms after pulse

    S t e a d y

    S t a t e

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    MIXDES 02

    2D Simulation & Mechanisms

    Device structure

    N-channel FETon SOI (0.3 m)

    Gate oxide:4.5nm

    Source DrainGate

    oxide 400nm

    Si-substrate

    Body: 3.10 17 to 1.10 18

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    MIXDES 02

    2D Simulation & Mechanisms

    During Writing 1 VG= 0.6V V S= 0V VD= 2V

    S D

    Gate

    S

    Gate

    D

    Holes generated byImpact Ionizationat high V D (2V)

    Hole Flux due to ImpactIonization:Positive charge in the body

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    MIXDES 02

    2D Simulation & Mechanisms

    After Writing 1 VG= 0.6V V S= 0V VD= 0.3V

    DD

    SS

    Gate Gate

    Excess of holes in the body

    Excess of channel electrons: Drain current increases

    until holes are evacuatedthrough forward junctionleakage

    Hole density Hole Flux density

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    MIXDES 02

    2D Simulation & Mechanisms

    After Writing 1

    0 ms

    1 ms4 ms14 ms

    100 ms400 ms3 s

    Decay of the body potential as afunction of time after Writing 1

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    MIXDES 02

    2D Simulation & Mechanisms

    During Writing 0 VG= 0.6V V S= 0V VD= -1V

    Gate Gate

    S S DD

    Holes are removed after a few ns

    Hole current density after 1 ns after 3 ns

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    MIXDES 02

    DD SS

    GateGate

    after 10 ns after 100 ns: steady state

    2D Simulation & Mechanisms

    During Writing 0

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    MIXDES 02

    Gate

    DS

    2D Simulation & Mechanisms

    After Writing 0 VG= 0.6V V S= 0V VD= 0.3VDefault of holes in the body

    Default of channel electrons: Drain current decreases

    Hole density

    Gate

    DS

    Reverse junction leakagegenerates holes in the body

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    MIXDES 02

    2D Simulation & Mechanisms

    After Writing 0

    3 s1.5 s700 ms300 ms10 ms

    0 ms

    Decay of the body potential as afunction of time after Writing 0

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    MIXDES 02

    1T-DRAM Cell Scaling

    Demonstration for small W/L and 3 ns operation High endurance: >10 15 extrapolated

    -20

    -10

    0

    10

    20

    30

    40

    50

    60

    0 50 100 150 200

    I s [ A / m

    ]

    Time [ s]

    L = 150 nmW = 400 nm

    -20

    0

    20

    40

    60

    80

    0 50 100 150 200 250 300 350 400Time [ns]

    L = 0.2 mW = 10 m

    Writing "0"

    3ns drain pulse

    Writing "1"3ns drain pulseembedded into7ns gate pulse

    I s [ A / m

    ]

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    MIXDES 02

    Conclusion

    1T/1C-DRAM cells: does not scale below 100 nm SOI DRAM = true 1T-DRAM = 4F 2 cell Exploits Floating Body charging of PD SOI-MOSFETs No capacitor, no new materials, no additional masks

    Standard CMOS logic or memory process Ideal for merged logic/memory SOC applications Non destructive read in a refresh interval High switching speed: 3 ns demonstrated Scalable