Report copyright - STUDI PENGARUH ANIL PADA SIFAT SILIKON AMORF ...repository.its.ac.id/501/1/1110100051-paperpdf.pdf4 → SiH 4 + + 2 e-→ SiH 3 + H + e-(1) atau e-+ SiH 4 → SiH 2 + H 2 (2) Sifat,
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