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14.05.2013 www.sentech.de 1
Plasma Prozess-Technologie bei
SENTECH Instruments
- ICP- und RIE-Ätzen,
ICPECVD sowie PEALD
Michael Arens
Plasma Germany Frühjahrssitzung 2013 Berlin 14.5.2013
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Outline
Einführung
Ätzsysteme und Anwendungen
ICPECVD und PECVD
PEALD Systeme und Anwendungen
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The Company
Private company founded in 1990
New building since 2010
ISO 9001 certificated
60 employees (30% R&D)
Business fields:
Thin Film Metrology &
Plasma Process Technology
More than 1,500 metrology tools
and 300 plasma tools in the field
SENTECH‘s strengths:
Application support
Broad range of products
High quality of products
Service
Turn over 2012: 10 Mio Euro
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Plasma Process Technology
• RIE, ICP-RIE
• PECVD, ICPECVD
• ALD / PEALD
• Cluster tools
• SENTECH laser end point monitor
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Etch technology and applications
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RIE- and ICP-RIE plasma etcher
RIE chamber
ICP chamber
RF Bias-Power
surface damages possible due
to the ion bombardment
increased etch rate
low damage processes
chuck bias Ei
Low density plasma
VRF
RF-Matchbox CCP-Electrode
Inductive Coupled Power
High density plasma
RF ICP-Power
RF-Matchbox
ICP-Matchbox PTSA 200
CCP-Electrode with
He-backside cooling
ICP-power controls high ion density ni
Bias-power controls low ion energy Ei
pressure p=0.1 …10 Pa
plasma density ne ~1011 ..1012 ions/cm-3
VRF controls of high ion energy Ei and
low ion density ni
pressure p= 1…100 Pa
plasma density ne=109 …1010ions/cm-3
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RIE Plasma Etcher System
• III-V etching
• dielectrics (SiO2, SiN)
• metal etching
• silicon etching
• resist etching
broad application range
Al-etch Silicon etch
GaAs VCSEL
Etchlab 200 SI 591
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Inductively coupled plasma source Planar triple spiral antenna PTSA 200
High plasma density
Low ion energy
Low pressure operation
13.56 MHz
Al2O3 dielectric window
Integrated automatic matchbox
Pressure Range 0.1 ... 20 Pa Power range 100W...1200W Plasma Density up to 1012 cm-3 Min. Ion Energy 10 eV
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low damage, high rate processes
low temperature processes
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-100 -50 0 50 100
1010
1011
1012
0,1 Pa
0,5 Pa
1 Pa
3 Paele
ktr
on
de
ns
ity
Ne (
cm
-3)
Position x (mm)
500 W, Ar
Ion energy distribution
low damage
PTSA 200 ICP
homogeneity (Ar-Plasma)
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SI 500 - system layout
load-lock
ICP source with PTSA Planar Triple Spiral Antenna with central window
high throughput vacuum system
electrode with He-BS-cooling & excellent temperature control
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SI 500 ICP-RIE-System – a flexible solution for the etch of different materials
continuous Process
(different gas mixtures) at low temperatures
(Cryo-etching)
fast gas replacement
(gas chopping)
Silicon fine Etching
with ICP
Silicon Deep Reactive Ion Etching (DRIE)
with ICP
III-V-Semiconductors
II-VI-
Semiconductors
Ash/Clean-
Processes
Insulating-/Glass-Substrates
Metal- Etching
Sputtering
Dielectric - Layers
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ICP etcher SI 500: Nanostructures photonic crystal in InP 130 nm, aspect ratio ca. 20:1
quantum dot in GaAs (NEST Pisa) 200 - 400 nm 20 nm SiGe quantum wire
(Ruhr-Uni Bochum)
PhC in SiO2 and Si3N4 (FSU Jena) 370 nm,
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deep etch in GaAs, SiC and silica
Cl2, BCl3
> 4 µm/min
SiC
SF6/O2
rate up to 1.7 µm/min
GaAs
Courtesy by CHF3/SF6
100 µm deep, Ni mask
Quartz
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Etching of Silicon with vertical sidewalls based on fluorine chemistry Continuous process Cryogenic etching 3-step gas chopping
process (Bosch)
used for
nanostructures
smooth sidewalls
very precise profile
control by adding C4F8
lower etch rate
deep etching in Si
scallops
profile control by
depostition-/etch-
steps
high etch rate
deep etching in Si
smooth sidewalls
profile control by
temperature or O2
high etch rate
Silicon Deep Reactive Ion Etching (DRIE) with ICP Silicon fine Etching (ICP)
„scalloping“
„scalloping“
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period: 3310nm
wavelength: 850nm
measured efficiency: >80%
wave front error (rms) < 5nm
(</100)
back side reflectivity <0.3%
Etching of microoptics
results for the Gaia grating
500nm period, 1200nm depth
pattern geometry optical equivalent
INSTITUTE of APPLIED PHYSICS Friedrich-Schiller University Jena
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PECVD and ICPECVD
Systems and Applications
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PECVD with loadlock
optional with frequency mixing
Optical process monitoring
(OES, Interferometer, LE)
Deposition of
SiO2, SiNx, SiOxNy, TEOS, a-Si:H, DLC
PECVD: Depolab 200 SI 500 PPD
Wafer direct loading
2“-8“ Wafer
Modular design for flexible
upgradeability with larger pumping
unit, low frequency power supply,
and additional gas lines…
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ICPECVD: SI 500 D
Low stress, low temperature and low
damage plasma enhanced chemical
vapor deposition (PECVD)
SI 500 D:
planar ICP plasma source,
He backside cooling
Optical process monitoring
(LE, Interferometer, OES)
Plasma deposition of
SiO2, SiNx, SiOxNy, TEOS, a-Si:H
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Si3N4 Deposition with PECVD and ICPECVD
PECVD ICPECVD
Temperatur 350°C 100°C
BOE–etchrate 35 nm/min < 10 nm/min
Stress controllable by additional LF coupling
controllable by process parameter
Homogenity of the film thickness: d= 258.5 ± 3%
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1.96 1.97 1.98 1.99 2.00 2.01 2.02 2.03 2.04 2.05
-1000
-800
-600
-400
-200
0
200
stress (350W 10Pa)
Stress (350W 13Pa)
Stress(150W,13Pa)
ten
sile
co
mp
ressiv
e
n (=633 nm)
Str
ess(
MP
a)
Stress Control in ICPECVD
without Bias
p
T = 130 °C
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Si3N4
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Applications of low T ICPECVD films
Low temperature SiNx
ICPECVD film for lift-off process
400nm thick SiNx films deposited on PET.
The bow demonstrates the different stress value of the SiNx layers.
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ALD & PEALD @
SENTECH Instruments GmbH
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ALD: Atomic Layer Deposition
- 1974: Finish patent (Dr. Tuomo Suntolo)
improve the quality of ZnS films in electroluminescent displays (TFEL)
- ALD is a special CVD process
sequential use of precursor materials
- Deposition of ultrathin films
oxides, nitrides, sulfides, metals …
- 2 different types of ALD
thermal and plasma enhanced
Example: thermal deposition of Al2O3 with
trimethyl aluminum (TMA) and water vapor (H2O)
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Atomic Layer Deposition ALD and PEALD
Deposition of ultra-thin films of few nanometers with excellent uniformity and very good conformality to 3D surfaces in semiconductor engineering, MEMS and other nanotechnology applications
SI ALD: ALD system for small scale production SI ALD LL: ALD system with loadlock chamber
Upgradable with capacitive coupled plasma (CCP) source for Plasma Enhanced ALD (PEALD)
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Reactor chamber and plasma source
- Reactor chamber Temperature: up to 150 °C
Showerhead mode
- Precursor line Temperature: up to 200 °C
3-Port ALD-valve
Stop valve
- Plasma source True remote CCP-source
isolation valve
Plasma source can be separated from the
system
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PEALD on 8" Wafer
Al2O3: TMA + O2-Plasma (SENTECH Ellipsometer: SE 800)
AlN: TMA + NH3-Plasma (SENTECH Ellipsometer: SE 800)
Layer thickness: 8” wafer (nm) 40,8 (± 1,96%)
Growth rate (Å/cycle) 0,9
Substrate temperature (°C) 250
n (@632,8 nm) 1,933 (± 0,91%)
Layer thickness: 8” wafer (nm) 26,8 (± 1,6%)
Growth rate (Å/cycle) 1,2
Substrate temperature (°C) 200
n (@632,8 nm) 1,642 (± 0,58%)
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Multilayer Al2O3 / SiO2
Al2O3-Process
SiO2-Process
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 150
5
10
15
20
25
30
Dru
ck [P
a]
Zeit [h]
- thermal ALD Al2O3 and PEALD SiO2 alternately
- in total 53 layers : 26 Al2O3-layers and 24 SiO2-layers (~ 1 µm)
- deposition time: ~ 14 h
Layer thickness (SENTECH Reflectometer: RM 2000)
Excellent homogeneity (± 0,6 %, 4″-Wafer)
Very good agreement with expected film thickness
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Conformality
18 nm ALD-Al2O3 21 nm PEALD-Al2O3
Excellent conformality using ALD as well as PEALD
Dank an das IPHT Jena für die REM-Aufnahmen
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Plasma Process Monitoring
Laser ellipsometry, interferometry and optical emission spectroscopy are offered for in-situ monitoring of film growth and erosion, etch depth measurement and endpoint detection.
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SLI 670 – Laser-Interferometer
• Light source laser diode (λ~670 nm)
• Working distance 150 mm … 500 mm
• Spot size 100 µm (at 150 mm distance)
• Measurement speed 15 ms … 1000 ms (adjustable)
• Translation stage 25 mm x 25 mm (with 2 µm step)
• Field of view 1.5 mm x 1.5 mm (at 150 mm distance)
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silicon
polymer
ICP power
intensity
modulation
polymer etching end of polymer film
silicon silicon
polymer
nv
np
ns
nv
np
ns
nv
ns
laser
light
modulation
stops
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Plasma Cluster Configurations
Etching (ICP, RIE) and deposition modules (PECVD, ALD), cassette stations, and productive robots can be combined to cluster systems for R&D and production to meet the requirements of closed processing and high throughput.
• Fully automated ICP and RIE etchers for compound semiconductor processing
• Large area substrate processing for masks and micro-optics
• High throughput chromium etch cluster
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Vielen Dank für Ihre Aufmerksamkeit.