20080701-287-電化學加工技術介紹與應用

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    CAD/CAMCAD/CAM

    ( )

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    CAD/CAMCAD/CAM

    Pourbaix diagram

    -

    I-V cure

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    CAD/CAMCAD/CAM

    Pourbaix diagram( )

    Pourbaix Diagram -PH

    PH

    Pourbaix Diagram

    Nernst

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    CAD/CAMCAD/CAM

    Pourbaix diagram( )

    Pourbaix Nernst

    Cr(OH)3

    Cr

    Cr3

    Cr2+

    CrO42-

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    CAD/CAMCAD/CAM

    I=if-ib

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    CAD/CAMCAD/CAM

    IL

    IL=DnFCB/X

    D CB

    X

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    CAD/CAMCAD/CAM

    (

    )

    Nernst

    ii

    i

    ZF

    RT

    L

    L

    e

    = log303.2

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    CAD/CAMCAD/CAM

    ( )

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    CAD/CAMCAD/CAM

    : ( passivestate )

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    CAD/CAMCAD/CAM

    (Metal modification theory)

    (Reaction velocity theory)

    (Oxide film theory)

    (Adsorption electrochemical theory)

    ( (Diffusiontheory)

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    CAD/CAMCAD/CAM

    PH

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    CAD/CAMCAD/CAM

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    CAD/CAMCAD/CAM

    I-V Curve

    AB etchingarea CD

    polishing area DE pitting area

    cd

    ( v )

    a

    bc d

    e

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    CAD/CAMCAD/CAM

    FeFe2++2e-

    2H2O+2e-H2+2OH

    -

    2Fe+4H2O+O22Fe(OH)3

    + H2

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    CAD/CAMCAD/CAM

    5~10

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    CAD/CAMCAD/CAM

    ECM EDM

    0.05mm 0.01mm

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    CAD/CAMCAD/CAM

    iVe =

    Ve mm/min

    mm3/A.min

    K

    V

    V

    ( )Ve

    EVK =

    ECM

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    CAD/CAMCAD/CAM

    ECM

    a.

    b.

    c.

    a. NaCl

    b. NaNO3 NaCl

    c. NaClO3

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    CAD/CAMCAD/CAM

    McGeough 1988

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    CAD/CAMCAD/CAM

    900cm2

    10000A 0-30V

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    CAD/CAMCAD/CAM

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    CAD/CAMCAD/CAM

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    CAD/CAMCAD/CAM

    (ECMP)

    ( )

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    CAD/CAMCAD/CAM

    ( )

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    CAD/CAMCAD/CAM

    ( )

    Ra

    0.01m

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    CAD/CAMCAD/CAM

    ( )

    + -

    +

    + eFeFe 22

    +

    + OHHeOH 22

    22

    2

    ++ 22)(22 HOHFeOHFe

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    CAD/CAMCAD/CAM

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    CAD/CAMCAD/CAM

    C

    N

    C

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    CAD/CAMCAD/CAM

    CNC milling

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    CAD/CAMCAD/CAM

    ( )

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    CAD/CAMCAD/CAM

    ( )

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    CAD/CAMCAD/CAM

    -

    (Fc30)

    (Ra=0.05m)

    60%

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    CAD/CAMCAD/CAM

    -

    Ra=0.38 m

    Ra=0.02 m

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    CAD/CAMCAD/CAM

    Ra 0.86 m0.23 m

    CAD/CAM

    -

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    CAD/CAMCAD/CAM

    (EP)

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    CAD/CAMCAD/CAM

    ( )

    (Ra Rmax)

    EP

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    CAD/CAMCAD/CAM

    ( )

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    CAD/CAMCAD/CAM

    The principle of electropolishing

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    CAD/CAMCAD/CAM

    Electropolishing Mechanism(

    )

    Ben Franklin EP

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    CAD/CAMCAD/CAM

    Electropolishing Mechanism(

    )

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    CAD/CAMCAD/CAM

    Electropolishing Mechanism(

    )

    The metal irons insolution at the edge of

    the anode film willnaturally migrate intothe main body of thesolution.

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    CAD/CAMCAD/CAM

    (a)

    (b)

    (c)

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    CAD/CAMCAD/CAM

    EP

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    CAD/CAMCAD/CAM

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    CAD/CAMCAD/CAM

    ( )

    Rmax

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    CAD/CAMCAD/CAM

    ( )

    ESCA

    SEM

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    CAD/CAMCAD/CAM

    EP

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