a pdms diffusion pump for on-chip fluid handling in microfluidic devices mark a. eddings and bruce...
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A PDMS DIFFUSION PUMP FOR ON-CHIP FLUID HANDLING IN
MICROFLUIDIC DEVICES
Mark A. Eddings and Bruce K. Gale
Department of Bioengineering, University of Utah, Salt Lake City, UT
Department of Mechanical Engineering, University of Utah, Salt Lake City, UT
MicroTAS 2006, pp. 44-46
陳睿鈞
Outline
Introduction Fabrication Results and Discussion Conclusion References
Introduction Fabrication Results and Discussion Conclusion References
PDMS-Based Micropump
generate flowRapid off-chip valving Deflecting thin PDMS membranes
generate flowGas permeabilityAdditional preparation timeone-time use applications
K. Hosokawa, 2004
Marc A. Unger, 2000
Power-free pump
Membrane pump
Diffusion-Based Membrane Pump
atmp
T
t
ppPA
dt
dV 76
273
)( 12
p2 : feed pressureP1 : permeate pressureP : permeability coefficientA : diffusion areaT : absolute temperatureP atm : atmospheric pressuret : thickness of the membrane
Flow rateApplied pressure
Applied vacuum
Diffusion-based membrane pumping method
Theoretical equation
Introduction Fabrication Results and Discussion Conclusion References
Fabrication
1.Lithography 2.Xurography(razor and writing)
SU-8Silicon wafer
vinylPMMA wafer
65°C 45min
65°C overnight
master mold cast
bonding
D. Duffy, 1998
Daniel A. 2005
Microfluidic Device
Measuring flow rates Demonstrating dead-end chamber filling
fluid channel layer
diffusion membrane
vacuum source layer
Green : pressure/vacuum inletRed : fluid wells
Introduction Fabrication Results and Discussion Conclusion References
Flow Rate Characterization
atmp
T
t
ppPA
dt
dV 76
273
)( 12
device
Variables : p2 : feed pressure
A : diffusion area
equation :
with a CCD camera
t : thickness of the membrane
Comparing Theoretical Data With Experimental Data
Low aspect ratios and high aspect ratios. Diffusion area was changed by membrane elongation and
contact to the channel ceiling.
FEA results for membrane deflection in microchannels of aspect ratios 2 and 10
low high
Fluid Handling Fluid was easily manipulated through turns in cross
intersections and filling dead-end channels and chambers.
1
2
3
4
5
6
device
Three different fluids, red, green and blue, filling dead-end chambers.
Conclusion
The gas permeation pump provides a novel and convenient method for manipulating fluids within microfluidic devices.
Rapid dead-end channel filling and flow rates in the 200 nl·min-1 range have been demonstrated.
No need high frequency valve operation and significantly higher total chip areas.
Pumping and valving can be performed using one control line for pressure and one for the vacuum.
one control line
Marc A. Unger, 2000
three control lines
References Mark A Eddings and Bruce K Gale, “A PDMS-based gas permeation pump for
on-chip fluid handling in microfluidic devices”, J. Micromech. Microeng. 16 (2006) 2396–2402.
Marc A. Unger, Hou-Pu Chou, Todd Thorsen, Axel Scherer, Stephen R. Quake, “Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography”, SCIENCE VOL 288 7 APRIL 2000, 113-116.
D. Duffy, J. McDonald, O. Schueller, G. Whitesides, “Rapid Prototyping of Microfluidic Systems in Polydimethylsiloxane”, Anal. Chem. 70, pp. 4974-4984.
K. Hosokawa, K. Sato, N. Ichikawa, M. Maeda, “Power-free PDMS microfluidic devices for gold nanoparticle-based DNA analysis”, Lab chip 2004, Vol. 4, pp.181–185.
Daniel A. Bartholomeusz, Ronald W. Boutté, and Joseph D. Andrade, “Xurography: Rapid Prototyping of Microstructures Using a Cutting Plotter”, 2005 J. Microelectromech. Syst. 14 1364–74.
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