sensing technology - next generation vcselssource: vcsels –market and technology trends 2019, yole...
TRANSCRIPT
Next Generation VCSELs
2020.09.24
Xiaochi Chen (陈晓迟)Co-founder
General Manager
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Vertilite
Snapshot
01 Conventional
VCSEL Products
02 Next-Generation
VCSEL Products
03 Summary04
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Vertilite Snapshot (常州纵慧芯光半导体科技有限公司)◼ Founded: December 2015
◼ Global Operations:
Changzhou(常州), China (Headquarter, Sales, FAE, in-house Epi, Assembly and Testing center)
Shanghai(上海), China (Customer Support)
Taiwan & US (Supply Chain Management, Local Customer Support)
◼ Team: ~110 employees (17 PhDs, 5 from Stanford University)
Substantial Industry and Research Experiences in VCSEL Technology
• 6’ Epi Growth, Device Optical, Electrical and Thermal Design
• Material and Device Characterizations
• In house III-V Material Epitaxial Growth
• Packaging and testing
◼ Partners: > 150 customers
Top players in consumer 3D-sensing:
• Mobile phone, solution, modules, and components companies
Pioneers in automotive LiDAR:
• Solution, modules, and auto companies
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Vertilite
Snapshot
01 Conventional
VCSEL Products
02 Next-Generation
VCSEL Products
03 Summary04
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VCSLEs in Smartphones
Source: www.apple.com
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How LiDAR Works – Time of Flight
◼发射端VCSEL光源发射激光点阵
◼接收端SPAD测量光飞时间计算目标物体距离
◼生成3D点云图
◼低分辨率点云 + AI算法→高分辨率点云
Source: www.apple.com
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LiDAR Depth API(应用程序接口)
深度API:配备了LiDAR扫描仪的设备,可以实时
使用设备周围环境的每像素的深度信息。例如周围环境对AR虚拟物体的遮挡。
获取深度信息后,可以放置AR对象到周围环境内,并对AR虚拟物体进行遮挡。
Source: www.youtube.com
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广泛的应用领域
车载应用▪ 2025年预计将有超过2500万辆/年智能汽车需要VCSEL芯片,领域产值达万亿美元
虚拟现实▪ 做为当下最热门的技术之一,
AR/VR 市场在2025年预计会超过千亿美元级别
智能手机▪ 2025年预计智能手机出货量将高达40亿台/年,市场接近8000亿美元。
医疗器材▪ 随着VCSEL技术的日趋成熟,其在医疗领域的应用不断更新,目前该市场以超过30%的年复合率增长并在2020年超过5000亿美元
物联网▪ 据咨询公司分析,物联网市场将以27.8%的年复合率增长并在2025年超过933亿美元
B2CB2B
Source: Grand View Research; Goldman Sachs Car 2025 Report; GDC Vault AR/VR Report;
Infonetics Research Telecom and Datacom Network Equipment and Software report; Frost & Sullivan Smartphone Market Landscape Report, 2017
通讯应用▪ Infonetics数据预测Datacom市场将稳定在4.9%的年复合增长率并于2025年超过3000亿美元的市场总价值
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2018-2024 VCSEL Market Revenue
Source: VCSELs – Market and Technology Trends 2019, Yole Developpement, May 2019
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3D摄像头在智能手机上的渗透率
2020.9 预测 前置3D摄像头 后置3D摄像头
2019 10% 5%
2020e 12% 10%
2021e 15% 20%
2022e 18% 26%
2023e 20% 35%
2024e 22% 40%
2025e 25% 45%
Source: Richard Liu, Yole Developpement, 2020
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EEL v.s. VCSEL v.s. LED
Epitaxial Growth
Processing,
On Wafer Testing
EEL: Edge emitting laser
VCSEL: Vertical cavity surface emitting laser
LED: Light emitting diode
• Coherent
• Elliptical beam, large divergence
• Cleaving/mirror coating
• Coherent
• Circular beam, small divergence
• Epitaxy-grown DBR mirror
• Non-coherent
• Circular beam, all direction
EEL
VCSEL
LED
Dicing, Mirror Coating,
Testing
Dicing
Dicing
Processing
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Product List
Wavelength
(nm)
Optical
PowerProduct Type Applications Sample Pictures
850 / 940 >10W Regular array LiDAR, Flood
illumination,
ToF 3D sensing,
Structure-light 3D
imaging
(Face ID etc)
850 / 940 2~4 W Regular array,
Custom random
array,TOF module
850 / 940 1 W
850 / 940 0.5 W
850 / 940 150 mW
Singe-emitter,Regular array
Proximity sensor,Gesture recognition,Auto-focus,optical
mouse
850 / 940 15 mW
850 / 940 5 mW
850 5 mW Chip
10G~25G data
communication
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2W 940nm Mass Product LIV Performance
◼ 2W 940nm chip PCE over 45%
◼ The performance is leading in the industry
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Vertilite VCSEL – Excellent over-temperature Performance
Test condition: Pulse, 1000Hz, 10% DC, -40~105℃
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ltag
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tical
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wer
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Current (A)
P-(-40)℃ P-0℃ P-25℃ P-50℃ P-75℃ P-85℃
P-95℃ P-105℃ V-(-40)℃ V-0℃ V-25℃ V-50℃
V-75℃ V-85℃ V-95℃ V-105℃
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Current (A)
PCE-(-40)℃ PCE-0℃ PCE-25℃ PCE-50℃
PCE-75℃ PCE-85℃ PCE-95℃ PCE-105℃
◼ PCE is over 40% PCE up to 75℃; over 30% PCE up to 105℃.
◼ Superior performance over a wide range of temperature (-40-105℃) with high PCE.
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Vertilite 2~3W TOF module: PCE over 40% at 60˚C
Dimension: 3.5*3.2*1.25mm
FOV: 60˚ *45˚
Test condition: 1000Hz,10%
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Reliability Test – equivalent field operating life
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Equivalent field operation life (years)
◼ 2W device performances are very stable after over 2600hrs of accelerated life test
▪ Equivalent field operating life of 24 years assuming 24hrs usage per day (or 72 years if assuming 8hrs
usage per day)
▪ Well exceeding customers’ typical lifetime requirement of 3~5 years.
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Rigorous New Product Introduction Flow
Performanceverified
Customer acceptance
Stable yields Mass production
Key milestones
• Demand analysis
• Market analysis
• Technical feasibility
• Project Kickoff
• Pilot production
• Customer production
Correlation Analysis
• Yield analysis
• Cost analysis
• Spec and control
limits
• Capacity analysis
• Manufacture flow
• database
• documents
• PLM system
Project planning
Engineering Verification
Design Verification
Production Verification
Mass Production
• Design review• Process flow• FMEA analysis• Performance
analysis• Customer feedback
• Internal full Qual
• Customer Qual
• Yield analysis
• Corner Case Study
• Design freeze
Project kickoff
Major activities
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Stringent VCSEL Production Quality Control
Production
OrderEpi growth
Fab process(spec limits, SPC)
100% wafer-
level test
Dicing
100% OQC
visual inspection
100% Epi FP
mapping, surface-
scan
100% AOI
(VI spec)PnP
packaging
Shipping out
of fab
100% IQCWarehouse
Wafer Qual
Pass
100% OQC
Shipping to
customerVisual
Inspection
Quality
check steps
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Quality Certificate List
Certification ISO14001:2015 OHSAS8001:2007 ISO9001:2015 QC080000:2017 AEC-Q102
CategoryEnvironmental
Management
Occupational Health &
Safety Assessment
Quality ManagementHazardous Substance
Process ManagementAutomotive Product
Certificate
Note: Automotive Quality Certification: IATF 16949 in progress
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Mass Production - wavelength control
◼ Stable control of epi wafer wavelength meets tight spec requirements.
918
923
928
933
938
943
948
953
958
0 200 400 600 800 1000 1200 1400 1600 1800 2000
Wa
ve
len
gth
(nm
)
Wafer#
Vertilite recent 2000 production wafers
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VCSEL Market Share for ToF
Source: 2019-2020 Market Analysis of Time-of-Flight (ToF) Camera for Smartphone, by Techno Systems Research CO., LTD
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Vertilite
Snapshot
01 Conventional
VCSEL Products
02 Next-Generation
VCSEL Products
03 Summary04
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Key Requirements for LiDAR Light Source
For LiDAR
light source
Low Cost
Superior
Reliability
High Power
Density
- Automotive reliability
(AEC-Q100&AEC-Q102)
- Wide Operating temp
range (-40~105˚C)
- Long distance range (50~250m)
- High signal-to-noise-ratio
- High slope efficiency
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Introduction to Multi-Junction VCSELs◼ What is multi-junction (MJ) VCSEL
▪ VCSEL with several active-region junctions stacked vertically
◼ Features of MJ VCSEL compared to single-junction (SJ) VCSEL
▪ Much higher optical power under same current / same chip size
▪ Need higher voltage to drive the VCSEL
◼ Why we need MJ VCSEL
▪ Market is moving towards longer distance coverage with TOF
▪ Under short pulse, MJ VCSEL can achieve much higher peak optical
power and better SNR
▪ Smaller chip size
▪ Lower current enables high-speed driving and lower system power
consumption
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MJ vs SJ VCSEL array: LIV performance comparison (50˚C)
◼ Under the same current, MJ VCSEL shows higher PCE and much higher optical power than SJ VCSEL
Device
Test condition: 1kHz Pulse, 10% D.C., 50˚C
I (A) P(W) V(V) SE PCE(%)
Triple Junction
(3J)3.5 8.2 4.8 2.7 49
Single Junction
(1J)3.5 3.0 1.9 1.0 44
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we
r(m
W)
Current (mA)P-Single junction P-Triple junction
V-Single junction V-Triple junction
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PC
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Current (mA)PCE-Single junction PCE-Triple junction
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Vertilite 3J VCSEL array Max PCE 53.7% at RT
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ow
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Current (A)
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lta
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(V
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PC
ECurrent (A)
◼ 3J VCSEL array Max PCE 53.7%
◼ Test condition: 10% D.C. QCW at room temperature
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MJ Chip Reliability Data
◼ MJ VCSEL passed a series of stringent reliability tests, including 1000hrs of Accelerated Life Test (ALT)
showing almost no degradation
▪ Equivalent to over 15 years of consumer electronics field use lifetime (assuming 4hrs usage per day)
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Vertilite LiDAR Solution Examples
◼ Multi-Chip Flash solution
▪ Multiple chips in series and parallel in a submount, with increased total power
◼ Multi-Zone Flash solution
▪ Current project: 850nm,1J, 10 zones,30~50W/zone
▪ Optional optics: FOV 90 x 30 deg (9x30 deg each zone)
▪ Project in developing: 940nm, 5J, 10 zones
▪ VCSEL sample available for demoOptics
holder
submount
Multi-chip
Multi-zone
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Vertilite
Snapshot
01 Conventional
VCSEL Products
02 Next-Generation
VCSEL Products
03 Summary04
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Vertilite Competitive Advantages
Vertilite Advantage Details
In-house 6” Epitaxy capability Faster R&D turnaround
Secure capacity (1000/month 6-inch epi wafers)
Strong technical know-how Core team with 20+ years’ experiences in VCSEL R&D and
mass production control
Leading Supply Chain Industry-leading epi and fab partners with competitive cost
Successful mass-production
track record
6-inch epi wafers > 2000 pieces, VCSEL chips > 10 millions
www.vertilite.com
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