精密機械振動診斷與改善

1

STUT-ME

精密機械振動診斷與改善

王永鵬南台科技大學機械工程系

2

STUT-ME

大綱前言振動來源振動診斷實務振動改善實務實例介紹

3

STUT-ME

前言影響精密製程良率之因素：

設備、製程、材料、環境例：某產品需多套設備共同完成，若每套設備良率為 99% ，總良率 85% （ 16 套）總良率 72% （ 32 套）

環境條件：空氣潔淨度、氣流特性、溫度、濕度、振動、噪音、靜電、 EMI

4

STUT-ME

Microvibration Control Area

14/11/2004 5

STUT-MECriterion

Curve Max Level

micro-in/sec (dB)

Detail Size

microns

Description of Use

Workshop (ISO)

32,000(90) N/A Distinctly felt vibration. Appropriate to workshops and non-sensitive areas.

Office (ISO)

16,000(84) N/A Felt vibration. Appropriate to offices and non-sensitive areas.

Residential Day (ISO)

8,000(78) 75 Barely felt vibration. Appropriate to sleep areas in most instances. Probably adequate for computer equipment, probe test equipment and low-power (to 20X) microscopes.

Op. Theatre (ISO)

4,000(72) 25 Vibration not felt. Suitable for sensitive sleep areas. Suitable in most instances for microscopes to 100X and for other equipment of low sensitivity.

VC-A 2,000(66) 8 Adequate in most instances for optical microscopes to 400X, microbalances, optical balances, proximity and projection aligners, etc.

VC-B 1,000(60) 3 An appropriate standard for optical microscopes to 1000X, inspection and lithography equipment (including steppers) to 3 micron line-widths.

VC-C 500(52) 1 A good standard for most lithography and inspection equipment to 1 micron detail size.

VC-D 250(48) 0.3 Suitable in most instances for the most demanding equipment including electron microscopes (TEMs and SEMs) and E.Beam systems, operation to the limits of their capacity.

VC-E 125(42) 0.1 A difficult criterion to achieve in most instances. Assumed to be adequate for the most demanding of sensitive systems including long path, laser-based, small target systems and other systems.

• Vibration Criteria of Sensitive Equipment

6

STUT-ME

前言

30

40

50

60

70

80

4 5 6.3 8 10 12.5 16 20 25 31.5 40 50 63 80

1/3 Octave Band Center Frequency (Hz)

Velo

city

Lev

el (d

B re

1 m

icro

-inch

/s) VC-A(2000 micro in/sec)

VC-B(1000 micro in/sec)

VC-C(500 micro in/sec)

VC-D(250 micro in/sec)

VC-E(125 micro in/sec)

7

STUT-ME

前言

8

STUT-ME

前言

9

STUT-ME

前言

10

STUT-ME

振動來源廠外振源

建築、土木施工道路交通高速鐵路地震廠外運轉設備聲音、風

)(12

)(

2

112

12

12

:Source Line

:SourcePoint

:nPropagatio Ground

for Equation aveRayleigh W

RR

RR

evv

eR

Rvv

11

STUT-ME

振動來源

12

STUT-ME

振動來源

13

STUT-ME

振動來源

14

STUT-ME

振動來源廠內振源

廠內施工附屬運轉設備（ Fan 、

Pump‥‥ ）管路振動人員走動自動傳輸機構聲音（ 75 dB↑ ）空氣脈衝‥‥

設備振源運動組件 Fan 、 Pump 管件

15

STUT-ME

振動診斷實務1. 現象研判2. 選擇振動量測位置及方向

格子樑、基座、 XYZ 方向3. 振動量測

1/3 Octave Band → 判斷是否大於允許值 Narrow Band → 判斷振源

4. 振源判斷共振 → 寬頻激振源（交通、工事、人員、台車、

移動件）固定頻率 → 轉動設備

16

STUT-ME

振動改善實務振動之產生與傳遞

Source → Path → Receiver 改善對象

Source ：降低振動產生 Path ：隔振 Receiver ：吸振、設備強化、基座強化

改善對策：時效性、經濟性、改善程度

17

STUT-ME

振動改善實務交通振動之改善

主要廠房距馬路 50 m 以上去除障礙物、道路平坦防振道路之鋪設交通管制水池

人員、台車振動改善高架地板吸振台車避振人員走動限制

18

STUT-ME

振動改善實務 Sound Induced Vibration

噪音源改善噪音源隔音罩設備隔音罩

管路振動流線改善加適當之支撐管路隔振管路吸振

19

STUT-ME

振動改善實務附屬運轉設備

動平衡吸振

基座共振加強剛性增加阻尼隔振（主動式、被動式）吸振

20

STUT-ME

振動診斷與改善實例（一）現象：某廠 SEM 影像發生鋸齒現象量測：格子樑、基座、 XYZ 三方向、基座共振頻率測試

診斷：設備基座共振改善：強化基座

21

STUT-ME

振動診斷與改善實例（一）

22

STUT-ME



23

STUT-ME


24

STUT-ME


25

STUT-ME


26

STUT-ME


27

STUT-ME



28

STUT-ME

振動診斷與改善實例（二）現象：某廠生產機台振動過大，不符振動標準，影響

生產量測：

生產設備基座及格子樑、 XYZ 三方向 1/3 Octave Band 與 Narrow Band

診斷：振動值超過標準附屬運轉設備振動過大頂樓風車造成

改善：清除風車扇葉結晶，動平衡校正改良風車隔振設備隔振

29

STUT-ME

振動診斷與改善實例（二）

30

STUT-ME


31

STUT-ME

振動診斷與改善實例（二）風車之預估隔振效率

32

STUT-ME

振動診斷與改善實例（二）現象：某廠生產機台振動過大，不符振動標準，影響

生產量測：

生產設備基座及格子樑、 XYZ 三方向 1/3 Octave Band 與 Narrow Band

診斷：振動值超過標準附屬運轉設備振動過大頂樓風車造成

改善：清除風車扇葉結晶，動平衡校正改良風車隔振設備隔振

33

STUT-ME


34

STUT-ME


35

STUT-ME


36

STUT-ME


精密機械振動診斷與改善

Documents