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SENSORS BASED ON NANOSTRUCTURED MIXED METALLOXIDES FOR
DETECTION OF TOXIC, EXPLOSIVE AND FLAMMABLE SPECIES
E.L.Shangina, V.A.Seleznev, B.M.Voronov, A.P.Melnikov, G.N.Goltsman
Moscow State Pedagogical University
L.I.Trakhtenberg, V.F.Gromov, G.N.Gerasimov, T.V.Belysheva, E.Yu.Spiridonova
Karpov Institute of Physical Chemistry, Moscow
Currently, sensors of different types are used for detection of toxic, explosive and
flammable air content. Conductometric sensors are the most simple, reliable and low-
price ones among them. The operation principle of the aforementioned sensors is based
on the change of the conductivityof the sensor film as a result of chemosorption of the
analyzed chemical compounds on the surface of the film. The efficiency of
semiconductor nanostructered films as conductometric sensors is proven due to thefact that the conductivity of these films is changed as a result of volatile species
chemosorption on the surface of nanoparticles and subsequent reactions with
chemosorbed molecules.
The most wide-spread conductometric sensors are based on semiconductor-type
oxides of metals,primarily SnO2 , that detect the content of such gases as H2, CO,
CH4 [1], O3 [2] in the atmosphere. On the other hand, there are practically no sensors of
this kind for detection of complex organic toxic or explosive compounds.
This work is part of the project oriented on the research and development of fast
nanostructured metalloxide conductometric sensors for selective detection of toxicorganic compounds, mainly organic amins that work at a temperature of 200-250 C.
In this project, the electron metallic oxide semiconductors, such as SnO2 and In2O3,have
been chosen as the base of the sensors. Earlier research showed that one can detect
small concentrations of toxic non-symmetric dimethyl hydrazine in the air using these
sensors [3].
The sensitive layer is deposited on a sapphire substrate. First, platinum electrodes
were formed on the top side of this substrate to measure the conductivity of sensitive
layer. Then, a platinum layer was deposited on the back side of the substrate to heat the
sensitive layer. The SEM pictures of the sensor are shown in Fig 1.
Currently, paste-like compositions are usually used to fabricate the sensitive layer.
These compositions contain nanosize powders of appropriate semiconductor oxides.
Such a paste is deposited on the substrate as a thin layer, for example, by the silk-
screening method and then treated at a certain temperature.
It should be noted that this method is rather time-consuming. Furthermore, in this
case it is very hard to obtain films that have uniform thickness and identical
properties. Additional problems are related to the relatively low adhesion of the layer to
the substrate surface. Thus, we propose and apply a new method of sensitive layer
deposition. The method is based on the aerosol spraying of the solution that contains the
correspondingprecursors. The solution is sprayed on the surface of the substrate
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a b
Fig.1 . The SEM pictures of the sensor:
a) top view with platinum electrodes;
b) back side of the substrate with meander-like platinum heater.
heated to a certain temperature and then the obtained layer is annealed. It is importantto note that the method of the aerosol spraying of the sensitive layer allowed us to get
more homogeneous films with particles of smaller sizes compared to the silk-screen
printing: the mean size of the particles in the first case is about 30 nm. Such a
difference in the size should lead to a higher efficiency of the sensors produced by the
aerosol spraying method .
The conductivity of the nanostructured SnO2 films fabricated by both the aerosol
spraying method and the silk-screen printing one was investigated. The thickness of the
films made by the aerosol spraying was about 100 nm while the silk-screen printed
films were as thick as about 1-2 m. The measurements were performed in the
temperature range from 250 to 500 C.
We observed the Arrhenius temperature dependence of the conductivity of the
films containing up to 12mole percent of In2O3 (see Table 1 ). In the case when the film
contains 19 mole percent and more of In2O3 it reveals non-monotonic temperature
dependence of the conductivity. Thus we may conclude that the basic conductivity
mechanism is changed when the fraction of In2O3 in SnO2 increases.
Table 1. The activation energy E of the
conductivity of nanostructured films of
different content, fabricated by the aerosolspraying method.
The film content , kcal/mol
SnO2 10,8
SnO2 + 6% In2O3 12,3
SnO2 + 12% In2O3 8,1
SnO2 + 2%PdO 5,0
SnO2 + (1:1) 5,6
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In spite of the fact that the temperature dependence of the conductivity does not
change when one adds oxides of palladium and cobalt to SnO2, the introduction of
these oxides significantly affects the value of the activation energy of these films. It
can be easily seen from the data presented in Table 1 that the activation energy of the
conductivity for mixed films containing CoO or PdO in addition to SnO2 is
substantially lower than for the pure SnO2 film. Addition of 6 mole percent of indiumoxide to SnO2 film does not practically change the activation energy of the conductivity
of nanostructured film. On the contrary, the addition of 12 mole percent of indium
oxide leads to a significant decrease of the activation energy of the conductivity.
It should also be noted that the activation energy of the conductivity of SnO2 film
appreciably depends on the method of the film fabrication: for the films deposited by
the aerosol spraying the activation energy E=10,8 kcal/mol, for silk-screen printed
ones E=11,8 kcal/mol.
Based on the conductivity data for the obtained nanostructured metaloxide films
we consider the possibility to fabricate the sensitive layers with the optimal compositionfor detection of some gases-deoxidants, for example, hidrogen, carbon monoxide, and
organic compounds.
We gratefully acknowledge the financial support of the Russian Foundation for Basic Research (Grants #08-03-00029 and #09-03-00194) and the Federal Agency forEducation (Grant #2.1.1/4240).
1. Gromov V.F., Gerasimov G.N., Belysheva T.V., Trakhtenberg L.I. Mechanisms of
sensor effect in SnO2 conductometric detectors for gases-deoxidants // Rossiiskii
Khimicheskii Zhurnal. 2008. V.52. N 5. P.80 87.
2. Belysheva T.V., Gerasimov G.N., Gromov V.F., Trakhtenberg L.I. Sensor
properties of Fe2O3 * In2O3 films: detection of low concentrations of ozone in
air // Zhurnal Fizicheskoi Khimii. 2008. V.82. N 10. P.1921 1926.
3. Belysheva T.V., Kazachkov E.A., Bogovtseva L.P., Kubyshkin V.N., Vokhontsev
V.M. Electrophysical properties of gas sensitive In23 and WO3 semiconductor
films as detectors of non-symmetric dimethyl hydrazine in air // Zhurnal
Analiticheskoi Khimii. 2006. V.61. N 7. P.731 739.