九州大学 超顕微解析研究センターaccelerating edu. and res. advancements in ku....

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The Ultramicroscopy Research Center 九州大学 超顕微解析研究センター Since 1975 Kyushu University

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  • The Ultramicroscopy Research Center

    九州大学 超顕微解析研究センター Since 1975

    Kyushu University

  • 2

    Mission of The URC・・・・・・・・・・・・・・・・・・・・・・・・・・・・ P.30

    Main equipment of The URC・・・・・・・・・・・・・・・・・・・ P.40

    Flow-chart of Cooperative Utilization・・・・・・・・・・・・ P.10

    Proposal/Application of Research Project・・・・・・・・・・・・・・・・・ P.11

    Training Courses・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ P.12

    Booking equipment・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ P.13

    List of Charges for Use of Equipment・・・・・・・・・・・・・・・・・・・・ P.14

    Submission of Records and Manuscripts・・・・・・・・・・・・・・・・・・ P.15

    Collaborative use for researchers outside of KU・・ P.16

    Map & Access ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ P.18

    Staffs and Contact of the URC ・・・・・・・・・・・・・・・・・・ P.19

  • 3

    • Sharing facilities to academic staff and students of Kyushu Univ.

    • Also sharing to researches inside and outside Japan.

    Offering Advanced Equipment and Techniques

    • Publication of the research outcomes.

    • Technical support and training courses for users.

    Accelerating Edu. and Res. advancements in KU.

    • Installation of latest model EMs.

    • Cooperation in technique developments.

    Development of advanced EMs and analytical techniques

  • 4 JEM-3200FSK JEM-ARM200F JEM-ARM200CF JEM-2100HC JEM-2000EX

    Tecnai-G20

    Tecnai-G20F

    JEM-1300NEF Micro-calorie meter SEM

    Dual beam FIB

    3D-tomography TEM Cs-corrected STEM/TEM Conventional TEM High Contrast TEM

    High Voltage TEM (1.3MV)

    Analytical TEM

    Lorentz TEM

  • 新超高圧電子顕微鏡

    New High Voltage TEM

    (JEM-1300NEF)

    High voltage transmission electron microscope equipped with an

    omega-type energy filter and a high solid angle SSD type X-ray

    detector. Observation of chemical composition and bonding states

    as well as magnified images are available. It is possible to observe

    inorganic or metal specimens as thick as several μm and to

    analyze 3 dimensional tomography.

    5

    3次元観察用電子分光型電子顕微鏡

    3D tomography TEM

    (JEM-3200FSK)

    An analytical electron microscope equipped with an Si(Li) type

    X-ray detector and an omega-type energy filter. An asymmetric

    magnetic pole-piece is adopted for its objective lens which

    allows dark-field imaging without visual field cutting. A double tilt

    (x and y axes) and rotation (z-axis) holder fits analysis of 3D

    tomography. A heating stage and cooling stage are available.

  • 広電圧超高感度原子分解能電子顕微鏡

    Atomic Resolution Analytical TEM (JEM-ARM200CF)

    6

    収差補正走査/透過電子顕微鏡

    Cs-Corrected STEM/TEM

    TEM(JEM-ARM200F)

    Atom resolution analytical electron microscope equipped with

    double Cs correctors operated at 60, 80, 120 and 200 kV. A high

    efficiency SDD type X-ray detector ( solid angle of 0.8 sr) is

    attached along with a GIF Quantum energy filter. Observation of

    HAADF, BF or ABF-STEM images is available in addition to

    atomic resolution elemental mapping and analysis of electron

    energy state.

    An advanced version of ARM200F equipped with a cold-field

    emission electron source and two hexapole-type Cs correctors.

    It also offers the latest GIF Quantum energy filter for EELS as

    well as a high efficient dual XEDS system with a collection solid

    angle close to 2 sr. The whole instrument is tuned for operation

    at accelerating voltages of 30, 60, 80, 120 and 200 kV, allowing

    a wider range of materials to be examined with atomic level

    resolution.

  • ローレンツ電子顕微鏡

    Lorenz TEM

    (TECNAIG2-F20)

    An analytical electron microscope with a Schottky type field

    emission source. A Si(Li) X-ray detector is attached for EDS.

    Observation of STEM images of BF or HAADF is available. The

    STEM mode is suitable for elemental mapping and 3 dimensional

    tomography of crystalline material. Lorentz microscopy is possible

    for observation of magnetic material.

    7

    デジタル電子顕微鏡

    Digital TEM

    (TECNAIG2-20)

    A transmission electron microscope equipped with a Si(Li) type X-

    ray detector. STEM mode is available. Elemental mapping and

    3D tomography are possible in addition to conventional TEM

    bright field or dark field imaging. A heating stage and cooling stage

    (Liquid N2) are available.

  • マイクロカロリーメーター 高エネルギー分解能元素分析装置

    Micro-Calorimeter FESEM

    (SII TES+Zeiss-ULTRA55)

    A micro-calorimeter X-ray detector is attached to a high resolution

    Scanning Electron Microscope (SEM) along with a SDD type X-

    ray detector. The micro-calorimeter uses the transition edge of

    superconductor cooled below 0.1K by using a dilution refrigerator.

    The energy resolution of X-rays are 10 eV at an acceleration

    voltage of 6 kV. The machine is suitable for identification of

    elements included in multicomponent bulk material.

    8

    汎用電子顕微鏡

    Conventional TEM

    (JEM-2000EX, JEM-2100HC)

    Conventional TEMs with an acceleration

    voltage of 200kV. JEM-2100HC has a 16

    mega pixel CMOS camera to capture

    digital TEM images.

    JEM-2000EX

    Conventional TEM

    JEM-2100HC

    High Contrast TEM

  • Name of equipment Performance

    DITABIS micron (Imaging Plate system) TEM image readout to digital data with a high dynamic range of 5 orders.

    Name of software PC Performance

    Mac Tempas X Mac Simulation of HREM image and diffraction pattern

    Crystal Kit Mac Drawing of crystal models

    jems Win Simulation of HREM image and diffraction pattern and CBED

    Crystal Maker Win Drawing of crystal models and diffraction patterns

    ICDD View 2014 Win Former JCPDS, Identification of crystal structure, International Data base of crystals

    Temography Win Reconstruction of 3D structure from tilted series of images

    Inspect3D Win Reconstruction of 3D structure from tilted series of images

    Amira Win Reconstruction of 3D structure from tilted series of images

    Software for analysis of image and diffraction

    TEM image recording

    Name of equipment Performance

    FEI Quanta 3D 200i

    (Dual beam FIB)

    Focused Ga ion beam milling system is combined with a scanning electron

    microscope. Cutting and slicing is possible by observing the SEM image of a

    sample. Pin-point sampling of he desired region is possible with this system.

    Gatan PIPS, JEOL IonSlicer

    Fischione TEM Mill, Nano Mill Preparation of thin TEM specimens by Ar ion milling, Acceleration voltage, Ion

    beam illuminating angle. Probe sizes are different from machine to machine.

    We also have a DARKROOM for film development

    TEM specimen preparation equipment 9

  • Flow-chart of Cooperative Utilization

    10

  • Proposal/Application of Research Project

    11

    ○Fill up a prescribed form and submit it to the Office

    of The URC.

    ○The project leader should be an academic staff who

    has a budget / fund for the

    payment.

    ○A copy of the prescribed form is available from the

    WEB site, or at the Office

    of The URC.

  • 12

    Training Courses

    ○The URC offers training courses for users.

    ○ Training courses consist of (a) Introductory (b) Elementary (c) Middle (1) HVEM, (2) Analytical TEM, (3) High resolution TEM, (4) Electron diffraction, (5) Specimen preparation with FIB, (6) TEM tomography (7) Analytical SEM

    ○ Beginners should take "Introductory" and "Elementary"

    courses at least, in principle.

    The training courses are offered by URC and HVEM-Forum, cooperatively. Information on the schedule of courses, etc., is available in the WEB site of The URC.

    ふりがな 身 分

    受講者氏名

    所属部局・部門 (学生は指導教員名を

    記入)

    指導教員名*注1

    九州大学超高圧電顕室 利用申請状況

    該当の枠に✓を付けてください。 □ 利用申請済み □ 後日利用申請予定

    電話番号 所属連絡先 自宅(携帯)

    ファックス

    電子メール ※携帯メール不可

    (受講日のお知らせは通常メールで行います。申請された方は必ずメールでの案内確認を行ってください。)

    X線取扱講習 あり なし(超高圧電子顕微鏡の使用に際

    しては必要となります)

    受講希望日を別紙スケジュール表参照の上、第3希望までご記入下さい。

    □ 第1希望 □ 第2希望 □ 第3希望 □ 第4希望以降(あればご記入下さい)

    *注1 学生の方は、指導教員の承認を得た上で申請してください。

    九州大学超高圧電子顕微鏡室利用者研修会参加申請書

    九州大学 超高圧電子顕微鏡室講習会受付宛(E-mail添付 可)

  • 13 Booking equipment

    ○ Booking reservation for equipments is necessary.

    ○ Book from the request form on the WEB

    site.

    ○ Always fill in your request date and time up to the THIRD preference.

    In case of same multiple requests or

    sudden troubles of equipment, you

    maybe asked to shift to another time or

    day. ○ Submission of requests are due 9:00AM

    of Friday of the preceding week of your

    using.

    ○ Time table of the allocated reservations will be noticed on the WEB site, uploaded

    by the evening of Friday of the preceding

    week.

    ○ When you have to cancel your reservation inevitably, contact to the URC office AS

    SOON AS POSSIBLE.

    ○ If you cancel without any notice, you will be banned and will NEVER be able to

    make further reservations.

    WEB site http://www.hvem.kyushu-u.ac.jp/

    Click here for booking

    http://www.hvem.kyushu-u.ac.jp/http://www.hvem.kyushu-u.ac.jp/http://www.hvem.kyushu-u.ac.jp/http://www.hvem.kyushu-u.ac.jp/

  • Equipment and Consumables Charge/Price

    JPY / time-unit*

    1 Old HVEM (JEM-1000) ¥ 8,400 .

    2 New model of HVEM (JEM-1300NEF) ¥ 11,300 .

    3 3D-tomography TEM (JEM-3200FSK) ¥ 10,000 .

    4 Lorenz TEM (TECNAI-F20) ¥ 8,600 .

    5 Digital TEM (TECNAI-20) ¥ 8,300 .

    6 Dual-beam FIB/SEM (FEI Quanta 3D 200i) ¥ 6,200 .

    7 Micro-calorimeter EDS FE-SEM

    (Zeiss ULTRA55 + SII-nanotechnology) ¥ 6,800 .

    8 Abberation corrected TEM (JEM-ARM200F) ¥ 9,100 .

    9 Atomic Resolution Analytical TEM

    (JEM-ARM200CF)

    ¥ 9,400 .

    10 Conventional TEM (JEM-2100HC) ¥ 6,000 .

    11 Conventional TEM (JEM-2000EX) ¥ 5,900 .

    12 Negative films (Imaging plates) ¥ 260. / sheet

    13 Liquid helium ¥ 551. / liter

    14

    * 1 time-unit = 4 hours

    List of Charges for Use of Equipments (as July, 2015)

  • Submission of Records and Manuscripts

    ○Published papers and presentations

    Every project-leader should submit the following at the end of FY.

    * Brief results of the research project

    * List of publications and presentations related to the use of equipments of

    The URC.

    ○Manuscripts for Annual Reports of The URC.

    >Every user and project-leader are invited to submit a

    manuscript for Annual Reports of The URC. >Every research project has an obligation to submit one

    manuscript at least.

    * 2 pages of A4-sheet

    * English is recommended.

    * The dead-line of submission is the middle of May.

    * The manuscript is saved in a form of electronic

    document, and uploaded to the Repository of KU.

    * A report based on halfway results is also acceptable.

    * It needs care when the provision for intellectual

    property right and/or originality of article is concerned.

    15

  • Collaborative use for researchers outside of KU

    Microstructural Characterization

    Platform Project started in

    early July 2012 commissioned

    by the Ministry of Education,

    Culture, Sports, Science and

    Technology. Objectives and

    roles of HVEM Lab. KU project

    are to support “Research and

    Development of nano-

    material“ by opening our

    facilities and “Know how” of

    analysis to researchers outside

    of KU.

    16

    (1)文部科学省 ナノテクノロジープラットフォーム Nanotechnology Platform Project of the Ministry of Education, Culture, Sports, Science and Technology

    Advanced Characterization Nanotechnology Platform

    E-mail:[email protected] URL:http://nanoplat.hvem.kyushu-u.ac.jp

  • 九州大学学術研究都市推進機構(Organization for Promotion Academic City by Kyushu University)

    The Forum for High Voltage Electron Microscopy

    HVEM Station Network project started in April

    2011, supported by the Ministry of Education,

    Culture, Sports, Science and Technology.

    Objectives and roles of the project are to

    establish collaboration network of the major

    institutes for high voltage electron microscopy

    in Japan , and to provide top-level unique

    characterization. Core universities: Kyushu

    Univ., Osaka Univ., Nagoya Univ. and

    Hokkaido Univ.

    17 (2)文部科学省 超高圧電子顕微鏡連携ステーション

    Research Station for High Voltage Electron Microscopy

    HVEM Forum is established in 2005 at the Organization for Promotion Academic

    City by Kyushu University. The Forum aims at offering technology and

    information services to researchers out side of KU. The technology services

    consists of (a) Joint use of advanced instruments, (b) Assist and instruction for

    observation and analysis, (c) Consulting or collaboration. Users should be a

    member of the HVEM Forum.

    (3)会員制研究支援組織「超高圧電子顕微鏡フォーラム」

  • MAP & ACCESS 18

    ACCESS for Ito Campus

    http://suisin.jimu.kyushu-u.ac.jp/en/info/index.html

    MAP of Ito Campus

    http://www.kyushu-u.ac.jp/access/map/ito/ito-e.html

    ACCESS for KYUSHU UNIVERSITY

    http://www.kyushu-u.ac.jp/english/university/location/location.php

    http://www.kyushu-u.ac.jp/english/university/location/location.phphttp://suisin.jimu.kyushu-u.ac.jp/en/info/index.htmlhttp://suisin.jimu.kyushu-u.ac.jp/en/info/index.htmlhttp://suisin.jimu.kyushu-u.ac.jp/en/info/index.htmlhttp://suisin.jimu.kyushu-u.ac.jp/en/info/index.htmlhttp://suisin.jimu.kyushu-u.ac.jp/en/info/index.htmlhttp://www.kyushu-u.ac.jp/access/map/ito/ito-e.htmlhttp://www.kyushu-u.ac.jp/access/map/ito/ito-e.htmlhttp://www.kyushu-u.ac.jp/access/map/ito/ito-e.htmlhttp://www.kyushu-u.ac.jp/access/map/ito/ito-e.htmlhttp://www.kyushu-u.ac.jp/access/map/ito/ito-e.htmlhttp://www.kyushu-u.ac.jp/english/university/location/location.phphttp://www.kyushu-u.ac.jp/english/university/location/location.phphttp://www.kyushu-u.ac.jp/english/university/location/location.php

  • ●Members of The URC

    Director : Prof. S. Matsumura Chief manager:Assoc. Prof. K. Yasuda Chair. Tech. Comm.:Prof. M. Nishida Ito Campus : Prof. Y. Murakami

    Chikushi Campus : Prof. S. Hata

    Technician:H. Maeno

    ●Contact TEL / FAX : 092-802-3292

    E-mail: [email protected]

    http://www.hvem.kyushu-u.ac.jp/

    19 Staffs and Contact of the URC

    http://zaiko0.zaiko.kyushu-u.ac.jp/hvem/http://zaiko0.zaiko.kyushu-u.ac.jp/hvem/http://zaiko0.zaiko.kyushu-u.ac.jp/hvem/