:49914078:

: 49914057:

> 80% ( 380 700 nm)

< 10 cm

(rms) < 1.4 nm(380~780nm)80 %103 S/cm

2. : 3. 4.

ITO1.(Evaporation)

2.(DC or RF reactivemagnetron sputtering)

(Physical vapordepositionPVD)(RF 13.6 MHz)Ar (Electrode)( ) Bombardment)()3.(Chemical vapor depositionCVD)

CVD 4.(Spray pyrolysis)

5.(Sol-gel process)

ITO1umITOITO(Reactivemagnetron sputtering)(Sol-gel process) (Stoichimetry)ITO ITO ,:

ITO (ESCA)(SEM)(STM)ITOX(XRD)-(UV/Vis)1 cmITO ITO

2. /(I)(V)(I)(V)(R)(I)(V)(R)(S)(4)

R = 4.532V /I (/)

ITO PDATouch panel ITO ITO http://www2.nkfust.edu.tw/~johnfu/mold%20teaching%20materials/7%20transparent%20film.pdfhttp://www.51touch.com/Files/TouchDoc/itofilm_tco_theory_app.ication.pdf