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熱蒸鍍製程 (Thermal Evaporation) · 蒸鍍合金 可 可 可 蒸鍍耐熱化合物 可 可 可 粒子能量 很低0.1~0.5 eV 可提高1~100 eV 可提高1~100 eV 惰性氣體離子衝擊
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