mos-ak_jms by rohit anand
TRANSCRIPT
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Principles of the 1-T DRAMConcept on SOI
Jean-Michel Sallese, Serguei Okhonin, Pierre FazanMikhail Nagoga
LEG Laboratory, Swiss Federal Institute of Technology, EPFL,1015 Lausanne, Switzerland
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1T/1C DRAM cell area : 8F 2 (F: min. feat. size)
Capacitor does not scale below 100 nm (30 fF) Alternate Memory Solutions : exotic materials, large cells and complex:
FERAM : 1T / 1 FeCap - MRAM : 1T / 1 MTJ - OUM : 1T / 1 R
Capacitor-less DRAM Cells : some attempts, still complex: 2T cell on bulk Si or SOI, Tunnel diode .
Objective of this work: a 1T cell Use SOI MOSFETs Scales with CMOS < 100 nm
Introduction
CBL
WL
T
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PD SOI-Mosfet Floating Body Effects:Floating Body Device operation instabilities:
Kink effect Self heating Transient effects:
Current overshooting Current undershooting
1T DRAM : exploits such effects: Use SOI body charging to store information.
Use SOI transistor to read stored information.
Introduction
Gate
Si
Buried OxideS DSiO 2 + + +
PD-SOI Nmosfet
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1T-DRAM Concept Store excess of + or - charges in the Body of PD
SOI-MOSFETs Use the transistor amplifying mode: 1T Gain Cell
VG > V ON
VDD VDD
VDD /2
Vcc/2
00
VG > V ON
1T/1C-DRAM True 1T-DRAM
BL1
C BLC Cell
BL1
+/ V
+ + +
- - -
Read bycurrentsensing
I1, I 0
Store 1
Store 0
Read bychargesharing
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Samples :0.25 m PD-SOI N&P MOSFETs from LETI 0.13 m PD-SOI N&P MOSFETs from IMEC
Data Writing (PD N-mosfet):Write a 1 :
Channel impact ionization : excess of holes
Write a 0 : Forward biasing body junction: default of holes
Data Reading:Read the information stored by current sensingNon destructive read
Data Refreshing:DRAM= data loss with timeRefresh operations needed
1T-DRAM Operation Modes
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Writing 1 Use impact ionization mechanism:
Example of voltage for 0.25 m NMOS devicesfor writing 1 in 3 ns
1T-DRAM Operation Modes
Gate
SiBuried Oxide
S D+ + +SiO 2
0.6V
0V 2V
PD-SOI NMOS
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Writing 0 Use hole removal mechanism:
Example of voltage for 0.25 m NMOS devicesfor writing 0 in 3 ns
1T-DRAM Operation Modes
PD-SOI NMOS
Gate
Si
Buried Oxide
S D+ + +- - -0V -2.3V
0.6V
SiO 2
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Writing 1 & Writing 0( 0.25 m PD N-mosfet, W/L = 25/0.5 m )
1T-DRAM Operation Modes
0
1 10 -5
2 10 -5
3 10 -5
4 10 -5
5 10 -5
0 5 10 15 20
R e a
d C u r r e n
t [ A
]
Time [s]
"1"
"0"
W/L=25/0.5 m
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Data reading: current sensing
Key difference vs 1T/1C-DRAM: Non destructive read
But refresh needed: charge loss due to generations & recombinations
1T-DRAM Operation Modes
0.6V
0.3V
- +
I read
-10
0
10
20
30
40
50
0 0.5 1 1.5
R e a
d C u r r e n
t [ u A ]
Gate Voltage [V]
180 mV
"1"
"0"
VD = 0.2 V1 & 0 meas. 1 ms after pulse
S t e a d y
S t a t e
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2D Simulation & Mechanisms
Device structure
N-channel FETon SOI (0.3 m)
Gate oxide:4.5nm
Source DrainGate
oxide 400nm
Si-substrate
Body: 3.10 17 to 1.10 18
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2D Simulation & Mechanisms
During Writing 1 VG= 0.6V V S= 0V VD= 2V
S D
Gate
S
Gate
D
Holes generated byImpact Ionizationat high V D (2V)
Hole Flux due to ImpactIonization:Positive charge in the body
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2D Simulation & Mechanisms
After Writing 1 VG= 0.6V V S= 0V VD= 0.3V
DD
SS
Gate Gate
Excess of holes in the body
Excess of channel electrons: Drain current increases
until holes are evacuatedthrough forward junctionleakage
Hole density Hole Flux density
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2D Simulation & Mechanisms
After Writing 1
0 ms
1 ms4 ms14 ms
100 ms400 ms3 s
Decay of the body potential as afunction of time after Writing 1
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2D Simulation & Mechanisms
During Writing 0 VG= 0.6V V S= 0V VD= -1V
Gate Gate
S S DD
Holes are removed after a few ns
Hole current density after 1 ns after 3 ns
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DD SS
GateGate
after 10 ns after 100 ns: steady state
2D Simulation & Mechanisms
During Writing 0
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Gate
DS
2D Simulation & Mechanisms
After Writing 0 VG= 0.6V V S= 0V VD= 0.3VDefault of holes in the body
Default of channel electrons: Drain current decreases
Hole density
Gate
DS
Reverse junction leakagegenerates holes in the body
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2D Simulation & Mechanisms
After Writing 0
3 s1.5 s700 ms300 ms10 ms
0 ms
Decay of the body potential as afunction of time after Writing 0
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1T-DRAM Cell Scaling
Demonstration for small W/L and 3 ns operation High endurance: >10 15 extrapolated
-20
-10
0
10
20
30
40
50
60
0 50 100 150 200
I s [ A / m
]
Time [ s]
L = 150 nmW = 400 nm
-20
0
20
40
60
80
0 50 100 150 200 250 300 350 400Time [ns]
L = 0.2 mW = 10 m
Writing "0"
3ns drain pulse
Writing "1"3ns drain pulseembedded into7ns gate pulse
I s [ A / m
]
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Conclusion
1T/1C-DRAM cells: does not scale below 100 nm SOI DRAM = true 1T-DRAM = 4F 2 cell Exploits Floating Body charging of PD SOI-MOSFETs No capacitor, no new materials, no additional masks
Standard CMOS logic or memory process Ideal for merged logic/memory SOC applications Non destructive read in a refresh interval High switching speed: 3 ns demonstrated Scalable