MS414 Materials Characterization (소재분석)

Byungha Shin (신병하)Dept. of MSE, KAIST

1

2017 Fall Semester

Course Information

Teaching StaffProf. Byungha Shin (Teacher)byungha@kaist.ac.kr, X 3315, W1-1 #3404 office hours: 16:00 – 17:30 on Tue and Thurs or by appointment (via email)www.energymatlab.kaist.ac.kr

Mr. Suwan Jeon (Teaching Assistant)jswoo325@kaist.ac.kr, X 3371, W1-1

Meeting time and placeTime: 2:30 – 4:00 (3:50) on Mon and WedLocation: E11 Creative Learning Bldg (창의학습관) #311

TextbookThere is no dedicated textbook in this course. Lecture notes and relevant reading materials (mostly selected chapters from the references listed in the next slide) will be used instead. Lecture notes and handouts will be uploaded to the KLMS website: https://klms.kaist.ac.kr/

Course Information

Course InformationSyllabus1. Overview of various characterization techniques (1 lecture)2. Chemical analysis techniques (8 lectures)

2.1. X-ray Photoelectron Spectroscopy (XPS)2.2. Ultraviolet Photoelectron Spectroscopy (UPS)2.3. Auger Electron Spectroscopy (AES)2.4. X-ray Fluorescence (XRF)

3. Ion beam based techniques (4 lectures)3.1. Rutherford Backscattering Spectrometry (RBS)3.2. Secondary Ion Mass Spectrometry (SIMS)

4. Diffraction and imaging techniques (7 lectures)4.1. Basic diffraction theory4.2. X-ray Diffraction (XRD) & X-ray Reflectometry (XRR)4.3. Scanning Electron Microscopy (SEM) &

Energy Dispersive X-ray Spectroscopy (EDS)4.4. Transmission Electron Microscopy (TEM)

5. Scanning probe techniques (1 lecture)5.1. Scanning Tunneling Microscopy (STM)5.2. Atomic Force Microscopy (AFM)

6. Summary: Examples of real materials characterization (1 lecture) * Characterization techniques in blue are available at KARA (KAIST analysis center located in W8-1;

https://kara.kaist.ac.kr/)

Course InformationFocus of This Course

Characterization Techniques

1. What are the basic operational principles of them ?2. What types of information can they provide ?3. How are they applied to real-world materials research ?4. How are they practically instrumented ?

Course InformationReferences (no need to buy any of these)Brundle, Evans, and Wilson, “Encyclopedia of materials characterization”

General reference

Wolsky and Czanderna (Ed.), “Methods of surface analysis” in “Methods and Phenomena Vol. 1”

XPS, AES, SIMS

Carlson, “Photoelectron and Auger Spectroscopy” XPS, AESGrieken and Markowicz (Ed.), “Handbook of X-Ray Spectrometry” XRFMueller, “Spectrochemical Analysis by X-ray Fluorescence” XRFHeide, “Secondary Ion Mass Spectrometry” SIMSFeldman and Mayer, “Fundamentals of Surface and Thin Film Analysis”

XPS, RBS, SIMS

Chu, Mayer, and Nicolet, “Backscattering Spectrometry” RBSCullity, “Elements of X-ray Diffraction” XRDGuinier, “X-ray Diffraction in Crystals, Imperfect Crystals, and Amorphous Bodies”

XRD

Bowen, “High Resolution X-ray Diffractometry and Topography” XRD, XRRGoldstein, Newbury, Echlin, Joy, Lyman, Lifshin, Sawyer, and Michael, “Scanning Electron Microscopy and X-ray Microanalysis”

SEM, EDS

Williams and Carter, “Transmission Electron Microscopy” TEM, EDSMeyer, Hug, and Bennewitz, “Scanning Probe Microscopy” AFM, STM

Course Information

• No class on: 10/04 (Wed): Chu-seok10/09 (Mon): Hangul Proclamation Day10/16 (Mon) & 10/18 (Wed): Mid-term exam period11/08 (Wed): Kesterite Workshop11/15 (Wed): K-MRS Fall Meeting11/27 (Mon) & 11/29 (Wed): MRS Fall Meeting12/11 (Mon) & 12/13 (Wed): Final exam period

• With no make-up class, there are total 22 lectures when we can meet.• Two make-up classes will be scheduled in Nov (most likely on Sat’s).

Course Schedule

GradingMid-term exam 40% (400 pts)Final exam 60% (600 pts)Bonus points for class participation + α

Exam Dates and TimeMid-term exam: 10/18 (Wed), 1:00 pm – 4:00 pm*Final exam: 12/13 (Wed), 1:00 pm – 4:00 pm**Extra time will be given to those who want it.

Coverage of ExamsExams are open-book and open-note, but no internet (no smart phone).Mid-term exam: materials covered in all lectures till the exam Final exam: all lecture materials Exams of previous years will be given for your practice.

Grading and Exams

Course InformationClass Participation

Taken from a presentation file of Prof. Eric Mazur at Harvard University

Course InformationClass Participation

Active class participation (two correct answers) can change your grade!

665.0 A0659.0 A0656.2 A0648.7 A-640.3 A-638.7 A-

Total pts Grade759.5 A+757.8 A+757.5 A+749.2 A0745.0 A0744.2 A0

573.2 A-567.2 A-557.0 A-549.5 B+539.5 B+534.5 B+

Grade distribution from the last year

Course InformationOverview of Characterization Techniques

© Copyright Evans Analytical Group®

/UPS

(UV)

Course InformationCharacterization Service Companyhttp://www.eag.com

A Word About VacuumMost of the techniques that will be discussed use a charged particle (ion or electron) as either the signal generator or the detected signal. Virtually all of these measurements must be performed in high (10-5 – 10-8 Torr) or ultrahigh (<10-9 Torr) vacuum environments.

– require a long mean free path for the charged particle to either reach the sample or for the signal from the sample to reach a detector (mean free path: ~100 nm at 760 Torr; ~1 m at 10-4 Torr)

– sensitive filaments and detectors cannot be exposed to oxygen

– desire to keep surface clean

Course InformationOverview of Characterization Techniques

© Copyright Evans Analytical Group®

Depth of Analysis

Course InformationEAG Bubble Chart

© Copyright Evans Analytical Group®

Symbol Name Meters Examplem Meter 1 ~1 Human stridecm Centimeter 10-2 Diameter of a dimemm Millimeter 10-3 Credit card thicknessµm Micrometer

(microns)10-6 Diameter of human hair

is ~50-100µmnm Nanometer 10-9 ~ 3 atoms Å Ångstrom 10-10 = C-H bond length

mil 1/1000th inch 2.5x10-5 = 25.4µmµ” Micro-inch 2.5x10-8 = 25.4nm or 254Å

Note: 1nm = 10Å, 1µm = 10,000Å

Units: Length

Symbol Name Definitionat% Atom % Percentage of sample atoms consisting of

element “X”at/cm3 Atoms/cm3 Number of element “X” atoms per unit of

volume (atomic density)at/cm2 Atoms/cm2

(Areal Density)Total integrated number of element “X” atoms in a specific volume

ppm(a) Parts per million (atomic)

Number of element “X” atoms per million atoms of sample

wt% Weight % Percentage of sample material weight consisting of element “X”

ppm(w) Parts per million (weight)

Weight of element “X” atoms per millionth of sample weight

g/cm3 Grams/cm3

(Density)Weight of element “X” material per unit of volume

Units: Relative Content

Concentration vs. Areal Density vs. Density

Areal Density Atoms/area 6 at/cm2

Concentration Atoms/volume 6 at/cm3

1 cmformat examples

Density Mass/volume Si: 2.33 g/cm3

Dopant: 90 ng/cm3

Units: Relative Content

Dose = Concentration × Depth[at/cm2] [at/cm3] [cm]

Total Concentration: 44 at/cm3

Total Dose at 0-1.0 cm depth44 at/cm2

Dose at 0 - 0.33 cm depth24 at/cm2

Dose at 0.33 - 0.66 cm depth 12 at/cm2

Dose at 0.66 - 1.0 cm depth8 at/cm2

Definition: Dose